• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.134-140
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• 2021

This study investigates the flow efficiency and temperature based on flow path shape. Five models are designed to the no flow path, one flow path, two flow path, three flow path, add inlet flow path and add interior space gradient. Results show that two flow model(add inlet flow path and add interior space gradient), It was confirmed that model(add inlet flow path) is the optimal shape for coolant heat transfer, and model(add interior space gradient) is the optimal shape for coolant flow, demonstrates optimal design among the five models. The results of this study can be utilized to efficiently control the coolant flow through various types of flow paths.

• Journal of the Semiconductor & Display Technology
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• v.10 no.4
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• pp.21-23
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• 2011

Uniformity of plasma etching processes critically depends on the wafer temperature and its distribution. The wafer temperature is affected by plasma, chucking force, He back side pressure and the surface temperature of ESC(electrostatic chuck). In this work, 3D mathematical modeling is used to investigate the influence of the geometry of coolant path and the temperature distribution of the ESC surface. The model that has the coolant path with less change of the cross-sectional area and the curvature shows low standard deviation of the ESC surface temperature distribution than the model with the coolant path of the larger surface area and more geometric change.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.12 no.6
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• pp.92-96
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• 2003

Feul-Cell system consists of fuel reformer, stack and energy translator. Among these parts, stack is a core part which produces electricity directly. In order to set a stack module, fabrication of appropriate stack, design of water flow path in stack and control of coolant are needed. Especially, oater or air is used as a coolant to dissipate heat. The different temperature of each electric cell after cooling affects the performance of the stack. Therefore, it is necessary that the relationship between coolant hearing rate, width of stack, properties of stack, and the shape of water flow path must be understood. For the optimal design, the computational simulation by CFD-ACE has been conducted and the resulting database has been constructed.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.14-18
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• 2003

Feul-cell system consists of fuel reformer, stack and energy translator. Among these parts, slack is a core part which produces electricity directly. In order to set a stack module, fabrication of appropriate stack, design of water flow path in stack, and control of coolant are needed. Especially, water or air is used as a coolant to dissipate heat. The different temperature of each electric cells after cooling and the high temperature of the stack affect the performance of the stack, Therefore, it is necessary that the relationship between coolant, healing rate, width of slack, properties of stack, and the shape of water flow path must be understood. For the optimal design, the computational simulation by CFD-ACE has been conducted and the resulting database has been constructed.

• Nuclear Engineering and Technology
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• v.49 no.5
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• pp.979-988
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• 2017

The feasibility of cooling in a pressurized heavy water reactor after a large break loss-of-coolant accident has been analyzed using Multidimensional Analysis of Reactor Safety-KINS Standard code during the recirculation phase. Through evaluation of sensitivity of the fuel channel temperature to various effective recirculation flow areas, it is determined that proper cooling of the fuel channels in the broken loop is feasible if the effective flow area remains above approximately 70% of the nominal flow area. When the flow area is reduced by more than approximately 25% of the nominal value, however, incipience of boiling is expected, after which the thermal integrity of the fuel channel can be threatened. In addition, if a dramatic reduction of the recirculation flow occurs, excursions and frequent fluctuations of temperature in the fuel channels are likely to be unavoidable, and thus damage to the fuel channels would be anticipated. To resolve this, emergency coolant supply through the newly installed external injection path can be used as one alternative means of cooling, enabling fuel channel integrity to be maintained and permanently preventing severe accident conditions. Thus, the external injection flow required to guarantee fuel channel coolability has been estimated.

