• 한국재료학회지
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• 제16권2호
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• pp.80-84
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• 2006

The removal efficiency of Cu and Fe contaminants on the silicon wafer surface was examined to investigate the effect of cleaning solutions on the behavior of metallic impurities. Silicon wafers were intentionally contaminated with Cu and Fe solutions by spin coating and cleaned in different types of cleaning solutions based on $NH_4OH/H_2O_2/H_2O\;(SC1),\;H_2O_2/HCl/H_2O$ (SC2), and/or HCl/$H_2O$ (m-SC2) mixtures. The concentration of metallic contaminants on the silicon wafer surface before and after cleaning was analyzed by vapor phase decomposition/inductively coupled plasma-mass spectrometry (VPD/ICP-MS). Cu ions were effectively removed both in alkali (SC1) and in acid (SC2) based solutions. When $H_2O_2$ was not added to SC2 solution like m-SC2, the removal efficiency of Cu impurities was decreased drastically. The efficiency of Cu ions in SC1 was not changed by increasing cleaning temperature. Fe ions were soluble only in acid solution like SC2 or m-SC2 solution. The removal efficiencies of Fe ions in acid solutions were enhanced by increasing cleaning temperature. It is found that the behavior of metallic contaminants as Cu and Fe from silicon surfaces in cleaning solutions could be explained in terms of Pourbaix diagram.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2003년도 봄 학술발표회 논문집
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• pp.821-826
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• 2003

Laboratory experiments were peformed to understand physical properties of soil-cement column under the influence of acidic flow including metal contaminants and its retaining capacity against metal migration. The contaminant used in this study was nitric acid with Cu and Cd. The Permeability of soil-cement column decreased when pH of the column began to drop below 12. Decreases in pH led to significant reduction of compressive strength of clayey soil-cement specimen, while relatively marginal reduction for sandy soil-cement specimen. The metal contaminants did not leachate from soil-cement column until pH of soil-cement dropped below 7∼8 for Cu and 9∼10 for Cd. Metal contaminants were precipitated and trapped inside the soil-cement column at pHs higher than those mentioned as verified with metal analysis and visual inspection. This indicated that soil-cement column not only performs well as a cut-off wall, but also helps alleviating the level of contamination of the surrounding environment.

• 한국지하수토양환경학회지:지하수토양환경
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• 제18권1호
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• pp.85-93
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• 2013

This study is conducted to evaluate the leaching of contaminants from mine tailing by natural water and finally to estimate the leaching and transportation of heavy metal contaminants by rainfall. In order to identify contaminated heavy metal of soil, 17 soil, 2 tailing and 2 waste dump and 2 control samples were taken at mine area and analyzed total metal contents. The leaching experiments were conducted using distilled water. Cu, Pb, Zn was extracted from the reddish mine tailing in a short period time, especially the extraction rate of Cu (45.0%) was highest. The contaminants were leached from the yellowish mine tailing within an hour and the leaching rate of Cd (42.0%) and Zn (17.2%) were relatively high. The reddish soil from the waste dump showed leaching of Cu (5.1%), Pb (4.0%) and Zn (3.3%), however the leaching rate was low except Mi (14.2%). From the yellowish soil sampled from the dumping site, the leaching of Cu (8.2%) and Ni (9.7%) was high while the leaching of Zn (0.2%) were relatively low.

• Membrane and Water Treatment
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• 제14권1호
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• pp.19-25
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• 2023

The studies on the effect of different plastic properties (e.g., types, shapes, presence of additivies) on the sorption of contaminants in the agricultural environment are limited. In this study, Cu and Pb, the commonly found heavy metals in the environment, were used to investigate the sorption capacities of microplastics (MPs). The Pb sorption capacity increased in the order of polystyrene (PS)<polyethylene (PE)<polyvinyl chloride (PVC). The estimated Cu sorption capacity was greater for the PE films than the PE fragments, while the sorption strength was greater for the PE fragments. This suggests that the shapes of MPs can affect the contaminant sorption capacities. With the PE fragments, the Pb sorption capacity was greater than the Cu sorption capacity by 10-12 times. Also, the Pb and Cu sorption capacities were greater for the PE fragments with additives than the PE fragment without additives. After the sorption of Pb or Cu on MPs, the toxic effects of the Pb or Cu solutions were decreased, suggesting that the toxic effects of contaminants can be affected by the co-presence of MPs in the environment. Overall, the results show that different types and shapes of MPs and the presence of additives can affect the heavy metal sorption capacities of MPs.

