• Journal of Welding and Joining
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• v.34 no.6
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• pp.1-10
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• 2016

Flux Cored Wire is the most widely used welding material for Flux Cored Arc Welding these days. This paper introduces the technical aspects of manufacturing FCW and the development trend of FCW for each type of steel and metal. The studies are ongoing to lower the production cost of seamless-type FCW since it has not been generally used in welding shops so far because of it high cost even though the seamless-type FCW has various advantages than folded-type FCW in terms of manufacturing technology. Meanwhile, a technical research has been carried out to develop a rutile type of FCW products which satisfies high toughness after post heat treatment. In addition, for high-speed fillet welding, there has been a development of welding materials which can be welded in Single Auto-Carriage 100 cpm or more and up to Twin Tandem 200 cpm without occurring any welding defect in order to improve the welding productivity. As Zn coated steel is being used recently to improve the corrosion resistance of the automotive parts, a research and development for Metal Cored Wire has been conducted to reduce the Si island produced in welding operation than those produced when using the former solid wires. A development of welding material that guarantees CTOD performance beyond $-40^{\circ}C$ CTOD to $-60^{\circ}C$ is underway by different steel grades, and FCW for super austenitic stainless steel is being developed as the corrosion resistant steel has been upgraded.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.23-23
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• 2011

Chemical-Mechanical Planarization (CMP) 공정이란 화학적 반응 및 기계적인 힘이 복합적으로 작용하여 표면을 평탄화하는 공정이다. 이러한 CMP 공정은 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위하여 도입되었으며 반도체 제조를 위한 필수공정으로 그 중요성이 강조되고 있다. 특히 최근에는 Inter-Level Dielectric (ILD)의 형성과 Shallow Trench Isolation (STI) 공정에서실리콘 산화막을 평탄화하기 위한 CMP 공정에 대해 연구가 활발히 이루어지고 있다. 그러나 CMP 공정 후 scratch, pitting corrosion, contamination 등의 Defect가 발생하는 문제점이 존재한다. 이 중에서도 scratch는 기계적, 열적 스트레스에 의해 생성된 패드의 잔해, 슬러리의 잔유물, 응집된 입자 등에 의해 표면에 형성된다. 반도체 공정에서는 다양한 종류의 실리콘 산화막이 사용되고 gks이러한 실리콘 산화막들은 종류에 따라 경도가 다르다. 따라서 실리콘 산화막의 경도에 따른 CMP 공정 및 이로 인한 Scratch 발생에 관한 연구가 필요하다고 할 수 있다. 본 연구에서는 scratch 형성의 거동을 알아보기 위하여 boronphoshposilicate glass (BPSG), plasma enhanced chemical vapor deposition (PECVD) tetraethylorthosilicate (TEOS), high density plasma (HDP) oxide의 3가지 실리콘 산화막의 기계적 성질 및 이에 따른 CMP 공정에 대한 평가를 실시하였다. CMP 공정 후 효율적인 scratch 평가를 위해 브러시를 이용하여 1차 세정을 실시하였으며 습식세정방법(SC-1, DHF)으로 마무리 하였다. Scratch 개수는 Particle counter (Surfscan6200, KLA Tencor, USA)로 측정하였고, 광학현미경을 이용하여 형태를 관찰하였다. Scratch 평가를 위한 CMP 공정은 실험에 사용된 3가지 종류의 실리콘 산화막들의 경도가 서로 다르기 때문에 동등한 실험조건 설정을 위해 동일한 연마량이 관찰되는 조건에서 실시하였다. 실험결과 scratch 종류는 그 형태에 따라 chatter/line/rolling type의 3가지로 분류되었다 BPSG가 다른 종류의 실리콘 산화막에 비해 많은 수에 scratch가 관찰되었으며 line type이 많은 비율을 차지한다는 것을 확인하였다. 또한 CMP 공정에서 압력이 증가함에 따라 chatter type scratch의 길이는 짧아지고 폭이 넓어지는 것을 확인하였다. 본 연구를 통해 실리콘 산화막의 경도에 따른 scratch 형성 원리를 파악하였다.

