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휨 구조의 압전 마이크로-켄틸레버를 이용한 진동 에너지 수확 소자

  • Na, Ye-Eun;Park, Hyeon-Su;Park, Jong-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.476-476
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    • 2014
  • 서론: 저 전력 소모를 필요로 하는 무선 센서 네트워크 관련 기술의 급격한 발달과 함께 자체 전력 수급을 위한 진동 에너지 수확 기술에 대한 연구가 활발히 이루어지고 있다. 다양한 구조와 소재를 압전 외팔보에 적용하여 제안하고 있다. 그 중에서도 진동 기반의 에너지 수확 소자는 주변 환경에서 쉽게 진동을 얻을 수 있고, 높은 에너지 밀도와 제작 방법이 간단하다는 장점을 가지고 있어 많은 분야에 응용 및 적용 가능하다. 기존 연구에서는 2차원적으로 진동 에너지 수확을 위한 휜 구조의 압전 외팔보를 제안 하였다. 휜 구조를 갖는 압전 외팔보는 각각의 짧은 두 개의 평평한 외팔보가 일렬로 연결된 것으로 볼 수 있다. 하나의 짧고 평평한 외팔보는 진동이 가해지면 접선 방향으로 응력이 생겨 최대 휨 모멘텀을 갖게 된다. 그러므로 휜 구조를 갖는 외팔보는 진동이 인가됨에 따라 길이 방향과 수직 방향으로 진동한다. 하지만, 이 구조는 수평 방향으로 가해지는 진동에 대한 에너지를 수확하기에는 한계점을 가진다. 즉, 3축 방향에서 임의의 방향에서 진동 에너지를 수확하기는 어렵다. 본 연구에서는 3축 방향에서 에너지를 효율적으로 수확할 수 있도록 헤어-셀 구조의 압전 외팔보 에너지 수확소자를 제안한다. 제안된 소자는 길이 방향과 수직 방향뿐만 아니라 수평 방향으로도 진동하여 임의의 방향에서 진동 에너지를 수확할 수 있다. 구성 및 공정: 제안하는 소자는 3축 방향에서 임의의 진동을 수확하기 위해서 길이를 길게 늘이고 길이 방향을 따라 휘어지는 구조의 헤어-셀 구조로 제작하였다. 외팔보의 구조는 외팔보의 폭 대비 길이의 비가 충분히 클 때, 추가적인 자유도를 얻을 수 있다. 그러므로 헤어-셀 구조의 에너지 수확 소자는 기본적인 길이 방향, 수직방향 그리고 수평방향에 더불어 추가적으로 뒤틀리는 방향을 통해서 3차원적으로 임의의 주변 진동 에너지를 수확하여 전기적인 에너지로 생성시킬 수 있다. 제작된 소자는 높은 종횡비를 갖는 무게 추($500{\times}15{\times}22{\mu}m3$)와 길이 방향으로 길게 휜 압전 외팔보($1000{\times}15{\times}1.7{\mu}m3$)로 구성되어있다. 공정 과정은 다음과 같다. 먼저, 실리콘 웨이퍼 위에 탄성층을 형성하기 위해 LPCVD SiNx를 $0.8{\mu}m$와 LTO $0.2{\mu}m$를 증착 후, 각각 $0.03{\mu}m$$0.12{\mu}m$의 두께를 갖는 Ti와 Pt을 하부 전극으로 스퍼터링한다. 그리고 Pb(Zr0.52Ti0.48)O3 박막을 $0.35{\mu}m$ 두께로 졸겔법을 이용하여 증착하고 상부 Pt층을 두께 $0.1{\mu}m$로 순차적으로 스퍼터링하여 형성한다. 상/하부 전극은 ICP(Inductively Coupled Plasma)를 이용해 건식 식각으로 패턴을 형성한다. PZT 층과 무게 추 사이의 보호막을 씌우기 위해 $0.2{\mu}m$의 Si3N4 박막이 PECVD 공정법으로 증착되고, RIE로 패턴을 형성된다. Ti/Au ($0.03/0.35{\mu}m$)이 E-beam으로 증착되고 lift-off를 통해서 패턴을 형성함으로써 전극 본딩을 위한 패드를 만든다. 초반에 형성한 실리콘 웨이퍼 위의 SiNx/LTO 층은 RIE로 외팔보 구조를 형성한다. 이후에 진행될 도금 공정을 위해서 희생층으로는 감광액이 사용되고, 씨드층으로는 Ti/Cu ($0.03/0.15{\mu}m$) 박막이 스퍼터링 된다. 도금 형성층을 위해 감광액을 패턴화하고, Ni0.8Fe0.2 ($22{\mu}m$)층으로 도금함으로써 외팔보 끝에 무게 추를 만든다. 마지막으로, 압전 외팔보 소자는 XeF2 식각법을 통해 제작된다. 제작된 소자는 소자의 여러 층 사이의 고유한 응력 차에 의해 휨 변형이 생긴다. 실험 방법 및 측정 결과: 제작된 소자의 성능을 확인하기 위하여 일정한 가속도 50 m/s2로 3축 방향에 따라 입력 주파수를 변화시키면서 출력 전압을 측정하였다. 먼저, 소자의 기본적인 공진 주파수를 얻기 위하여 수직 방향으로 진동을 인가하여 주파수를 변화시켰다. 그 때에 공진 주파수는 116 Hz를 가지며, 최대 출력 전압은 15 mV로 측정되었다. 3축 방향에서 진동 에너지 수확이 가능하다는 것을 확인하기 위하여 제작된 소자를 길이 방향과 수평 방향으로 가진기에 장착한 후, 기본 공진 주파수에서의 출력 전압을 측정하였다. 진동이 길이방향으로 가해졌을 때에는 33 mV, 수평방향으로 진동이 인가되는 경우에는 10 mV의 최대 출력 전압을 갖는다. 제안하는 소자가 수 mV의 적은 전압은 출력해내더라도 소자는 진동이 인가되는 각도에 영향 받지 않고, 3축 방향에서 진동 에너지를 수확하여 전기에너지로 얻을 수 있다. 결론: 제안된 소자는 3축 방향에서 진동 에너지를 수확할 수 있는 에너지 수확 소자를 제안하였다. 외팔보의 구조를 헤어-셀 구조로 길고 휘어지게 제작함으로써 기본적인 길이 방향, 수직방향 그리고 수평방향에 더불어 추가적으로 뒤틀리는 방향에서 출력 전압을 얻을 수 있다. 미소 전력원으로 실용적인 사용을 위해서 무게추가 더 무거워지고, PZT 박막이 더 두꺼워진다면 소자의 성능이 향상되어 높은 출력 전압을 얻을 수 있을 것이라 기대한다.

