• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.433-433
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• 2012

As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

• Korean Journal of Ecology and Environment
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• v.41 no.1
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• pp.34-42
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• 2008

Water quality standards (WQS) are mandatory to guarantee the human health and protection of aquatic ecosystems, and maintain the condition of suitable water quality. The present WQS for the protection of human health in Korea contain nine substances (As, Cd, $Cr^{6+}$, CN, Pb, Hg, ABS, organophosphorus compounds and PCBs), but it is insufficient to preserve the human and aquatic ecosystem from a variety of chemicals. Therefore, it is necessary to expand the substance of WQS for the protection of human health. In this study, we chose the 20 chemicals from 43 chemicals of the project entitled 'Development of Integrated Methodology for Evaluation of Water Environment'. The methodology for calculating water quality criteria was amended from the US Environmental Protection Agency (US EPA)'s equation for deriving ambient water quality criteria for the protection of human health. The factors including fish intake, drinking water intake, and human body weight used in the equation reflected Korean situations. The monitoring values were derived from the water quality monitoring data in Korean four main rivers. The orders of priorities of chemicals were evaluated by human health risk assessment, and the proposed WQS was derived by technical and economic analyses. These results were reflected to expand the WQS for the protection of human health.

• Journal of Yeungnam Medical Science
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• v.18 no.1
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• pp.30-38
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• 2001

Background: The purpose of this study was to evaluate the usefulness of diffusion-weighted magnetic resonance imaging for monitoring the response to radiation therapy in metastatic bone marrow of the spines. Materials and Methods: Twenty-one patients with metastatic bone marrow of the spines were examined with MRI. Diffusion-weighted and spin-echo MRI were performed in 10 patients before and after radiation therapy with or without systemic chemotherapy, and performed in 11 patients after radiation therapy alone. Follow up spin-echo and diffusion-weighted MRI were obtained at 1 to 6 months after radiation therapy according to patients' condition. The diffusion-weighted imaging sequence was based on reversed fast imaging with steady-state precession (PSIF). Signal intensity changes of the metastatic bone marrows before and after radiation therapy on conventional spin-echo sequence MRI and diffusion-weighted MRI were evaluated. Bone marrow contrast ratios and signal-to-noise ratios before and after radiation therapy of diffusion- weighted MRI were analyzed. Results: All metastatic bone marrow of the spinal bodies were hyperintense to normal bone marrow of the spinal bodies on pretreatment diffusion-weighted MRI and positive bone marrow contrast ratios(p<0.001), and hypointense to normal spinal bodies on posttreatment diffusion-weighted MRI and negative bone marrow contrast ratios(p<0.001). The signal to noise ratios after treatment decreased comparing with those of pretreatment. Decreased signal intensity of the metastatic bone marrows on diffusion-weighted MRI began to be observed at average more than one month after the initiation of the radiation therapy. Conclusion: These results suggest that diffusion-weighted MRI would be an excellent method for monitoring the response to therapy of metastatic bone marrow of the spinal bodies, however, must be investigated in a larger series of patients with longer follow up period.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.20 no.6
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• pp.101-107
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• 2020

Road surface measurement is an essential process for quantifying the degree and displacement of roughness in road surface management. For safer road surface management and quick maintenance, it is important to accurately measure the road surface while mounted on a vehicle. In this paper, we propose a sophisticated road surface measurement system that can be measured on a moving vehicle. The proposed road surface measurement system supports more accurate measurement of the road surface by using a high-performance line laser sensor. It is also possible to measure the transverse and longitudinal profile by matching the position information acquired from the RTK, and the velocity adaptive update algorithm allows a manager to monitor in a real-time manner. In order to evaluate the proposed system, the Gocator laser sensor, MRP module, and NVIDIA Xavier processor were mounted on a test mobile and tested on the road surface. Our evaluation results demonstrate that our system measures accurate profile base on the MSE. Our proposed system can be used not only for evaluating the condition of roads but also for evaluating the impact of adjacent excavation.

• Journal of the Korean Recycled Construction Resources Institute
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• v.9 no.2
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• pp.191-199
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• 2021

In this study, the correlation between the influencing factors on corrosion and Half Cell Potential(HCP) measurement was analyzed considering the three levels of W/C ratio, cover depth, and chloride concentration. The HCP increased with enlarged cover depth, so it was confirmed that the increment of cover depth was effective for control of corrosion. Based on the criteria, the case of 60mm cover depth showed excellent corrosion control with under -200mV, indicating increase of cover depth is an effective method for reducing intrusion of external deterioration factors. When fresh water was injected to the upper part of specimens, very low level of HCP was monitored, but in the case that concentrations of chloride were 3.5% and 7.0%, HCP dropped under -200mV. In addition, the case with high volume of unit binder showed lower HCP measurement like increasing cover depth. Multiple regression analysis was performed to evaluate the correlation between the corrosive influence factors and HCP results, showing high coefficient of determination of 0.97. However, there were limitations such as limited number of samples and measuring period. Through the additional corrosion monitoring and chloride content evaluation after dismantling the specimen, more reasonable prediction can be achieved for correlation analysis with relevant data.

