• 한국표면공학회:학술대회논문집
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• 한국표면공학회 1999년도 추계학술발표회 초록집
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• pp.49-49
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• 1999

In this study, $Cl_2/BCI_3$ magnetized inductively coupled plasmas (MICP) were used to etch GaN and the effects of magnetic confinements of inductively coupled plasmas on the GaN etch characteristics were investigated as a function of $Cl_2/BCI_3$. Also, the effects of Kr addition to the magnetized $Cl_2/BCI_3$ plasmas on the GaN etch rates were investigated. The characteristics of the plasmas were estimated using a Langmuir probe and quadrupole ma~s spectrometry (QMS). Etched GaN profiles were observed using scanning electron microscopy (SEM). The small addition of $Cl_2/BCI_3$ (10-20%) in $Cl_2$ increased GaN etch rates for both with and without the magnetic confinements. The application of magnetic confinements to the $Cl_2/BCI_3$ inductively coupled plasmas (ICP) increased GaN etch rates and changed the $Cl_2/BCI_3$ gas composition of the peak GaN etch rate from 10% $BCI_3$ to 20% $BCI_3$. It also increased the etch selectivity over photoresist, while slightly reducing the selectivity over $Si0_2$. The application of the magnetic field significantly increased positive $BCI_2{\;}^+$ measured by QMS and total ion saturation current measured by the Langmuir probe. Other species such as CI, BCI, and CI+ were increased while species such as $BCl_2$ and $BCI_3$ were decreased with the application of the magnetic field. Therefore, it appears that the increase of GaN etch rate in our experiment is related to the increased dissociative ionization of $BCI_3$ by the application of the magnetic field. The addition of 10% Kr in an optimized $Cl_2/BCI_3$ condition (80% $Cl_2/$ 20% $BCI_3$) with the magnets increased the GaN etch rate about 60%. More anisotropic GaN etch profile was obtained with the application of the magnetic field and a vertical GaN etch profile could be obtained with the addition of 10% Kr in an optimized $Cl_2/BCI_3$ condition with the magnets.

• Geomechanics and Engineering
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• 제10권4호
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• pp.423-436
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• 2016

Currently, there is a great interest in the coupling between multiphase fluid flow and geomechanical effects in hydrocarbon reservoirs and surrounding rocks. The ideal solution for this coupled problem is to introduce the geomechanical effects through the stress analysis solution and implement an algorithm, which assures that the equations governing the flow and stress analyses are obeyed in each time step. This paper deals with the implementation of a program (FORTRAN90 interface code), which was developed to couple conventional reservoir (ECLIPSE) and geomechanical (ABAQUS) simulators, using a partial coupling algorithm. The explicit coupled hydro-mechanical behavior of Iranian field during depletion and $CO_2$ injection is studied using the soils consolidation procedure available in ABAQUS. Time dependent reservoir pressure fields obtained from three dimensional compositional reservoir models were transferred into finite element reservoir geomechanical models in ABAQUS as multi-phase flow in deforming reservoirs cannot be performed within ABAQUS. The FEM analysis of the reservoir showed no sign of plastic strain under production and $CO_2$ injection scenarios in any part of the reservoir and the stress paths do not show a critical behavior.

• Smart Structures and Systems
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• 제16권5호
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• pp.781-806
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• 2015

A unified formulation of finite layer methods (FLMs), based on the Reissner mixed variational theorem (RMVT), is developed for the three-dimensional (3D) coupled electro-elastic analysis of simply-supported, functionally graded piezoelectric material (FGPM) plates with open- and closed-circuit surface conditions and under electro-mechanical loads. In this formulation, the material properties of the plate are assumed to obey an exponent-law varying exponentially through the thickness coordinate, and the plate is divided into a number of finite rectangular layers, in which the trigonometric functions and Lagrange polynomials are used to interpolate the in- and out-of-plane variations of the primary field variables of each individual layer, respectively, such as the elastic displacement, transverse shear and normal stress, electric potential, and normal electric displacement components. The relevant orders used for expanding these variables in the thickness coordinate can be freely chosen as the linear, quadratic and cubic orders. Four different mechanical/electrical loading conditions applied on the top and bottom surfaces of the plate are considered, and the corresponding coupled electro-elastic analysis of the loaded FGPM plates is undertaken. The accuracy and convergence rate of the RMVT-based FLMs are assessed by comparing their solutions with the exact 3D piezoelectricity ones available in the literature.

• Ocean Systems Engineering
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• 제3권4호
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• pp.275-294
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• 2013

Side-by-side offloading operations are widely utilized in engineering practice. The hydrodynamic interactions between two vessels play a crucial role in safe operation. This study focuses on the coupled effects between two floating bodies positioned side-by-side as a shuttle tanker-FPSO (floating production, storage and offloading) system. Several wave directions with different side-by-side distances are studied in order to obtain the variation tendency of the horizontal hydrodynamic coefficients, motion responses and mean drift forces. It is obtained that the coupled hydrodynamics between two vessels is evidently distinguished from the single body case with shielding and exaggerating effects, especially for sway and yaw directions. The resonance frequency and the peak amplitude are closely related with side-by-side separation distance. In addition, the horizontal hydrodynamics of the shuttle tanker is more susceptible to coupled effects in beam waves. It is suggested to expand the gap distance reasonably in order to reduce the coupled drift forces effectively. Attention should also be paid to the second peaks caused by hydrodynamic coupling. Since the horizontal mean drift forces are the most mainly concerned forces to be counteracted in dynamic positioning (DP) system and mooring system, prudent prediction is beneficial in saving consumed power of DP system and reducing tension of mooring lines.

