• Journal of the Semiconductor & Display Technology
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• v.7 no.3
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• pp.29-34
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• 2008

This paper describes the fabrication and characterization of a differential pressure type integrated mass-flow controller made of stainless steel for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally closed valve and differential pressure sensor. A stacked solenoid actuator mounted on a base-block is utilized for precise and rapid control of gas flow. The differential pressure flow sensor consisting of four diaphragms can detect a flow rate by deflection of diaphragm. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a fast response less than 0.3 sec. Also, this device shows accuracy less than 0.1% of full scale. It is confirmed that this device is not attacked by toxic gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control corrosive gases with fast response.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.29 no.12
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• pp.628-637
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• 2017

This study was conducted to present an effective control method for the common duct system to uniformly discharge volume flow rate exhausted from the kitchen and bathroom of each household in an apartment regardless of the position of household. Since the common duct system is installed vertically and the ventilator is installed in the terminal, the static pressure of each household decreases when vertical height increases. Therefore, the volume flow rate exhausted from each household is different. In order to improve such a phenomenon, a constant air volume damper shall be installed in a branch duct coupled with a common vertical duct system. The selected ventilator should also be able to handle the maximum volume flow rate considering diversity factor. Therefore, a uniform volume flow rate must be exhausted from all households where the hood is operated. This paper mainly focuses on suggestion of an optimum exhaust control method by comparing exhaust performance of each household according to the presence or absence of a constant air volume damper.

• International Journal of Internet, Broadcasting and Communication
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• v.7 no.2
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• pp.28-35
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• 2015

Thin film electronic devices which brought the current mobile environment could be fabricated only under the high quality vacuum conditions provided by high vacuum systems. Especially for the development of advanced thin film devices, constant high quality vacuum as the deposition pressure is definitely needed. For this purpose, the variable conductance throttle valves were employed to the high vacuum system. In this study, the effects of throttle valve applications on vacuum characteristics were simulated to obtain the optimum design modelling of variable conductance of high vacuum system. Commercial simulator of vacuum system, $VacSim^{(multi)}$, was used on this investigation. Reliability of employed simulator was verified by the simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure of below $10^{-3}torr$. Simulation results were plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• Journal of Biosystems Engineering
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• v.40 no.2
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• pp.95-101
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• 2015

Purpose: During the start-up period, the response time of a hydraulic system increases in the winter because of the increased oil viscosity caused by the cold weather. The problems of delayed tractor starting and excessive wear of the clutch disk occur for these reasons. Therefore, this study develops an analysis model using the commercial hydraulic analysis program AMESim to examine the characteristics of delays in power shuttle starting at different oil temperatures. Methods: In the experiment, a tractor was stationary on a flat surface with the engine running at a constant speed of 1,080 rpm. The forward lever was then pressed to activate the power shuttle at three different oil temperatures, and the pressure changes were measured. The pressure on the forward clutch control valve was measured by a pressure gauge installed on the hydraulic line supplied to the transmission from the main valve. An analysis model was also developed and verified with actual tests. Results: The trend of the simulated pressures of the power shuttle is similar to that of the measured pressures, and a constant modulation period was observed in both the simulation and test results. However, the difference found between the simulation and test results was the initial pressure required to overcome the initial force of the clutch spring. Conclusions: This study also examines the characteristics of the delayed startup of the power shuttle at different oil temperatures through simulations.

• 유체기계공업학회:학술대회논문집
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• 2005.12a
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• pp.448-453
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• 2005

Temperature Control Valve (TCV) is one of the useful temperature control devices, which is used to control constant temperature of working fluid in power and chemical plants and domestic water supply systems. TCV is composed of body, cylinder and piston, and the body shape has a symmetrical H-type. In general, it has several inlet and outlet holes, and its shape is like as tubular sleeve. The piston has three rings two rings of the end of piston have the function of controlling inlet flow rate with hot and cold working fluids, the center ring has the function of preventing hot and cold water from intermixing. Consequently, the shapes of piston and cylinder are the main design parameters in the performance of TCV. In this study, numerical analyses were carried out with two different piston and cylinder shapes to investigate the functions as a temperature control valve and the flow characteristics according to piston opening grade in TCV. Using a commercial code, FLUENT, velocity and pressure fields in TCV are obtained under steady, standard $k -{\epsilon}$ turbulence model and no-slip condition.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.1
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• pp.121-130
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• 2002

Clean stockers are being used by semiconductor and TFT-LCD manufacturers to store and buffer work in process. Since an important function of a stocker is to keep the contained material clean. The only way to keep the stored product clean is to provide constant clean airflow the product and through stocker, The airflow across the product prevent contamination from settling on the product. Up to now, stocker typically have been configured to receive their laminar airflow from fan filter units that are located on the side of the stocker This type of stocker may have such problems as complexity of structure, increment of temperature, mechanical vibration, initial investment and running cost. In this study, In order to solve the above mentioned problems, new air control system in stocker is proposed, which is to control open ratios of exits that are located on the side of the stocker without fan filter units. Open ratios of exits need to be optimized for the same quantities of airflow in each exit. In this study, static pressure regain was used for the analysis of the open ratios of exits theoretically and Blue Ridge Numerics FEM software, CFDesign, was used fur simulating airflow in stocker. As a result, Open ratios of exits important to provide constant clean airflow can be obtained by the analysis of static pressure regain and was verified by simulation results. Therefore, new air control system in stocker can be used by the semiconductor and TFT-LCD manufacturers.

