Thermodynamic Equilibrium Analysis of Copper Chemical Vapor Deposition from Cu(II) Hexafluoroacetylacetonate Precursor (Cu(II) Hexafluoroacetylacetonate 프리커서에 의한 구리 화학증착의 열역학적 평형조성 해석)
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- Korean Journal of Materials Research
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- v.5 no.6
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- pp.657-666
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- 1995