• Korean Journal of Materials Research
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• v.5 no.6
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• pp.633-638
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• 1995

Two types of $Ta_2O_{5}$, films, prepared by thermal oxidation and PECVD, on P-type(100) Si wafers were studied to examine the relationship between electrical properties and stresses of the films. For the thermally oxidized films, Ta films were depositied on the Si wafers by dc magnetron sputtering followed by thermal oxidation as functions of oxidation temperature and time. The PECVD films were deposited on the Si wafers as a fuction of RF power density. The relationship between the electrical properties and film stresses were studied. In the case of thermally oxidized $Ta_2O_{5}$ film, the electrical properties and film stress were not found to be dependent on each other, while PECVD $Ta_2O_{5}$ films showed that the electrical properties were depended on the film stress.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.7 no.8
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• pp.1743-1750
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• 2003

DC motor requires a rotor speed sensor for accurate speed control. The speed sensors such as resolvers and encoders are used as a speed detector, but they increase cost and size of the motor and restrict the industrial drive applications. So in these days, many papers have reported in the sensorless operation of DC motor〔3­5〕. This paper presents a new sensorless strategy using neural networks〔6­8〕. Neural network has three layers which are input layer, hidden layer and output layer. The optimal neural network structure was tracked down by trial and error, and it was found that 4­16­1 neural network structure has given suitable results for the instantaneous rotor speed. Also, learning method is very important in neural network. Supervised learning methods〔8〕 are typically used to train the neural network for learning the input/output pattern presented. The back­propagation technique adjusts the neural network weights during training. The rotor speed is gained by weights and four inputs to the neural network. The experimental results were found satisfactory in both the independency on machine parameters and the insensitivity to the load condition.

• Journal of Sensor Science and Technology
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• v.5 no.4
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• pp.17-24
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• 1996

Planar multi-junction thermal converters were fabricated for precise measurements of the ac voltage and current by an ac-dc transfer method. A heater and a thermocouple array were fabricated onto a sandwiched membrane, $Si_{3}N_{4}$ (200 nm) / $SiO_{2}$ (400 nm) / $Si_{3}N_{4}$ (200 nm), a thickness of $0.8\;{\mu}m$ and a size of $2{\times}4\;mm^{2}$, which is supported by a surrounding frame. The NiCr heater is located at the center of the membrane vertically. Hot junctions of $48{\sim}156$ pairs of thermocouples (Cu-CuNi44) are located near or onto the heater, and cold junctions are located onto the silicon frame. Output of the thermal converters for 10 mA dc input was $76\;mV{\sim}382\;mV$ dependent on a model, and short term stability of the outputs was ${\pm}5{\sim}15\;ppm$/ 10 min with 5 mA dc input. Responsivity in air was in the range of $3.9{\sim}14.5V/W$. Responsivity of the model BF48 in air which has 48 thermocouples was 2 times or greater than that of 3 dimensional multi-junction thermal converter in vacuum which has 56 thermocouples. AC-DC transfer differences with an input of 10 mA or less were less than ${\pm}1\;ppm$ in the frequency range from 5 Hz to 2 kHz, and about $2{\sim}3\;ppm$ at 5 kHz and 10 kHz.

• Journal of Sensor Science and Technology
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• v.11 no.2
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• pp.67-76
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• 2002

We have presented a 2-dimensional fluxgate sensor with ferrite core, excitation, and pick-up coil. This fluxgate sensor system consists of a sensing element, driving circuits for excitation coil and signal processing for detecting second harmonic frequency component which is proportional to the DC magnetic to be measured. The sensor core is excited by a square waveform of voltage through the excitation coil of 80 turns. The second harmonic output of pick-up coil(x and y axis: 100 turns) is measured by FFT spectrum analyzer. This result is compared with output of PSD(phase sensitive detector) unit for detecting the second harmonic component. The measured maximum sensitivity is about 1580 V/T at driving frequency of 1.5 kHz and excitation current of 2 App. The nonlinearity of this system is measured about 2.3%(PSD) and about 1%(second harmonics of the pick-up). The angle error of the system is ${\pm}2$ %/FS.

• Journal of Institute of Control, Robotics and Systems
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• v.2 no.3
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• pp.181-187
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• 1996

A frictionless positioning device using cone-shaped active magnetic bearings(AMBs) is developed, which is driven by a brushless DC motor equipped with resolver. The cone-shaped AMB feature that the structure is simple and yet the five d.o.f. rotor motion is controlled by four magnet pairs. A linearized dynamic model, which accounts for the relationship between input voltage and output current in the cone-shaped magnet, is developed and the azimuth motion of the frictionless positioning device is modeled as the second order system. The feedback controller is designed by using linear quadratic regulator with integral action optimal control law so that the cone-shaped AMB system is stabilized and the frictionless positioning device gets the zero steady state. It is observed that the linearized dynamic model is adequate and the frictionless positioning device can achieve the tracking accuracy within the sensor resolution.

