• Title/Summary/Keyword: Contact Material

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The Improvement of Profile Tilt in High Aspect Ratio Contact (컨택 산화막 에칭에서의 바닥 모양 찌그러짐 변형 개선)

  • Hwang, Won-Tae;Choi, Sung-Gil;Kwon, Sang-Dong;Im, Jang-Bin;Jung, Sang-Sup;Park, Young-Wook
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.666-670
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    • 2004
  • VLSI 소자에서 design rule(D/R)이 작아져 각 단위 Pattern의 size가 작아짐에 따라 aspect ratio가 커지게 되었다. 산화막 contact etch를 하는데 있어 산화막 측벽을 보호하는데, 이러한 보호막은 주로 fluoro-carbon 계열의 polymer precursor들이 사용된다. Aspect ratio(A/R)가 5 이하일 때에는 측벽의 보호막에 의한 바닥 변형이 문제가 되지 않으나, 10 이상의 A/R를 가진 contact에서는 크기가 줄고, 모양이 불균형하게 변하는 바닥 변형을 쉴게 관찰할 수 있다. 이러한 바닥 변형이 커지면 contact 저항이 높아지는 것은 물론이고, 심하게는 하부 pattern과 overlap 불량을 유발할 수 있다. 본 논문에서는 바닥변형을 일으키는 원인을 분석하고 fluoro-carbon 계열의 polymer precursor의 종류$(C_4_F6\;vs.\;C_3F_8)$에 따른 polymer증착 상태 확인 및 pattern비대칭에 따른 바닥 변형의 고찰과 plasma etching 시 H/W 변형을 통해 바닥 변형이 거의 없는 조건을 찾아낼 수 있었다.

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A Study on the Compression Characteristics of Bi-polymer O-rings (복합소재 O-링의 압축변형 특성에 관한 연구)

  • Kim, Do-Hyun;Kim, Chung-Kyun
    • Tribology and Lubricants
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    • v.21 no.4
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    • pp.171-176
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    • 2005
  • O-ring seal is an essential component in various mechanical apparatuses for a sealing of oil container and pressure vessels. This paper presents the sealing pressure and compressive contact behaviors of hi-polymer O-rings, which is made by an outer shell of FFKM material and an inner solid ring of FKM one. The contact normal pressure and its ratios are measured by experimental method with an automatic control system of the working temperature and analyzed numerically by using the non-linear Marc FEM program. The results show reasonably good agreements between the computed FEM results and measured ones when the operating temperature is kom normal temperature of $18^{\circ}C$ and a high temperature of $300^{\circ}C$ But the compared values between the computed and tested results show a little difference because of the increased temperature, which is related to the non-linear parameter of the O-ring material. Bi-polymer 0-ring shows a good contact normal stress and compression behavior for a given operation temperature and compression ratio.

A Study on the Characteristics of the Tube-to-Support Dynamic Impact Force Measurement Facility (튜브와 지지대 사이의 동적상호 충격력 측정장치 특성규명에 관한 연구)

  • 김일곤;박진무
    • Journal of KSNVE
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    • v.5 no.1
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    • pp.95-106
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    • 1995
  • Flow-induced vibration in heat exchanger (or fuel rod) in nuclar power plant can cause dynamic interactions between tubes and tube supports resulting in fretting-wear. To increase the reliability and design life of heat exchanger components, design criteria that establish acceptable limits of vibration and minimize fretting wear are necessary. The fretting-wear rate is dependent upon material combination, contact configuration, environmental conditions and tube-to tube support dynamic interaction. It is demostrated that the fretting -wear rate correlates well with tube-to-support contact force or work rate. The tube-to-support dynamic interaction, which consists of dynamic contact forces and tube motion, is used to relate single-span wear data to real heat exchanger configurations consisting of multi-span tube bundles. This paper describes the test facility to measure tube-to-support dynamic impact force and reports its dynamic characteristics through the four impact tests - a force transduces independent and external impact tests, central ring inside impact test and additional cylinder impact test. Through the tests the impact parameter change dependent upon the material difference of impacting ball is studied, and the impact parameters of Force Transducer Assembly components are measured. And also the dynamic behavior of Force Transducer Assembly is analyzed. The force measurement technique herein is shown to provide a reasonable measure of dynamic contact forces.

