• Title/Summary/Keyword: Copper growth

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Improvement of semiconductor contact hole filling of Copper by ionized cluster beam deposition technique (이온화클러스터빔 증착법에 의한 구리 박막의 반도체 접촉구 메움 향상에 관한 연구)

  • Baek, Min;Son, Ki-Wang;Kim, Do-Jin
    • Journal of the Korean Vacuum Society
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    • v.7 no.2
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    • pp.118-126
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    • 1998
  • A study to improve filling of semiconductor contact holes by enhancement of the directionality of the source beams has been undertaken. The collimation of source beams was improved by the ionized cluster beam deposition technique with modification of the cell geometry. The collimation tested with neutral beam was excellent. But, the Cu flims were grown in a columnar mode due to the lack of surface mobilit of the impinged clusters. A shadow effect also caused cleavage and consequent discontinuity at the steos as films grow. By applying acceleration voltage, the columnar growth in a contact hole of 0.5 $\mu$m diameter and 1 $\mu$m height disappeared and considerable coverage at the side wall of the contacts as well as perfect bottom coverage were observed. These are all due to the assistants of the accelerated ionized clusters with high kinetic energy. Thus we demonstrated that the ICB deposition technique can be used to completely fill sub-half-micron contact holes with high aspect ratio.

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A Study of the Properties of CuInS2 Thin Film by Sulfurization

  • Yang, Hyeon-Hun;Park, Gye-Choon
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.2
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    • pp.73-76
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    • 2010
  • The copper indium disulfide ($CuInS_2$) thin film was manufactured using sputtering and thermal evaporation methods, and the annealing with sulfurization process was used in the vacuum chamber to the substrate temperature on the glass substrate, the annealing temperature and the composition ratio, and the characteristics thereof were investigated. The $CuInS_2$ thin film was manufactured by the sulfurization of a soda lime glass (SLG) Cu/In/S stacked [1] elemental layer deposited on a glass substrate by vacuum chamber annealing [2] with sulfurization for various times at a temperature of substrate temperature of $200^{\circ}C$. The structure and electrical properties of the film was measured in order to determine the optimum conditions for the growth of $CuInS_2$ ternary compound semiconductor $CuInS_2$ thin films with a non-stoichiometric composition. The physical properties of the thin film were investigated under various fabrication conditions [3,4], including the substrate temperature, annealing temperature and annealing time by X-ray diffraction (XRD), field Emission scanning electron microscope (FE-SEM), and Hall measurement systems. [5] The sputtering rate depending upon the DC/RF power was controlled so that the composition ratio of Cu versus In might be around 1:1, and the substrate temperature affecting the quality of the film was varied in the range of room temperature (RT) to $300^{\circ}C$ at intervals of $100^{\circ}C$, and the annealing temperature of the thin film was varied RT to $550^{\circ}C$ in intervals of $100^{\circ}C$.

Retardation of Grain Growth of Copper Electrodeposits by Organic Additive (유기첨가제를 통한 구리도금층 결정립 성장의 억제)

