• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.9
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• pp.701-709
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• 2011

In semiconductor wafer fabrication, etching is one of the most critical processes, by which a material layer is selectively removed. Because of difficulty to correct a mistake caused by over etching, it is critical that etch should be performed correctly. This paper proposes a new approach for etch endpoint detection of small open area wafers. The traditional endpoint detection technique uses a few manually selected wavelengths, which are adequate for large open areas. As the integrated circuit devices continue to shrink in geometry and increase in device density, detecting the endpoint for small open areas presents a serious challenge to process engineers. In this work, a high-resolution optical emission spectroscopy (OES) sensor is used to provide the necessary sensitivity for detecting subtle endpoint signal. Partial Least Squares (PLS) method is used to analyze the OES data which reduces dimension of the data and increases gap between classes. Support Vector Machine (SVM) is employed to detect endpoint using the data after PLS. SVM classifies normal etching state and after endpoint state. Two data sets from OES are used in training PLS and SVM. The other data sets are used to test the performance of the model. The results show that the trained PLS and SVM hybrid algorithm model detects endpoint accurately.

• Smart Structures and Systems
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• v.15 no.1
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• pp.151-167
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• 2015

Instrumentation on structural health monitoring system imposes critical issues for applying the structural monitoring system to real world structures, for which not only on the configuration and geometry, but also aesthetics on the system to be monitored should be considered. To illustrate this point, two real world structural health monitoring systems, the structural health monitoring system of Shenzhen Vanke Center and the structural health monitoring system of Shenzhen Bay Stadium in China, are presented in the paper. The instrumentation on structural health monitoring systems of real world structures is addressed by providing the description of the structure, the purpose of the structural health monitoring system implementation, as well as details of the system integration including the installations on the sensors and acquisition equipment and so on. In addition, an intelligent algorithm on stress identification using measurements from multi-region is presented in the paper. The stress identification method is deployed using the fuzzy pattern recognition and Dempster-Shafer evidence theory, where the measurements of limited strain sensors arranged on structure are the input data of the method. As results, at the critical parts of the structure, the stress distribution evaluated from the measurements has shown close correlation to the numerical simulation results on the steel roof of the Beijing National Aquatics Center in China. The research work in this paper can provide a reference for the design and implementation of both real world structural health monitoring systems and intelligent algorithm to identify stress distribution effectively.

• Nuclear Engineering and Technology
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• v.42 no.6
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• pp.620-635
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• 2010

In this paper we describe current activities on the project Multi-Scale Modeling and Analysis of convective boiling (MSMA), conducted jointly by the Paul Scherrer Institute (PSI) and the Swiss Nuclear Utilities (Swissnuclear). The long-term aim of the MSMA project is to formulate improved closure laws for Computational Fluid Dynamics (CFD) simulations for prediction of convective boiling and eventually of the Critical Heat Flux (CHF). As boiling is controlled by the competition of numerous phenomena at various length and time scales, a multi-scale approach is employed to tackle the problem at different scales. In the MSMA project, the scales on which we focus range from the CFD scale (macro-scale), bubble size scale (meso-scale), liquid micro-layer and triple interline scale (micro-scale), and molecular scale (nano-scale). The current focus of the project is on micro- and meso-scales modeling. The numerical framework comprises a highly efficient, parallel DNS solver, the PSI-BOIL code. The code has incorporated an Immersed Boundary Method (IBM) to tackle complex geometries. For simulation of meso-scales (bubbles), we use the Constrained Interpolation Profile method: Conservative Semi-Lagrangian $2^{nd}$ order (CIP-CSL2). The phase change is described either by applying conventional jump conditions at the interface, or by using the Phase Field (PF) approach. In this work, we present selected results for flows in complex geometry using the IBM, selected bubbly flow simulations using the CIP-CSL2 method and results for phase change using the PF approach. In the subsequent stage of the project, the importance of effects of nano-scale processes on the global boiling heat transfer will be evaluated. To validate the models, more experimental information will be needed in the future, so it is expected that the MSMA project will become the seed for a long-term, combined theoretical and experimental program.

