• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.237.1-237.1
• /
• 2014

Etching is one of the most important steps in semiconductor manufacturing. In etch process control a critical task is to stop the etch process when the layer to be etched has been removed. If the etch process is allowed to continue beyond this time, the material gets over-etched and the lower layer is partially removed. On the other hand if the etch process is stopped too early, part of the layer to be etched still remains, called under-etched. Endpoint detection (EPD) is used to detect the most accurate time to stop the etch process in order to avoid over or under etch. The goal of this research is to develop a hardware and software system for EPD. The hardware consists of an Optical Plasma Monitor (OPM) sensor which is used to continuously monitor the plasma optical emission intensity during the etch process. The OPM software was developed to acquire and analyze the data to perform EPD. Our EPD algorithm is based on the following theory. As the etch process starts the plasma generated in the vacuum is added with the by-products from the etch reactions on the layer being etched. As the endpoint reaches and the layer gets completely removed the plasma constituents change gradually changing the optical intensity of the plasma. Although the change in optical intensity is not apparent, the difference in the plasma constituents when the endpoint has reached leaves a unique signature in the data gathered. Though not detectable in time domain, this signature could be obscured in the frequency spectrum of the data. By filtering and analysis of the changes in the frequency spectrum before and after the endpoint we could extract this signature. In order to do that, first, the EPD algorithm converts the time series signal into frequency domain. Next the noise in the frequency spectrum is removed to look for the useful frequency constituents of the data. Once these useful frequencies have been selected, they are monitored continuously in time and using a sub-algorithm the endpoint is detected when significant changes are observed in those signals. The experiment consisted of three kinds of etch processes; ashing, SiO2 on Si etch and metal on Si etch to develop and evaluate the EPD system.

• Journal of Radiation Protection and Research
• /
• v.38 no.1
• /
• pp.29-36
• /
• 2013

The aim of this study was to determine the correlation between exposure index (EI) and dose factors related to radiation dose optimization in digital radiography (DR) system. Two phantoms with built-in regional test object for quantitative assessment of images were used to produce image signals that acquired in chest radiography background. EI and entrane surface dose (ESD) increased proportionally with rise of radiation dose (kVp, mAs) in both DR and CR systems. Especially, DR detector was effective to form good contrast and hence, reached easily to improvement of image quality with minimal dose changes. It made operators possible to expect the accuracy of EI values deeply related to absorbed dose of the detector. The evaluation of images was obtained specially employed calculation of noise to signal ratio (NSR) and contrast to noise ratio (CNR). These measurements were performed for how exposure factors affect image quality. NSR was inversely proportional to kVp and mAs and low NSR represented high signal detection efficiency. Consequently, EI values was the measure of the amount of exposure received by the image receptor and it was proportional to exposure factors. Therefore the EI in a recommended range from manufacturer can offer optimal image quality. Also, continuous monitoring of EI values in the digital radiography can reduce the unnecessary patient dose and help the quality control of the system.

• Journal of the Institute of Electronics Engineers of Korea SC
• /
• v.39 no.6
• /
• pp.42-48
• /
• 2002

The design, construction and performance test of a convenient multi-purpose irradiator is described. A multi-purpose irradiator using Cesium-137 has been developed for studies of low dose radiation effects in biology and for calibration of Thermo Luminescent dosimeter(TLD). During the operation, three rods of radioactive material which are 10cm in length revolve 180 degrees and irradiate biological samples, or TLD, and return to their shielded position, after the programmed time. A programmable Logic Controller(PLC) controls the sequence of operation, interlock, motor rotation and safety system. The rotation speed of biological samples can vary up to 20 RPM. A real time monitoring system was also incorporated to check and control the operation status of the irradiator. The capacity of the irradiation chamber was 4.5 liters. The isodose distribution at arbitrary vertical planes was measured by using film dosimetry. The dose-rate was 0.13 cGy/min in air and 0.11 cGy/min in water equivalent material in the case of Cesium-137. Range of activity was 2 Ci. The homogeneity of dose distribution in the chamber was ${\pm}$7%. The actual radiation level on the surface was within permissible levels. The irradiator had a maximum 0.35 mR/min radiation leakage on its surface.

• Journal of Korean Society for Atmospheric Environment
• /
• v.32 no.2
• /
• pp.216-232
• /
• 2016

