• Title/Summary/Keyword: Crucible shape

Search Result 32, Processing Time 0.025 seconds

Effects of the crucible shape on the temperature of sapphire crystal and the shape of melt/crystal interface in heat exchanger method (열교환법에서 도가니 형상 변화가 사파이어 결정 온도와 고/액 계면 형태에 미치는 영향)

  • 임수진;왕종회;임종인
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.14 no.4
    • /
    • pp.155-159
    • /
    • 2004
  • Numerical analysis which is based on finite element techniques, implicit Euler method and frontal solving algorithm was performed to study the effects of the crucible shape on the temperature of sapphire crystal and the shape of the melt/crystal interface in heat exchanger method. The computer simulation described here and effective to solving the heat transport phenomena with the transition of the interface shape from hemispherical to planar. In the work, various crucibles with differently shaped corners at their bottom are considered to improve the deflection of the melt/crystal interface. The shape of the crucible should be considered as one of the variables for the process optimization.

Cold Crucible Electromagnetic Casting of Silicon (Cold crucible을 이용한 실리콘의 전자기주조)

  • Shin, Je-Sik;Lee, Sang-Mok;Moon, Byung-Moon
    • Journal of Korea Foundry Society
    • /
    • v.25 no.3
    • /
    • pp.115-122
    • /
    • 2005
  • In the present study, an EMC (Electromagnetic Casting) process, using a segmented Cu cold crucible under a high frequency alternating magnetic field of 20 kHz, was practiced for the fabrication of poly-crystalline Si ingot of 50 mm diameter. The effects of Joule heating and electromagnetic pressure in molten Si were systematically investigated with various processing parameters such as electric current and crucible configuration. A preliminary experimental work was initiated with the pure Al system for the establishment of a stabilized non-contact working condition, and further adapted to the semiconductor-off-grade Si system. A commercialized software such as Opera-3D was utilized in order to simulate electromagnetic pressure and Joule heating. In order to evaluate the meniscus shape of the molten melts, shape parameter was used throughout the research. A segmented graphite crucible, which was attached at the upper part of the cold crucible, was introduced to enhance significantly the heating efficiency of Si melt keeping non-contact condition during continuous melting and casting processes.

Effects of Rotation on the Czochralski Silicon Single Crystal Growth (초크랄스키법에 의한 실리콘 단결정성장에서 회전효과가 미치는 영향에 대한 연구)

  • 김무근
    • Transactions of the Korean Society of Mechanical Engineers
    • /
    • v.19 no.5
    • /
    • pp.1308-1318
    • /
    • 1995
  • The influence of varying rotation speed of both crystal and crucible was numerically investigated for the Czochralski silicon-crystal growth. Based on a simplified model assuming flatness of free surfrae, the Navier-Stokes Boussinesq equations were employed to identify the flow pattern, temperature distribution as well as the shape of the melt/crystal interface. The present results showed that the interface shape was relatively convex with respect to the melt at lower pulling rate and tended to be concave as the pulling rate increased. In particular, the experimentally observed gull-winged shape of the interface was qualitatively in agreement with the predicted shape. The rotation of crystal alone little affected the growth system. When the rotation speed of the crucible was increased, there occurred inversion of the interface shape from convex to concave pattern. At rapid rotation of the crucible, an interesting channel formation was predictied primarily due to the assumption of laminar flow.

The effect of the system factors on the shape of the S/L interface in GaAs single crystal grown by VGF method (VGF법을 사용한 GaAs 단결정 성장시 계의 구성요소가 고액계면의 형상에 미치는 영향)

  • Seung-Ho Hahn;Hyung-Tae Chung;Young-Kyu Kim;Jong-Kyu Yoon
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.4 no.1
    • /
    • pp.33-41
    • /
    • 1994
  • It is well known that the position and the shape of the S/L interface affect the qualities of the single crystal in the growth process. Thus the information of the temperature profile in the growth system is very important. In this study, we developed the program to predict the temperature profile from the setting values of the heating blocks in VGF(vertical gradient freezing) single crystal growth system. With this program, we studied the effects of the materials and the sizes of support rod, the materials of the crucible on the S/L interface shape. The larger radius and/or smaller thermal diffusivity support rod was, the flatter the S/L interface was. When the thermal conductivity of crucible was isotropic, the S/L interface was more concave downward to the solid phase in proportional to the increase of thermal diffusivity of the crucible. By the comparison of the S/L interface shape between PBN crucible and quartz crucible for the same condition, the effect of anisotropy of thermal conductivity of crucible showed different trends with respect to the position of the S/L interface.

  • PDF

Interpretation of the Asymmetric Color and Shape of Brownish Ring in Quartz Crucible

  • Jung, YoonSung;Choi, Jae Ho;Min, Kyung Won;Byun, Young Min;Im, Won Bin;Kim, Hyeong-Jun
    • Journal of the Semiconductor & Display Technology
    • /
    • v.21 no.4
    • /
    • pp.50-52
    • /
    • 2022
  • Brownish rings (BRs) with white interiors are formed during the manufacture of silicon ingots in quartz glass crucibles. These BRs inhibit the yield of silicon ingots. However, the composition and mechanism of the formation of these BRs remain unclear thus far. Therefore, in this study, we analyzed the color and shape of these BRs. Raman analysis revealed that the brown and white colors appear owing to oxygen deficiency rather than crystallization from excess oxygen supply as previously assumed. Moreover, the dark shade of the brown areas depends on the degree of oxygen deficiency and the asymmetrical width of the brown areas is attributed to the direction of the molten silicon flow, which is influenced by the rotation and heat of the ingot crucible.

