• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.244.2-244.2
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• 2013

Contact Pattern을 Plasma Etching을 통해 Pattering 공정을 진행함에 있어서 Plasma 내에 존재하는 High Energy Ion 들의 Bombardment 에 의해, Contact Bottom 의 Silicon Lattice Atom 들은 Physical 한 Damage를 받아 Electron 의 흐름을 방해하게 되어, Resistance를 증가시키게 된다. 또한 Etchant 로 사용되는 Fluorine 과 Chlorine Atom 들은, Contact Bottom 에 Contamination 으로 작용하게 되어, 후속 Contact 공정을 진행하면서 증착되는 Ti 나 Co Layer 와 Si 이 반응하는 것을 방해하여 Ohmic Contact을 형성하기 위한 Silicide Layer를 형성하지 못하도록 만든다. High Aspect Ratio Contact (HARC) Etching 을 진행하면서 Contact Profile을 Vertical 하게 형성하기 위하여 Bias Power를 증가하여 사용하게 되는데, 이로부터 Contact Bottom에서 발생하는 Etchant 로 인한 Damage 는 더욱 더 증가하게 된다. 이 Damage Layer를 추가적인 Secondary Damage 없이 제거하기 위하여 본 연구에서는 원자층 식각방법(Atomic Layer Etching Technique)을 사용하였다. 실험에 사용된 원자층 식각방법을 이용하여, Damage 가 발생한 Si Layer를 Secondary Damage 없이 효과적으로 Control 하여 제거할 수 있음을 확인하였으며, 30 nm Deep Contact Bottom 에서 Damage 가 제거될 수 있음을 확인하였다. XPS 와 Depth SIMS Data를 이용하여 상기 실험 결과를 확인하였으며, SEM Profile 분석을 통하여, Damage 제거 결과 및 Profile 변화 여부를 확인하였으며, 4 Point Prove 결과를 통하여 결과적으로 Resistance 가 개선되는 결과를 얻을 수 있었다.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.5
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• pp.531-537
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• 2012

Fretting fatigue tests were conducted to investigate the effect of contact pressure on fretting fatigue behavior in aluminum alloy A7075-T6. Test results showed that when the contact pressure is so low that gross or partial slip occurs at the pad/specimen interface, fretting fatigue damage increases with the contact pressure. However, when the contact pressure is high enough to prevent slip at the interface, fretting fatigue damage decreases with the contact pressure. In order to understand how the contact pressure influence the fretting fatigue damage, finite element analyses were conducted and the analysis results were used to evaluate critical plane fretting fatigue damage parameters and their components. It is revealed that fretting fatigue damage estimated with the parameters exhibits the same variation as that in the tests. Moreover, the variation of fretting fatigue damage is closely related with that of the maximum normal stress on the critical plane rather than the strain amplitude on the critical plane.

• Journal of Korea Foundry Society
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• v.17 no.6
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• pp.577-584
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• 1997

Evaluation of rolling contact fatigue damage as well as material development for roll of rolling mill is being studied until quite recently. In this paper, a focus has been imposed on evaluating the rolling contact fatigue damage. In order for this, the accumulating process of rolling contact damage using the ferritic, pearlitic and bainitic DCI has been analyzed by X-ray diffraction technique. The main finds are; 1) The graphite in DCI is considered to be a cause of interfering in the redistribution of stress. Eventually, it results in the branching of crack. 2) The evaluation of rolling contact fatigue damage can be estimated in terms of the change of residual stress and/or a half-value breadth on surface during rolling contact.

• Journal of Advanced Marine Engineering and Technology
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• v.32 no.6
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• pp.931-937
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• 2008

The rail/wheel rolling contact affects the microstructure in the surface layer of rail. Recently. continuum damage mechanics allows us to describe the microprocesses involved during the straining of materials and structures at the macroscale. Elastic and plastic strains. the corresponding hardening effects are generally accepted to be represented by global continuum variables. The purpose of continuum damage mechanics is to introduce the possibility of describing the coupling effects between damage processes and the stress-strain behavior of materials. In this study. the continuum damage mechanics caused by elastic deformation was briefly introduced and applied to the fatigue damage of the rails under the condition of cyclic loading. The material parameter for damage analysis was first determined so that it could reproduce the life span under the compressive loading in the vicinity of fatigue limit. Some numerical studies have been conducted to show the validity of the present computational mechanics analysis.

• Computers and Concrete
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• v.1 no.3
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• pp.261-284
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• 2004

Two enhancements to a recently developed plastic-damage-contact model for concrete are presented. The model itself, which uses planes of degradation that can undergo damage and separation but that can regain contact according to a contact law, is described. The first enhancement is a new damage evolution function which provides a completely smooth transition from the undamaged to the damaged state and from pre-peak to post-peak regions. The second is an improved contact function that governs the potential degree of contact with increasing opening on a crack plane. The use of a damage evolution function with a pre-peak has implications for the consistent tangent matrix/stress recovery algorithm developed for the model implementation, and amendments to this algorithm to accommodate the new function are described. A series of unpublished experimental tests on notched specimens undertaken in Cardiff in the mid 1990s are then described. These include notched beam tests as well as prismatic and cylindrical torsion tests. The tests are then considered in three dimensional finite element analyses using the modified Craft model implemented in the finite element program LUSAS. Comparisons between experimental and numerical data show reasonable agreement except that the numerical simulations do not fully describe the latter stages of the softening responses for the torsion examples. Finally, it is concluded that the torsion tests described provide useful benchmark examples for the validation of three-dimensional numerical models for concrete.

