• Title/Summary/Keyword: DC Arc Plasma Jet

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100KW DC Arc Plasma of CVD System for Low Cost Large Area Diamond Film Deposition

  • Lu, F.X.;Zhong, G.F.;Fu, Y.L.;Wang, J.J.;Tang, W.Z.;Li, G.H.;Lo, T.L.;Zhang, Y.G.;Zang, J.M.;Pan, C.H.;Tang, C.X.;Lu, Y.P.
    • The Korean Journal of Ceramics
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    • v.2 no.4
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    • pp.216-220
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    • 1996
  • In the present paper, a new type of DC arc plasma torch is disclosed. The principles of the new magnetic and fluid dynamic controlled large orifice long discharge tunnel plasma torch is discussed. Two series of DC Plasma Jet diamond film deposition equipment have been developed. The 20kW Jet equipped with a $\Phi$70 mm orifice torch is capable of deposition diamond films at a growth rate as high as 40$\mu\textrm{m}$/h over a substrate area of $\Phi$65 mm. The 100kW high power Jet which is newly developed based on the experience of the low power model is equipped with a $\Phi$120 mm orifice torch, and is capable of depositing diamond films over a substrate area of $\Phi$110 mm at growth rate as high as 40 $\mu\textrm{m}$/h, and can be operated at gas recycling mode, which allows 95% of the gases be recycled. It is demonstrated that the new type DC plasma torch can be easily scaled up to even higher power Jet. It is estimated that even by the 100kW Jet, the cost for tool grade diamond films can be as low as less than $4/carat.

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Experimental analysis on the characteristics of enthalpy probe immersed in arc plasma flow (아크 플라즈마 유동에 삽입된 엔탈피 탐침의 동작특성 실험)

  • Seo, Jun-Ho;Nam, Jun-Seok;Choi, Seong-Man;Hong, Bong-Gun;Hong, Sang-Hee
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.38 no.12
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    • pp.1240-1246
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    • 2010
  • Enthalpy probe with the inner and outer diameters of 1.5 mm and 4.8 mm, respectively, is designed and used to measure the temperatures and velocities along the centerline of Ar arc plasma flow until the probe was destroyed. For this purpose, Ar arc plasma flow is generated by non-transferred type DC arc heater with the power level of 17 kW. From this experiment, it is shown that the designed enthalpy probe can measure the temperature and velocity of arc plasma flow up to 12,000 K and 600 m/s, respectively, without destroy of probe tip. In this extreme case, the arc plasma flow is calculated to transfer the heat flux of ${\sim}5{\times}10^7\;W/m^2$ to the probe based on the heat and thermal boundary equations near the forward stagnation point of a body immersed in arc plasma flow. Consequently, the designed enthalpy probe can measure the wide ranges of plasma temperatures, velocities and concentrations simultaneously, which are generated by various types of arc heaters within the heat flux ranges of $0{\sim}5{\times}10^7\;W/m^2$ on the probe tip.

Mechanical Properties of CVD Diamond

  • Yoshikawa, Masanori;Hirata, Atsushi
    • The Korean Journal of Ceramics
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    • v.2 no.4
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    • pp.212-215
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    • 1996
  • This paper focuses the strength and wear resistance of CVD diamond films. The strength of free-standing CVD diamond films synthesized by microwave plasm CVD, DC plasma CVD, RF plasma CVD and arc discharge plasma jet CVD has been measured by three-point bending test. The wear resistance of CVD diamod films has been evaluated by the pin-on-disk type testing. diamond films coated on the base of sintered tungsten carbide pin by hot filament CVD have been rubbed with a sintered diamond disk in muddy water. Volume removed wear of CVD diamond has been compared with stellite, WC alloy and bearing steel.

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Development of a Microplasma Source under Atmospheric Pressure using an External Ballast Capacitor (방전에너지 제어용 외부 커패시터를 이용한 대기압 마이크로 플라즈마 소스 개발)

  • Ha, Chang-Seung;Lee, Je-Hyun;Son, Eui-Jeong;Park, Cha-Soo;Lee, Ho-Jun
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.27 no.6
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    • pp.31-38
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    • 2013
  • A pulse driven atmospheric plasma jet controlled by external ballast capacitor is developed. Unlike the most commonly use DBD sources, the proposed device utilizes bare metal electrode. The discharge energy per pulse can precisely be determined by changing voltage and capacitance of the ballast capacitor. It is shown that the device can provide wide range of plasma, from stable glow mode to near arc state. Current-voltage waveforms, optical emission spectra and discharge images are investigated as a function of an injection energy. The OES shows that He and oxygen lines are increased as a function of the external ballast capacitor. Ozone and rotational temperature have similar tendency with a power consumption. The feeding gas is He and the applied DC voltage is from 400V to 800V when the gap distance is $500{\mu}m$.

Planarization of Diamond Films Using KrF Excimer Laser Processing (KrF 엑사이머 레이저 법을 이용한 다이아몬드 박막의 평탄화)

  • Lee, Dong-Gu
    • Journal of the Korean Society for Heat Treatment
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    • v.13 no.5
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    • pp.318-323
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    • 2000
  • The planarization of rough polycrystalline diamond films synthesized by DC arc discharge plasma jet CVD (chemical vapor deposition) was attempted using KrF excimer laser pulses. The effects of laser incidence angle and reaction gases (ozone and oxygen) on etching rate of diamond were studied. The temperature change of diamond and graphite with different laser fluences was calculated by computer simulation to explain the etching behavior of diamond films. The threshold energy density from the experiment for etching of pure crystalline diamond was about $1.7J/cm^2$ and fairly matched the simulation value. Preferential etching of a particular crystallographic plane was observed through scanning electron microscopy. The etching rate of diamond with ozone was lower than that with oxygen. When the angle of incidence was $80^{\circ}$ to the diamond surface normal, the peak-to-valley surface roughness was Significantly reduced from $20{\mu}m$ to $0.5{\mu}m$.

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Synthesis of TiO2-xNx Using Thermal Plasma and Comparison of Photocatalytic Characteristics (열플라즈마에 의한 TiO2-xNx의 합성 및 광촉매 특성 비교)

  • Kim, Min-Hee;Park, Dong-Wha
    • Applied Chemistry for Engineering
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    • v.19 no.3
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    • pp.270-276
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    • 2008
  • $N_2$ doped $TiO_2$ nano-sized powder was prepared using a DC arc plasma jet and investigated with XRD, BET, SEM, TEM, and photo-catalytic decomposition. Recently the research interest about the nano-sized $TiO_2$ powder has been increased to improve its photo-catalytic activity for the removal of environmental pollutants. Nitrogen gas, reacting gas, and titanium tetrachloride ($TiCl_4$) were used as the raw materials and injected into the plasma reactor to synthesize the $N_2$ doped $TiO_2$ power. The particle size and XRD peaks of the synthesized powder were analyzed as a function of the flow rate of the nitrogen gas. Also, the characteristics of the photo-catalytic decomposition using the prepared powder were studied. For comparing the photo-catalytic decomposition performance of $TiO_2$ powder with that of $TiO_2$ coating, $TiO_2$ thin films were prepared by the spin coating and the pulsed laser deposition. For the results of the acetaldehyde decomposition, the photo-catalytic activity of $TiO_{2-x}N_x$ powder was higher than that of the pure $TiO_2$ powder in the visible light region. For the methylene blue decomposition, the decomposition efficiency of $TiO_2$ powder was also higher than that of $TiO_2$ film.