  • Jeong, Yong-Ho;Park, Chae-Min;Lee, Hyo-Jong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.139-139
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    • 2016
  • 반도체 다마신배선용 도금용 구리도금첨가제는 대표적으로 accelerator, suppressor 및 leveler 첨가제를 사용하여 다마신 패턴을 채우고 평탄화를 시킬 수 있다. Si 반도체 공정기술에 기반한 정확한 구조분석을 통해 각각의 첨가제의 기능이 비교적 체계적으로 연구되었으며, 최근에는 유속영향을 많이 받는 것으로 알려진 leveler 첨가제에 대한 연구가 활발히 진행되고 있다. 본 연구는 대표적 leveler 첨가제의 하나인 Janus Green B(JGB, $C_{30}H_{31}ClN_6$)를 0 ~ 1 mM을 첨가하여 Si 기판위에 증착된 Cu 씨드층 상의 도금후 표면상태 및 불순물의 농도를 분석하고, 이 박막층들의 결정립 성장 경향성을 electron backscattered diffraction(EBSD) 분석을 통해 진행하였다. C, H, N 등의 불순물이 JGB 농도와 선형적 관계를 가지고 증가하는 것을 알 수 있었으며, S와 O의 불순물도 JGB 농도 증가에 따라 증가하는 것을 알 수 있었다. 또한 0.1 mM 첨가한 경우에 60% 정도 결정립 성장이 진행된 것을 알 수 있었으며, 0.2 mM을 넣은 경우에는 결정립 성장이 일어나지 않은 것을 알 수 있었다. 흥미로운 점은 4 point probe를 통한 면저항 측정을 통해 EBSD를 통한 결정립성장이 관찰되지 않은 0.2 mM JGB를 첨가한 경우에 대해서도 면저항의 감소가 관찰되며, 오히려 JGB 농도가 높을수록 이러한 면저항의 감소가 빠르게 시작되는 것을 관찰할 수 있었다. 이는 JGB 농도 증가에 따라 박막층의 불순물의 농도가 증가하고 막내에 존재하는 불순물의 농도가 증가하면 내부응력장이 커짐으로 인해 더욱 빠른 속도로 불순물의 재배치가 일어난 것으로 보인다. 이러한 불순물이 결정립계면에 편석되는 경우에 pinning을 통해 결정립계면의 이동을 저하시킬 수 있으므로 결정립의 성장 억제가 가능해진 것으로 판단된다.

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Sectional Composition of Minerals in Domestic Deer Antler (국내산 녹용(Cervi parvum Cornu) 의 부위별 무기질 조성)

  • Kim, Hye-Young;Rhyu, Mee-Ra
    • Korean Journal of Food Science and Technology
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    • v.32 no.1
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    • pp.31-36
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    • 2000
  • The mineral compositions were analysed of the tip and the upper section of dried domestic antlers. The upper section was divided longitudinally into four parts. The tip and the upper section were divided traversely into the velvet and the spongy bone layers. The contents of ash, calcium, phosphorus and magnesium increased (p<0.05), and those of manganese, zinc, copper and iron decreased (p<0.05) downward from the tip both in the velvet and the spongy bone layers. The contents of ash, calcium, phosphorus, manganese and zinc of the spongy bone layer were significantly (p<0.05) higher than those of the velvet layer. The tip, which is the growth center of the antler, had the significantly (p<0.05) lowest proportions of Ca/ash, Ca/P and Ca/Fe ratios both in the velvet and spongy bone layers.

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Synthesis of Aligned Porous Sn by Freeze-Drying of Tin Chloride/camphene Slurry (염화주석/camphene 슬러리의 동결건조에 의한 방향성 기공구조의 Sn 다공체 제조)

  • Bang, Su-Ryong;Oh, Sung-Tag
    • Korean Journal of Materials Research
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    • v.25 no.1
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    • pp.27-31
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    • 2015
  • This paper proposes a novel way of fabricating aligned porous Sn by freeze-drying of camphene slurry with stannic oxide ($SnO_2$) coated Sn powders. The $SnO_2$ coated Sn powders were prepared by surface oxidation of the initial and ball-milled Sn powders, as well as heat treatment of tin chloride coated Cu powders. Camphene slurries with 10 vol% solid powders were prepared by mixing at $50^{\circ}C$ with a small amount of oligomeric polyester dispersant. Freezing the slurry was done in a Teflon cylinder attached to a copper bottom plate cooled at $-25^{\circ}C$. Improved dispersion stability of camphene slurry and the homogeneous frozen body was achieved using the oxidized Sn powder at $670^{\circ}C$ in air after ball milling. The porous Sn specimen, prepared by freeze-drying of the camphene slurry with oxidized Sn powder from the heat-treated Sn/tin chloride mixture and sintering at $1100^{\circ}C$ for 1 h in a hydrogen atmosphere, showed large pores of about $200{\mu}m$, which were aligned parallel to the camphene growth direction, and small pores in their internal walls. However, $100{\mu}m$ spherical particles were observed in the bottom part of the specimen due to the melting of the Sn powder during sintering of the green compact.

