• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.478-478
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• 2010

대기압 플라즈마 공정은 진공 플라즈마 공정에 비해 장치의 경제성 및 규모면에서 많은 장점을 갖고 있어 대기압 공정에 대한 연구가 필요하다. 본 연구는 대기압 DC Arc Plasmatron을 이용하여 기체의 유량, 전류, plasmatron과 Si wafer 간의 거리를 변화시켜 이에 대한 Si wafer에 식각률(etching rate)을 확인하고 최적화 하였다. Ar은 2000sccm, $CF_4$는 50, 100sccm, 그리고 $O_2$는 0~1000sccm의 유량에 변화를 주었고 전류는 50A, 70A에서 식각하였다. 분석을 위해 Si wafer를 SEM(scanning electron microscope) 측정을 하였고, 그 결과 전류는 70A에서 기체 유량은 $CF_4$는 100sccm, $O_2$는 500sccm 일 때 식각률이 높게 나타났다. 그리고 전류와 유량을 위와 같은 조건에서 Plasmatron과 Si wafer 간의 거리를 5mm~15mm 변화를 주었을 때 Si wafer에 식각률을 측정해 본 결과 거리가 5mm일 때 식각률이 가장 높음을 확인 할 수 있었다. 아울러 거리를 변화시켰을 때가 유량이나 전압을 변화시킨 것 보다 식각률의 변화가 큰 경향을 보임을 알 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제35회 하계학술대회 초록집
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• pp.100-100
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• 2008

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 B
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• pp.972-974
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• 2005

The present work deals with the theoretical study of the effects of copper vapours resulting from the erosion of the electrodes on the properties of a SF6 arc in a Laval nozzle. Computations have been done for a DC arc of 1000A with upstream gas pressure of 3.75MPa. The arc plasma is assumed to be in local thermodynamic equilibrium(LTE). The sheath and non-equilibrium region around the electrodes are not considered in this model. However, its effects on the energy flux into the electrodes are estimated from some experimental and theoretical data. The turbulence effects are calculated using the Prandtl mixing length model. A conservation equation for the copper vapour concentration is solved together with the governing equations for mass, momentum and energy of the gas mixture. Comparisons were made between the results with and without electrodes erosion. It has been found that the presence of copper vapours cools down the arc temperature due to the combined effects of increased radiation and increased electrical conductivity. The copper vapour distribution is very sensitive to the turbulent parameter. The erosion of upstream electrode(cathode) has larger effects on the arc compared to the downstream electrode(anode) as the copper vapour eroded from the anode cannot diffuse against the high-speed axial flow.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.480-480
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• 2010

In the present work, we studied effect of the deposition parameters on the structure and properties of ZnO films deposited by DC arc plasmatron. The varied parameters were gas flow rates, precursor composition, substrate temperature and post-deposition annealing temperature. Vapor of Zinc acetylacetone was used as source materials, oxygen was used as working gas and argon was used as the cathode protective gas and a transport gas for the vapor. The plasmatron power was varied in the range of 700-1,500 watts. Flow rate of the gases and substrate temperature rate were varied in the wide range to optimize the properties of the deposited coatings. After deposition films were annealed in the hydrogen atmosphere in the wide range of temperatures. Structure of coatings was investigated using XRD and SEM. Chemical composition was analyzed using x-ray photo-electron spectroscopy. Sheet conductivity was measured by 4-point probe method. Optical properties of the transparent ZnO-based coatings were studied by the spectroscopy. It was shown that deposition by a DC Arc plasmatron can be used for low-cost production of zinc oxide films with good optical and electrical properties. Sheet resistance of 4 Ohms cm was achieved after the deposition and 30 min annealing in the hydrogen at $350^{\circ}C$. Elevation of the substrate temperature during the deposition process up to $350^{\circ}C$ leads to decreasing of the film's resistance due to rearrangement of the crystalline structure.

