• 제목/요약/키워드: Czochralski Process

검색결과 43건 처리시간 0.019초

Oxide perovskite crystals type ABCO4:application and growth

  • Pajaczkowska, A.
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1996년도 The 9th KACG Technical Annual Meeting and the 3rd Korea-Japan EMGS (Electronic Materials Growth Symposium)
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    • pp.258-292
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    • 1996
  • In the last year great interest appears to YBCO thin films preparation on different substrate materials. Preparation of epitaxial film is a very difficult problem. There are many requirements to substrate materials that must be fullfilled. Main problems are lattice mismatch (misfit) and similarity of structure. From paper [1] or follows that difference in interatomic distances and angles of substrate and film is mire important problem than similarity of structure. In this work we present interatomic distances and angle relations between substrate materials belonging to ABCO4 group (where A-Sr or Ca, B-rare earth element, C-Al or Ga) of different orientations and YBCO thin films. There are many materials used as substrates for HTsC thin films. ABCO4 group of compounds is characterized by small dielectric constants (it is necessary for microwave applications of HTsC films), absence of twins and small misfit [2]. There most interesting compounds CaNdAlO4, SrLaAlO4 and SrLaGaO4 were investigated. All these compounds are of pseudo-perovskite structure with space group 14/mmm. This structure is very similar to structure of YBCO. SLG substrate has the lowest misfit (0.3%) and dielectric constant. For preparation of then films of substrates of this group of compound plane of <100> orientation are mainly used. Good quality films of <001> orientations are obtained [3]. In this case not only a-a misfit play role, but c-3b misfit is very important too. Sometimes, for preparation of thin films substrates of <001> and <110> orientations were manufactured [3]. Different misfits for different YBCO faces have been analyzed. It has been found that the mismatching factor for (100) face is very similar to that for (001) face so there is possibility of preparation of thin films on both orientations. SrLaAlO4(SLA) and SrLaGaO4(SLG) crystals of general formula ABCO4 have been grown by the Czochralski method. The quality of SLA and SLG crystals strongly depends on axial gradient of temperature and growth and rotation rates. High quality crystals were obtained at axial gradient of temperature near crystal-melt interface lower than 50℃/cm, growth rate 1-3 mm/h and the rotation rate changing from 10-20pm[4]. Strong anisotropy in morphology of SLA and SLG single crystals grown by the Czochralski method is clearly visible. On the basics of our considerations for ABCO4 type of the tetragonal crystals there can appear {001}, {101}, and {110} faces for ionic type model [5]. Morphology of these crystals depend on ionic-covalent character of bonding and crystal growth parameters. Point defects are observed in crystals and they are reflected in color changes (colorless, yellow, green). Point defects are detected in directions perpendicular to oxide planes and are connected with instability of oxygen position in lattice. To investigate facets formations crystals were doped with Cr3+, Er3+, Pr3+, Ba2+. Chromium greater size ion which is substituted for Al3+ clearly induces faceting. There appear easy {110} faces and SLA crystals crack even then the amount of Cr is below 0.3at.% SLG single crystals are not so sensitive to the content of chromium ions. It was also found that if {110} face appears at the beginning of growth process the crystal changes its color on the plane {110} but it happens only on the shoulder part. The projection of {110} face has a great amount of oxygen positions which can be easy defected. Pure and doped SLA and SLG crystals measured by EPR in the<110> direction show more intensive lines than in other directions which allows to suggest that the amount of oxygen defects on the {110} plane is higher. In order to find the origin of colors and their relation with the crystal stability, a set of SLA and SLG crystals were investigated using optical spectroscopy. The colored samples exhibit an absorption band stretching from the UV absorption edge of the crystal, from about 240 nm to about 550 m. In the case of colorless sample, the absorption spectrum consists of a relatively weak band in the UV region. The spectral position and intensities of absorption bands of SLA are typical for imperfection similar to color centers which may be created in most of oxide crystals by UV and X-radiation. It is pointed out that crystal growth process of polycomponent oxide crystals by Czochralski method depends on the preparation of melt and its stoichiometry, orientation of seed, gradient of temperature at crystal-melt interface, parameters of growth (rotation and pulling rate) and control of red-ox atmosphere during seeding and growth (rotation and pulling rate) and control of red-ox atmosphere during seeding and growth. Growth parameters have an influence on the morphology of crystal-melt interface, type and concentration of defects.

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8인치 실리콘성장을 위한 커스프 MCZ계에서 축방향 산소분포에 대한 연구 (A numerical study on the optimum operation condition for axial oxygen concentration in 8 inch silicon growth by cusp MCZ)

  • 이승철;윤종규
    • 한국결정성장학회지
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    • 제7권3호
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    • pp.406-417
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    • 1997
  • 초크랄스키법들 의한 8인치 실리콘 단결정 성장계에 대칭과 비대칭 커스프 자장을 인가하여 결정을 성장시켰을 때 축방향으로 일정한 산소농도분포를 가질 수 있는 적절한 인가 자장의 크기와 비대칭도에 대한 수치해석적 연구를 수행하였다. 결정이 성장할 때 커스프 자장의 형태가 유지되는 방법으로 도가니의 위치를 변화시키는 방법과 인가코일의 위치를 변화시키는 방법을 비교하였다. 대칭 커스프 자장이 인가된 경우, 축방향으로 일정한 산소농도를 얻을 수 있는 자장의 강도변화는 결정이 성장함에 따라 아래로 볼록한 형태를 띠었다. 축밟향으로 일정한 산소농도분포를 갖기 위해 도가니의 위치를 변화시키는 방법과 코일의 위치를 변화시키는 방법을 비교한 결과 비슷한 산소농도의 표준편차값을 가짐을 알 수 있었다. 비대칭 자장이 인가된 경우, 축방향으로 일정한 산소농도 분포를 얻기 위해서는 비대칭도는 결정이 성장함에 따라 점차 증가하는 양상을 보였다.

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초크랄스키 공정에서의 천이예측 (Prediction of transition in Czochralski process)

  • 최정일;성형진
    • 한국결정성장학회지
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    • 제7권1호
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    • pp.108-116
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    • 1997
  • 초크랄스키 대류에서의 동적 천이과정에 대한 실험 및 수치해석 연구가 수행되었다. 결정의 회전에 의한 강제대류와 결정/용융 경계면과 도가니 외벽간의 온도차에 의한 자연대류의 상호작용에 의해서 결정되어지는 유동구조와 천이현상을 해석하기 위해 도가니 내의 온도진동 특성을 시간주기($t_p$)와 진동크기($Delta\theta$)에 의해 검토하였다. 혼합대류인자에 따른 천이현상의 체계적인 연구가 수행되었으며($0.134\le Ra/PrRe^2 \le3.804$), 천이현상에 대한 Pr수의 영향을 조사하였다. 천이 메카니즘을 이해하기 위해, 자오면상의 온도장과 중심축에서의 축방향 속도에 대한 해석이 부가되었다.

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