• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.264.2-264.2
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• 2013

Molecular layer deposition (MLD) is sequential, self-limiting surface reaction to form conformal and ultrathin polymer film. This technique generally uses bifunctional precursors for stepwise sequential surface reaction and entirely organic polymer films. Also, in comparison with solution-based technique, because MLD is vapor-phase deposition based on ALD, it allows epitaxial growth of molecular layer on substrate and is especially good for surface reaction or coating of nanostructure such as nanopore, nanochannel, nanwire array and so on. In this study, polyurea film that consisted of phenylenediisocyanate and phenylenediamine was formed by MLD technique. In situ Fourier Transform Infrared (FTIR) measurement on high surface area SiO2 substrate was used to monitor the growth of polyurethane and polyurea film. Also, to investigate orientation of chemical bonding formed polymer film, plan-polarized grazing angle FTIR spectroscopy was used and it showed epitaxial growth and uniform orientation of chemical bones of polyurea films.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.9 no.6
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• pp.813-823
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• 1998

This paper analyzed the circularly polarized conformal microstrip patch antennal using the unsplit anisotropic perfectly matched layer(UAPML) method. Also, this paper are treated effectively the edge and corner parts on the 3 dimensional UAPML. Especially, to analyze microstrip patch antennas with the coaxial feeder line, it was applied to mixed the UAPML with Mur's first order absorbing boundary condition. Therefore this paper suggest the new the method to mix the UAPML with Mur's first order absorbing boundary condition. The results show the time responses of electromagnetics $E_z$ and $H\chi'$, input impedances of coaxial cable and radiation patterns of strip parchs on the single and the array patchs with central frequencies 1.575 GHz, 1.778 GHz and 4.8 GHz in L-band and C-band for mobile communication. The results of this paper shows that its results was compared the Mur's first order abc and mixed the second order dispersion boundary condition(SDBC) with the Mur's first order absorbing boundary condition. In accordance with, the validity of the method is confirmed.

• Journal of the Microelectronics and Packaging Society
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• v.25 no.4
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• pp.149-154
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• 2018

This paper describes the fabrication and heat transfer property of 50 watts rated LED array module where multiple chips are mounted on chip-on-board type ceramic-metal hybrid substrate with high heat dissipation property for high power street and anti-explosive lighting system. The high heat transfer ceramic-metal hybrid substrate was fabricated by conformal coating of thick film glass-ceramic and silver pastes to form insulation and conductor layers, using thick film screen printing method on top of the high thermal conductivity aluminum alloy heat-spreading panel, then co-fired at $515^{\circ}C$. A comparative LED array module with the same configuration using epoxy resin based FR-4 PCB with thermalvia type was also fabricated, then the thermal properties were measured with multichannel temperature sensors and thermal resistance measuring system. As a result, the thermal resistance of the ceramic-metal hybrid substrate in the $4{\times}9$ type LEDs array module exhibited about one third to the value as that of FR-4 substrate, implying that at least triple performance of heat transfer property as that of FR-4 substrate was realized.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.5
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• pp.218-224
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• 2003

This paper describes a novel MEMS integration technique on a CMOS chip. MEMS integration on CMOS circuit has many advantages in view of manufacturing cost and reliability. The surface topography of a CMOS chip from a commercial foundry has 0.9 ${\mu}{\textrm}{m}$ bumps due to the conformal coating on aluminum interconnect patterns, which are used for addressing each MEMS element individually. Therefore, it is necessary to achieve a flat mirror-like CMOS chip fer the microelectromechanical system (MEMS) such as micro mirror array. Such CMOS chip needs an additional thickness of the dielectric passivation layer to ease the subsequent planarization process. To overcome a temperature limit from the aluminum thermal degradation, this study uses RF sputtering of silicon nitride at low temperature and then polishes the CMOS chip together with the surrounding dummy pieces to define a polishing plane. Planarization reduces 0.9 ${\mu}{\textrm}{m}$ of the bumps to less than 25 nm.

• 대한공업교육학회지
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• v.36 no.1
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• pp.115-130
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• 2011

When the hollow cylinder structure moves in underwater with high speed structural can be propagated from the end of the structure to the front side. This noise can reduce the sensitivity of the conformal array which installed in the surface of the cylinder. To reduce this noise propagation it is suggested to install two self-reduction rings at the surrounding of the cylinder which is 500mm in diameter and 840mm in length. The places of the two noise reduction rings are 120mm and 240mm point from the end of the structure. Two noise reduction rings reduced 10.1 % of maximum stress. When outside noise frequency applied to the structure from the 4kZ to 6kHz, 20dB noise reduction was calculated using 6 order polynomial equation. When outside noise frequency also applied to the structure with 200Hz, 500Hz, 900Hz, maximum sound pressure level point moved to the end of the structure. Most conformal sensors are fabricated at the front side of the structure. Based on the simulation results proposed two rings can be reduced noise propagation from the tail of the structure effectively.

• Journal of Practical Engineering Education
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• v.10 no.1
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• pp.41-47
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• 2018

Underwater acoustic sensors are mounted on unmanned underwater vehicles(UUV) and detect and process the underwater information. These underwater acoustic sensor designs are very important subject for understanding and applying engineering. Therefore, in this paper, it was designed and fabricated the acoustic sensors step by step, evaluated their performance, and then studied the suitability of such a series of design procedures and steps to apply them to the integrated design learning. The results of the questionnaire survey showed that the steps and methods of the proposed sensor design are suitable for the contents of the integrated design project, and they are easy to acquire the technology and are very interesting design topics. It is anticipated that when the design project is applied to the integrated design in the future, high educational achievement will be achieved.