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Reflectance and Microhardness Characteristics of Sulfide Minerals from the Sambong Copper Mine (삼봉동광산산(三峰銅鑛山産) 유화광물(硫化鑛物)의 반사도(反射度)와 미경도(微硬度) 특성(特性))

  • Chi, Se Jung
    • Economic and Environmental Geology
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    • v.17 no.2
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    • pp.115-139
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    • 1984
  • The Cu-Pb-Zn-Ag hydrothermal vein-type deposits which comprise the Sambong mine occur within calc-alkaline volcanics of the Cretaceous Gyeongsang Basin. The ore mineralization took place through three distinct stages of quartz (I and II stages) and calcite veins (III stage) which fill the pre-existing fault breccia zones. These stages were separated in time by tectonic fracturing and brecciation events. The reflection variations of one mineral depending on mineralization sequence are considered to be resulted from variation in its chemical composition due to different physico-chemical conditions in the hydrothermal system. The reflection power of sphalerite increases with the content of Fe substituted for Zn. Reflectances of the sphalerite grain are lower on (111) than on (100) surface. The spectral profiles depend on the internal reflection color. Sphalerite, showing green, yellow and reddish brown internal reflection, have the highest reflection power at $544m{\mu}$ (green), $593m{\mu}$ (yellow) and $615m{\mu}$ (red) wavelength, respectively. Chalcopyrite is recognized as biaxial negative from the reflectivity data of randomly oriented grains measured at the most sensitivity at $544m{\mu}$. The microindentation hardness against the Fe content (wt. %) for the sphalerite increases to 8.05% Fe and then decreases toward 9.5% Fe content. Vickers hardness of the sphalerite is considerably higher on surface of (100) than on (111). The relationship between Vickers hardness and crystal orientation of the galena was determined to be $VHN_{(111)}$ > $VHN_{(210)}$ > $VHN_{(100)}$. The softer sulfides have the wider variation of the diagonal length in the indentation. Diagonal length in the indentation is pyrite