Effect of Growth Conditions in the Attachment of Salmonella typhimurium to the Host Cells (생육조건에 따른 Salmonella typhimurium의 숙주세포 부착성)

  • Kim, Young-Hee;Kim, Sam-Woong;Kang, Ho-Young
    • Journal of Life Science
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    • v.15 no.4 s.71
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    • pp.641-646
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    • 2005
  • An approximately 10-fold higher level of adherence of Salmonella typhimurium strain TML to Int-407 cells was observed with organisms grown in Luria broth or in high-iron containing medium than those grown in low-iron containing medium. Iron specifically enhanced adherence, while other cations such as calcium, cobalt, copper, potassium, magnesium and manganese did not. It was suggested that iron did not act as a passive ligand - probably it stimulated production of bacterial factors necessary for adherence. A similar pattern of iron modulation of adhesiveness was also seen in Salmonella mutants with single or different combinations of multiple mutations in genes encoding the mannose sensitive hemagglutinin (type 1 fimbriae), mannose resistant hemagglutinin and flagellum. The adhesiveness of an isogenic fur mutant was modulated by iron in a manner similar to the wild-type strain, suggesting that iron modulation of adherence is independent of the fur gene product.

Laccase- and Peroxidase-Free Tyrosinase Production by Isolated Microbial Strain

  • Sambasiva Rao, K.R.S.;Tripathy, N.K.;Mahalaxmi, Y.;Prakasham, R.S.
    • Journal of Microbiology and Biotechnology
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    • v.22 no.2
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    • pp.207-214
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    • 2012
  • Laccase- and peroxidase-free tyrosinase has commercial importance in the production of L-3, 4-dihydroxyphenylalanine (L-DOPA), which is mainly used in the treatment of Parkinson's disease. In the present study, isolation of an actinomycetes microbial strain capable of producing only tyrosinase is reported. Among all soil isolates, three individual colonies revealed black color around the colony in the presence of tyrosine. Further screening for laccase and peroxidase activities using syringaldazine denoted that one of the isolates, designated as RSP-T1, is laccase and peroxidase negative and produces only tyrosinase. The microbe was authenticated as Streptomyces antibioticus based on 16S ribotyping. Effective growth of this isolate was noticed with the use of medium (pH 5.5) containing casein acid hydrolysate (10.0 g/l), $K_2HPO_4$ (5.0 g/l), $MgSO_4$ (0.25 g/l), L-tyrosine (1.0 g/l), and agar (15 g/l). The scanning electron micrograph depicted that the microbe is highly branched and filamentous in nature. The enzyme production was positively regulated in the presence of copper sulfate. The impact of different fermentation parameters on tyrosinase production depicted that the maximized enzyme titer values were observed when this isolate was grown at 6.5 pH and at $30^{\circ}C$ temperature under agitated conditions (220 rpm). Among all the studied physiological parameters, agitation played a significant role on tyrosinase production. Upon optimization of the parameters, the yield of tyrosinase was improved more than 100% compared with the initial yield.

Analysis of Commercial Recycling Technology and Research Trend of Printed Circuit Boards in Korea (국내 인쇄회로기판의 재활용 상용화 기술 및 연구동향 분석)

  • An, HyeLan;Kang, Leeseung;Lee, Chan-Gi
    • Resources Recycling
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    • v.26 no.4
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    • pp.9-18
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    • 2017
  • Recently, the amount of electronic scrap is rapidly increasing due to the rapid growth of the electronics industry. Among the components of electronic scrap, the printed circuit board(PCB) is an important recycling target which includes common metals, precious metals, and rare metals such as gold, silver, copper, tin, nickel and so on. In Korea, however, PCB recycling technologies are mainly commercialized by some major companies, and other process quantities are not accurately counted. According to present situation, several urban mining companies, research institutes, and universities are conducting research on recovery of valuable metals from PCBs and/or reusing them as raw materials that is different from existing commercialization process developed by major companies. In this study, we analyzed not only current status of collection/disposal process and recycling of waste PCBs in Korea but also the trend of recycling technologies in order to help resource circulation from waste PCBs become more active.

