• The Korean Journal of Ceramics
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• 제2권2호
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• pp.95-101
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• 1996

Variations of the leakage current behaviors and interface potential barrier $({\Phi}_B)$ of rf-sputter deposited (Ba, Sr)$TiO_3$ (BST) thin films with thicknesses ranging from 20 nm to 150nm are investigated as a function of the thickness and bias voltages. The top and bottom electrodes are dc-sputter-deposited Pt films. ${\Phi}_B$ critically depends on the BST film deposition temperature, postannealing atmosphere and time after the annealing. The postannealing under $N_2$ atmosphere results in a high interface potential barrier height and low leakage current. Maintaining the BST capacitor in air for a long time reduces the ${\Phi}_B$ from about 2.4 eV to 1.6 eV due to the oxidation. ${\Phi}_B$ is not so dependent on the film thickness in this experimental range. The leakage conduction mechanism is very dependent on the BST film thickness; the 20 nm thick film shows tunneling current, 30 and 40 nm thick films show Shottky emission current.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.1881-1883
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• 2005

In this study, PZT thin films were fabricated using sol-gel Processing onto $Si/SiO_2/Ti/Pt$ substrates. PZT sol with different Zr/Ti ratio(20/80, 30/70, 40/60, 52/48) were prepared, respectively. The films were fabricated by using the spin-coating method on substrates. The films were heat treated at $450^{\circ}C$, $650^{\circ}C$ by rapid thermal annealing(RTA). The preferred orientation of the PZT thin films were observed by X-ray diffraction(XRD), and Scanning electron microscopy(SEM). All of the resulting PZT thin films were crystallized with perovskite phase. The fine crystallinity of the films were fabricated. Also, we found that the ferroelectric properties from the dielectric constant of the PZT thin films were over 600 degrees, P-E hysteresis constant. And the leakage current densities of films were lower than $10^{-8}\;A/cm^2$. It is concluded that the PZT thin films by sol-gel process to be convinced of application for ferroelectric memory device.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1562-1564
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• 2003

In this study, PZT thin films were fabricated using sol-gel processing onto Si/$SiO_2$/Ti/Pt substrates. PZT sol with different Zr/Ti ratio(20/80, 30/70, 40/60, 52/48) were prepared, respectively. The films were fabricated by using the spin-coating method on substrates. The films were heat treated at $450^{\circ}C,\;650^{\circ}C$ by rapid thermal annealing(RTA). The preferred orientation of the PZT thin films were observed by X-ray diffraction(XRD), and Scanning electron microscopy(SEM). All of the resulting PZT thin films were crystallized with perovskite phase. The fine crystallinity of the films were fabricated. Also, we found that the ferroelectric properties from the dielectric constant of the PZT thin films were over 600 degrees, P-E hysteresis constant. And the leakage current densities of films were lower than $10^{-8}A/cm^2$. It is concluded that the PZT thin films by sol-gel process to be convinced of application for ferroelectric memory device.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.394-394
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• 2007

Transparent conductive films can serve as a critical component in displays, solar cells, lasers, optical communication devices, and solid state lighting. Carbon nanotube (CNT) based transparent conductive films are fabricated on glass and polymer substrates. CNTs typically exist in form of quasi-crystalline bundles or highly entangled bundles containing tens of individual nanotubes. To achieve full potential, CNTs must be dispersed in a solvent or other organic media. CNTs are acid treated with nitric acid then the stable dispersion of CNTs in polar solvent such as alcohols, DMF, etc. is achieved by sonication. The solubility of CNTs correlates well with the area ratio of the D and G bands from Raman spectrum. Thin films are formed from well dispersed CNT solutions using spray coating method. CNT thin films exhibit a sheet resistance ($R_s$) of nearby $10^3\;{\Omega}/sq$ with a transmittance of around 80% on the visible light range, which is attributed by excellent dispersion and interaction among CNTs, solvents and polymeric binders.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.392-393
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• 2006

This paper describes the fabrication of SiCN microstructures for super-high temperature MEMS using photopolymerization of pre-ceramic polymer. In this work. polysilazane liquide as a precursor was deposited on Si wafers by spin coating. microstructured and solidificated by UV lithography. and removed from the substrate. The resulting solid polymer microstructures were cross-linked under HIP process and pyrolyzed to form a ceramic of withstanding over $1400^{\circ}C$. Finally, the fabricated SiCN microstructures were annealed at $1400^{\circ}C$ in a nitrogen atmosphere. Mechanical characteristics of the SiCN microstructure with different fabrication process conditions were evaluated. The elastic modules. hardness and tensile strength of the SiC microstructure implemented under optimum process conditions are 94.5 GPa, 10.5 GPa and 11.7 N/min, respectively. Consequently, the SiCN microstructure proposed in this work is very suitable for super-high temperature MEMS application due to very simple fabrication process and the potential possiblity of sophisticated multlayer or 3D microstructures as well as its good mechanical properties.

