• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.04b
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• pp.101-104
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• 2004

In this study AlN/Al thin films were prepared at various conditions, such as $N_2$ gas flow rate $[N_2/(N_2+Ar)]$ from 0.6 to 0.9, a substrate temperature ranging from room temperature to $300^{\circ}C$ and working pressure 1mTorr. We estimated crystallographic characteristics and c-axis preferred orientations of AlN/Al thin films as function of Al electrode surface roughfness. The optimal processing conditions for Al electrode were found at substrate temperature of $300^{\circ}C$, sputtering power of 100W and a working pressure of 2mTorr. In these conditions, we obtained the c-axis preferred orientation of $AlN/Al/SiO_2/Si$ thin film about 4 degree.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.114-114
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• 2010

In this study, structural properties and photoluminescent characteristics of thin film rhombohedral zinc orthosilicate doped with manganese ($Zn_2SiO_4:Mn$) were investigated. The $Zn_2SiO_4:Mn$ films showed a pronounced absorption edge in the near ultraviolet wavelength region and a high optical transparency in the visible spectral range. The maximum transmittance reached 0.922 at 597 nm, which was very close to the transmittance of the fused quartz substrate alone (0.935). The $Zn_2SiO_4:Mn$ films were composed of rhombohedral polycrystalline grains with random crystallographic orientation. The broad-band photoluminescence emission peaked at around 525 nm was observed from the $Zn_2SiO_4:Mn$ films, which was ascribed to the radiative relaxation from the $^4T_1$ lowest excitation state to $^6A_1$ ground state of 3d5 electrons in divalent manganese ion. The excitation band exhibited a peak maximum at 259 nm in the near ultraviolet region, which was considered to be associated with the charge transfer transition of divalent Mn ion in the $Zn_2SiO_4$ system.

• Journal of the Korean Vacuum Society
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• v.9 no.4
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• pp.367-372
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• 2000

ZnO thin films were deposited on amorphous slide glass and $SiO_2$/Si substrates by Facing Targets Sputtering method with sputtering current 0.1~0.8 A, working pressure 0.5~3 mTorr and substrate temperature R.T~$400^{\circ}C$. When the sputtering current was 0.4 A, working pressure was 0.5 mTorr and substrate temperature was 30$0^{\circ}C$, ${\Delta}{\Theta}_{50}$ value of ZnO/glass and ZnO/$SiO_2$/si thin film was $3.8^{\circ}$ and $2.98^{\circ}$, respectively. In these conditions, we knew that ZnO thin film were deposited with good c-axis orientation on amorphous slide glass by FTS system.

• Journal of the Korean Society for Heat Treatment
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• v.28 no.4
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• pp.171-180
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• 2015

The variation in microstructure and texture during continuous annealing was examined in a series of 1.6% Mn-0.1% Cr-0.3% Mo-0.005% B steels with carbon contents in the range of 0.010 to 0.030%. It was found that microstructure of hot band consisted of ferrite and pearlite as a consequence of high coiling temperature, and eutectoid carbon content was between 0.011% and 0.016%. Martensite ranged in volume fraction from 1.5% to 4.0% when annealed at $820{\circ}C$ according to the typical continuous annealing cycle. The critical martensite content for the continuous yielding was about 4% from stress-strain curves. The continuous yielding was obtained in the 0.030% carbon steel and 0.010% to 0.020% carbon steels revealed some yield point elongation ranging from 0.8% to 2.2% in as-annealed conditions. Higher tensile strength in the higher carbon steel is due to both increase in the martensite volume fraction and ferrite grain refinement. Decreasing the carbon content to 0.01% strengthened the intensities of ${\gamma}$-fiber textures, resulting in the increase in the $r_m$ value, which was caused by the lower volume fraction of martensite. The higher carbon steels showed the lower $r_m$ value of about 1.0.

• Transactions of Materials Processing
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• v.17 no.1
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• pp.46-51
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• 2008

Polycrystalline materials such as steels(BCC) and aluminum alloys(FCC) show the strain hardening and the strain rate hardening during the plastic deformation. The strain hardening is induced by deformation resistance of dislocation glide on some crystallographic systems and increase of the dislocation density on grain boundaries or inner grain. However, the phenomenon of the strain rate hardening is not demonstrated distinctly in the rage of $10^{-2}$ to $10^2/sec$ strain rate. In this paper, tensile tests for various strain rates are performed in the rage of $10^{-2}$ to $10^2/sec$ then, specimens are extracted on the same strain position to investigate the microscopic behavior of deformed materials. The extracted specimens are investigated by using the electron backscattered diffraction(EBSD) and transmission electron microscopy(TEM) results which show the effect of texture orientation, grain size and dislocation behavior on the strain rate hardening.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.361-361
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• 2012