• Korea-Australia Rheology Journal
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• 제13권3호
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• pp.131-139
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• 2001

A coupled approach is proposed for the prediction of sheet profile in sheet casting process, which combines one-dimensional analytical method on planar elongational flow region and three-dimensional numerical method on the other region. The strategy is constructed from the observations that the flow domain of sheet casting process can be separated into two parts based old the flow kinematics. The flow field in the central region of sheet, over which the planar elongational flow dominates, is possibly replaced by one-dimensional analytical solution. Then only a partial flow domain near the edge region of sheet, where the flow kinematics cannot be described by the planar elongational flow itself, requires three-dimensional numerical simulation. Good agreement is observed between the coupled approach developed in this study and the full three-dimensional numerical simulation previously developed and reported by the authors. This coupled approach may have provided flexibility with low costs to accommodate a wide range of die sizes in sheet casting process.

• 전기학회논문지
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• 제65권7호
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• pp.1211-1217
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• 2016

Discharge characteristics of inductively coupled plasma were investigated by using electrostatic probe and fluid simulation. The Inductively Coupled Plasma source driven by 13.56 Mhz was prepared. The signal attenuation ratios of the electrostatic probe at first and second harmonic frequency was tuned in 13.56Mhz and 27.12Mhz respectively. Electron temperature, electron density, plasma potential, electron energy distribution function and electron energy probability function were investigated by using the electrostatic probe. Experiment results were compared with the fluid simulation results. Ar plasma fluid simulations including Navier-Stokes equations were calculated under the same experiment conditions, and the dependencies of plasma parameters on process parameters were well agreed with simulation results. Because of the reason that the more collision happens in high pressure condition, plasma potential and electron temperature got lower as the pressure was higher and the input power was higher, but Electron density was higher under the same condition. Due to the same reason, the electron energy distribution was widening as the pressure was lower. And the electron density was higher, as close to the gas inlet place. It was found that gas flow field significantly affect to spatial distribution of electron density and temperature.

• Smart Structures and Systems
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• 제32권4호
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• pp.195-205
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• 2023

The contact acoustic emission (AE) monitoring system is time-consuming and costly for monitoring concrete structures in large scope, in addition, the great difference in acoustic impedance between air and concrete makes the detection process inconvenient. In this work, we broaden the conventional AE source localization method for concrete to the non-contact (air-coupled) micro-electromechanical system (MEMS) microphones array, which collects the energy-rich leaky Rayleigh waves, instead of the relatively weak P-wave. Finite element method was used for the numerical simulations, it is shown that the propagation velocity of leaky Rayleigh waves traveling along the air-concrete interface agrees with the corresponding theoretical properties of Lamb wave modes in an infinite concrete slab. This structures the basis for implementing a non-contact AE source location approach. Based on the experience gained from numerical studies, experimental studies on the proposed air-coupled AE source location in concrete slabs are carried out. Finally, it is shown that the locating map of AE source can be determined using the proposed system, and the accuracy is sufficient for most field monitoring applications on large plate-like concrete structures, such as tunnel lining and bridge deck.

• 전기학회논문지
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• 제67권9호
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• pp.1165-1173
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• 2018

Recently, owing to environmental problems and instability of rare earth resources market, non-rare earth electric motors are attracting attention. As a non-rare earth motor type, a wound rotor synchronous motor(WRSM) has high power density and wide driving range further it can reduce loss by field current control during field weakening control at high speed. However, since the d-axis flux of the WRSM is coupled with the rotor circuit, the fluctuation in the d-axis flux linkage affects the rotor circuit, which causes ripple of the field current and torque. In this paper, we propose the field current ripple compensation method by injecting the feedforward voltage. the proposed compensating method was demonstrated by simulation and experiments.

• Geomechanics and Engineering
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• 제37권3호
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• pp.243-251
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• 2024

In the current work, a poro-thermoelastic half-space issue with temperature-dependent characteristics and an inclined load is examined in the framework of the three-phase-lag model (3PHL) while taking into account the effects of magnetic and gravity fields. The resulting coupled governing equations are non-dimensional and are solved by normal mode analysis. To investigate the impacts of the gravitational field, magnetic field, inclined load, and an empirical material constant, numerical findings are graphically displayed. MATLAB software is used for numerical calculations. Graphs are used to visualize and analyze the computational findings. It is found that the physical quantities are affected by the magnetic field, gravity field, the nonlocal parameter, the inclined load, and the empirical material constant.

• 터널과지하공간
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• 제32권6호
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• pp.411-434
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• 2022

사용후핵연료의 심층처분 개념에서 근계영역 암반은 열-수리-역학적 복합거동을 하게 되는 것으로 잘 알려져있다. 이러한 복합거동 과정에서 암석의 여러 물성들은 변화하는데, 이러한 물성변화를 합리적으로 반영하는 경우 고준위방사성폐기물 처분장의 장기안정성의 평가를 위해 활용되는 해석 및 현장시험의 신뢰도를 향상시킬 수 있다. 이를 위해 본 기술보고에서는 암석의 열-수리-역학적 간접복합거동에 관한 국내외 연구사례를 조사하고 분석하였다. 특히, 간접복합거동의 대표적인 사례 중 지하수에 의한 포화 및 온도 증가에 따른 암석의 여러 물성 변화, 응력 변화에 의한 투수계수 변화를 중점적으로 조사·요약하였다.