• 한국세라믹학회지
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• 제26권5호
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• pp.661-669
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• 1989

The defect structure in LiNbO3 single crystals grown by Czochralski method from the congruently melting composition were investigated. Chemical etching patterns were studied in x-plane, z-plane, and major cleavage plane, respectively, dislocation density was higher at the periphery of crystals than at the center because the thermal stress due to radial temperature gradient had a main effect on it, as compared with dislocations formed from the solid-liquid interface. Many dislocation lineages were arranged along several directions.

• 한국세라믹학회지
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• 제25권6호
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• pp.699-703
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• 1988

Domain structures of LiNbO3 crystals grown by Czochralski method were examined according to the growth axis and the rotational speed of crystals. Ring shape and split domain structures were revealed in Z-axis and Y-axis grown crystals respectively. It was found that the domain structures of grown crystals were closely related to the solid-liquid interface shape during growth.

• 한국세라믹학회지
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• 제27권5호
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• pp.698-701
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• 1990

The necessary conditions for the growth of high quality Bi12SiO20 single crystals by the Czochralski method have been determined. The interface of melt and crystal was transformed convex to concave above 7 rpm. For growth <001> and <111> directions, facet morphology exhibited 4-fold and 6-fold symmetry. When the crystal of <001> growth direction was broadened, minor facet {110} was developed outstandingly.

• International Journal of Control, Automation, and Systems
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• 제3권2호
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• pp.252-257
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• 2005

In this work, we propose a simple but efficient method to design a target temperature trajectory for pulling speed tracking control of the crystal grower in the Czochralski crystallization process. In the suggested method, the model predictive control strategy is used to incorporate the complex dynamic effect of the heater temperature on the pulling speed into the temperature trajectory design quantitatively. The feedforward trajectories designed by the proposed method were implemented on 200 mm and 300 mm silicon crystal growers in the commercial Czochralski process. The application results have demonstrated its excellent and consistent tracking performance of pulling speed along whole bulk crystal growth.

• 한국결정성장학회지
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• 제7권1호
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• pp.27-40
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• 1997

The heat in Czochralski method is transfered by all transport mechanisms such as convection, conduction and radiation and convection is caused by the temperature difference in the molden pool, the rotations of crystal or crucible and the difference of surface tension. This study delvelops the simulation model of Czochralski growth by using the finite difference method with fixed grids combined with new latent heat treatment model. The radiative heat transfer occured in the surfce of the system is treated by calculating the view factors among surface elements. The model shows that the flow is turbulent, therefore, turbulent modeling must be used to simulate the transport phenomena in the real system applied to 8" Si single crystal growth process. The effects of a cusp magnetic field imposed on the Czochralski silicon melt are studied by numerical analysis. The cusp magnetic field reduces the natural and forced convection due to the rotation of crystal and crucible very effectively. It is shown that the oxygen concentration distribution on the melt/crystal interface is sensitively controlled by the change of the magnetic field intensity. This provides an interesting way to tune the desired O concentration in the crystal during the crystal growing.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 추계학술대회 논문집
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• pp.17-20
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• 1998

Thermal behavior of Flow Pattern Defect (FPD) and Large Pit (LP) in Czochralski Silicon crystals was investigated by applying high temperature ($\geq$1100$^{\circ}C$) annealing and non-agitation Secco etching. For evaluation of the effect of LP upon device performance / yield, DRAM and ASIC devices were fabricated. The results indicate that high temperature annealing generates LPs whereas it decreases FPD density drastically, and LP does not have detrimental effects on the performance /

• 한국결정성장학회지
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• 제12권1호
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• pp.50-55
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• 2002

$LiNbO_3$ 단결정에 $Nd_2O_3$0.2~0.5 wt.%를 칭량하여 결정을 성장 시켰다. 그리고 광손상을 억제하기 위해 ZnO 2~8 mole%를 첨가하여 광손상에 대한 저항성을 높였다. 본 연구에서는 Nd가 doping된 단결정을 성장시켜 주기적인 domain을 만들고자 하였다

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1998년도 PROCEEDINGS OF THE 15TH KACG TECHNICAL MEETING-PACIFIC RIM 3 SATELLITE SYMPOSIUM SESSION 4, HOTEL HYUNDAI, KYONGJU, SEPTEMBER 20-23, 1998
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• pp.21-25
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• 1998

An experimental investigation on flow pattern was carried out in molten Woods metal using an incorporated magnet probe to determine the velocity field in a Woods metal model of Czochralski crystal growth system. The local velocities in Woods metal were obtained 3-dimensionally at numerous positions of large crucible by measuring the voltage induced in the melt. Since there have not been a lot of the model experiments on the velocity distributions in the large size of melt with low Prandtl number for Czochralski crystal growth system, the present paper aims to give useful guidelines for e analysis of fluid flow in Czochralski growth system.

• 한국결정성장학회지
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• 제6권4호
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• pp.620-626
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• 1996

자체 제작한 고주파 유도 가열 Czochralski 장치를 이용하여 조화용융조성(congruently melting composition)의 undoped 및 MgO.doped 단결정을 육성하였다. 최적육성조건을 확립하였으며, 보상가열전압조정방식을 이용하여 약 ${\pm}5\;%$ 이내의 범위로 직경제어하는데 성공하였다. 또한, 첨가된 $Mg^{2+}$ 이온이 ferroelectric domain 형성에 미치는 영향을 전자현미경(SEM)등으로 분석하였다.

• 한국결정학회지
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• 제7권1호
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• pp.1-7
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• 1996

Czochralski 인상장치에 로드 셀(load cell) 및 데이터 입출력 장치를 부착하고, computer에 의해 목표로 하는 크기의 단결정이 성장되도록 RF power가 자동 조정되는 프로그램을 개발하였다. 본 연구에서는 개발된 프로그램의 동작원리, 특성 및 구성 장치를 중심으로 기술하였으며, Nd:YAG산화물 단결정에 이 방법을 적용한 결과 ±5% 내에서 Nd:YAG 결정의 직경이 조절됨을 확인하였다.