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Comparative Study on Distribution of Heavy Metals of the Surface Sediments in East/West Oceanic Dumping Areas (동/서해병 해역 표층 퇴적물의 중금속 분포 특성 비교)

  • Kim, Pil-Geun;Park, Maeng-Eon;Sung, Kyu-Youl;Lim, Sung-Taek;Oh, Sul-Mi
    • Economic and Environmental Geology
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    • v.42 no.2
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    • pp.121-131
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    • 2009
  • The distribution characteristics of heavy metals for surface sediments in east oceanic dumping area (EDA) and west oceanic dumping area (WDA) are evaluated by grain sizes, minerals, sedimentation rates and compositions of heavy metals. The mean grain sizes in EDA and WDA range from $7.95{\Phi}$ to $8.51{\Phi}$ and $7.42{\Phi}$ to $8.15{\Phi}$, respectively. These are mostly belonging to the M (mud) type. Minerals in the surface sediments consist of illite with chlorite, smectite, and kaolinite. Sedimentation rates estimated by $^{210}Pb$ method in EDA and WDA are 1.11 mm/yr$\sim$1.73 mm/yr and 1.87 mm/yr, respectively. According to the interrelationship, concentrations of Ni, Cu, Cr, and Zn are closely associated with mean grain size, Al, and Fe, whereas concentrations of Cd and Pb are poorly associated with ones. The enrichment factors of these elements are higher than 1.5, suggesting that the concentrations of Cd and Pb in the surface sediments are affected by anthropogenic sources. The $I_{geo}$-class numbers of Cd and Pb in the surface sediments are mostly classified in 2 to 4, showing moderate to strongly polluted. These numbers in EDA are higher than that of WDA, and the highest number is 4, indicative of the strongly polluted class. Our results show that the disposed wastes at EDA include mineralogical wastes, dredged materials from sewage disposals, and sludges from constructions having materials of WDA. The annual amount of oceanic dumping in EDA is double than that in WDA.

Growth Characteristic and Nutrient Uptake of Water Plants in Constructed Wetlands for Treating Livestock Wastewater (인공습지를 이용한 축산폐수처리장에서 수생식물의 생육특성과 영양염류 흡수특성)

  • Park, Jong-Hwan;Seo, Dong-Cheol;Kim, Seong-Heon;Lee, Choong-Heon;Choi, Jeong-Ho;Lee, Sang-Won;Lee, Dong-Jin;Ha, Yeong-Rae;Cho, Ju-Sik;Heo, Jong-Soo
    • Korean Journal of Environmental Agriculture
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    • v.31 no.4
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    • pp.351-358
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    • 2012
  • BACKGROUND: Constructed wetlands for wastewater treatment are vegetated by wetland plants. Wetland plants are an important component of wetlands, and the plants have several roles in relation to the livestock wastewater treatment processes. The objectives of this study were to investigate the growth characteristics and nutrient absorption of water plants in constructed wetlands for treating livestock wastewater. METHODS AND RESULTS: In this study, livestock wastewater treatment plant by constructed wetlands consisted of $1^{st}$ water plant filtration bed, $2^{nd}$ activated sludge bed, $3^{rd}$ vertical flow(VF), $4^{th}$ horizontal flow(HF) and $5^{th}$ HF beds. Phragmites communis TRINIUS(PHRCO) was transplanted in $3^{rd}$ VF bed, Iris pseudoacorus L(IRIPS) was transplanted in $4^{th}$ HF bed and PHRCO, IRIPS and Typha orientalis PRESEL(THYOR) were transplanted in $5^{th}$ HF. Growth of water plants in constructed wetlands were the highest in October. The IRIPS growth was higher than other plant as 264 g/plant in October. The absorption of nitrogen and phosphorus by IRIS were 3.38 g/plant and 0.634 g/plant, respectively. The absorption of K, Ca, Mg, Na, Fe, Mn, Cu and Zn by water plants were higher in the order of IRIPS > THYOR > PHRCO. CONCLUSION(S): The absorption of nutrients by water plants were higher on the order of IRIPS > THYOR > PHRCO in constructed wetlands for treating livestock wastewater.