• Journal of the Korean Society for Nondestructive Testing
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• v.35 no.1
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• pp.61-67
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• 2015

Recently, the initiation of outside diameter stress corrosion cracking (ODSCC) at the tube support plate region of domestic steam generators (SG) with Alloy600 HTMA tubes has been increasing. As a result, SGs with Alloy600 HTMA tubes must be replaced early or are scheduled to be replaced prior to their designed lifetime. ODSCC is one of the biggest threats to the integrity of SG tubes. Therefore, the accurate evaluation of tube integrity to determine ODSCC is needed. Eddy current testing (ECT) is conducted periodically, and its results could be input as parameters for evaluating the integrity of SG tubes. The reliability of an ECT inspection system depends on the performance of the inspection technique and abilty of the analyst. The detection probability and ECT sizing error of degradation are considered to be the performance indices of a nondestructive evaluation (NDE) system. This paper introduces an optimized evaluation method for ECT, as well as the sizing error, including the analyst performance. This study was based on the results of a round robin program in which 10 inspection analysts from 5 different companies participated. The analysis of ECT sizing results was performed using a linear regression model relating the true defect size data to the measured ECT size data.

• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.74-79
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• 2022

In this study, the plasma corrosion resistance and the change in the number of contamination particles generated using the plasma etching process and cleaning process of coating parts for semiconductor plasma etching equipment were investigated. As the coating method, atmospheric plasma spray (APS) was used, and the powder materials were Y₂O₃ and Y₃Al₅O₁₂ (YAG). There was a clear difference in the densities of the coatings due to the difference in solubility due to the melting point of the powdered material. As a plasma environment, a mixed gas of CF₄, O₂, and Ar was used, and the etching process was performed at 200 W for 60 min. After the plasma etching process, a fluorinated film was formed on the surface, and it was confirmed that the plasma resistance was lowered and contaminant particles were generated. We performed a surface cleaning process using piranha solution(H₂SO₄(3):H₂O₂(1)) to remove the defect-causing surface fluorinated film. APS-Y₂O₃ and APS-YAG coatings commonly increased the number of defects (pores, cracks) on the coating surface by plasma etching and cleaning processes. As a result, it was confirmed that the generation of contamination particles increased and the breakdown voltage decreased. In particular, in the case of APS-YAG under the same cleaning process conditions, some of the fluorinated film remained and surface defects increased, which accelerated the increase in the number of contamination particles after cleaning. These results suggest that contaminating particles and the breakdown voltage that causes defects in semiconductor devices can be controlled through the optimization of the APS coating process and cleaning process.

• KEPCO Journal on Electric Power and Energy
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• v.6 no.2
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• pp.145-150
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• 2020

Water wall tube is one of the major factors consisting of a fluidized bed boiler and it plays very important role for the generation of electricity within the boiler. But these water wall tubes within the fluidized bed boiler are subject to the ware and corrosion caused by the high temperature gas and the flowing medium. If water leak is occurred, the secondary damage by the water leak will occur. As a result of that, the power generation efficiency decreases noticeably. Therefore, the maintenance of the water wall tube is very important. In this study, we designed a exciter sensor based on simulation and composed a remote field eddy current system for the defect evaluation of the outer water wall tube. Starting from the shape design of exciter, we conducted simulations for various design factors such as the water wall tube size, material, frequency, lift-off and so on. Based on the results, we designed the optimum exciter sensor for the water wall tube test within the fluidized bed boiler.

• Journal of Korean Tunnelling and Underground Space Association
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• v.24 no.1
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• pp.109-128
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• 2022

The precise inspection for safety and diagnosis (PISD) of tunnel has been conducted by the special act on safety control of public structures. However, the present assessment for the segmental lining of TBM tunnel has limitation such as: NDTs for integrity, segmental configuration for field inspection, and consideration for jacking system. Even if the number of TBM tunnel is less than 1% of enrolled facility in FMS, more attention to maintenance should be necessary due to its usage such as multi-use facility and national important facility. Compared to NATM tunnel, excavated by drilling and blasting and then installed lining by cast-in-place within 6~12 m, TBM tunnel is cut out ground by disk and cutter-bit and then assembled 7 pieces of precast segment, 1.2~1.4 m wide. Different features of design, construction, and maintenance should be considered to be more exact evaluation of TBM tunnel. The characteristics of defect is categorized and analyzed with 11 operational TBM tunnels in domestic subway. To be more comprehend various particular defects, foreign studies have been also adapted. Crack and leakage are categorized in 7 patterns. Breakage/spalling and corrosion are also grouped into 3 patterns. Patterned defects or damages are fed back in design, construction, and are useful guidelines for maintenance stage in future.