• Journal of the Semiconductor & Display Technology
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• v.17 no.3
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• pp.85-89
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• 2018

Temperature uniformity of a wafer in a semiconductor process is a very important factor that determines the overall yield. Therefore, it is very important to confirm the temperature characteristics of the chuck surface on which the wafer is lifted. The temperature characteristics of the chuck depend on the external heat source, the shape of the cooling channel inside the chuck, the material on the chuck surface, and so on. In this study, CFD confirms the change of temperature characteristics according to the stacking order of ceramic materials and inner coolant path on the chuck surface. Finally this study suggests the best cooling condition of electrostatic chuck.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.92-97
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• 2021

The importance of processes in cryogenic environments is increasing in a way to address problems such as critical dimension (CD) narrow and bottlenecks in micro-processing. Accordingly, in this paper, we proceed with the design and analysis of Electrostatic Chuck(ESC) and Coolant in cryogenic environments, and present optimal model conditions to provide the temperature distribution analysis of ESC in these environments and the appropriate optimal design. The wafer temperature uniformity was selected as the reference model that the operating conditions of the refrigerant of the liquid nitrogen in the doubled aluminum path were excellent. Design of simulation (DOS) was carried out based on the wheel settings within the selected reference model and the classification of three mass flow and diameter case, respectively. The comparison between factors with p-value less than 0.05 indicates that the optimal design point is when five turns of coolant have a flow rate of 0.3 kg/s and a diameter of 12 mm. ANOVA determines the interactions between the above factor, indicating that mass flow is the most significant among the parameters of interests. In variable selection procedure, Case 2 was also determined to be superior through the two-Sample T-Test of the mean and variance values by dividing five coolant wheels into two (Case 1 : 2+3, Case 2: 3+2). Finally, heat transfer analysis processes such as final difference method (FDM) and heat transfer were also performed to demonstrate the feasibility and adequacy of the analysis process.

• The KSFM Journal of Fluid Machinery
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• v.2 no.3 s.4
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• pp.24-29
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• 1999

The ASME strainers have been newly installed at the suction side of each reactor coolant pump to get rid of the foreign materials which may damage the pump impeller or interfere with the coolant path of fuel flow tube or primary plate type heat exchanger. The strainer was designed in accordance with ASME SEC. III, DIV. 1, Class 3 and the structural integrity was verified by seismic analysis. The screen was designed in accordance with the effective void area from the result of flow analysis for T-type strainer. After installation of the strainer, it was confirmed through the field test that the flow characteristics of primary cooling system were not adversely affected. The pressure loss coefficient was calculated by Darcy equation using the pressure difference through each strainer and the flow rate measured during the strainer performance test. And these are useful data to predict flow variations by the pressure difference.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.1021-1025
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• 2017

Numerical heat/flow analysis was performed on a liquid rocket engine head with the cooling water manifold to ensure the durability of a ground test facility for heat exchanger. Through these studies, the shapes of the injector and the flow path were determined and applied to the head of the engine under development. Firing tests were conducted to verify the designed coolant manifold and no thermal damage was found on the engine-head-face. Comparing the combustion test results with the numerical analysis, the outlet temperature of coolant showed a difference of about $15^{\circ}C$. This trend is reasonable considering existence of LOX manifold, thermal barrier coating, and the actual location of flame.

• Transactions of the Korean Society of Automotive Engineers
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• v.22 no.3
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• pp.179-185
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• 2014

Average temperature and temperature uniformity in a battery cell are the important criteria of the thermal management of the battery pack for hybrid electric vehicles and electric vehicles (HEVs and EVs) because high power with large size cell is used for the battery pack. Thus, liquid cooling system is generally applied for the HEV/EV battery pack. The liquid cooling system is made of multiple cooling plates with coolant flow paths. The cooling plates are inserted between the battery cells to reject the heat from batteries to coolant. In this study, the cooling plate with U-shaped coolant flow paths is considered to evaluate the effects of coolant flow condition on the cooling performance of the system. The counter flow and parallel flow set up is compared and the effect of flow rate is evaluated using CFD tool (FLUENT). The number of counter-flows and flow rate are changed and the effect on the cooling performance including average temperature, differential temperature, and standard deviation of temperature are investigated. The results show that the parallel flow has better cooling performance compared with counter flow and it is also found that the coolant flow rate should be chosen with the consideration of trade-off between the cooling performance and pressure drop.