• KSTLE International Journal
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• v.1 no.1
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• pp.48-51
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• 2000

Surface damage accumulation of alumina ceramics under the cyclic stress state was analyzed. The alternating stress state in repeat pass sliding contact was simulated by a synchronized biaxial (normal and tangential) repeated indentation technique. Wear debris formation mechanism through damage accumulation and fatigue grain failure in both alumina ceramic balls and flat disks was confirmed, and the contact induced surface degradation due to fatigue cracking accumulation was quantified by measuring vertical contact displacement. Variation of structural compliance (slope of load-displacement curve) of two contacting bodies was expressed as a variation of the apparent elastic property, called pseudo-elastic constant, of the contact system.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.8
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• pp.1599-1607
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• 2002

The purpose of this work is to suggest a new non-contact damage detection method for rotating ferromagnetic shafts. The presence and the location of a damage in rotating shafts are assessed by means of longitudinal elastic waves propagating along the shafts. These waves are measured by non-contact magnetostrictive sensors consisting of a coil and bias magnets. This paper shows the effectiveness of the sensors in the damage detection of rotating shafts. Several issues occurring in the application of the sensors to rotating shafts are carefully investigated.

• Journal of the Korean Association of Oral and Maxillofacial Surgeons
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• v.40 no.6
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• pp.278-284
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• 2014

Objectives: This study used cone-beam computed tomography (CBCT) images to categorize the relationships between the mandibular canal and the roots and investigated the prevalence of nerve damage. Materials and Methods: Through CBCT images, contact and three-dimensional positional relationships between the roots of the mandibular third molar and the mandibular canal were investigated. With this data, prevalence of nerve damage according to the presence of contact and three-dimensional positional relationships was studied. Other factors that affected the prevalence of nerve damage were also investigated. Results: When the mandibular third molar and the mandibular canal were shown to have direct contact in CBCT images, the prevalence of nerve damage was higher than in other cases. Also, in cases where the mandibular canal was horizontally lingual to the mandibular third molar and the mandibular canal was vertically at the cervical level of the mandibular third molar, the prevalence of nerve damage was higher than in opposite cases. The percentage of mandibular canal contact with the roots of the mandibular third molar was higher when the mandibular canal was horizontally lingual to the mandibular third molar. Finally, the prevalence of nerve damage was higher when the diameter of the mandibular canal lumen suddenly decreased at the contact area between the mandibular canal and the roots, as shown in CBCT images. Conclusion: The three-dimensional relationship of the mandibular third molar and the mandibular canal can help predict nerve damage and can guide patient expectations of the possibility and extent of nerve damage.

• Journal of the Korean Society of Safety
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• v.26 no.3
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• pp.1-7
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• 2011

Fatigue damage on the train wheel surface was estimated by considering the effect of friction coefficient of rolling on the contact surface between the wheel and rail during operation. From FEM analys, the maximum Tresca stress was 550.7 MPa at a depth of 2.07 mm under the maximum contact pressure ($P_{max}$ = 894.3 MPa) between wheel and rail. The maximum stress continued to increase along with the increase in the frictional coefficient. The fatigue initiation lifetime of the wheel by the rolling contact was predicted using the Smith-Watson-Topper (SWT) equation and the maximum principal strain equation (${\varepsilon}$-N).

• Proceedings of the KSME Conference
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• 2001.06a
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• pp.561-566
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• 2001

A long bar impact test to alumina plates(AD 85 and AD 90) was carried out by using fabricated impact testing apparatus. The apparatus adopting a long bar of 2.1m in length made it possible to measure directly the applied impact force to the specimen during bar impact. The dimension of specimens was $33{\times}33mm$ and thickness was 3.4mm. Confinement of D2=18mm outer diameter and D1=10.5mm inner diameter was used to provide contact pressure to the specimen. Contact pressure of p=100 or 200MPa was applied to specimen before impact test. Damage caused in those cases were compared with the case of without contact pressure. The damage of specimen was different depending upon the pressure level of confinement. The existence of confinement had suppressed the development of radial cracks from the bottom of specimen and reduced the extent of damage as compared with cases without contact pressure(p=0MPa). Because the application of contact pressure to the specimen increased the apparent flexural stiffness of specimen during bar impact, it had produced the change of developed damage in the specimen; from the radial cracks to the local contact stress dominant damage. It would contribute to the improvement of the ballistic property in ceramic plates.