Silk and Cotton Textiles, the Principal Maritime Trade Commodities of Ancient India

  • DAYALAN, Duraiswamy
    • Acta Via Serica
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    • v.6 no.2
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    • pp.91-116
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    • 2021
  • India has had a rich and diverse textile tradition since the 3rd millennium BCE. The origin of Indian textiles can be traced back to the Harappan period. Owing to the hot and humid climate in most parts of India, cotton has remained India's favourite choice of fabric for normal use. Thus, India is supposed to be the first nation to have grown, woven, and patterned cotton fabrics. Moreover, India is one of the leading cotton-growing countries in the world. The earliest occurrence of cotton thread in India is roughly datable to 4000 BCE and of dyed fabrics to about 2500 BCE. Large numbers of needles and spindle-whorls found in Harappa and other early historic sites in India reveal the prosperous state of textile production and its trade in the early period. The textile producers used a wide range of skills to process raw materials and make regionally idiosyncratic dyes, weaves, prints, and embroideries. Additionally, the silk from wild indigenous forms of silkworms was known in the Indian sub-continent roughly contemporary with the earliest clear archaeological evidence for silk in China. The analysis of thread fragments found inside a copper bangle and ornament from Harappa and steatite beads from Chanhu-daro, have yielded silk fibers dating to 2500-2000 BCE. Apart from other products, cotton and silk textiles were important export materials from India right from the Harappan period. Actually, the sea-borne trade had played an important role in the economic growth and prosperity of the Harappan civilization. Several ancient seaports in the entire coastline of India played a vital role in the maritime trade during the Harappan period and cotton and silk textiles of Indian origin have been found in various countries. The contemporary writings and epigraphy have also attested to the vast maritime trade network of India and the export of textile materials. The paper discusses in detail the origin and development of cotton and silk textile production in India through the ages and its role in maritime trade networks.

Comparative Phenotypic Analysis of Anabaena sp. PCC 7120 Mutants of Porin-like Genes

  • Schatzle, Hannah;Brouwer, Eva-Maria;Liebhart, Elisa;Stevanovic, Mara;Schleiff, Enrico
    • Journal of Microbiology and Biotechnology
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    • v.31 no.5
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    • pp.645-658
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    • 2021
  • Porins are essential for the viability of Gram-negative bacteria. They ensure the uptake of nutrients, can be involved in the maintenance of outer membrane integrity and define the antibiotic or drug resistance of organisms. The function and structure of porins in proteobacteria is well described, while their function in photoautotrophic cyanobacteria has not been systematically explored. We compared the domain architecture of nine putative porins in the filamentous cyanobacterium Anabaena sp. PCC 7120 and analyzed the seven candidates with predicted OprB-domain. Single recombinant mutants of the seven genes were created and their growth capacity under different conditions was analyzed. Most of the putative porins seem to be involved in the transport of salt and copper, as respective mutants were resistant to elevated concentrations of these substances. In turn, only the mutant of alr2231 was less sensitive to elevated zinc concentrations, while mutants of alr0834, alr4741 and all4499 were resistant to high manganese concentrations. Notably the mutant of alr4550 shows a high sensitivity against harmful compounds, which is indicative for a function related to the maintenance of outer membrane integrity. Moreover, the mutant of all5191 exhibited a phenotype which suggests either a higher nitrate demand or an inefficient nitrogen fixation. The dependency of porin membrane insertion on Omp85 proteins was tested exemplarily for Alr4550, and an enhanced aggregation of Alr4550 was observed in two omp85 mutants. The comparative analysis of porin mutants suggests that the proteins in parts perform distinct functions related to envelope integrity and solute uptake.