In present, the Seoul City is undergoing traffic congestion problems caused by rapid urbanization and population growth. Thus the City government has reorganized the mass transportation system since 2004 and the subway has become a very important means for public transit. Since the subway system is typically a closed environment, the indoor air quality issues have often raised by the public. Especially since a huge amount of PM (particulate matter) is emitted from ground tunnels passing through the subway train, it is now necessary to assess the characteristics and behaviors of fine PM inside the tunnel. In this study, the concentration patterns of $PM_1$, $PM_{2.5}$, and $PM_{10}$ in the Seoul subway line-2 were analyzed by real-time measurement during winter (Jan 13, 2015) and summer (Aug 7, 2015). The line-2 consisting of 51 stations is the most busy circular line in Seoul having the railway of 60.2 km length. The the one-day average $PM_{10}$ concentrations were $148{\mu}g/m^3$ in winter and $66.3{\mu}g/m^3$ in summer and $PM_{2.5}$ concentrations were $118{\mu}g/m^3$ and $58.5{\mu}g/m^3$, respectively. The $PM_{2.5}/PM_{10}$ ratio in the underground tunnel was lower than the outdoor ratio and also the ratio in summer is higher than in winter. Further the study examined structural types of underground subsections to explain the patterns of elevated PM concentrations in the line-2. The subsections showing high PM concentration have longer track, shorter curvature radius, and farther from the outdoor stations. We also estimated the outdoor PM concentrations near each station by a spatial statistical analysis using the $PM_{10}$ data obtained from the 40 Seoul Monitoring Sites, and further we calculated $PM_{2.5}/PM_{10}$ and $PM_1/PM_{10}$ mass ratios near the outdoor subway stations by using our observed outdoor $PM_1$, $PM_{2.5}$, and $PM_{10}$ data. Finally, we could develop pollution maps for outdoor $PM_1$ and $PM_{2.5}$ near the line-2 by using the kriging method in spatial analysis. This methodology may help to utilize existing $PM_{10}$ database when managing and control fine particle problems in Korea.

• Journal of The Korean Society of Agricultural Engineers
• /
• v.59 no.6
• /
• pp.127-135
• /
• 2017

In this study, a cold well and a warm one with the distance of 100 m were installed in the alluvial aquifer. Groundwater used as the heat and the cold source of heat pump was designed to flow into the warm and the cold well with a diameter of 200 mm. In order to increase the heat and cold storage in aquifer, six auxiliary wells with the diameter of 50 mm and the depth of 30 m were installed at an interval of 5 m from the main well. Also, heat pump 50 RT, the thermal tank $40m^3$, and a remote control and monitoring system were installed in three single-span greenhouses ($2,100m^2$) for growing tomato in Buyeo, Chungcheongnam-do. According to the aquifer heat storage test which had been conducted from Aug. 31 to Sep. 22, 2016, warm water of $850m^3$ was found to flow into warm well. The temperature of the injected water was $30^{\circ}C$ (intake temperature : $15^{\circ}C$), and the heat of 12.8 Gcal was stored. The greenhouse heating test in winter had been conducted from Nov. 21, 2016 to Apr. 30, 2017. On Nov. 21, 2016 when heating greenhouse started, the aquifer temperature of the warm well was $18.5^{\circ}C$. The COP for heating with water source at $18.5^{\circ}C$ was 3.8. The intake water temperature of warm well was gradually lowered to the temperature of $15^{\circ}C$ on Jan. 2, 2017 and the heat pump COP was measured to be 3.2 at that time. As a result, the heat pump COP was improved by 18 %. and retrieval heat was 8 Gcal, the retrieval rate of heat stored in aquifer was estimated at 63 %.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
• /
• v.39 no.6
• /
• pp.541-548
• /
• 2021

Recently, multispectral cameras are being actively utilized in various application fields such as agriculture, forest management, coastal environment monitoring, and so on, particularly onboard UAV's. Resultant multispectral images are typically georeferenced primarily based on the onboard GPS (Global Positioning System) and IMU (Inertial Measurement Unit)or accurate positional information of the pixels, or could be integrated with ground control points that are directly measured on the ground. However, due to the high cost of establishing GCP's prior to the georeferencing or for inaccessible areas, it is often required to derive the positions without such reference information. This study aims to provide a means to improve the georeferencing performance of a multispectral camera images without involving such ground reference points, but instead with the simultaneously onboard high resolution RGB camera. The exterior orientation parameters of the drone camera are first estimated through the bundle adjustment, and compared with the reference values derived with the GCP's. The results showed that the incorporation of the images from a high resolution RGB camera greatly improved both the exterior orientation estimation and the georeferencing of the multispectral camera. Additionally, an evaluation performed on the direction estimation from a ground point to the sensor showed that inclusion of RGB images can reduce the angle errors more by one order.

• Journal of Appropriate Technology
• /
• v.6 no.1
• /
• pp.37-44
• /
• 2020

Medical waste is any kind of waste that contains infectious material and recommended not to be transferred for infection control. As a means of disposal, incineration has better points than dumping or landfill in the quantity reduction, odorless and nonhazardous. However, open burning and incineration of health care wastes under bad circumstances, can result in the emission of environmental pollutants to air. A burial of biological waste brings pollution of soil and water. Most of sub divisional hospitals in Fiji transfer their medical wastes to divisional hospitals for incineration. In 2011, 62,518 kg of medical waste was incinerated in the three divisional hospitals. However, some medical wastes are considered as general waste and burnt or sent to landfill site, some are buried on site in some sub-divisional hospitals. In this regards, urgent education is necessary for awareness promotion to relevant personnel in medical waste treatment. On site incineration using small scale incinerator is more recommended than transportation of medical wastes treatment in Fiji. Moreover, remotely controllable and fixable small scale of incinerator is more desirable in sub-divisional hospitals. It is recommended that Fiji government to set up a legal framework for medical waste management (MWM), to develop specific guidelines for MWM, to set up a training system for MWM to ensure that all relevant personnel are trained, to develop a monitoring and supervision system for MWM, to clarify the future financing of MWM activities, and to improve the MWM infrastructure.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
• /
• v.17 no.1
• /
• pp.76-81
• /
• 2024