사파이어 단결정은 LED 소자의 기판으로 널리 사용되고 있으며 현재 소자 수율을 향상시키기 위하여 6인치 이상의 대구경 웨이퍼를 만들기 위한 많은 노력을 경주하고 있다. 단결정, 특히 반도체 단결정 웨이퍼에서 ($00{\cdot}1$), ($10{\cdot}2$) 등의 어떠한 결정학적인 방위(crystallographic orientation)가 표면과 이루는 각도, 즉 표면방위각(off-cut 또는 misorientation angle)의 크기와 방향은 제조된 LED 소자의 물성에 영향을 끼치므로 웨이퍼를 가공할 때 정확하게 콘트롤해야 한다. 본 연구에서는 고분해능 X-선을 이용하여 표면이결정학적 방향과 이루는 면방위각을 정밀하게 결정하는 측정법을 연구하였다. 기존의 ASTM 의 측정법과는 다른 원리를 이용하고 웨이퍼의 휨(bending)이나 측정고니오 회전축의 편심과 무관하게 표면방위각을 결정하는 새로운 이론적 모델을 제시하고 그 모델을 적용하여 표면의 수직축이 대구경 사파이어 ($00{\cdot}1$) 축과 이루는 표면방위각을 정확하게 측정 분석하였다. 본 연구에서 사용한 6인치 사파이어 웨이퍼에 대하여 표면방위각은 $0.21^{\circ}$이었으며 표면각이 나타나는 방향은 웨이퍼의 primary edge 방향으로부터 $-1.2^{\circ}$ 벗어나 있는 방향이었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.103-103
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• 2011

The epitaxial Cu-doped ZnO and pure ZnO thin films were grown on Al2O3 (0001) substrates by RF sputtering method. The structures and crystallographic orientations were investigated using X-ray diffraction (XRD) and X-ray absorption spectroscopy. From the XRD pattern, it is observed that peak positions shift towards higher $2{\theta}$ value with Cu doping. The ${\omega}$-scan measurements at the (0002) diffraction peak for these samples reveal that the full-widths at half-maxima (FWHMs) are about $0.017-0.019^{\circ}$, which indicate a good c-axis orientation of the Zn1-xCuxO films. From phi-scan, all of the Zn1-xCuxO films were epitaxially grown. EXAFS measurements also demonstrated that Cu incorporated into a Zn-atom position substitutionally. All the results confirmed that copper ion were well incorporated into the ZnO lattices by substituting Zn sites without changing the wurtzite structure and no secondary phase existed in Cu-doped ZnO thin films.

• Applied Microscopy
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• v.44 no.1
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• pp.34-39
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• 2014

Electron backscatter diffraction (EBSD) is widely used for quantitative microstructural analysis of the crystallographic nature of variety of materials such as metals, minerals, and ceramics. EBSD can provide a wide range of information on materials including grain size, grain orientation, texture, and phase identity. In the case of metallic alloys, EBSD now has become an essential technique to analyze the texture, particularly when severe deformation is applied to the alloys. In addition, EBSD can be one of the very useful tools in identification of twin, particularly in Mg alloys. In Mg alloys different type of twin can occur depending on the c/a ratio and stacking fault energy on the twinning plane. Such an occurrence of different type of twin can be most effectively analyzed using EBSD technique. In this article, the recent development of Mg alloys and occurrence of twin in Mg are reviewed. Then, recently published example for identification of tension and compression twins in AZ31 and ZX31 is introduced to explain how EBSD can be used for identification of twin in Mg.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.8
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• pp.455-460
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• 2016

A textured front surface is required in high efficiency silicon solar cells to reduce reflectance and to improve light trapping. Wet etching with alkaline solution is usually applied for mono crystalline silicon solar cells. However, alkali texturing method is not appropriate for multi-crystalline silicon wafers due to grain boundary of random crystallographic orientation. Accordingly, acid texturing method is generally used for multi-crystalline silicon wafers to reduce the surface reflectance. To reduce reflectivity of multi-crystalline silicon wafers, double texturing method with combination of acid and reactive ion etching is an attractive technical solution. In this paper, we have studied to optimize RIE condition by different RF power condition (100, 150, 200, 250, 300 W).

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1301-1304
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• 1994

ZnO transparent conducting oxide thin films have been prepared by Pyrosol deposition method. The effect of the Al doping with varying Al/Zn mole ratio and the post-deposition heat treatment on the electrical resistivity and optical transmittance of the prepared films have been investigated. From the experimental results, the ZnO:Al thin films with resistivity as low as $3{\times}10^{-3}{\Omega}cm$ and transmittance as high as 80% can be obtained by Al doping. Also We have found the annealing of the as-deposited ZnO film in vacuum leads to a substantial reduction in resistivity without affecting the optical transmittance and crystallographic orientation. However, the annealing effect of ZnO:Al thin films is smaller than ZnO films with respect to reduction in resistivity.