• 한국진공학회지
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• 제9권2호
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• pp.102-109
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• 2000

chemical mechanical Polishing (CMP)공정 중 제거된 막과 연마재의 지꺼기를 제거하기 위하여 일반적으로 사용하는 scrubbing과 같은 기계적인 세정법으로는 기가급 소자 제조시에 요구되는 $10^{10}/\textrm{cm}^2$ 이하의 오염도에 도달하기 어렵다. 따라서 이러한 기계적인 세정법에 이어 충분히 제거되지 못한 금속오염물을 제거하기 위한 2차 세정이 요구된다. 본 논문에서는 리모트 플라스마 세정법과 UV/$O_3$ 세정법을 사용하여 oxide CMP 후에 웨이퍼 표면에 많이 존재하는 K, Fe, Cu등의 금속오염물을 제거하는데 대한 연구결과를 보고하고자 한다. 리모트 수소 플라스마 세정결과에 의하면, 세정시간이 짧을 수록, rf-power가 증가할수록 세정 효과가 우수한 것으로 나타났으며, CMP 공정 후 웨이퍼 표면에 특히 많이 존재하는 금속 불순물인 K, Fe, Cu 등의 오염 제거를 위한 최적 공정 조건은 세정시간이 1분, rf-power가 100 W인 것으로 나타났다. AFM 분석 결과에 의하면 rf-power의 증가에 따라 표면 거칠기가 미소하게 증가하는데 , 이것은 플라스마에 의한 손상 때문인 것으로 보이나 그 정도는 무시할만하다. 한편, UV/$O_3$ 세정의 경우에는 세정공정시간이 30 sec일때 가장 우수한 세정효과가 얻어졌다. 리모트 수소 플라스마 및 UV/$O_3$ 세정방법에 의한 Si 웨이퍼 표면의 금속 불순물 제거기구는 Si표면 금속오염의 하단층에 생성된 $SiO_2H^+$/ 및 $e^-$와 반응하여 $SiO^*$상태로 휘발될 때 금속불순물이 $SiO^*$에 묻어서 함께 제거되는 것으로 사료된다.

• 한국지하수토양환경학회지:지하수토양환경
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• 제22권2호
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• pp.33-40
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• 2017

In typical remediation practices, separate washing systems have to be applied to clean up the soils contaminated with both oil and heavy metals. In this study, we evaluated the efficiency of successive two-stage soil washing in removal of mixed-contaminants from soil matrix. Two-stage soil washing experiments were conducted using different combinations of chemical agent: 1) persulfate oxidation, followed by organic acid washing, and 2) Fenton oxidation, followed by inorganic acid washing. Persulfate oxidation-organic acid washing efficiently removed both organic and inorganic contaminants to meet the regulatory soil quality standard. The average removal rates of total petroleum hydrocarbons (TPH), Cu, Pb, and Zn were 88.9%, 82.2%, 77.5%, and 66.3% respectively, (S/L 1:10, reaction time 1 h, persulfate 0.5 M, persulfate:activator 3:1, citric acid 2 M). Fenton oxidation-inorganic acid washing also gave satisfactory performances to give 89%, 80.9%, 87.1%, and 67.7% removal of TPH, Cu, Pb, and Zn, respectively (S/L 1:10, reaction time 1 hr, hydrogen peroxide 0.3 M, hydrogen peroxide:activator 5:1, inorganic acid 1 M).

• 한국물환경학회지
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• 제24권5호
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• pp.523-532
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• 2008

A phase II site investigation and feasibility study was conducted at a military mortar shooting range near the demilitarized zone (Kyunggi, South Korea) to assess the extent of contaminants migration to the nearby Imjin river in which a flood control dam is under construction. The results showed that silty-clay soils around target areas were co-contaminated with heavy metals (Cd, Cu, and Pb) and explosives (HMX, RDX, and TNT). The total amount of contaminant was estimated to be 497.1 kg-RDX, 20.6 kg-HMX, 1.4 kg-TNT, 35.2 kg-Cd, 4,331 kg-Cu, and 5,115 kg-Pb, respectively. Both heavy metals and explosives were almost equally distributed on each soil particle size fraction. Neither subsurface soil samples nor ground water samples showed signs of contamination above the environmental criteria. The major migration route of contaminants was soil particles in surface run-off during rain at which a mass discharge rate of 30.0 mg-RDX/hour was observed.