Recently, agricultural methods are changing from experience-based agriculture to data-based agriculture. Changes in agricultural production due to the 4th Industrial Revolution are largely occurring in three areas: smart sensing and monitoring, smart analysis and planning, and smart control. In order to realize open-field smart agriculture, information on the physical and chemical properties of soil is essential. Conventional physicochemical measurements are conducted in a laboratory after collecting samples, which consumes a lot of cost, labor, and time, so they are quickly measured in the field. Measurement technology that can do this is urgently needed. In addition, a soil analysis system that can be carried and moved by the measurer and used in Korea's rice fields, fields, and facility houses is needed. To solve this problem, our goal is to develop and commercialize software that can collect soil samples and analyze the information. In this study, basic soil composition measurement was conducted using soil composition measurement sensors consisting of hardness measurement and electrode sensors. Through future research, we plan to develop a system that applies soil sampling using a CCD camera, ultrasonic sensor, and sampler. Therefore, we implemented a sensor and soil analysis UI that can measure and analyze the soil condition in real time, such as hardness measurement display using a load cell and moisture, PH, and EC measurement display using conductivity.

• Journal of dental hygiene science
• /
• v.14 no.2
• /
• pp.150-157
• /
• 2014

The aim of this study was to suggest a convenient method of monitoring the gingival state through plaque detection. Quantitative Light-Induced Fluorescence-Digital (QLF-D), which can assess mature plaque, can be used to assess the oral hygiene status of individuals and to establish an adequate intervention plans for them. The subjects of the study participated in the clinical training at Department of Dental Hygiene, N University. The subjects completed questionnaires on general characteristics and oral hygiene methods. Then, photographs of maxillary and mandibular anterior teeth of the subjects were taken using the QLF-D. After the oral examinations, gingival state was recorded according to the $L{\ddot{o}}e$ & Silness's Gingival Index (GI). In addition, a plaque control record was calculated in percentage using disclosing agent. The analysis of the relation between the plaque control record and the QLF-D scores showed positive correlation (r=0.638, p<0.001), and the analysis of the relation between the QLF-D scores and the gingival bleeding index scores also showed positive correlation (r=0.562, p<0.001). Besides, the study classified the participants into healthy gingiva group and the gingivitis group according to the classification criteria of GI, and when the difference of QLF-D scores between the groups was analyzed, the QLF-D scores were statistically significantly higher (t=-2.785, p=0.007) in the gingivitis group ($1.71{\pm}1.545$) than the healthy gingiva group ($0.74{\pm}1.290$). When the differences in mean values of the QLF-D scores were analyzed against and the gingival bleeding index scores, the QLF-D scores of 0 and 1 belonged to the category of normal gingival state while the QLF-D scores of 2, 3 and 4 belonged to the category of gingivitis state. Therefore, it is deemed that the red fluorescence detected by the QLF-D from the mature supragingival plaque can be used for monitoring the state of gingivitis.

• The Korean Journal of Pesticide Science
• /
• v.9 no.4
• /
• pp.429-436
• /
• 2005

As Sclerotinia sclerotiorum causing cucumber sclerotinia rot was the fastest in the mycelial growth at $25^{\circ}C$, its pathogenicity was strong at the same temperature among several temperatures. All the isolates of Sclerotinia sclerotiorum showed a strong pathogenicity against cucumber fruits, which was confirmed by a disk assay and a wound assay. A wound assay was superior to a disk assay to develop the assay system for assessing the fungicidal activity of several fungicides against Sclerotinia sclerotiorum. In a disk assay, it was very difficult to assess the fungicidal activity, because the pathogenicity of isolates used in the experiment was very strong. At 500 and $3.0{\mu}g/mL$, the activity of dichloflouanid and the mixture of carbendazim and diethofencarb against cucumber sclerotinia rot was 14.3 and 42.3%, respectively, by using a disk assay. However, at same concentration two fungicides showed the high controlling activity as 100 and 92.5%, through a wound assay in a laboratory. Also, the activity of two fungicides was good against cucumber sclerotinia rot in the greenhouse where cucumber plants were cultivated in the field, showing the control value as 91.1 and 82.9% at 100 and $825{\mu}g/mL$, respectively. All the isolates of Sclerotinia sclerotiorum from cucumber fruits sampled in the polyvinyl house were subjected to monitoring for the resistance to 7 fungicides. The $EC_{50}$ value of 7 fungicides was as follows: fenhexamid; $0.13{\mu}g/mL$, procymidon and iprodione; 0.18 and $0.24{\mu}g/mL$, carbendazim and the mixture of carbendazim and diethofencarb; 0.13과 $0.05{\mu}g/mL$, iminoctadine and dichlofluanid; 1.94 and $8.95{\mu}g/mL$. Ultimately it was not found that resistant isolates of Sclerotinia sclerotiorum were appeared in the field.