• Journal of Welding and Joining
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• 제25권6호
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• pp.71-77
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• 2007

Until now, many researches on laser-arc hybrid welding processes have been conducted mainly for high power CW laser and high direct current arc to weld the thick steel plates for shipbuilding. Recently, however the usage of thin steel plates, which tend to be deformed easily by thermal energy, is been increasing because of demand of light structure such as car body in the automobile industry. Accordingly, heat sources having relatively low heat input such as pulsed laser, dip-transfer DC GMA and pulsed GMA seem to be applied more increasingly and the study about those heat sources is needed more intensively. Any heat source mentioned above can not stand alone without weld defects at a relatively high welding speed for increasing the welding productivity. This is main reason to apply the hybrid welding process which uses pulsed laser and low-heat-input GMA heat sources simultaneously to weld the thin steel plate. In this study, parameters of pulsed laser and dip-transfer DC GMA welding are studied firstly through preliminary experiments, and then analyzed in the viewpoint of their physical phenomena. Before conducting the hybrid welding, a pulse control technique is developed based on the parallel port communication and Visual C++ 6.0. Owing to development of this technique, interactions of laser and arc pulses can be controlled consistently. Using the pulse control technique, the hybrid welding is conducted and then its interactive welding phenomenon is analyzed.

• 전력전자학회논문지
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• 제27권6호
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• pp.489-497
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• 2022

This work investigates the commutation characteristics of the current flowing through an electrical-contact-type switch to the semiconductor switch branch during the breaking operation of hybrid DC switchgear. A simple, reliable, low-cost natural commutation method is proposed, and the current commutation characteristics are analyzed in accordance with the conduction voltage drop of the semiconductor switch branch through experiments. A prototype 400 V/10 A class natural commutation type hybrid DC switchgear is set up. Its performance is verified, and its characteristics are analyzed.

• Journal of Electrical Engineering and Technology
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• 제2권1호
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• pp.89-97
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• 2007

This paper presents a new circuit topology of active edge resonant snubbers assisted half-bridge soft switching PWM inverter type DC-DC high power converter for DC bus feeding power plants. The proposed DC-DC power converter is composed of a typical voltage source-fed half-bridge high frequency PWM inverter with a high frequency planar transformer link in addition to input DC busline side power semiconductor switching devices for PWM control scheme and parallel capacitive lossless snubbers. The operating principle of the new DC-DC converter treated here is described by using switching mode equivalent circuits, together with its unique features. All the active power switches in the half-bridge arms and input DC buslines can achieve ZCS turn-on and ZVS turn-off commutation transitions. The total turn-off switching losses of the power switches can be significantly reduced. As a result, a high switching frequency IGBTs can be actually selected in the frequency range of 60 kHz under the principle of soft switching. The performance evaluations of the experimental setup are illustrated practically. The effectiveness of this new converter topology is proved for such low voltage and large current DC-DC power supplies as DC bus feeding from a practical point of view.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 하계종합학술대회 논문집(2)
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• pp.369-372
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• 2002

This paper presents a family of continuous conduction mode with constant-switching pulse width modulator controllers. Unified implementation of quasi steady state approach for various DC-DC converters topoiogies is illustrated. The property and control low for quasi-state approach will be discussed in this paper. The different procedures will be discussed in details with different results for five commonly used DC-DC converters. Both trailing and leading edge pulse width modulation are used. Leading edge modulation can some times lead to simpler control circuitry as will be demonstrated in some circuits. These controllers do not require the multiplier in the voltage feed back loop, error amplifier in the current loop and rectified line voltage sensor, which are needed by traditional control methods. Controller examples and design arc analyzed.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2010년도 추계학술대회
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• pp.234-237
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• 2010

This paper proposes a balancing control of DC-link voltages of a H-bridge multilevel inverter for STATCOM application. Individual DC link voltage is controlled by simply adjusting the d-q voltage reference through a PI controller in each cell while the main controller carries out the reactive power control. The correctness and effectiveness of the method are validated by PSIM simulation with unbalanced load condition data taken from a typical arc furnace load, showing the adverse effects of load unbalance to DC link voltage significantly suppressed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 추계학술대회 논문집
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• pp.323-326
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• 1998

The current-voltage characteristic have been measured in a gas stabilized DC arc generated in a non-transferred arc plasma torch operating on a mixture of argon and nitrogen. Relation between voltage and current to these arcs has been examined by plasma power and current under different flow rates and gas mixture ratios. Firstly, the voltage and current of arc plasma used argon was measured and secondly, in argon-nitrogen mixed gas regime, the flow rate of nitrogen was increased slowly. When the flow rate of nitrogen was increased, electrode drop of potential was increased.