• Title/Summary/Keyword: Concept ion

Search Result 92, Processing Time 0.024 seconds

[O2/N2] Plasma Etching of Acrylic in a Multi-layers Electrode RIE System (다층 RIE Electrode를 이용한 아크릴의 O2/N2 플라즈마 건식 식각)

  • Kim, Jae-Kwon;Kim, Ju-Hyeong;Park, Yeon-Hyun;Joo, Young-Woo;Baek, In-Kyeu;Cho, Guan-Sik;Song, Han-Jung;Lee, Je-Won
    • Korean Journal of Materials Research
    • /
    • v.17 no.12
    • /
    • pp.642-647
    • /
    • 2007
  • We investigated dry etching of acrylic (PMMA) in $O_2/N_2$ plasmas using a multi-layers electrode reactive ion etching (RIE) system. The multi-layers electrode RIE system had an electrode (or a chuck) consisted of 4 individual layers in a series. The diameter of the electrodes was 150 mm. The etch process parameters we studied were both applied RIE chuck power on the electrodes and % $O_2$ composition in the $N_2/O_2$ plasma mixtures. In details, the RIE chuck power was changed from 75 to 200 W.% $O_2$ in the plasmas was varied from 0 to 100% at the fixed total gas flow rates of 20 sccm. The etch results of acrylic in the multilayers electrode RIE system were characterized in terms of negatively induced dc bias on the electrode, etch rates and RMS surface roughness. Etch rate of acrylic was increased more than twice from about $0.2{\mu}m/min$ to over $0.4{\mu}m/min$ when RIE chuck power was changed from 75 to 200 W. 1 sigma uniformity of etch rate variation of acrylic on the 4 layers electrode was slightly increased from 2.3 to 3.2% when RIE chuck power was changed from 75 to 200 W at the fixed etch condition of 16 sccm $O_2/4\;sccm\;N_2$ gas flow and 100 mTorr chamber pressure. Surface morphology was also investigated using both a surface profilometry and scanning electron microscopy (SEM). The RMS roughness of etched acrylic surface was strongly affected by % $O_2$ composition in the $O_2/N_2$ plasmas. However, RIE chuck power changes hardly affected the roughness results in the range of 75-200 W. During etching experiment, Optical Emission Spectroscopy (OES) data was taken and we found both $N_2$ peak (354.27 nm) and $O_2$ peak (777.54 nm). The preliminarily overall results showed that the multi-layers electrode concept could be successfully utilized for high volume reactive ion etching of acrylic in the future.

Sustainability Indices (=Green Star) for Microbial Fuel Cell (미생물 연료전지 영속발전 지표개발)

  • Song, Ha-Geun;KOO, Ja-Kong
    • Journal of the Korea Organic Resources Recycling Association
    • /
    • v.23 no.2
    • /
    • pp.47-52
    • /
    • 2015
  • A microbial fuel cell (MFC) is a device that can be obtained electricity from a variety of organic through the catalytic reaction of the microorganism. The MFC can be applied to various fields, and research is required to promote the performance of the microbial fuel cell for commercialization. The lower performance of an MFC is due to oxygen reduction at the cathode and the longer time of microbial degradation at anode. The MFC amount of power is sufficient but, in consideration of many factors, as a renewable energy, now commonly power density as compared to Nafion117 it is an ion exchange membrane used is PP (Poly Propylene) from 80 to about 11 fold higher, while reducing the cost to process wastewater is changed to a microporous non-woven fabric of a low cost, it may be energy-friendly environment to generate electricity. All waste, in that it can act as a bait for microorganisms, sustainability of the microbial fuel cell is limitless. The latest research on the optimization and performance of the operating parameters are surveyed and through the SSaM-GG(Smart, Shared, and Mutual- Green Growth) or GG-SSaM(Green Growth - Smart, Shared, and Mutual) as the concept of sustainable development in MFC, the middle indices are developed in this study.

Formation and Characteristics of the Fluorocarbonated SiOF Film by $O_2$/FTES-Helicon Plasma CVD Method

