Characteristics of Metal-Insulator-Metal Capacitors with HfO$_2$ Deposited by Sputtering
(스퍼터링 방법으로 증착한 HfO$_2$ MIM 커패시터의 유전특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2002.07a
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- pp.362-365
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- 2002