• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.136.2-136.2
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• 2015

반도체 제조는 chip의 성능 향상 및 단가 하락을 위해 지속적으로 pattern size가 nano size로 감소해 왔고, capacitor 용량은 증가해 왔다. 이러한 현상은 contact hole의 aspect ratio를 지속적으로 증가시킨바, 그에 따라 최적의 HARC (high aspect ratio contact)을 확보하는 적합한 dry etch process가 필수적이다. 그러나 HARC dry etch process는 많은 critical plasma properties 에 의존하는 매우 복잡한 공정이다. 따라서, critical plasma properties를 적절히 조절하여 higher aspect ratio, higher etch selectivity, tighter critical dimension control, lower P2ID과 같은 plasma characteristics을 확보하는 것이 요구된다. 현재 critical plasma properties를 제어하기 위해 다양한 plasma etching 방법이 연구 되어왔다. 이 중 plasma를 낮은 kHz의 frequency에서 on/off 하는 pulsed plasma etching technique은 nanoscale semiconductor material의 etch 특성을 효과적으로 향상 시킬 수 있다. 따라서 본 실험에서는 dual-frequency capacitive coupled plasma (DF-CCP)을 사용하여 plasma operation 동안 duty ratio와 pulse frequency와 같은 pulse parameters를 적용하여 plasma의 특성을 각각 제어함으로써 etch selectivity와 uniformity를 향상 시키고자 하였다. Selective SiO2 contact etching을 위해 top electrode에는 60 MHz pulsed RF source power를, bottom electrode에는 2MHz pulse plasma를 인가하여 synchronously pulsed dual-frequency capacitive coupled plasma (DF-CCP)에서의 plasma 특성과 dual pulsed plasma의 sync. pulsing duty ratio의 영향에 따른 etching 특성 등을 연구 진행하였다. 또한 emissive probe를 통해 전자온도, OES를 통한 radical 분석으로 critical Plasma properties를 분석하였고 SEM을 통한 etch 특성분석과 XPS를 통한 표면분석도 함께 진행하였다. 그 결과 60%의 source duty percentage와 50%의 bias duty percentage에서 가장 향상된 etch 특성을 얻을 수 있었다.

• Food Science and Biotechnology
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• v.16 no.6
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• pp.1069-1071
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• 2007

The frequency independent critical concentration (Cc) of xanthan and carob (X/C) mixed gel was determined based on the Winter-Chambon's theory. X/C mixed (X/C=1:1 ratio) gels were prepared from 0.1 to 1% of concentration. The linear viscoelastic properties, i.e., storage and loss modulus, of X/C mixed gel at $20^{\circ}C$ were measured by frequency sweep tests. The frequency independence of tangent function of phase angle (tan ${\delta}$) of X/C mixed gels was graphically determined from the intersection of the plot of phase angle against concentration at varied frequencies. The intersection (C=0.43%) was considered to be Cc of X/C mixed gel.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.37 no.6
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• pp.9-16
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• 2000

The perception of flicker on the computer display devices depends upon the temporal waveform of the phosphor decay characteristic, the frame rate, and the display size. The lowest frequency at which flicker is not perceived is called the critical fusion frequency or critical frequency. Critical fusion frequency is evaluated by the display illuminance and the modulation (m) defined as the ratio of the amplitude of first harmonic frequency to the DC of the waveform. In this paper, we analyze the relationship bet ween the critical fusion frequency, relating to the decay characteristic of the phosphors and luminance on the monitor, and the frame frequency. Also under considering the viewing angle, we presented the frame frequency that is less sensitive to the full size of the display device.

• Journal of Drive and Control
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• v.19 no.4
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• pp.1-9
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• 2022

The structure and operating principle of the 2-speed shift reducer were explained, the allowable bending stress value of the material was compared with the analysis result through FM structural analysis program, and the average stress distribution value of von Mises was performed on the gear root atmosphere. The structural safety of the 2-speed planetary gear reducer was verified through FM structural analysis. The natural frequency was calculated by applying the specifications of the planetary gears of the 2-speed gearbox, and the critical speed of resonance was calculated by calculating the natural frequency and the transmission error of the engaged gear pair. As a result of analyzing the critical speed, since it is formed higher than the actual operating speed range, it is considered safe because there is no resonance problem due to the suggested specifications of the planetary gears of the 2-speed shift reduction.

• Proceedings of the KIEE Conference
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• 1994.07a
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• pp.183-185
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• 1994

A new method for determination of electric parameter of cell membranes is proposed. Two circular electrodes is designed to have repulsive force. From the potential energy analysis, stable points where a cell is levitated between electrodes exist and move as frequency or voltage change. The levitated cell in the stable point fall freely when DEP force is zero. The DEP force is dependent on the frequency and the force is zero at the critical frequency. The critical frequency is determined by measuring the difference between the time taken at zero-applied voltage and the time taken at the frequency and the voltage. For example, the critical frequency and stable points of N.crassa slime cell is numerically evaluated. In the exeriment, polystyrene in water is levitated at the stable point. We show that the stable point move as the applied voltage is changed.

