• 한국전기전자재료학회논문지
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• 제18권9호
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• pp.840-845
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• 2005

A three branches vortical Hall sensor for detecting rotation angle of brushless motor has fabricated. The sensor is constructed three branches of $150{\mu}m$ width and $300{\mu}m$ distance from central electrode to Hall electrode. Each branch has one Hall output and one Hall input. The central electrode acts as common driving input. According to rotation angle change of brushless motor, sensor gives three position signals phase shifted by $120^{\circ}$. The sensitivity of sensor is 200V/A$\cdot$T at magnetic field of 0.1 T and constant driving current of 1mA. It has also showed three sine waves of Hall output voltages with $120^{\circ}$ phase over one motor rotation. The noise can limit sensor's resolution. We have measured sensor's noise characteristics. The detectable minimum magnetic field is $20{\mu}T$ at driving current 1mA, measured frequency 1 kHz and bandwidth$({\Delta}f)$ of 1Hz.