• 제목/요약/키워드: Czochralski

검색결과 219건 처리시간 0.032초

초크랄스키 실리콘 단결정에서 성장 쌍정과 결정 외형의 관계 (Relation Between the Growth Twin and the Morphology of a Czochralski Silicon Single Crystal)

  • 박봉모
    • 한국결정학회지
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    • 제11권4호
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    • pp.207-211
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    • 2000
  • In a Czochralski silicon single crystal, the relation between the growth twin and the crystal morphology was investigated. The growth twin is nucleated on the {111} facet planes near the growth ridges. When a {111} growth twin is formed in the <100> silicon crystal, the growth ridge where twin is nucleated will continuous through the twin plane. Other two ridges at the 90。 apart will be displaced about 33° and be deformed to facets. The ridge on the opposite side of twin nucleation will disappear by forming a slight hill. Because the growth ridges of silicon is due to the {111} planes, the variation in the growth ridge formation can be predicted clearly by considering the change of the {111} plane traces in the stereographic projection after twining.

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압전응용을 위한 Langasite(La$_3$Ga$_5$SiO$_{14}$) 단결정의 성장 및 특성 (Growth and Characteristics of Langasite(La$_3$Ga$_5$SiO$_{14}$) Single Crystal for the Piezoelectric Applicatons)

  • 정일형;오근호
    • 한국세라믹학회지
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    • 제36권6호
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    • pp.640-645
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    • 1999
  • Recently rapid progress of electronic and telecommunication technology requires the development of new piezoelectric materials and cellular communication is more and more used in various fields. Langasite(La3Ga5SiO14) is suitable for new piezoelectric properties. Langastie can be applied as communication devices due to intermediate piezoelectric properties which are similar to those of quartz and LiTaO3 in its acoustic characteristics. So in this study Langastie(La3Ga5SiO14) single crystal with 47 mm in diameter and 25mm in length were sucessfully grown by using self-designed Czochralski system. In addition optimum growth conditions for the piezoelectric applications throughout estimation of crystal quality and frequency characteristics were investigated.

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New Oxide Crystals as Substrates for GaN-based Blue Light Emitting Devices

  • Fukuda, T.;Shimamura, K.;Tabata, H.;Takeda, H.;Futagawa, N.;Yoshikawa, A.;Kochurikhin, Vladimir-V.
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1999년도 PROCEEDINGS OF 99 INTERNATIONAL CONFERENCE OF THE KACG AND 6TH KOREA·JAPAN EMG SYMPOSIUM (ELECTRONIC MATERIALS GROWTH SYMPOSIUM), HANYANG UNIVERSITY, SEOUL, 06월 09일 JUNE 1999
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    • pp.3-26
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    • 1999
  • We have successfully grown <111>-oriented (La,Sr)(Al,Ta)$O_3$(LSAT) mixed-perovskite single crystals and <0001>-oriented $Ca_8La_2(PO_4)_6O_2$(CLPA) single crystals with the apatite structure by the Czochralski method. The compositional and lattice parameter uniformity of the crystals are discussed in relation to the growth conditions. Since LSAT and CLPA single crystals have excellent lattice matching with GaN, they ar promising as new substrates for the growth of high quality GaN epitaxial layers.

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Czochralski법에 의한 $LiNbO_3$ 단결정 성장 (The Growth of LiNbO3 Crystals by Czochralski Technique)

  • 이상학;윤의박
    • 한국세라믹학회지
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    • 제29권3호
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    • pp.189-194
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    • 1992
  • In order to grow a 127.86$^{\circ}$rotated LiNbO3 single crystal with good characteristics of surface acoustic wave (SAW) up to 80 mm in diameter, the temperature gradient of furnace, the growth rate and the rotation rate of crystal were changed. We could grow a crystal which had few macro defects at the conditions of temperature gradient as 30~6$0^{\circ}C$/cm, growth rate as 5 mm/hr and rotation rate as 8 rpm. The experimental ranges of the growth conditions are as follows. Temperature gradient was varied from 20 to 20$0^{\circ}C$/cm, growth rate as 5~7 mm/hr and crystal rotation rate as 6~12rpm.

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Growth and Properties of Co-doped Ce,Mn:LiTaO3 Single Crystals

  • Gang, Bong-Hoon;Rhee, Bum-Ku;Lim, Ki-Soo;Bae, Sung-Ho;Joo, Gi-Tae
    • 한국세라믹학회지
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    • 제39권8호
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    • pp.711-714
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    • 2002
  • The Ce, Mn: $LiTaO_3$ crystals were grown by Czochralski method in congruent ${\varphi}$3" $LiTaO_3$ single crystal growing conditions. Concentrations of Ce and Mn in melt were respectively 0.1 mole%. As-grown crystals were red, transparent and the grown crystals were tested with oxidation/reduction treatment for clor and other properties. Influence of Ce and Mn dopants on $LiTaO_3$ crystal properties was discussed. And the nonlinear optical properties of the Ce, Mn: $LiTaO_3$ crystal are being studied.

