• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.289.1-289.1
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• 2016

Germanium (Ge) with higher carrier mobility and a lower crystallization temperature has been considered as the channel material of thin-film transistors for display applications. Various methods were studied for crystallizaion of poly-Ge from amorphous Ge at low temperature. Especially Metal induced crystalliazation (MIC) process was widely studied because low process cost. In this paper, we investigate copper diffusion process of different thick (70 nm, 350 nm) poly-Ge film obtained by MIC process at various temperatures (250, 300, and $350^{\circ}C$) through atomic force microscopy (AFM), Raman spectroscopy, and secondary ion mass spectroscopy (SIMS) measurement. Crystallization completeness and grain size was similar in all the conditions. Copper diffusion profile of 370 nm poly-Ge film show simirly results regardless of process temperature. However, copper diffusion profile of 70 nm poly-Ge film show different results by process temperature.

• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.548-551
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• 2002

The crystallization of amorphous silicon (a-Si) was achieved using a field aided lateral crystallization (FALC) process at 350 $^{\circ}C$. Under the influence of an electric field, Cu is found to drastically enhance the lateral crystallization velocity of a-Si. When an electric field was applied to the selectively Cu-deposited a-Si film during the heat treatment at temperature as low as 350 $^{\circ}C$, dendrite-shaped crystallization of a-Si progressed toward Cu-free region and the crystallization from negative electrode side toward positive electrode side was accelerated. We identified that 1000${\AA}$ thick a-Si film was completely crystallized by Cu-FALC process at 350 $^{\circ}C$ by TEM analysis.

• KSBB Journal
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• v.20 no.3
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• pp.164-176
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• 2005

In bioengineering field, current academic trends and informations on crystallization technology for bioproduct separation were summarized. It is essential for utilizing the crystallization technology to understand the fundamental phenomena of crystallization of crystal nucleation, crystal growth, crystal agglomeration and population balance for the design of crystallizers. In general, the crystal nucleation that the crystalline solids occur from the solution is analyzed by Gibb's free energy change in the aspect of thermodynamics and in the present paper the crystal nucleation models based on the above thermodynamics are summarized by their key characteristics. The crystal growth and agglomeration, which have been studied over 50 years and are essential phenomena for separation technology, are reviewed from their basic concept to most leading edge trend of researches. In the material and population balances for the designs of crystallization separation process, the analysis of crystallizers is summarized. Thereon, the present review paper will academically contribute the understanding the crystallization phenomena and the design of the crystallization separation process.

• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.58.1-58.1
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• 2010

We have developed a novel crystallization process, where the crystallization temperature is lowered compared to the conventional RTA process and the metal contamination is lowered compared to the conventional VIC process. A very-thin a-Si film was deposited and crystallized at $550^{\circ}C$ for 3 h by the VIC process and then a thick a-Si film was deposited and crystallized by the RTA process at $680^{\circ}C$ for 5 min using the VIC poly-Si layer as a crystallization seed layer. The RTA crystallized temperature could be lowered up to $50^{\circ}C$, compared to RTA process alone. The poly-Si film appeared a needle-like growth front and relatively well-arranged (111) orientation. In addition, the Ni concentration in the poly-Si film was lowered to $3{\times}10^{17}\;cm^{-3}$ and that at the poly-Si/$SiO_2$ interface was lowered to $5{\times}10^{19}\;cm^{-3}$. The reduction in metal contamination could be greatly helpful to achieve a low leakage current in poly-Si TFT, which is the critical parameter for commercialization of AMOLED.

• Journal of the Korean Vacuum Society
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• v.14 no.1
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• pp.24-28
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• 2005

A typical method for obtaining poly-Si films is the solid phase crystallization(SPC) of amorphous Si. Advantages of SPC are uniformity, process quality and low cost of production. However, high process temperature and long process time prevent the employment of SPC process on thermally susceptible glass substrate. In this parer, we propose a new method that applies an alternating magnetic field during crystallization annealing in an alternating magnetic field crystallization(AMFC) system for lowering process temperature and shorter process time of SPC. When we crystallized, in the case of SPC, annealing time is 24 hours at 570℃. But in the case of AMFC, annealing time is only 20 minutes at the same temperature.