• International Journal of Control, Automation, and Systems
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• v.2 no.3
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• pp.279-288
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• 2004

This paper presents a novel design for a tubular linear brushless permanent-magnet motor. In this design, the magnets in the moving part are oriented in an NS-NS―SN-SN fashion which leads to higher magnetic force near the like-pole region. An analytical methodology to calculate the motor force and to size the actuator was developed. The linear motor is operated in conjunction with a position sensor, three power amplifiers, and a controller to form a complete solution for controlled precision actuation. Real-time digital controllers enhanced the dynamic performance of the motor, and gain scheduling reduced the effects of a nonlinear dead band. In its current state, the motor has a rise time of 30 ms, a settling time of 60 ms, and 25% overshoot to a 5-mm step command. The motor has a maximum speed of 1.5 m/s and acceleration up to 10 g. It has a 10-cm travel range and 26-N maximum pull-out force. The compact size of the motor suggests it could be used in robotic applications requiring moderate force and precision, such as robotic-gripper positioning or actuation. The moving part of the motor can extend significantly beyond its fixed support base. This reaching ability makes it useful in applications requiring a small, direct-drive actuator, which is required to extend into a spatially constrained environment.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.2
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• pp.147-152
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• 2012

This paper dealt with the frequency component analysis of acoustic signals produced by corona and series-arc discharges as a diagnostic technique for closed-switchboards. Corona and series-arc discharge were simulated by a needle-plane electrode and an arc generator specified in UL1699, respectively. Acoustic signal was detected by a wideband acoustic sensor with a frequency bandwidth of 4 Hz~100 kHz (-3 dB). We analyzed frequency spectrums of the acoustic signals detected in various discharge conditions. The results showed that acoustic signals mainly exist in ranges from 30 kHz to 60 kHz. From the experimental results, an acoustic detection system which consists of a constant current power supply (CCP), a low noise amplifier (LNA) and a band pass filter was designed and fabricated. The CCP separates the signal component from the DC source of acoustic sensor, and the LNA has a gain of 40 dB in ranges of 280 Hz~320 kHz. The high and the low cut-off frequency are 30 kHz and 60 kHz, respectively. We could detect corona and series-arc discharges without any interference by the acoustic detection system, and the best frequency is considered in ranges of 30 kHz~60 kHz.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.12
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• pp.1093-1098
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• 2007

Tilting trains are currently in operation in 13 countries around the world. With the advances in tilting technology, verification of economic efficiency, and changes in economic situations, the introduction of tilting trains will rapidly spread across the globe. The measurement system is composed of the industrial computers installed in the console and the measurement racks mounted on each car. It is utilized to accumulate the data by the communication card and the optical cable. The optical cable and power cable are coupled at the connector located in joint of train to make easy to disconnect car each other. The signal conditioner is designed to choose and to extend the channel for each sensor readily. The sensor measurement rack has adopted as decentralization method. It is installed in each car to minimize the cable length. In also, it is manufactured based on 19"rack and covered to protect the cable. In this study, the programs for measurement and analysis were also developed to understand the traction system characteristics of TTX. Using this measurement system, we studied that acceleration test, re-powering test, and gradually powering test. The acceleration performance of TTX is 1.735 km/h/s, and it is inner standard value. The notch test result from 1 to 7 steps, DC link voltage is under standard value, and the output electric current of inverter is controlled normally. From the test results, we saw the performances of the traction systems are normal.

• Journal of the Korean Vacuum Society
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• v.20 no.3
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• pp.195-199
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• 2011

ITO thin films and gold (Au), copper (Cu) and nickel (Ni) intermediate ITO multilayer (ITO/Au/ITO, ITO/Cu/ITO, ITO/Ni/ITO) films were deposited on glass substrates with a reactive radio frequency and direct current magnetron sputtering system and then the effect of intermediate metal layer and annealing temperature on the methanol gas sensitivity of ITO films were investigated. Although both ITO and ITO/metal/ITO (IMI) film sensors have the same total thickness of 100 nm, IMI sensors have a sandwich structure of ITO 50 nm/metal 10 nm/ITO 40 nm. The change in the gas sensitivity of the film sensors caused by methanol gas ranging from 100 to 1000 ppm was measured at room temperature. The IAI film sensors showed the higher sensitivity than the other sensors. Finally, it is concluded that the ITO 50/Au 10/ITO 40 nm film sensors hasthe potential to be used as improved methanol gas sensor.

• Journal of Sensor Science and Technology
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• v.7 no.3
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• pp.154-162
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• 1998

A planar Bi-Sb multijunction thermal converter with high thermal sensitivity and small ac-dc transfer error has been fabricated by preparing the bifilar thin film Pt-heater and the hot junctions of thin film Bi-Sb thermopile on the $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$-diaphragm, which functions as a thermal isolation layer, and the cold junctions on the dielectric membrane supported with the Si-substrate, which acts as a heat sink, and its ac-dc transfer characteristics were investigated with the fast reversed dc method. The respective thermal sensitivities of the converter with single bifilar heater were about 10.1 mV/mW and 14.8 mV/mW in the air and vacuum, and those of the converter with dual bifilar heater were about 5.1 mV/mW and 7.6 mV/mW, and about 5.3 mV/mW and 7.8 mV/mW in the air and vacuum for the inputs of inside and outside heaters, indicating that the thermal sensitivities in the vacuum, where there is rarely thermal loss caused by gas, are higher than those in the air. The ac-dc voltage and current transfer difference ranges of the converter with single bifilar heater were about ${\pm}1.80\;ppm$ and ${\pm}0.58\;ppm$, and those of the converter with dual bifilar heater were about ${\pm}0.63\;ppm$ and ${\pm}0.25\;ppm$, and about ${\pm}0.53\;ppm$ and ${\pm}0.27\;ppm$, respectively, for the inputs of inside and outside heaters, in the frequency range below 10 kHz and in the air.