• Analyses & Alternatives
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• v.7 no.2
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• pp.179-207
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• 2023

Carbon neutrality, the international community's practical challenge in response to climate change, is becoming a key industrial strategy for the future development of nations. Despite concerns that China, as an economic powerhouse in the G2, may face challenges leading global climate change efforts due to its high-carbon-emitting industrial structure, it is leveraging carbon neutrality to enhance its industrial competitiveness. The Chinese government has formulated national policies for achieving carbon neutrality and detailed sector-specific plans to implement them. In particular, it aims to leverage carbon neutrality industrial strategies as a lever for adjusting the domestic industrial structure and fostering new industries, at the same time responding to international climate norms and external pressures. However, the effectiveness of carbon-neutral industrial strategies is expected to vary based on regional conditions such as economic and industrial levels. This article analyzes the regional conditions for implementing carbon neutrality in China, as well as the contents and characteristics of major industrial policies. Due to differing levels of economic development and industrial structures, significant variations in carbon emissions, size, emission sources, and efficiency are inevitable across regions. These disparities introduce diverse initial conditions and endogenous factors in pursuing carbon-neutral goals, limiting the direction and implementation of carbon-neutral industrial strategies favoring certain regions. In particular, the extent of policy autonomy granted to local governments regarding carbon neutrality implementation will influence the regional dynamics of central-local environmental governance. Consequently, it is crucial to emphasize regional monitoring alongside comprehensive national research to accurately navigate the path towards carbon neutrality in China. In summary, the article underscores the importance of understanding regional variations in economic development, industrial structure, and policy autonomy for successful carbon neutrality implementation in China. It highlights the need for regional monitoring and comprehensive national research to determine a more precise direction for achieving carbon neutrality.

• Journal of the Earthquake Engineering Society of Korea
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• v.10 no.6 s.52
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• pp.1-8
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• 2006

This paper describes the procedures developing the algorithm for analyzing signals acquired from the Bridge Weigh-in-Motion (BWIM) system installed in Seohae Bridge as a part of the bridge monitoring system. Through the analysis procedure, information about heavy traffics such as weight, speed, and number of axles are attempted to be extracted from time domain strain data of the BWIM system. One of numerous pattern recognition techniques, artificial neural network (ANN) is employed since it can effectively include dynamic effects, bridge-vehicle interaction, etc. A number of vehicle running experiments with sufficient load cases are executed to acquire training and/or test set of ANN. Extracted traffic information can be utilized for developing quantitative database of loading effect. Also, it can contribute to estimate fatigue lift or current health condition, and design truck can be revised based on the database reflecting recent trend of traffic.

• Journal of The Korean Society of Agricultural Engineers
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• v.56 no.4
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• pp.1-8
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• 2014

Appropriate amount of water supply to paddy fields in proper time is important to achieve efficient agricultural water management. The purpose of this study is to evaluate the irrigation water supply adequacy for paddy fields using water level data in irrigation canals. For the evaluation, the real-time water level data were collected from main canals in the Dongjin irrigation district for 2 years. Using the water level data, delivered irrigation water amounts at the distribution points of each canal were calculated. The water balance model for paddy field was designed considering intermittent irrigation and the irrigation water requirement was estimated. Irrigation water supply adequacy was analyzed from main canals to the irrigation blocks based on the comparison between estimated requirement and delivered irrigation water amounts. From the adequacy analysis, irrigation water supply showed poor management condition in 2012 with low efficiency except the Daepyong canal section, and the adequacy in 2013 was good or fair except the Yongsung canal section. When irrigation water for paddy fields was insufficient, water supply adequacy was affected by irrigation area, but when irrigation water was enough to supply, adequacy was affected by distance from main canal to distribution points. These results of the spatial and temporal dimensions of the irrigation adequacy could be utilized for efficient irrigation water management to improve the temporal uniformity and equity in the water distribution for paddy fields.

• Journal of the Korean housing association
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• v.27 no.2
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• pp.21-31
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• 2016

In recent rural areas, unlike the past, the young population is increasing with the growth of the agricultural industry and the quality of life-focused trend. Therefore, the rural areas need to more actively respond to the housing demands of the young generations. In this regard, this study aimed to research the housing conditions of the households with children and identify any problems. The study targeted 16 families with children in Deokpo-ri, Yeongwol-gun, Gangwon Province. The research was conducted based on the on-site case study, specifically face-to-face in-depth interview and on-site monitoring using the checklist by residential spaces. The research findings are as follows: The discovered issues include the storage size and safety issues in the movement space, failure to provide the space tailored to the characteristics of the children and the insufficient size and storage space in the living space and the size and safety issues in the sanitary space. Overall, it was identified that small and insufficient storage space in the house pointed out as the main issue in this research was getting the residents' life more uncomfortable and unreasonable, and the activities of the children made their parents do unnecessary behaviors and stressed out during the process of childrearing. Therefore, it is necessary to consider the space arrangement considering the organizing system, caring system and the behavioral characteristics of the children during the process of child-rearing.

• Tunnel and Underground Space
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• v.22 no.2
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• pp.130-143
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• 2012

Cablebolts used to be employed as auxiliary supports where long or high capacity bolts are needed, but become competitive by the improvements in supportability and easiness in handling. Based on the test results obtained from various researches, the performance of the cablebolts was analyzed numerically while varying lengths and fixing conditions. The supporting effecte is assessed by monitoring displacements and stress taken place in shotcrete. When cablebolts are grouted without being tensioned, supporting effect was not as good as that of rockbolts. But, their supportability was good enough to substitute rockbolts if tensioned properly. Post grouting right after tensioning of the cablebolts shows reduction in supportability, but long term stability could be achieved without losing supportability if grouted when the bolt is far enough from the face. Further study is necessary including laboratory and in-situ tests under various conditions to use cablebolts as main support in tunnels.