• Journal of Drive and Control
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• v.15 no.4
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• pp.1-10
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• 2018

Spool displacement of a direction control valve is the standard signal to measure the bandwidth frequency of the direction control valve. When the spool displacement signal is not available, it is suggested in this study to use the metering hydraulic line as an alternative way to measure - 90 degree phase bandwidth frequency of the hydraulic direction control valve. Dynamics of the hydraulic line is composed of inertia, capacitance, and friction effects. The effect of oil inertia is dominant in common hydraulic line dynamics and the line dynamics is close to a derivative action in a range of high frequency; such as a range of bandwidth frequency of common directional control valves. Phase difference between spool displacement and line load pressure is nearly constant as a valve close to 90 degree. If phase difference is compensated from the phase between valve input and pressure, compensated phase may be almost same as the phase of spool displacement that is a standard signal to measure phase bandwidth frequency of the directional control valve. A series of experiments were conducted to examine the possibility of using line pressure in to measure phase bandwidth frequency of a directional control valve. Phase bandwidth frequency could be measured with relatively high precision based on metering hydraulic line technique and it reveals consistent results even when valve input, oil temperature, and supply pressure change.

• Journal of Microbiology and Biotechnology
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• v.15 no.3
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• pp.587-594
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• 2005

The contribution of electrostriction of water molecules to the stabilization of the negatively charged tetrahedral transition state of a lipase-catalyzed reaction was examined by means of kinetic studies involving high-pressure and solvent dielectric constant. A good correlation was observed between the increased catalytic efficiency of lipase and the decreased solvent dielectric constant. When the dielectric constant of solvents was lowered by 5.00 units, the losses of activation energy and free energy of activation were 7.92 kJ/mol and 11.24 kJ/mol, respectively. The activation volume for $k_{cat}$ decreased significantly as the dielectric constant of solvent decreased, indicating that the degree of electrostriction of water molecules around the charged tetrahedral transition state has been enhanced. These observations demonstrate that the increase in the catalytic efficiency of the lipase reaction with decreasing dielectric constant resulted from the stabilization of electrostatic energy for the formation of an oxyanion hole, and that this stabilization was caused by the increase of electrostricted water around the charged tetrahedral transition state. Therefore, we conclude that the control of solvent dielectric constant can stabilize the tetrahedral transition state, thus lowering the activation energy.

• 제어로봇시스템학회:학술대회논문집
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• 1991.10a
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• pp.468-468
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• 1991

The variable-frequency type water supply equipment, which adopts the variable-voltage and variable-frequency converter(VVVF converter) to govern automatically the rotating speed of a pump, can save 15-20% of power, as compared with a throttle-controlled pump device or an airpressurized water supply equipment, and is finding a wide application. However, it still has some disadvantages : greater pressure fluctuations during switching over the pump and prolonged low-effeciency running of the pump in the case of small consumption of water. Therefore, it is difficult to apply the equipment to the fire water supply system where the water should not be put into use unless a fire takes place, and the water pressure in pipelines should permanently remain constant. This paper introduces the automatic regulation principle of the variable-frequency type air-pressurized water supply equipment (hereafter referred to as simply BFQS equipment) for dual purposes of daily life and fire control, which combined both technologies of speed governing by a converter and air-pressurized water supplying, then discusses some problems related to automatic control, and finally gives the experimental results of an embodiment-BPQS-100-50 water supply equipment.

• Journal of Drive and Control
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• v.15 no.3
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• pp.36-42
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• 2018

Agricultural tractors require frequent shifting to improve operation efficiency, and PST (Powershift Transmission) is considered as a suitable transmission. However, due to the inherent characteristics of the PST, shocks arise during shifting, which imparts a negative effect on the operator. Therefore, in order to improve the transmission performance of the tractor PST, researches on various methods including the hydraulic system circuit, the engine input speed control, and the mechanical system of the transmission are steadily being conducted. In this study, in order to reduce the impact of PST on a shift based on SimulationX software, we analyzed the characteristics of the input signal of PCV (Pressure Control Valve) through sensitivity analysis and verified the simulation model through actual vehicle test. Optimization was performed for minimizing the shift shock for some of the parameters of the input signal at constant temperature and RPM conditions.