• Environmental Analysis Health and Toxicology
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• 제25권1호
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• pp.19-26
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• 2010

Discharged materials from the point or non-point source are released into the sea, and as the results, marine environment is directly affected. We must estimate the impacts of contaminants to marine pollution rapidly and accurately. Therefore, it is needed on early warning system for appreciating marine environmental impacts, and required a bioassay to evaluate abnormal changes. A bioassay test was developed to examine the effects of heavy metal contaminants on the early life stages of the marine annimals. We have studied the effects of metals on early development of a sea urchin species, Strongylocentrotus intermedius. S. intermedius embryos were tested with six metals (Cu, Ag, Zn, Cd, Cr, Ni) and showed the highest sensitivity to Cu as well as the lowest sensitivity to Cd. The order of biological impact for metals was Cu>Ag>Ni>Zn>Cr>Cd. In accordance with the results, sea urchins embryos can provide biological criteria for seawater quality assessment. The sensitivity of developmental bioassay whith S. intermedius is at intermediate level among marine organisms commonly used in aquatic bioassays. And this sea urchin can be routinely employed as a test organism for ecotoxicity assays.

• Ocean and Polar Research
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• 제38권3호
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• pp.171-184
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• 2016

In order to assess the level of contamination and identify the priority contaminants in the Busan coast, intensive sediment sampling was conducted and persistent organic pollutants and heavy metals were analyzed. The Sediment Quality Index (SQI) was derived based on the contaminant data by comparing with Sediment Quality Guidelines (SQGs) established in Korea, Canada, and Australia/New Zealand. Toxic contaminants were found to be widely distributed across the coast. Among organic contaminants, PAHs showed the highest concentration, followed by butyltins, nonylphenols, PBDEs, DDTs, PCBs, HCHs and CHLs. Heavy metals were also abundantly detected with the highest concentration of Zn followed by Cu > Cr > Pb > Ni > As > Cd > Hg. Compared to organic contaminants, most heavy metals, except for Cu and Hg, were homogeneously distributed along the coast in a good relationship with total organic carbon of sediment particles. In general, the concentrations of organic compounds and heavy metals were highest at the inner part of harbor areas with a tendency to decline from inside areas to the outside, indicating the high loading of pollutants from harbors. A high exceedance for low-SQGs and high-SQGs was found for TBT, p'-DDT, p,p'-DDD, Cu and Zn. The SQI scores calculated from low-SQGs and high-SQGs were in the range of 18-100 and 54-100, respectively. The inner part of Busan Harbor, Dadaepo Harbor, and Gamcheon Harbor were observed as being regions of concern. Overall, TBT, Cu, and p,p'-DDT were the chemicals most frequently exceeding SQGs and influencing SQI scores.

• 한국진공학회지
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• 제21권1호
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• pp.6-11
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• 2012

Sputter 방식으로 증착된 구리 seed 층(구리 seed/Ti/Si) 위에 형성된 오염물 제거과정을 이해하기 위하여, 강력한 계면 활성능력을 가진 약알칼리 탈지제 Metex TS-40A 용액을 사용하여 담금(dipping) 시간에 따른 구리 seed 층 표면의 변화형상 및 변화상태를 조사 분석하였다. Field emission scanning electron microscope을 이용하여 TS-40A 용액에 전처리 후 구리 seed 표면 형상이 grain이 명확히 보일 정도로 변화하는 것을 관찰하였고, X-ray photoelectron spectroscopy를 이용하여 표면 처리된 Cu seed 표면의 화학구조 및 불순물 상태를 조사하였다. TS-40 용액에서의 dipping 시간 변화에 따른 효과는 거의 없었다. TS-40A 용액에 전처리한 후, 구리 seed 층 표면위의 많은 탄소성분이 제거되었고, 약간의 산소가 제거되었으며, O=C 및 $Cu(OH)_2$에 해당되는 피크들이 감소되는 것이 관측되었다. 하지만 표면에서 불순물 Si이 silicate 상태로 검출되었다. TS-40A 용액에 포함되어 있는 silicate 성분이 구리 seed 층과 반응하여 이 silicate 불순물이 구리 seed 표면에 형성된 것으로 보여진다. 약알칼리 탈지제 Metex TS-40A 용액을 사용한 전처리 과정을 통해, 구리 seed 표면 위의 O=C 및 $Cu(OH)_2$ 등의 제거에는 탁월한 효과를 보였으나, 불순물 silicate가 형성되었으므로 이 알칼리 탈지제를 사용한다면, 이후에 산세정 및 다른 세정과정을 거쳐 표면에 존재하는 silicate를 제거할 필요성이 있다.