KCl:Eu 단결정 성장과 형광특성 (Crystal Growth and Luminescence Properties of KCl Doped with Eu2+ Ions)

  • 제재용;장경혁;박철우
    • 센서학회지
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    • 제20권1호
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    • pp.30-34
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    • 2011
  • Single crystal of KCl doped with $Eu^{2+}$ ions was grown by the Czochralski method in the high pressure Ar gas(purity 99.999 %) atmosphere with chamber pressure from which the crystal with high quality was obtained. As grown $KCl:Eu^{2+}$ crystal was checked by X-ray diffraction. Luminescence properties of KCl:Eu are investigated by laser-excitation spectroscopy under 355 nm excitation at 14 and 295 K. The broad emission band due to the $Eu^{2+}$ 5d $\rightarrow$ 4f transition is peaked at 417 nm with full width at half maximum of about 20 and 30 nm.

Modelling of transport phenomena and meniscus shape in Czochralski growth of silicon material

  • Bae, Sun-Hyuk;Wang, Jong-Hoe;Kim, Do-Hyun
    • 한국결정성장학회지
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    • 제9권5호
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    • pp.454-458
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    • 1999
  • Hydrodynamic Thermal Capilary Model developed previously has been modified to study the transport phenomena in the Czochralski process. Our analysis is focused on the heat transfer in the system, convection in the melt phase, and the meniscus and interface shape. Four major forces drive melt flow in the crucible, which include thermal buoyancy force in the melt, thermocapillary force along the curved meniscus, crucible rotation and crystal rotation. Individual flow mechanism due to each driving force has been examined to determine its interaction with the meniscus and interface shape. A nominal 4-inch-diameter silicon crystal growth process is chosen as a subject for analysis. Heater temperature profile for constant diameter crystal is also present as a function of crystal height or fraction solidified.

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TRIZ(6SC)를 활용한 잉곳 인상모듈 및 실리콘 단결정 잉곳 제조장치의 창의적 설계 (A Study on the Creative Design of Pulling Module for Silicon Ingot and an Apparatus of Manufacturing Silicon Single Crystal Ingot by using TRIZ(6SC))

  • 홍성도;허용정
    • 반도체디스플레이기술학회지
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    • 제11권2호
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    • pp.39-43
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    • 2012
  • This paper presents a study on the design of a pulling module for silicon ingot and an apparatus of manufacturing silicon single crystal ingot using the same method. The pulling module is conceptually designed by using TRIZ. Czochralski method(CZ) is representative way to manufacture single crystal ingot for wafers. The seed can be broken by high tension which is caused by large weight of a silicon ingot. The solution of this problem has been derived using 6SC(6 steps creativity)TRIZ. The pulling module is actuated by DC motor and rollers. High tension in the seed is removed by the rotate-elevate motion of rollers in the pulling module. A rubber belt is included in the rotate-elevate mechanism for increasing friction between rollers and silicon ingot.

Numerical Analysis on the Flow Pattern in the Melt of Cold Model for the Czochralski system

  • Kim, Min-Cheol;Lee, Sang-Ho;Yi, Kyung-Woo
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1998년도 PROCEEDINGS OF THE 15TH KACG TECHNICAL MEETING-PACIFIC RIM 3 SATELLITE SYMPOSIUM SESSION 4, HOTEL HYUNDAI, KYONGJU, SEPTEMBER 20-23, 1998
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    • pp.113-116
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    • 1998
  • A numerical study was performed on the fluid flow in the melt of the cold model for Czochralski growth system. The fluid flow in the melt of Woods metal with crucible diameter of 20cm was calculated using a three dimensional finite difference method. Since the crucible size is large, fully turbulent model as well as laminar model was used in the calculation. The effects of crucible rotation rate, crystal rotation rate and wall temperature difference on the velocity and temperature distribution were also investigated. For the purpose of verifying the results of calculation, a cold model experiment using Woods metal was also conducted and the velocity distribution in the melt of the model was measured.

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X-X: Single-Crystalline Si TFTs Fabricated with ${\mu}-Czochralski$ (grain-filter) process

  • Ishihara, R.;Dijk, B.D.van;Wilt, P.Ch. van der;Metselaar, J.W.;Beenakker, C.I.M.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.159-162
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    • 2002
  • This paper reviews an advanced excimer-laser crystallization technique enabling precise location-control of the individual grains. With the developed ${\mu}$-Czochralski (grain-filter) process, the large grains having a diameter of 6 ${\mu}m$ can be set precisely at predetermined positions. We will also discuss the performance of the single-crystalline Si TFTs that are formed within the location-controlled Si grains. The field-effect mobility for electrons is 430 $cm^2/Vs$ on average, which is well comparable to that of TFTs made with silicon-on-insulator wafers.

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