Nutritional Properties, as Food Resources for Menu Development, of Cubed Snailfish, Shaggy Sea Raven, and Two Kinds of Wild Vegetables that are Staple Products in Samcheok (삼척지역 특산물인 곰치, 풍덕구이, 곰취, 곤드레의 향토식품 소재화를 위한 영양적 특성 연구)

  • Surh, Jeong-Hee;Kim, Jong-Ok;Kim, Mi-Hyun;Lee, Jae-Choel;Yang, Hee-Wan;Lee, Byung-Yong;Kim, Mi-Young;Yun, Sun-Ju;Jeong, Hye-Ryeon
    • Korean journal of food and cookery science
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    • v.25 no.6
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    • pp.690-702
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    • 2009
  • Liparis tessellatus(cubed snailfish), Hemitripterus villosus(shaggy sea raven), Ligularia fischeri, and Cirsiu setidens, which are staple products in Samcheok, were studied as food resources for the development of a representative local menu. Thus, their nutritional compositions were analyzed, and the resulting values were used to assess the nutritional characteristics of the newly-developed menu. In Liparis tessellatus and Hemitripterus villosus, the organic components including protein and fat tended to be lower than the corresponding values referred to as the 'Seventh Revision Food Composition Table' (2006), which was presumably linked to the spawning period of the fish. The contents of Zn, Cu, and Mg, which are nutritionally important even though the consumption of these minerals by Koreans is not sufficient, were determined to 0.5, 0.2, and 34.3 mg/100 g for Ligularia fischeri, and 26.2, 1.1, and 147.7 mg/100 g for dried Cirsiu setidens. Cirsiu setidens cultivated in Samcheok contained noticeably higher amounts of calcium, zinc, and iron, and its calcium level was more than an order of magnitude higher than that provided by the Food Composition Table. This might be associated with the fact of that Samcheok is abundant in lime which consists of calcium-containing inorganic materials. n-3 fatty acids including docosahexaenoic acid(DHA) accounted for 21% and 13% of the total fatty acids, for Liparis tessellatus and Hemitripterus villosus, respectively, and the major amino acids were glutamic acid, aspartic acid, glycine, and alanine for both fish. One of the newly developed menus, Cirsiu setidens hae-jang-gook, was nutritionally superior to the corresponding menu that used dried radish leaves, a typical ingredient in hae-jang-gook, in terms of the protein, iron, and zinc contents. Rice pottage cooked with Liparis tessellatus instead of abalone was high in protein, calcium, iron and zinc, where one serving provided 29.1, 15.4, 31.0, and 27.8% of their Reference Intake (RI)s, respectively.

Quality Characteristics and Antioxidant Activity of Spirulina added Yogurt (스피루리나 첨가 요구르트의 품질 특성 및 항산화능)

  • Shin, Yu-Mi;Son, Chan-Wok;Sim, Hyun-Jung;Kim, Min-Hee;Kim, Mi-Yeon;Kwon, Oh-Yun;Kim, Mee-Ree
    • Korean journal of food and cookery science
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    • v.24 no.1
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    • pp.68-75
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    • 2008
  • The aim of this study was to evaluate the quality characteristics and antioxidant activity of yogurt containing spirulina. Yogurt base was prepared from skim milk added with $0.25{\sim}1%(w/v)$ spirulina powder and fermented with lactic acid bacteria (S. thermophilus : L. bulgaricus = 1 : 1) at $40^{\circ}C$ for 12 hr. Kiwi puree and oligosaccharides were then added. The addition of 1% spirulina powder stimulated the growth of lactic acid bacteria, which showed the highest viable cell count ($3.4{\times}10^9$ CFU/mL), and increased the titratable acidity (1.10%). The viscosity range of the yogurt was 6,000 to 9,000 cP, and the sugar content of the yogurt was around 18 $^{\circ}Brix$. The antioxidant activities were determined using the DPPH method, and the hydroxyl radical scavenging activity of the yogurt containing spirulina was higher than that of the control. The sensory evaluation scores for appearance, odor, taste, overall acceptability and buying intention were higher in the yogurt containing 0.25% spirulina than in the other groups. The amount of macronutrients in the yogurt containing spirulina was higher than that in the control. In addition, the amounts of micronutrients in the yogurt containing spirulina was significantly increased. According to these results, the optimum concentration of spirulina powder is around 0.25%.