• Journal of the Korean Society for Nondestructive Testing
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• v.33 no.6
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• pp.519-523
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• 2013

A steam generator (SG) tube is an important component of a nuclear power plant (NPP). It works as a pressure boundary between the primary and secondary systems. The integrity of a SG tube can be assessed by an eddy current test every outage. The eddy current technique(adopting a bobbin probe) is currently the main technique used to assess the integrity of the tubing of a steam generator. An eddy current signal analyst for steam generator tubes continuously analyzes data over a given period of time. However, there are possibilities that the analyst conducting the test may get tired and cause mistakes, such as: missing indications or not being able to separate a true defect signal from one that is more complicated. This error could lead to confusion and an improper interpretation of the signal analysis. In order to avoid these possibilities, many countries of opted for automated analyses. Axial ODSCC (outside diameter stress corrosion cracking) defects on the tubes of OPR1000 steam generators have been found on the tube that are in contract with tube support plates. In this study, automated analysis software called CDS (computer data screening) made by Zetec was used. This paper will discuss the results of introducing an automated analysis system for an axial ODSCC on the tubes of an OPR1000 steam generator.

• Transactions of the Korean Society of Pressure Vessels and Piping
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• v.6 no.1
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• pp.16-22
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• 2010

Cast austenitic stainless steel(CASS) is used in the primary cooling piping system of nuclear power plant for it's relative low cost, corrosion resistance and easy of welding. However, the coarse-grain structure of cast austenitic stainless steel can strongly affect the inspectability of ultrasonic testing. The major problems encountered during inspection are beam skewing, high attenuation and high background noise of CASS component. So far, the best inspection performance involving CASS components have been achieved using low frequency TRL(Transmitter/Receiver side-by-side L wave) angle beam probe. But TRL technique could not detect shallow defect and it contains an uncertainty for sizing capability. Currently, most of researchers are studying to overcome these challenge issue. In this study, low-frequency phased array TRL technique used to detect and sizing the flaws in CF8A cast austenitic stainless steel.As conclusion, we could detect and size not only axial flaw but also circumferential flaw using low frequency phased array technique.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.3
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• pp.36-43
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• 2016

Carbon fiber-reinforced silicon carbide (Cf-SiC) and SiC / SiC composites have high thermal conductivity, and excellent corrosion and wear resistance, a low coefficient for thermal expansion and are lightweight. This is why they are commonly used in parts of the aerospace industry to develop an aircraft thrust deflector, jet vane, combustion chamber, elevens, body flap, and a shingle. So, understanding how this state-of-the-art Cf-SiC affects both internal and external crack detection and determining issues during the manufacturing process of composite materials, should be evaluated according to valuation techniques in the external environment. In this paper, we apply a non-contact air ultrasonic technique of non-destructive testing techniques to perform a study on internal defect detection identification and assessment of carbon-fiber reinforced silicon carbide composites to perform basic research and applied research.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.11
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• pp.2954-2966
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• 1994

The characteristics and good corrosion resistance at room and elevated temperatures led to increasing application of Ti-alloys such as aircraft, jet engine, turbine wheels. In forging of Ti-alloy at high temperature, die chilling and die speed should be carefully controlled because the flow stress of Ti-alloy is sensitive to temperature, strain and strain-rate. In this study, the forging of turbine disk was numerically simulated by the finite element method for hot-die forging process and isothermal forging process, respectively. The effects of the temperature changes, the die speed and the friction factor were examined. Also, local variation of process parameters, such as temperature, strain and strain-rate were traced during the simulation. It was shown that the isothermal forging with low friction condition produced defect-free disk under low forging load. Consequently, the simulational information will help industrial workers develope the forging of Ti-alloys including 'preform design' and 'processing condition design'. It is also expected that the simulation method can be used in CAE of near net-shape forging.