• Transactions of the Korean Society of Mechanical Engineers
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• v.15 no.1
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• pp.366-375
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• 1991

In this study, vibrational behavior of uniform pipe carrying a moving medium is studied by using a transfer matrix and the displacement function derived from the conventional beam theory. In various boundary conditions, flow velocity and mechanical property change of the variation of natural frequency are investigated. The Coriolis term in the original differential equation of motion has been ignored in the investigation. This method is used to study the variation of natural frequency with flow velocity for clamped-clamped, cantilevered, clamped-pinned, pinned-pinned, free-free straight pipe element. It is shown that clamped-clamped, free-free pipe have the highest natural frequency and critical velocity values while cantilevered pipe have the smallest natural frequency for the same mechanical properties. From the vibration effects of mechanical property variation, it is shown that bending stiffness and pipe length variation has large influence on natural frequency and critical velocity. Since the order of transfer matrix is not changed with boundary conditions of pipe element, this method proposed can be easily applied to personal-computer for vibration analysis of pipe element. Furthermore, this method can be extended to three-dimensional system by using a coordinate transformation for the analysis of piping systems.

• Smart Structures and Systems
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• v.19 no.3
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• pp.309-322
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• 2017

In this paper, the buckling, and free vibration analysis of tapered functionally graded carbon nanotube reinforced composite (FG-CNTRC) micro Reddy beam under longitudinal magnetic field using finite element method (FEM) is investigated. It is noted that the material properties of matrix is considered as Poly methyl methacrylate (PMMA). Using Hamilton's principle, the governing equations of motion are derived by applying a modified strain gradient theory and the rule of mixture approach for micro-composite beam. Micro-composite beam are subjected to longitudinal magnetic field. Then, using the FEM, the critical buckling load, and natural frequency of micro-composite Reddy beam is solved. Also, the influences of various parameters including ${\alpha}$ and ${\beta}$ (the constant coefficients to control the thickness), three material length scale parameters, aspect ratio, different boundary conditions, and various distributions of CNT such as uniform distribution (UD), unsymmetrical functionally graded distribution of CNT (USFG) and symmetrically linear distribution of CNT (SFG) on the critical buckling load and non-dimensional natural frequency are obtained. It can be seen that the non-dimensional natural frequency and critical buckling load decreases with increasing of ${\beta}$ for UD, USFG and SFG micro-composite beam and vice versa for ${\alpha}$. Also, it is shown that at the specified value of ${\alpha}$ and ${\beta}$, the dimensionless natural frequency and critical buckling load for SGT beam is more than for the other state. Moreover, it can be observed from the results that employing magnetic field in longitudinal direction of the micro-composite beam increases the natural frequency and critical buckling load. On the other hands, by increasing the imposed magnetic field significantly increases the stability of the system that can behave as an actuator.

• Journal of the Korean housing association
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• v.17 no.2
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• pp.143-150
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• 2006

In this Study, it was investigated what the critical elements of the Architectural Review by the Seoul Building Design Committee were. The critical elements selected by the members of committee were systematically analyzed. They were based on the 169 cases reviewed by the Building Design Committee. The committee consists of Professors, famous architects, architectural experts and official members. Thus, the critical elements selected by the committee can be regarded as the important criteria for the forthcoming architectural reviewing process. The critical elements selected by 960 members of the committee were classified by the frequency. The results in this study showed that the critical elements were ordered as follows: (1)floor plan, (2)landscape gardening, (3)form, (4)open space, (5)structure, (6)plan for preventing disasters, (7)circulation for men and cars, (8)facilities, (9)parking, (10)revision of drawings and documents. These criteria of the architectural evaluation established by the Seoul Building Design Committee can be applied to the fundamental preparation of the architectural review.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.903-906
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• 2005

The purpose of this paper is to investigate free vibrations and critical loads of the uniform Beck's columns with a tip spring, carrying a tip mass. The ordinary differential equation governing free vibrations of such Beck's column subjected to a follower force is derived based on the Bernoulli-Euler beam theory. Both the divergence and flutter critical loads are calculated from the load-frequency curves that are obtained by solving the differential equation numerically. The critical loads are presented in the figures as functions of various non-dimensional system parameters such as the mass moment of inertia and spring parameter.

• Wind and Structures
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• v.21 no.5
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• pp.523-536
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• 2015

To study the vibration frequency of super high-rise buildings in the process of vortex induced vibration (VIV), wind tunnel tests of multi-degree-of-freedom (MDOF) aero-elastic models were carried out to measure the vibration frequency of the system directly. The effects of structural damping, wind field category, mass density, reduced wind velocity ($V_r$), as well as VIV displacement on the VIV frequency were investigated systematically. It was found that the frequency drift phenomenon cannot be ignored when the building is very high and flexible. When $V_r$ is less than 8, the drift magnitude of the frequency is typically positive. When $V_r$ is close to the critical wind velocity of resonance, the frequency drift magnitude becomes negative and reaches a minimum at the critical wind velocity. When $V_r$ is larger than12, the frequency drift magnitude almost maintains a stable value that is slightly smaller than the fundamental frequency of the aero-elastic model. Furthermore, the vibration frequency does not lock in the vortex shedding frequency completely, and it can even be significantly modified by the vortex shedding frequency when the reduced wind velocity is close to 10.5.