Changes in Physicochemical Composition of Sea Urchin Roe by Steaming Treatment (열처리 조건에 따른 성게 알의 이화학적 성분 변화)

  • Lee, Sung-Uk;Lee, Hye-Young;Kim, Seong-Ho;Kim, Duk-Jin
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.41 no.4
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    • pp.550-560
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    • 2012
  • This study was performed to investigate the physicochemical properties of sea urchin ($Anthocidaris$ $crassispina$, $Pseudocentrotus$ $depressus$, $Hernicentrotus$ $pulcherrimus$) roe as a processed or canned food by steaming treatment. Proximate compositions of $A.$ $crassispina$ roe and $P.$ $depressus$ roe were similar, but water, crude ash, and carbohydrate contents of $H.$ $pulcherrimus$ roe showed little differences. Proximate compositions of sea urchin roe showed slight differences with steaming time, raw samples showed no differences. Glycine content of the three raw sea urchin roe samples showed the highest concentration among free amino acids, followed by arginine, alanine, and lysine, in order. Total free amino acid contents of raw sea urchin roe were 754.70 mg% ($A.$ $crassispina$), 567.75 mg% ($P.$ $depressus$), and 449.44 mg% ($H.$ $pulcherrimus$). Total free amino acid content of 5 min steaming sample was highest among steaming and canning conditions. ATP, ADP, and AMP contents of raw $P.$ $depressus$ roe sample was higher than those of $A.$ $crassispina$and $H.$ $pulcherrimus$ roe. Major fatty acids of the three raw sea urchin roe samples were myristic acid, palmitic acid, and EPA. S.F.A. content of raw samples of $A.$ $crassispina$and $H.$ $pulcherrimus$ roe was higher than U.F.A content, whereas U.F.A. content of $P.$ $depressus$ roe was highest among the three raw samples. For minerals K, P, Fe, and Zn contents were highest in $A.$ $crassispina$roe while Ca, Mg, Na, and Cu contents were highest in $H.$ $pulcherrimus$ roe. For heavy metals, Cd, Pb and As were detected in all samples in trace amounts under the criteria of the Korea food codex.

Reproductive Cycle of the Echiuroid Worm Urechis unicinctus(von Drasche) in Southern Korea (한국산 개불, Urechis unicinctus (von Drasche)의 생식주기)

  • 최상덕;김호진;이원교;곽은주;윤호섭;라성주;이인곤
    • Journal of Aquaculture
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    • v.13 no.2
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    • pp.169-174
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    • 2000
  • Reproductive cycle of U. unicinctus was studied from September 1998 to August 1999, using gonadosomatic index (CSI) as an indicator. In November, the CSI values were maximum for male (6.2) and female (7.0), respectively; the values were lowest for them (1.0 and 0.5) during the successive february. Subsequently, they rapidly increased and attained peak by March-April. The values decreased again in both sexes and remained unchanged until August. The index increased in October to attain the peak by November. The CSI values clearly indicated that there are two spawning events in a year, namely the first one during April-May and the second one in December. Reproductive cycle was classified into the following successive stages: in female, multipication (January~February, June ~Setember), maturation (March~April, November), spent (May and December), degeneration and resting (June and January), and in male, multiplication January ~ february, June ~September), maturation (March~April, October~November), spent (May and December) and degeneration and resting (January and June). Histological observations revealed that oocytes in the ovary matured simultaneously in November and March. At the same time, the envelopes of matured testis became thinner than those in the early stage.