• 열처리공학회지
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• 제31권2호
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• pp.63-67
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• 2018

Recent mold industry uses many roll-to-roll processes that can produce high production speed and precision machining and automation process. In the circular cylinder mold, however, patterns of less than $10{\mu}m$ are difficult to manufacture and maintain. In this study, we fabricated a circular cylindrical mold with a DLC thin film which have high hardness, low coefficient of friction and high releasability by using lithography and lift-off process. The height, line width, and pitch of the fabricated DLC macro pattern are $3.1{\mu}m$, $9.1{\mu}m$ and $20.2{\mu}m$, respectively. The pattern size is finer than the current applied to the aluminum cylinder type, and this shows the possibility of practical use of DLC micro pattern roll mold.

• 한국표면공학회지
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• 제26권6호
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• pp.291-298
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• 1993

In order to substitute for porous nickel anode in Molten Carbonate Fuel Cell(MCFC), porous cermet elec-trode was fabricated with Ni and Ni-P coated ceramic powder. Ni and Ni-P were coated by electroless plat-ing method in the nickel solution containing of hydrazine and sodium hypophosphate as a reducing agent. The plating solution was stirred by air and mechanical agitator. Ultrasonic irradiation was applied to the plating bath to improved the effect of agitation and coating speed. Electorde was formed by pressing method and doc-tor blade method followed by sinterd at$ 800^{\circ}C$ for 6 hours in H2 environment. Anode performance test carried out by potentiodynamic polarization technique in the MCFC operating condition and 154-161mA/$\textrm{cm}^2$ as ob-tained as a anode current density at the+100mV overpotential.

• 한국초전도ㆍ저온공학회논문지
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• 제21권1호
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• pp.1-5
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• 2019

The pulsed field magnetization of the short-circuited soldered double pancake coil made of stabilized commercial high-Tc superconductor (HTS) tape is experimentally studied. The evolution of the shielding current induced by the pulsed field and the trapped field after the pulsed magnetization was measured at 77 K. It is shown that the trapped field in the coil is close to the value reached in the field cooling process and reduces weakly at 5-fold increasing of pulsed field amplitude. The current relaxation at t~2 ms after the pulse is defined by the current sharing between the tape's copper coating and the $YBa_2Cu_3O_{7-d}$ layer. In the intermediate time scale (1 s < t < 100 s) the flux creep in HTS layer dominates. At t > 100 s the current's relaxation is defined by the resistance of soldered joint between tapes.

• 소성∙가공
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• 제30권4호
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• pp.179-185
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• 2021

Lithium ion batteries are generally manufactured by laser and etching using aluminum thin sheet. These processes are relatively expensive and have low productivity. In this study, blanking process of aluminum thin sheet for lithium ion battery was employed to replace laser cutting and etching process, all to reduce the production cost and improve productivity. Mechanical properties for aluminum and coating were determined by experimental results and rule of mixture for FE analysis of blanking process. Normalized Cockcroft-Latham criteria was also applied to describe shear behavior and critical damage values were determined by comparison of analytical and experimental result. We performed FE analysis to investigate the effects of clearance and punch-die radius on sheared surface of aluminum thin sheet and to determine optimal process condition. We manufactured the die set using the determined optimal process and conducted an experiment to confirm the feasibility of blanking process. The sheared surface of manufactured product was observed by optical microscope. As a results, the proposed process conditions successfully achieved the dimensional requirement in production of lithium ion battery parts.

• 한국재료학회지
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• 제30권12호
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• pp.672-677
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• 2020

Expensive PCBN or ceramic cutting tools are used for the processing of difficult-to-cut materials such as Ti and Ni alloy materials. These tools have a problem of breaking easily due to their high hardness but low fracture toughness. To solve this problem, cutting tools that form various coating layers are used in low-cost WC-Co hard material tools, and researches on various tool materials are being conducted. In this study, WC-5, 10, and 15 wt%Ni hard materials for difficult-to-cut cutting materials are densified using horizontal ball milled WC-Ni powders and pulsed current activated sintering method (PCAS method). Each PCASed WC-Ni hard materials are almost completely dense, with a relative density of up to 99.7 ~ 99.9 %, after the simultaneous application of pressure of 60 MPa and electric current for 2 min; process involves almost no change in the grain size. The average grain sizes of WC and Ni for WC-5, 10, and 15 wt%Ni hard materials are about 1.09 ~ 1.29 and 0.31 ~ 0.51 µm, respectively. Vickers hardness and fracture toughness of WC-5, 10, and 15 wt%Ni hard materials are about 1,923 ~ 1,788 kg/mm2 and 13.2 ~ 14.3 MPa.m1/2, respectively. Microstructure and phase analyses of PCASed WC-Ni hard materials are performed.