• Title/Summary/Keyword: Cu-to-Cu direct bonding

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Peel strengths of the Composite Structure of Metal and Metal Oxide Laminate (Metal과 Metal Oxidefh 구성된 복합구조의 Peel Strength)

  • Shin, Hyeong-Won;Jung, Taek-Kyun;Lee, Hyo-Soo;Jung, Seung-Boo
    • Journal of the Microelectronics and Packaging Society
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    • v.20 no.4
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    • pp.13-16
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    • 2013
  • A lot of various researches have been going on to use heat spreader for LED module. Nano porous aluminum anodic oxide (AAO) applied LED, which is produced from anodization, is easy and economically advantageous. Convensional LED module is consist of aluminum/adhesive/copper circuit. The polymer adhesive in this module is used as heat spreader. However the thermal emission of LED component is degraded because of low heat conductivity of polymer and also reliability of LED component is reduced. Therefore, AAO in this work was applied to heat spreader of LED module which has higher heat conductivity compare to polymer. Bonding strength between AAO and copper circuit was improved with Ti/Cu seed layer by copper sputtering process (DBC) before the bonding. And this copper circuit has been fabricated by electro plating method. Peel strength of AAO and copper circuit in this work showed range between 1.18~1.45 kgf/cm with anodizing process which is very suitable for high power LED application.