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Development and Characterization of Vertical Type Probe Card for High Density Probing Test (고밀도 프로빙 테스트를 위한 수직형 프로브카드의 제작 및 특성분석)

  • Min, Chul-Hong;Kim, Tae-Seon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.9
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    • pp.825-831
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    • 2006
  • As an increase of chip complexity and level of chip integration, chip input/output (I/O) pad pitches are also drastically reduced. With arrival of high complexity SoC (System on Chip) and SiP (System in Package) products, conventional horizontal type probe card showed its limitation on probing density for wafer level test. To enhance probing density, we proposed new vertical type probe card that has the $70{\mu}m$ probe needle with tungsten wire in $80{\mu}m$ micro-drilled hole in ceramic board. To minimize alignment error, micro-drilling conditions are optimized and epoxy-hardening conditions are also optimized to minimize planarity changes. To apply wafer level test for target devices (T5365 256M SDRAM), designed probe card was characterized by probe needle tension for test, contact resistance measurement, leakage current measurement and the planarity test. Compare to conventional probe card with minimum pitch of $50{\sim}125{\mu}m\;and\;2\;{\Omega}$ of average contact resistance, designed probe card showed only $22{\mu}$ of minimum pitch and $1.5{\Omega}$ of average contact resistance. And also, with the nature of vertical probing style, it showed comparably small contact scratch and it can be applied to bumping type chip test.

Study on terminal shape and pressure for contact type Ic measurement of long Bi-2223 tape (Bi-2223 초전도 테이프의 접촉식 Ic 측정을 위한 단자 형상 및 압력 조사)

  • Ha, D.W.;Yang, J.S.;Ha, H.S.;Oh, S.S.;Kwon, Y.K.;Ryu, K.S.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.04a
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    • pp.25-28
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    • 2002
  • Contact type Ic measurement system is needed to measure Ic continuously for long Bi-2223 tapes. Voltage and current terminals were designed several shapes for 4-probe method Ic measurement. Voltage terminals were made with brass and current terminals were made with Cu. We used 2 kinds of Bi-2223 tapes with different strength. When we measured Ic of Bi-2223 tape with Ag-Mg sheath, The proper weight was 0.3 kg and sharp pin type was better. according to voltage terminal shape and load. In case of Bi-2223 tape with Ag-Mn sheath, the proper terminal weight was 4 kg and sharp pin type was bad. It was possible to make continuous contact type Ic measurement system because We could get proper data - terminal shapes and loads - through these experiments.

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Polymerization of Contact Lens Materials Using Silicone (Silicone을 이용한 콘택트렌즈 재료의 중합)

  • Kim, Tae-Hun;Ye, Ki-Hun;Kwon, Young-Seok;Sung, A-Young
    • Journal of Korean Ophthalmic Optics Society
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    • v.11 no.2
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    • pp.143-149
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    • 2006
  • The purpose of this study is synthesizing silicone polymer which is used the material of contact lens and solving the problems of water content and light transmittance for gas permeable contact lens. We used NVP, MMA, HEMA monomer for polymerization and EGDMA as cross linking regent. Also, we polymerized with a several formulation arrangement for the best condition as contact lens. After that. we measured water content and light transmittance by each sample which was polymerized. We polymerized the silicone polymer which is simultaneously pursued by the transparent and water content of the material and measured their physical nature of each sample on this study.