• Journal of the Microelectronics and Packaging Society
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• v.11 no.2 s.31
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• pp.59-66
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• 2004

This paper presents a novel fabrication process for a tapered hollow metallic microneedle array using backside exposure of SU-8, and analytic solutions of critical buckling of a tapered hollow microneedle. An SU-8 meta was formed on a Pyrex glass substrate and another SU-8 layer, which was spun on top of the SU-8 mesa, was exposed through the backside of the glass substrate. An array of SU-8 tapered pillar structures. with angles in the range of $3.1^{\circ}{\sim}5^{\circ}$ was formed on top of the SU-8 mesa. Conformal electrodeposition of metal was carried out followed by a mechanical polishing using a pianarizing polymeric layer. All organic layers were then removed to create a metallic hollow microneedle array with a fluidic reservoir on the backside. Both $200{\mu}m\;and\;400{\mu}m$ tall, 10 by 10 arrays of metallic microneedles with inner diameters of the tip in the range of $33.6{\sim}101\;{\mu}m$ and wall thickness of $10{\mu}m\;-\;20{\mu}m$ were fabricated. Analytic solutions of the critical buckling of arbitrary-angled truncated cone-shaped columns are also presented. It was found that a single $400{\mu}m$ tall hollow cylindrical microneedle made of electroplated nickel with a wall thickness of $20{\mu}m$, a tapered angle of $3.08^{\circ}$ and a tip inner diameter of $33.6{\mu}m$ has a critical buckling force of 1.8 N. This analytic solution can be used for square or rectangular cross-sectioned column structures with proper modifications.

• Progress in Medical Physics
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• v.27 no.1
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• pp.37-45
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• 2016

In proton therapy, in vivo proton beam range verification is very important to deliver conformal dose to the target volume and minimize unnecessary dose to normal tissue. For this purpose, a multi-slit prompt-gamma camera module made of 24 scintillation detectors and 24-channel signal processing system is under development. In the present study, we have developed and tested a dual-mode signal processing system, which can operate in the energy calibration mode and the fast data acquisition mode, to process the signals from the 24 scintillation detectors. As a result of performance test, using the energy calibration mode, we were able to perform energy calibration for the 24 scintillation detectors at the same time and determine the discrimination levels for the detector channels. Further, using the fast data acquisition mode, we were able to measure a prompt-gamma distribution induced by a 45 MeV proton beam. The measured prompt gamma distribution was found similar to the proton dose distribution at the distal fall-off region, and the estimated beam range was $17.13{\pm}0.76mm$, which is close to the proton beam range of 16.15 mm measured by an EBT film.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.20 no.4
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• pp.389-398
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• 2002

As the necessity of land information has increased according to development of computer and Information-communication, people have been interested in the satellite measurement system that can update Cadastral and Geographical information rapidly and exactly. Most Cadastral base points which had limitation of measurement technology in the 1910s were less accurate and were destroyed through the Korean War. They also many problems in the process of reinstallation. So, they require the quick and correct method of measurement in re-equipment of a base point and a parcel based survey and so on. This study intends to present the GPS survey direction by understanding and analysing all sorts of problems rising in case of applying the GPS to cadastral area in order to increase the efficiency of the GPS measurement, and also develop the GPS kinematic survey program to apply to the efficiency of a kinematic survey. As a result of research, I could confirm the accuracy of Cadastral base points in Kwangju area by using Korea GPS array and a base point, and could get the result similar to existent cadastral survey result with the coordinate conversion program of Cadastral technology research institute. We however have to pay our attention to the transformation of the plane coordinates because the difference between tens of cm and the existing result can outbreak according to the Gauss conformal double projection method. And, I could figure out the practicality of the developed GPS kinematic survey program, compared with common use program. I expect that it can be applied to the digital cadastral survey and the cadastral map renewal as well.

• Progress in Medical Physics
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• v.23 no.4
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• pp.219-228
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• 2012

The tangential breast intensity modulated radiotherapy (T-B IMRT) technique, which uses the same tangential fields as conventional 3-dimensional conformal radiotherapy (3D-CRT) plans with physical wedges, was analyzed in terms of the calculated dose distribution feature and dosimetric accuracy of beam delivery during treatment. T-B IMRT plans were prepared for 15 patients with breast cancer who were already treated with conventional 3D-CRT. The homogeneity of the dose distribution to the target volume was improved, and the dose delivered to the normal tissues and critical organs was reduced compared with that in 3D-CRT plans. Quality assurance (QA) plans with the appropriate phantoms were used to analyze the dosimetric accuracy of T-B IMRT. An ionization chamber placed at the hole of an acrylic cylindrical phantom was used for the point dose measurement, and the mean error from the calculated dose was $0.7{\pm}1.4%$. The accuracy of the dose distribution was verified with a 2D diode detector array, and the mean pass rate calculated from the gamma evaluation was $97.3{\pm}2.9%$. We confirmed the advantages of a T-B IMRT in the dose distribution and verified the dosimetric accuracy from the QA performance which should still be regarded as an important process even in the simple technique as T-B IMRT in order to maintain a good quality.