• Laser Solutions
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• v.6 no.2
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• pp.9-17
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• 2003

Due to the heat confinement in the shallow region of the target for a short time scale, pulsed laser annealing has received an increasing interest for the fabrication of poly-Si thin film transistors(TFTs) on glass as a low cost substrate in the flat panel displays. The formation and growth mechanisms of poly silicon(poly-Si) grains in thin films are investigated using an excimer laser crystallization system. To understand the crystallization mechanism, the grain formations are observed by FESEM photography. The optical reflectance and transmittance during the crystallization process are measured using HeNe laser optics. A two-step ELC(Excimer Laser Crystallization) process is applied to enhance the grain formation uniformity.

• Proceedings of the Polymer Society of Korea Conference
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• 2006.10a
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• pp.158-158
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• 2006

The correlation between liquid-liquid phase separation (LLPS) and crystallization at several compositions in statistical copolymer blends of poly (ethylene-co-hexene) (PEH) and poly (ethylene-co-butene) (PEB) has been examined. In this case, the LLPS is coupled with the other ordering process, i.e. crystallization. The overwhelming change in the crystallization kinetics due to the composition fluctuation caused by the spontaneous spinodal LLPS is observed. This coupling mechanism suggests a new mechanism in the nucleation-crystallization process.

• Journal of the Korean Applied Science and Technology
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• v.24 no.4
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• pp.383-392
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• 2007

This paper is studied on the efficient purification process of dimethyl carbonate (DMC) from the melt layer crystallization combining crystallization process, sweating process and distillation recovery process. Purity and yield of DMC crystal depended mainly on the crystallization temperature, cooling rate, sweating termperature sweating rate. Through the optimization of crystallization and sweating operation, DMC crystal can be upgraded to very high purity over 99.9% and high yield over 85%.

• Journal of Environmental Health Sciences
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• v.23 no.4
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• pp.133-138
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• 1997

The technology of removing phosphorous, considered as one of the most important control nutrients causing eutrophication in various water bodies, have been investigated by many researchers. Recently, phosphorous crystallization process is emerging as a new technology for phosphorous removal. In this study, waste oyster shells which can be easily obtained from the ocean, were used as a seed crystal, and their effects of several physical/chemical factors on the phosphorous removal efficiencies were examined by batch tests. Ca$^{2+}$ and pH affected phosphorous crystallization process using waste oyster shells. As alkalinity of wastewater increased, phosphorous removal efficiencies gradually decreased. Phosphorous removal efficiencies were increased, as specific area and contact efficiency per unit area of waste oyster shells were increased. In case of high temperature, phosphorous crystallization process was rapidly advanced and phosphorous removal efficiencies were increased. Dependig on X-ray diffraction analysis, it was showed that generation materials extracted from the surface of waste oyster shells with short reaction time were dominated by $CaHPO_4\cdot 2H_2O$, but progressed to $Ca_5(OH)(PO_4)_3$. The SEM observation reveals that the evident variations were hardly seen, but particle sizes of waste oyster shells were relatively bigger and showed forms of smaller plate than before.

• Fibers and Polymers
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• v.2 no.3
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• pp.135-140
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• 2001

Organic-inorganic hybrid composites consisting of poly(vinylidene fluoride) (PVDF) and SiO$_2$ were prepared through a sol-gel process and the crystallization behavior of PVDF in the presence of $SiO_2$ networks was investigated by spectroscopic, thermal and x-ray diffraction measurements. The hybrid composites obtained were relatively transparent, and brittleness increased with increasing content of tetraethoxysilane (TEOS). It was regarded from FT-lR and DSC thermal analyses that at least a certain interaction existed between PVDF molecules and the $SiO_2$ networks. X-ray diffraction measurements showed that all of the hybrid samples had a crystal structure of PVDF ${\gamma}$-phase. Fresh gel prepared from the sol-gel reaction showed a very weak x-ray diffraction peak near 2$\theta$=$21^{\circ}$ due to PVDF crystallization, and Intensity increased grade-ally with time after gelation. The crystallization behavior of PVDF was strongly affected by the amount of $SiO_2$ networks. That is, $SiO_2$ content directly influenced preference and disturbance fur crystallization. In polymer-rich hybrids, $SiO_2$ networks had a favorable effect on the extent of PVDF crystallization. In particular, the maximum portent crystallinity of PVDF occurred at the content of 3.7 wt% $SiO_2$ and was higher than that of pure PVDF. However. beyond about 10 wt% $SiO_2$, the crystallization of PVDF was strongly confined.