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Ink-Jet 3D Printability of Ceramic Ink with Contact Angle Control

  • Park, Jae-Hyeon;Lee, Ji-Hyeon;Kim, Deug Joong;Hwang, Kwang-Taek;Kim, Jin-Ho;Han, Kyu-Sung
    • Journal of the Korean Ceramic Society
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    • v.56 no.5
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    • pp.461-467
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    • 2019
  • Ink-jet printing technology, which utilizes a digitalized design to print fine ink directly on a substrate, has been of interest in various industries due to its high efficiency and adaptability to various materials. Recently, active attempts have been made to apply ceramic materials having excellent heat resistance, light resistance, and chemical resistance to the ink-jet printing process. In this study, ceramic ink was synthesized by combining ceramic pigments with UV curable polymer. 3D printability at various contact angles between ceramic ink and substrate was analyzed in detail. Rheological properties of the synthesized ceramic ink were optimized to meet the requirements of the ink-jet printing process, and the contact angle of UV curable ceramic ink was controlled through surface treatment of the substrate. The potential for additive manufacturing of ceramic material using ink-jet printing was investigated by analyzing the effect of contact angle control on ceramic ink droplets and their 3D printability.

Implementation of Optical-based Measuring Instrument for Contact Wire Geometry in Electric Railway (전기철도의 전차선로 형상검측을 위한 광학기반 검측 장치 구현)

  • Park, Young;Cho, Yong-Hyeon;Jung, Ho-Sung;Lee, Ki-Won;Kim, Hyung-Chul;Kwon, Sam-Young;Park, Hyun-June;Kim, Won-Ha
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.9
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    • pp.868-871
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    • 2008
  • We propose an optical-based measuring instrument of catenary system in electric railway. This system was made to utilize line scan camera as inspecting system to measure the stagger and height of overhead contact wire in railway and composed with optical type source and FPGA-based image acquisition system with PCI slot. Vision acquisition software has been used for the application to programming interface for image acquisition, display, and storage with a frequency of sampling. To check the validity of our approach for the intended application, we monitored height and stagger in the overhead wire of a high-speed catenary system in Korea. The proposed optical-based measuring instrument to measure the contact wire geometry such as the hight and stagger shows promising on-field applications for online condition motoring. We expect that a new generation of real-time instruments with demanding various conditions motoring requirement in railway can be easily integrated into optical-based measuring instrument system.

Implementation of Real-Time Monitoring System for Overhead Contact Wire in Electric Railway (전차선로 검측을 위한 실시간 화상처리 시스템 구현)

  • Park, Young;Cho, Young-Hyeon;Lee, Ki-Won;Kwon, Sam-Young;Park, Hyun-Jun;Jang, Dong-Uk
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.543-544
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    • 2006
  • This paper describes a simple real-time monitoring system for use in measurement subsystem of contact wire and geometry of overhead contact wire in electric railway. The system has been consists of a high speed CMOS camera with resolution $1024\;{\times}\;1280$ pixels, line type laser source with a power equal to 300 mW, and PC-based image acquisition system with PCI Express slot. National instrument LabVIEW (8.0) and vision acquisition software have been used in application programming interface for image acquisition, display, and storage with a frequency of sampling of 500 acquisitions per second.

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Effect of System Dependent Harmonics in the Measurement of Ultrasonic Nonlinear Parameter by Using Contact Transducers (접촉식 탐촉자를 이용한 초음파 비선형 파라미터의 측정에서 시스템에 의존하는 고조파 성분의 영향)

  • Choi, Ik-Hwang;Lee, Jae-Ik;Kwon, Goo-Do;Jhang, Kyung-Young
    • Journal of the Korean Society for Nondestructive Testing
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    • v.28 no.4
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    • pp.358-363
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    • 2008
  • Ultrasonic nonlinearity has been considered as a promising method to evaluate the micro damage of material; however, its magnitude is so small that its measurement is not easy. Thus, in this study, we investigate the effects of such experimental system dependent factors in the measurement of ultrasonic nonlinear parameter by using contact PZT transducer. Experimental results showed that the effect of system dependent nonlinearity is reduced when the contact pressure and transducer input voltage are sufficiently large. These results will be very useful to find out the proper experiment condition to measure rather accurate nonlinear parameter.