• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
• /
• pp.1154-1156
• /
• 1999

This paper presents the novel fabrication of an electromagnetic micro actuator with a corrugated diaphragm and a flat one. The actuator consists of a Parylene diaphragm with a spiral copper coil and a permanent magnet. The cower coil is fabricated by electroplating and patterning. As the further works, the frequency response of the actuator are obtained by using a laser vibrometer and the static deflection of the actuator diaphragm are measure by using laser displacement meter. The corrugated diaphragm is expected to be better than the flat one with respect to the actuator performance.

• 센서학회지
• /
• 제30권5호
• /
• pp.273-278
• /
• 2021

Here, we studied the change in the mechanical stiffness of a diaphragm according to the corrugation pattern. The diaphragm consists of a silicon oxide and nitride double layer; a corrugation pattern was formed by dry etching, and the diaphragm was released by wet etching. The fabrication of the thin film was verified using focused ion beam and scanning electron microscopy images. The mechanical stiffness of the diaphragm was obtained by measuring the surface vibration using a laser Doppler vibrometer while applying external sound pressure. Flat squares, diaphragms with square corrugations, and circular corrugation patterns were measured and compared. The stiffness of the diaphragm with a corrugation structure was found to be smaller than that without a corrugation structure; in particular, circular corrugation showed a better effect because of the high symmetry. Furthermore, the effect of corrugation was theoretically predicted. The proposed corrugated diaphragm showed comparable flexibility with the state-of-the-art MEMS microphone diaphragm.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1994년도 하계학술대회 논문집 A
• /
• pp.141-143
• /
• 1994

In this paper, an electrostatic micro-actuator is fabricated using flat p+ diaphragm. To avoid the buckling of the flat p+ diaphragm, the processes are designed appropriately. The fabrication processes of the actuator are the anisotropic etching with EPW, the boron diffusion process, Al deposition and the silicon to glass bonding using the negative photoresist. The distance between the p+ and Al electrodes is $10{\mu}m$, and the thickness of the p+ diaphragm is $2{\mu}m$. The measurement of the characteristic of the actuator is performed at 50V. The center displacement of the diaphragm is $1.5{\mu}m$ at 10Hz. In comparison with the experimental data of the actuator with corrugated diaphragm, it is confirmed that the actuator with flat diaphragm is more effective than that with corrugated one in the small deflection region.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1993년도 정기총회 및 추계학술대회 논문집 학회본부
• /
• pp.207-209
• /
• 1993

In this paper, an electrostatic silicon micro actuator has been designed and fabricated using the micro machining technology. The actuator consists of two counter electrodes. One is an Al film deposited on a pyrex glass, and the other is a circular corrugated diaphragm with boron doped. The diaphragm is fabricated by boron etch stop technique using an anisotropic etchant, EPW.

• 대한조선학회논문집
• /
• 제46권3호
• /
• pp.279-289
• /
• 2009

For a Product Oil Carrier, longitudinal bulkhead as well as transverse one is corrugated shape in general and intersection part of bulkheads is utilized for a pipe trunk. Since lower and upper stools are to be connected with all of longitudinal and transverse bulkheads, they have a uniform height respectively. The purpose of this study is the development of design system for the minimization of total weight of longitudinal and transverse bulkheads at the initial design stage. In this study, the beam element models for longitudinal and transverse corrugated bulkheads are established and they are applied to the structural analysis. For the practical design, the selection and the position of an additional pipe trunk are considered in this study. In addition the required minimum distance between the bracket installed along the web of corrugation at lower stool and the diaphragm is taken into consideration during optimization process. Evolution strategy(ES) is adopted as an optimization technique.

• 한국정밀공학회지
• /
• 제30권8호
• /
• pp.790-796
• /
• 2013

Micro-speaker diaphragms play an important role in generating a desired audio response. The diaphragm is generally a circular membrane, and the cross section is a double dome, with an inner dome and an outer dome. To improve the sound quality of the speaker, a number of corrugations may be included in the outer dome region. In this study, the role of these corrugations is investigated using two kinds of finite element method (FEM) calculations. Structural FEM modeling was carried out to investigate the change in stiffness of the diaphragm when the corrugations were included. Modal FEM modeling was then carried out to compare the natural frequencies and the resulting vibrational modes of the plain and corrugated diaphragms. The effects of the corrugations on the vibration characteristics of the diaphragm are discussed.

• Steel and Composite Structures
• /
• 제21권5호
• /
• pp.1045-1067
• /
• 2016

Concrete bridges with corrugated steel webs and prestressed by both internal and external tendons have emerged as one of the promising bridge forms. In view of the different behaviour of components and the large shear deformation of webs with negligible flexural stiffness, the assumption that plane sections remain plane may no longer be valid, and therefore the classical Euler-Bernoulli and Timoshenko beam models may not be applicable. In the design of this type of bridges, both the ultimate load and ductility should be examined, which requires the estimation of full-range behaviour. An analytical sandwich beam model and its corresponding beam finite element model for geometric and material nonlinear analysis are developed for this type of bridges considering the diaphragm effects. Different rotations are assigned to the flanges and corrugated steel webs to describe the displacements. The model accounts for the interaction between the axial and flexural deformations of the beam, and uses the actual stress-strain curves of materials considering their stress path-dependence. With a nonlinear kinematical theory, complete description of the nonlinear interaction between the external tendons and the beam is obtained. The numerical model proposed is verified by experiments.

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제51권12호
• /
• pp.591-596
• /
• 2002

This paper Presents the fabrication and test of a micropump that can be applied to an implantable cerebrospinal fluid shunt system for hydrocephalus patients The proposed micropump consists of a pair of corrugated parylene diaphragm chambers and a set of nozzle and diffuser. The electromagnetic force drives the diaphragms and pumps the fluid. The static or dynamic characteristics of the fabricated devices have been obtained experimentally. The site of the micropump is $14 \times 12 \times 8mm^3$. The flow rate increase by about $3 mell/h$ was observed in the operational pressure range the micropump.

• 국제초고층학회논문집
• /
• 제3권1호
• /
• pp.35-48
• /
• 2014

In designing a 300 meter high skyscraper expected to be the tallest building in Japan, an earthquake-ridden country, we launched on the full-scale performance based design to ensure redundancy and establish new specifications using below new techniques. The following new techniques are applied because the existing techniques/materials are not enough to meet the established design criteria for the large-scale, irregularly-shaped building, and earth-conscious material saving and construction streamlining for reconstructing a station building are also required: ${\bullet}$ High strength materials: Concrete filled steel tube ("CFT") columns made of high-strength concrete and steels; ${\bullet}$ New joint system: Combination of outer diaphragm and aluminium spray jointing; ${\bullet}$ Various dampers including corrugated steel-plate walls, rotational friction dampers, oil dampers, and inverted-pendulum adaptive tuned mass damper (ATMD): Installed as appropriate; and ${\bullet}$ Foundation system: Piled raft foundation, soil cement earth-retaining wall construction, and beer bottle shaped high-strength CFT piles.