• Korean Journal of Materials Research
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• v.8 no.9
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• pp.837-842
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• 1998

As the size of the integrated circuit is scaled down the importance of Si cleaning has been emphasized. One of the major concerns is abut the removal of metallic impurities such as Cu and Fe on Si surface. In this study, we intentionally contaminated Cu and Fe on the Si wafers and cleaned the wafer by cleaning splits of the chemical mixture of $\textrm{H}_2\textrm{O}_2$ and HF and the combination of HF treatment with UV/$\textrm{O}_3$ treatment. The contamination level was monitored by TXRF. Surface microroughness of the Si wafers was measured by AFM. The Si wafer surface was examined by SEM. AES analysis was carried out to analyze the chemical composition of Cu impurities. The amount of Cu impurities after intentional contamination was abut the level of $\textrm{10}^{14}$ atoms/$\textrm{cm}^2$. The amount of Cu was decreased down to the level of $\textrm{10}^{10}$ atoms/$\textrm{cm}^2$ by cleaning splits. The repeated treatment exhibited better Cu removal efficiency. The surface roughness caused by contamination and removal of Cu was improved by repeated treatment of the cleaning splits. Cu were adsorbed on Si surface not in a thin film type but in a particle type and its diameter was abut 100-400${\AA}$ and its height was 30-100${\AA}$. Cu was contaminated on Si surface by chemical adsorption. In the case of Fe the contamination level was $\textrm{10}^{13}$ atoms/$\textrm{cm}^2$ and showed similar results of above Cu cleaning. Fe was contaminated on Si surface by physical adsorption and as a particle type.

• Journal of Soil and Groundwater Environment
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• v.9 no.4
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• pp.52-61
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• 2004

In order to remediate soils contaminated with oxyanionic As and cationic Zn and Ni through the pilot-scale acid washing, the effectiveness of acid washing and the properties of contaminated soils, fine soil particle and dissolved contaminants were evaluated. $H_{2}SO_4\;and\;H_{3}PO_4$ washing at pH $2{\sim}3$ enhanced the removal of As by the presence of competitive oxyanions and HCl washing effectively removed simultaneously As, Zn and Ni. The effectiveness of soil washing was little enhanced above the critical reaction time, and the carbonate, Fe/Mn oxide and organic/sulfides associated fraction were dominantly removed. The washing of coarse soil particles was highly efficient, but that of fine soil particles($<74{\mu}m$) was recalcitrant due to the enrichment with contaminants. Moreover, the physical separation of fine particles($<149{\mu}m$) enhanced the overall efficiency of soil washing. Therefore, both chemical extraction and separation of fine soil particles showed the high effectiveness of soil washing in the intersection point to minimize the amount of fine soil particles and to maximize the chemical extraction of contaminants.

• Journal of Soil and Groundwater Environment
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• v.15 no.2
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• pp.47-54
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• 2010

Although the demands for the dredging work have been increasing due to social and industrial reasons including national plan for restoration of four major rivers, environmental standards or management guidelines for the dredged river sediment are limited. The suggested environmental standard for the beneficial use of dredged river sediment consists of two levels, recyclable and concern, and includes eight contaminants such as metals and organic contaminants. The systematic approach to remediate dredged river sediment is also suggested. The system consists of both washing and stabilization processes with continuous multi particle separation. In the early stage, the sediments are separated into two particle sizes. The coarse-grained sediment over 0.075 mm, generally decontaminated with less trouble, follows normal washing steps and is sent for recycling. The fine-grained sediments under 0.075 mm are separated again at 0.025 mm. The particles bigger than this second separation point are treated in two ways, advanced washing for highly contaminated sediments and stabilization for less. The lab test results show that birnessite and apatite are most effective stabilizing agents among tested for Cd and Pb. The most fine residues, down-sized by continuous particle separation, are finally sent for disposal. The system is tested for metals in this study, but is expected to be effective for organic contaminants included in the environmental standard, such as PAH and PCE. The feasibility test on the field site will be followed.