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Chemical and Optical Absorption Spectroscopic Study of Colored Tourmalines (유색 전기석의 화학적 및 광학흡수 분광학적 연구)

  • Kim, Hee-Jong;Kim, Soo-Jin
    • Journal of the Mineralogical Society of Korea
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    • v.6 no.1
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    • pp.1-16
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    • 1993
  • The chemical and optical absorption spectroscopic characters of pink and colorless tourmalines from San Diego mine in California, U.S.A., blue/green tourmalines from anonymous mine, Brazil, and brownis black tourmalines from Uncheon and Haksan mines in Korea have been studied using X-ray diffractometer, electron microprobe, optical absorption spectroscopy, and heat treatment. Least-squares refinements give unit cell diminsions : a = 15.96-16.01 ${\AA}$, c = 7.15-7.16 ${\AA}$ for the brownish black tourmalines, a = 15.82 - 15.87 ${\AA}$, c = 7.09 - 7.10 ${\AA}$ for pink tourmalines, and a = 15.88 - 15.94 ${\AA}$, c = 7.12 - 7.15 ${\AA}$ for blue green tourmalines. The colors of tourmalines are responsible for the transition elements. The pink color is attributed to the $Mn^{3+}$ ions, the blue-green to $Fe^{2+}$ and $Mn^{2+}$, bluish green to $Cu^{2+}$, and the brownish black to $Fe^{2+}$, $Fe^{2+}$ - $Fe^{3+}$, and $Fe^{2+}$ - $Ti^{4+}$. The $Mn^{3+}$ ions of pink color tourmalines are stabilized in the Y sites compressed along the O(1)H-O(3)H axis by Jahn-Teller distortion. Heating removes the pink or red component from tourmalines, producing the colorless stones from the pink and red ones. The bluish green samples change into the greenish blue ones and a certain yellowish green samples change into the light green ones by heat treatment. In the elbaite-schorl series, the concentration of Fe and Mn are variable depending on the color zones. The green zone is characterrized by the high content of Fe and Mn are variable depending on the color zones. The green zone is characterized by the high content of Fe, whereas the pink zone by the high content of Mn. Mn increases in deep yellow zone compared with yellow or colorless zones.

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Characterization of Low-Temperature Pyrolysis and Separation of Cr, Cu and As Compounds of CCA-treated Wood (CCA (Chromated Copper Arsenate) 처리 목재의 저온 열분해와 CCA 유효 성분분리 특성)

  • Lim, Kie-Pyo;Lee, Jong-Tak;Bum, Jung-Won
    • Journal of the Korean Wood Science and Technology
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    • v.35 no.1
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    • pp.73-80
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    • 2007
  • This study was carried out to separate the heavy toxic metals in eco-building materials by low-temperature pyrolysis, especially arsenic (As) compounds in CCA wood preservative as a solid in char. The pyrolysis was carried out to heat the CCA-treated Hemlock at $280^{\circ}C$, $300^{\circ}C$, $320^{\circ}C$, and $340^{\circ}C$ for 60 mins. Laboratory scale pyrolyzer composed of [preheater$\rightarrow$pyrolyzer$\rightarrow$1st water scrubber$\rightarrow$2nd bubbling flask with 1% $HNO_3$ solution$\rightarrow$vent], and was operated to absorb the volatile metal compound particulates at the primary water scrubber and the secondary nitric acid bubbling flask with cooling condenser of $4^{\circ}C$ under nitrogen stream of 20 mL/min flow rate. And the contents of copper, chromium and arsenic compounds in its pyrolysis such as carbonized CCA treated wood, 1st washing and 2nd washing liquors as well as its raw materials, were determined using ICP-AES. The results are as follows : 1. The yield of char in low-temperature pyrolysis reached about 50 percentage similar to the result of common pyrolytic process. 2. The higher the pyrolytic temperature was, the more the volatiles of CCA, and in particular, the arsenic compounds were to be further more volatile above $320^{\circ}C$, even though the more repetitive and sequential monitorings were necessary. 3. More than 85 percentage of CCA in CCA-treated wood was left in char in such low-temperature pyrolytic condition at $300^{\circ}C$. 4. Washing system for absorption of volatile CCA in this experiment required much more contacting time between volatile gases and water to prevent the loss of CCA compounds, especially the loss of arsenic compound. 5. Therefore, more complete recovery of CCA components in CCA-treated wood required the lower temperature than $320^{\circ}C$, and the longer contacting time of volatile gases and water needed the special washing and recovery system to separate the toxic and volatile arsenic compounds in vent gases.