• Wind and Structures
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• v.32 no.2
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• pp.127-142
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• 2021

Wind load acting on a standalone structure is different from that acting on a similar structure which is surrounded by other structures in close proximity. The presence of other structures in the surrounding can change the wind flow regime around the principal structure and thus causing variation in wind loads compared to a standalone case. This variation on wind loads termed as interference effect depends on several factors like terrain category, geometry of the structure, orientation, wind incident angle, interfering distances etc., In the present study, a three building configuration is considered and the mean pressure coefficients on each face of principle building are determined in presence of two interfering buildings. Generally, wind loads on interfering buildings are determined from wind tunnel experiments. Computational fluid dynamic studies are being increasingly used to determine the wind loads recently. Whereas, wind tunnel tests are very expensive, the CFD simulation requires high computational cost and time. In this scenario, Artificial Neural Network (ANN) technique and Support Vector Regression (SVR) can be explored as alternative tools to study wind loads on structures. The present study uses these data-driven approaches to predict mean pressure coefficients on each face of principle building. Three typical arrangements of three building configuration viz. L shape, V shape and mirror of L shape arrangement are considered with varying interfering distances and wind incidence angles. Mean pressure coefficients (Cp mean) are predicted for 45 degrees wind incidence angle through ANN and SVR. Further, the critical faces of principal building, critical interfering distances and building arrangement which are more prone to wind loads are identified through this study. Among three types of building arrangements considered, a maximum of 3.9 times reduction in Cp mean values are noticed under Case B (V shape) building arrangement with 2.5B interfering distance. Effect of interfering distance and building arrangement on suction pressure on building faces has also been studied. Accordingly, Case C (mirror of L shape) building arrangement at a wind angle of 45º shows less suction pressure. Through this study, it was also observed that the increase of interfering distance may increase the suction pressure for all the cases of building configurations considered.

• Steel and Composite Structures
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• v.46 no.6
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• pp.773-791
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• 2023

Connections with damage concentrated to pre-selected components can enhance seismic resilience for moment resisting frames. These pre-selected components always yield early to dissipate energy, and their energy dissipation mechanisms vary from one to another, depending on their position in the connection, geometry configuration details, and mechanical characteristics. This paper presents behaviour insights on two types of beam-to-beam connections that the angles were designed as energy dissipation components, through the results of experimental study and finite element analysis. Firstly, an experimental programme was reviewed, and key responses concerning the working mechanism of the connections were presented, including strain distribution at the critical section, section force responses of essential components, and initial stiffness of test specimens. Subsequently, finite element models of three specimens were established to further interpret their behaviour and response that were not observable in the tests. The moment and shear force transfer paths of the composite connections were clarified through the test results and finite element analysis. It was observed that the bending moment is mainly resisted by axial forces from the components, and the dominant axial force is from the bottom angles; the shear force at the critical section is primarily taken by the slab and the components near the top flange. Lastly, based on the insights on the load transfer path of the composite connections, preliminary design recommendations are proposed. In particular, a resistance requirement, quantified by a moment capacity ratio, was placed on the connections. Design models and equations were also developed for predicting the yield moment resistance and the shear resistance of the connections. A flexible beam model was proposed to quantify the shear resistance of essential components.

• Structural Engineering and Mechanics
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• v.18 no.4
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• pp.475-491
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• 2004

Anchorage devices play an important role in post-tensioned bridge structures since they must sustain heavy loads in order to permit the transfer of the prestressing force to the structure. In external prestressing, the situation is even more critical since the anchorage mechanisms, with the deviators, are the only links between the structure and the tendons throughout the service life of the structure. The behaviour of anchorage devise may be studied by using the finite element method. To do so, each component of the anchorage must be adequately represented in order to approximate the anchor mechanism as accurately as possible. In particular, the modelling of the jaw/tendon device may be carried out using the real geometry of these two components with an appropriate constitutive contact law or by replacing these components by a single equivalent. This paper presents the numerical study of a mono-strand anchorage device. The results of a comparison between two different representations of the jaw/tendon device, either as two distinct components or as a single equivalent, will be examined. In the double-component setup, the influence of the wedge configuration composing the jaw, and the influence of lubrication of the anchor, will be assessed.