• Tribology and Lubricants
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• v.31 no.6
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• pp.281-286
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• 2015

Automotive transmission systems are assembled with a large number of gears and shafts, and rolling bearings are used to ensure their smooth operation. Gear oil in the gear box contains solid particles such as wear debris from contacting gears and metallic chips. This particle-enriched lubricating oil can cause premature failure of the rolling bearings. Research aimed at improving the service life of these rolling bearings has been confined mainly to design and lubrication of the inner/outer rings and the rolling elements. In this paper, we redesigned the shape of the cage pocket of a deep groove ball bearing to reduce the premature failure due to particle contamination. Test bearings are assembled with this new cage design containing a hole punched in the cage pocket. Endurance tests are carried out using the contaminated lubricating oil with miracle grid as hard particle. The duration and damaged bearing component shapes are compared for two different cages. The B₁₀ life of bearing with new cage is increased by about 66% compared to the conventional cage. This is because the hard particles can be easily discharged through the pocket hole without staying for a long time in the lubrication regions. This greatly decreases abrasive wear and dents on the highly stressed ball bearing surfaces. Therefore, the cage design of this study, containing a pocket hole, can significantly delay the premature failure of rolling bearings and improve the endurance life.

• Journal of Soil and Groundwater Environment
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• v.19 no.6
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• pp.72-79
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• 2014

Cavitation generated by ultrasonic irradiation can enhance the diffusional transport of organic contaminants from soil surfaces or pores. Therefore, ultrasound soil washing can be an alternative of traditional soil washing process. In this study, soil was artificially contaminated with n-tetradecane, n-hexadecane and phenanthrene. A plate type ultrasonic reactor at 25 kHz frequency and 1000W power was used for laboratory soil washing experiments. Ultrasonic soil washing efficiency was compared with those of traditional soil washing using mechanical mixing. Various operational parameter such as soil/liquid ratio, irradiation time, particle size, and soil organic matter content was tested to find out the optimum condition. It was found that ultrasonic soil washing demonstrates better performance than mechanical soil washing. Optimum soil:liquid ratio for ultrasonic soil washing was 1 : 5. Desorption of organic contaminants from soils by ultrasonic irradiation was relatively fast and reached equilibrium within 10 minute. However, decrease in the soil particle sizes by ultrasonic irradiation results in re-adsorption of contaminants to soil phase. It was also observed that soil particle size distribution and soil organic matter content have significant effects on the efficiency of ultrasonic soil washing.

• Journal of Soil and Groundwater Environment
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• v.16 no.1
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• pp.71-81
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• 2011

Cause of contamination in the study area nearby Jang Hang Refinery is dust scattering in refinery stack, and soil washing treatment is one of the proper technologies for soil remediation in this area. Site conditions frequently limit the selection of a treatment process. A treatment technology may be eliminated based on the soil classification or physicochemical characteristics of soil. This study was assessed the soil washing efficiency by conducting of soil characteristic analysis in the vicinity of Jang Hang Refinery Stack within a 2 km radius. Also, it was decided about remedial range with comparative analysis of As in soil by Korean Standard Test Method before/after revision, whereupon As concentration in soil showed a increasing tendency after revision. As a result, the soil washing using the size separation of soil was determined through identifying of As species in the soil. In this site, only particle size distribution and water content of soil can provide the initial means of screening for the potential use of soil washing.

• Progress in Superconductivity and Cryogenics
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• v.25 no.3
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• pp.13-17
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• 2023

Magnetic separation technology for small paramagnetic particles has been desired for the volume reduction of contaminated soil from the Fukushima nuclear power plant accident and for the separation of scale and crud from nuclear power plants. However, the magnetic separation for paramagnetic particles requires a superconducting high gradient magnetic separation system applied, hence expanding the bore diameter of the magnets is necessary for mass processing and the initial and running costs would be enormous. The use of high magnetic fields makes safe onsite operation difficult, and there is an industrial need to increase the magnetic separation efficiency for paramagnetic particles in as low a magnetic field as possible. Therefore, we have been developing a magnetic separation system combined with a selection tube, which can separate small paramagnetic particles in a low magnetic field. In the previous technique we developed, a certain range of particle size was classified, and the classified particles were captured by magnetic separation. In this new approach, the fluid control method has been improved in order to the selectively classify particles of various diameters by using a multi-stage selection tube. The soil classification using a multi-stage selection tube was studied by calculation and experiment, and good results were obtained. In this paper, we report the effectiveness of the multi-stage selection tube was examined.