Modelling of transport phenomena and meniscus shape in Czochralski growth of silicon material

  • Bae, Sun-Hyuk;Wang, Jong-Hoe;Kim, Do-Hyun
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.9 no.5
    • /
    • pp.454-458
    • /
    • 1999
  • Hydrodynamic Thermal Capilary Model developed previously has been modified to study the transport phenomena in the Czochralski process. Our analysis is focused on the heat transfer in the system, convection in the melt phase, and the meniscus and interface shape. Four major forces drive melt flow in the crucible, which include thermal buoyancy force in the melt, thermocapillary force along the curved meniscus, crucible rotation and crystal rotation. Individual flow mechanism due to each driving force has been examined to determine its interaction with the meniscus and interface shape. A nominal 4-inch-diameter silicon crystal growth process is chosen as a subject for analysis. Heater temperature profile for constant diameter crystal is also present as a function of crystal height or fraction solidified.

  • PDF

Silicon Single Crystal Growth by Continuous Crystal Growth Method (연속성장법에 의한 Silicon 단결정 연속성장)

  • 인서환;최성철
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.3 no.2
    • /
    • pp.117-124
    • /
    • 1993
  • It was found that the basic principle of continuous crystal growth method was following as; the powder supplied from the feeding system is molten in the graphite crucible under the ambient gas. After forming the molten zone in the lower part of the crucible, the seed crystal is deeped into the melt and pulled down with the rotation so that the melt crystallized from the seed. When the lowering rate, rotation rate, feeding rate and temperature are correct, the single crystal can grow. The critical melt level, the feeding rate, the growth rate, the change of the shape of molten zone by the graphite susceptor and crucible, the position of work coil, the balance between the gravitational force of melt and the centrifugal force originated from the rotation of seed which are the variables of the crystal growth and the sintering phenomenon of melt surface were researched.

  • PDF

Optimal Design of Cz Process for Increasing a Productivity of Single Crystal Si Solar Cell Ingot (태양전지용 단결정 실리콘 잉곳 생산성 증대를 위한 초크랄스키 공정 최적 설계)

  • Lee, Eunkuk;Jung, Jae Hak
    • Korean Chemical Engineering Research
    • /
    • v.49 no.4
    • /
    • pp.432-437
    • /
    • 2011
  • Recently, industry needs a new design of Czochralski(Cz) process for higher productivity with reasonable energy consumption. In this study, we carried out computational simulations for finding out a new optimal design of Cz process with variables which can be applied in real industry such as location of heater, shape of shield and crucible size. Objective process was Cz process which can be produced 8 inch diameter Si ingot for solar cell and we acquired an optimal design for higher productivity, low power consumption with stable production condition. For higher productivity we also change the crucible diameter from 22 inches to 24 inches with changing insulation thickness only because the process housing size could not be changed in industry.

Crystal Growth of LiNbO3 for SAW Devices (SAW Device 응용을 위한 LiNbO3 단결정 성장)

  • 최종건;오근호
    • Journal of the Korean Ceramic Society
    • /
    • v.25 no.1
    • /
    • pp.78-82
    • /
    • 1988
  • Good quality LiNbO3 single crystals which can be applied to SAW devices, were grown by Czochralski method. It was observed that the gas-bubbles were concentrated in ring shape at the outer part of grown crystals, and this anomaly was illustrated by modeling the mechanism of gas-bubble entrapment according to the melt flow pattern in the crucible. And this mechanism was also encertained by observation of solid-liquid interface shape of grown crystals. The optimal condition for good quality crystals was known that the solid-liquid interface shape was slightly concave.

  • PDF

A study on the brownish ring of quartz glass crucible for silicon single crystal ingot (실리콘 단결정 잉곳용 석영유리 도가니의 brownish ring에 대한 연구)

  • Jung, YoonSung;Choi, Jae Ho;Min, Kyung Won;Byun, Young Min;Im, Won Bin;Noh, Sung-Hun;Kang, Nam-Hun;Kim, Hyeong-Jun
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.32 no.3
    • /
    • pp.115-120
    • /
    • 2022
  • A brown ring (hereinafter referred to as BR) on the inner surface of a quartz glass crucible used in the manufacturing process of a silicon ingot for semiconductor wafers was studied. BR is 20~30 ㎛ in size and has an asymmetric brown ring shape. The size and distribution of BR were different depending on the crucible location, and the size and distribution of BR were the largest and most abundant in the round part with the highest crucible temperature during Si ingot growth. BR contains cristobalite, which has a higher coefficient of thermal expansion than quartz glass, so it is considered that surface cracks appear. The color development of BR and pin holes are presumed to be due to oxygen vacancies.