• Advances in nano research
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• v.8 no.3
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• pp.255-264
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• 2020

Buckling and post-buckling cases are often occurred in aorta artery because it affected by higher pressure. Also, its stability has a vital importance to humans and animals. The loss of stability in arteries may lead to arterial tortuosity and kinking. In this paper, post-buckling analysis of aorta artery is investigated under axial compression loads on the basis of Euler-Bernoulli beam theory by using finite element method. It is known that post-buckling problems are geometrically nonlinear problems. In the geometrically nonlinear model, the Von Karman nonlinear kinematic relationship is employed. Two types of support conditions for the aorta artery are considered. The considered non-linear problem is solved by using incremental displacement-based finite element method in conjunction with Newton-Raphson iteration method. The aorta artery is modeled as a cylindrical tube with different average diameters. In the numerical results, the effects of the geometry parameters of aorta artery on the post-buckling case are investigated in detail. Nonlinear deflections and critical buckling loads are obtained and discussed on the post-buckling case.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.2 s.173
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• pp.496-505
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• 2000

A semi-infinite parallel crack propagated with constant velocity in two bonded anisotropic strip under anti-plane clamped displacement is analyzed. Using Fourier integral transform a Wiener-Hopf equation is derived. By solving this equation the asymptotic stress and displacement fields near the crack tip are determined, where the results give the more general expression applicable to the extent of the anisotropic material having one plane of elastic symmetry for the parallel crack. The dynamic stress intensity factor and energy release rate are also obtained as a closed form, which are the results applicable to the problem both of dynamic and static crack under the same geometry as this study. The stress intensity factor approaches zero at the critical crack velocity which is less than the shear wave velocity, but in typical case of isotropic or orthotropic material agrees with the velocity of shear wave. Also a circular shear stress around crack tip is considered, from which the stress is shown to be approximately symmetric about the horizontal axis. Referring to the maximum stress criteria, it could be shown that a brenched crack is formed by crack growth as crack velocity increases.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.23 no.6 s.165
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• pp.1026-1038
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• 1999

Interlaminar fracture toughness of carbon/epoxy composite materials has been studied under tensile and flexural loading by the use of width tapered double cantilever beam(WTDCB) and end notched flexure(ENF) specimens. This study has significantly examined the effect of various interfacial ply orientation, ${\alpha}(0^{\circ},\;45^{\circ}\;and\;90^{\circ})$ and crack propagation direction, ${\theta}(0^{\circ},\;15^{\circ},\;30^{\circ}\;and\;45^{\circ})$ in terms of critical strain energy release rate through experiments. Twelve differently layered laminates were investigated. The data reduction for evaluating the fracture energy is based on compliance method and beam theory. Beam theory is used to analyze the effect of crack propagation direction. The geometry and lay-up sequence of specimens are considered various conditions such as skewness parameter, beam volume, and so on. The results show that the fiber bridging occurred due to the non-midplane crack propagation and causes the difference of fracture energy evaluated by both methods. For safer and more reliable composite structures, we obtain the optimal stacking sequence from initial fracture energy in each mode.

• Journal of the korean society of oceanography
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• v.36 no.3
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• pp.72-82
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• 2001

The progress of giant dyke construction off the Mangyung and Donajin rivers, has yielded enormous impact on the estuarine environment, both hydrodynamically and sedimentologically. Especially the inter-dyke gap in the northern Saemankeum area, 4 km wide between Yamido and Piungdo, has acted as an artificial tidal inlet. Due to such a changed geometry, tidal regime has been reversed from being flood- to ebb-dominated with a directional change from NE-SW to E-W. As a result, a large tongue-like tidal sand bar (named Saemankeum Bar) has conspicuously grown seaward through the artificial tidal inlet. The Saemankeum Bar composed of well-sorted very fine sands (3.0-3.5${\phi}$) has grown at a rate of 1.63 km/yr for the past three yews (1996-1998). Such a rapid growth of the sand bar is attributed to enhanced sediment supply derived from the degradation of former tidal sand bars at the mouth of the Mangyung River. Eventually the reworking of the tidal sand bars also caused the pre-existing tidal channels to be wider, deeper and more straightened. All of these phenomena well examplify the critical effect of artificial modifications on the natural estuarine environments.