• Journal of the Korean Society of Marine Environment & Safety
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• v.28 no.2
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• pp.212-223
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• 2022

For the remediation and restoration of contaminated sediment at the West Sea-Byeong dumping site, dredged materials was dumped in 2013, 2014, 2016, and 2017. The physicochemical properties and benthic fauna in surface sediments of the capping area (5 stations) and natural recovery area (2 stations) were analyzed annually from 2014 to 2020 to evaluate the capping effect of the dredged materials. The natural recovery area had a finer sediment with a mean particle size of 5.91-7.64 Φ, while the sediment in the capping area consisted of coarse-grained particles with a mean particle size of 1.47-3.01 Φ owing to the capping effect of dredged materials. Considering that the contents of organic matters (COD, TOC, and TN) and heavy metals in the capping area are approximately 50 % lower (p<0.05) than that in the natural recovery area, it is judged that there is a capping effect of dredged materials. As a result of analyzing macrobenthic assemblages, the number of species and ecological indices of the capping area were significantly lower than that of the natural recovery area (p<0.05). The number of species and ecological indices at the capping area were increased for the first four years after the capping in 2013 and 2014 and then tended to decrease thereafter. It is presumed that opportunistic species, which have rapid growth and short lifetime, appeared dominantly during the initial phase of capping, and the additory capping in 2016 and 2017 caused re-disturbance in the habitat environment. In the natural recovery and capping areas, Azti's Marine Biotic Index (AMBI) was evaluated as a fine healthy status because it maintained the level of 2^nd grades (Good), whereas Benthic Pollution Index (BPI) remained at the 1^st and 2^nd grade. Therefore, capping of dredged materials for remediation of contaminated sediment in the dumping site has the effect of reducing the pollution level. However, in terms of the benthic ecosystem, it is recommended that the recovery trend should be monitored long-term. Additionally, it is necessary to introduce an adaptive management strategy when expanding the project to remediate the contaminated sediment at the dumping area in the future.

• Journal of Microbiology and Biotechnology
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• v.23 no.9
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• pp.1279-1286
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• 2013

Particle size and metal species are important to both soil microbial toxicity and phytotoxicity in the soil ecosystem. The effects of CuO and ZnO nanoparticles (NPs) and microparticles (MPs) on soil microbial toxicity, phytotoxicity, and bioaccumulation in two crops (Cucumis sativus and Zea mays) were estimated in a soil microcosm. In the microcosm system, soil was artificially contaminated with 1,000 mg/kg CuO and ZnO NPs and MPs. After 15 days, we compared the microbial toxicity and phytotoxicity by particle size. In addition, C. sativus and Z. mays were cultivated in soils treated with CuO NPs and ZnO NPs, after which the treatment effects on bioaccumulation were evaluated. NPs were more toxic than MPs to microbes and plants in the soil ecosystem. We found that the soil enzyme activity and plant biomass were inhibited to the greatest extent by CuO NPs. However, in a Biolog test, substrate utilization patterns were more dependent upon metal type than particle size. Another finding indicated that the metal NP uptake amounts of plants depend on the plant species. In the comparison between C. sativus and Z. mays, the accumulation of Cu and Zn by C. sativus was noticeably higher. These findings show that metal oxide NPs may negatively impact soil bacteria and plants. In addition, the accumulation patterns of NPs depend on the plant species.

• Korean Journal of Materials Research
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• v.24 no.8
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• pp.429-433
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• 2014

As the fabrication technology used in FPDs(flat-panel displays) advances, the size of these panels is increasing and the pattern size is decreasing to the um range. Accordingly, a cleaning process during the FPD fabrication process is becoming more important to prevent yield reductions. The purpose of this study is to develop a FPD cleaning system and a cleaning process using a two-phase flow. The FPD cleaning system consists of two parts, one being a cleaning part which includes a two-phase flow nozzle, and the other being a drying part which includes an air-knife and a halogen lamp. To evaluate the particle removal efficiency by means of two-phase flow cleaning, silica particles $1.5{\mu}m$ in size were contaminated onto a six-inch silicon wafer and a four-inch glass wafer. We conducted cleaning processes under various conditions, i.e., DI water and nitrogen gas at different pressures, using a two-phase-flow nozzle with a gap distance between the nozzle and the substrate. The drying efficiency was also tested using the air-knife with a change in the gap distance between the air-knife and the substrate to remove the DI water which remained on the substrate after the two-phase-flow cleaning process. We obtained high efficiency in terms of particle removal as well as good drying efficiency through the optimized conditions of the two-phase-flow cleaning and air-knife processes.