  • Kyoung-Suk Oh;Min-Sung Kang;Chi-Kyu Choi;Seok-Min Yun
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 1998.02a
    • /
    • pp.77-77
    • /
    • 1998
  • Present silicon dioxide (SiOz) 떠m as intennetal dielectridIMD) layers will result in high parasitic c capacitance and crosstalk interference in 비gh density devices. Low dielectric materials such as f f1uorina뼈 silicon oxide(SiOF) and f1uoropolymer IMD layers have been tried to s이ve this problem. I In the SiOF ftlm, as fluorine concentration increases the dielectric constant of t뼈 film decreases but i it becomes unstable and wa않r absorptivity increases. The dielectric constant above 3.0 is obtain어 i in these ftlms. Fluoropolymers such as polyte$\sigma$따luoroethylene(PTFE) are known as low dielectric c constant (>2.0) materials. However, their $\alpha$)Or thermal stability and low adhesive fa$\pi$e have h hindered 야1리ru뚱 as IMD ma따"ials. 1 The concept of a plasma processing a찌Jaratus with 비gh density plasma at low pressure has r received much attention for deposition because films made in these plasma reactors have many a advantages such as go여 film quality and gap filling profile. High ion flux with low ion energy in m the high density plasma make the low contamination and go어 $\sigma$'Oss피lked ftlm. Especially the h helicon plasma reactor have attractive features for ftlm deposition 야~au똥 of i앙 high density plasma p production compared with other conventional type plasma soun:es. I In this pa야Jr, we present the results on the low dielectric constant fluorocarbonated-SiOF film d밑JOsited on p-Si(loo) 5 inch silicon substrates with 00% of 0dFTES gas mixture and 20% of Ar g gas in a helicon plasma reactor. High density 띠asma is generated in the conventional helicon p plasma soun:e with Nagoya type ill antenna, 5-15 MHz and 1 kW RF power, 700 Gauss of m magnetic field, and 1.5 mTorr of pressure. The electron density and temperature of the 0dFTES d discharge are measUI벼 by Langmuir probe. The relative density of radicals are measured by optic허 e emission spe따'Oscopy(OES). Chemical bonding structure 3I피 atomic concentration 따'C characterized u using fourier transform infrared(FTIR) s야3띠"Oscopy and X -ray photonelectron spl:’따'Oscopy (XPS). D Dielectric constant is measured using a metal insulator semiconductor (MIS;AVO.4 $\mu$ m thick f fIlmlp-SD s$\sigma$ucture. A chemical stoichiome$\sigma$y of 야Ie fluorocarbina$textsc{k}$영-SiOF film 따~si야영 at room temperature, which t the flow rate of Oz and FTES gas is Isccm and 6sccm, res야~tvely, is form려 야Ie SiouFo.36Co.14. A d dielec$\sigma$ic constant of this fIlm is 2.8, but the s$\alpha$'!Cimen at annealed 5OOt: is obtain려 3.24, and the s stepcoverage in the 0.4 $\mu$ m and 0.5 $\mu$ m pattern 킹'C above 92% and 91% without void, res야~tively. res야~tively.

  • PDF

Identification and Organization of Task Complexity Factors Based on a Model Combining Task Design Aspects and Complexity Dimensions

  • Ham, Dong-Han
    • Journal of the Ergonomics Society of Korea
    • /
    • v.32 no.1
    • /
    • pp.59-68
    • /
    • 2013
  • Objective: The purpose of this paper is to introduce a task complexity model combining task design aspects and complexity dimensions and to explain an approach to identifying and organizing task complexity factors based on the model. Background: Task complexity is a critical concept in describing and predicting human performance in complex systems such as nuclear power plants(NPPs). In order to understand the nature of task complexity, task complexity factors need to be identified and organized in a systematic manner. Although several methods have been suggested for identifying and organizing task complexity factors, it is rare to find an analytical approach based on a theoretically sound model. Method: This study regarded a task as a system to be designed. Three levels of design ion, which are functional, behavioral, and structural level of a task, characterize the design aspects of a task. The behavioral aspect is further classified into five cognitive processing activity types(information collection, information analysis, decision and action selection, action implementation, and action feedback). The complexity dimensions describe a task complexity from different perspectives that are size, variety, and order/organization. Combining the design aspects and complexity dimensions of a task, we developed a model from which meaningful task complexity factors can be identified and organized in an analytic way. Results: A model consisting of two facets, each of which is respectively concerned with design aspects and complexity dimensions, were proposed. Additionally, twenty-one task complexity factors were identified and organized based on the model. Conclusion: The model and approach introduced in this paper can be effectively used for examining human performance and human-system interface design issues in NPPs. Application: The model and approach introduced in this paper could be used for several human factors problems, including task allocation and design of information aiding, in NPPs and extended to other types of complex systems such as air traffic control systems as well.

Size Effect of Compressive Strength of Concrete for the Non-standard Cylindrical Specimens (비표준형 실린더 공시체에 대한 콘크리트 압축강도의 크기효과)

  • 김진근;어석홍;이성태
    • Magazine of the Korea Concrete Institute
    • /
    • v.9 no.1
    • /
    • pp.105-113
    • /
    • 1997
  • The reduction phenomena of concrete compressive strength with the size of cylinders have been very interested in, but till now the adequate. analysis technique is not fixed. Based on the existing research results. the bigger the member size is, the smaller the strengt.h is. However. the real test ~.csults reveal that the wduction rate becomes blunt and there are considerable differences between size offrct law and real results. The punposc. ofthis paper is to propose tho model equat.ion which covers the compressive strength of' cylinder specimens in case of general hight/dialnetcr ratio in terms of the size effect. he effect of maximum aggregate size on the microcrack zone was also studied, and the model equation was proposed by considering the concept of'the characteristic length. These results will also be used to predict the cornprcssivt. stxngth of various sized concrete cores sampled from existing structures.

Synthesis and electrochemical properties of layered $Li[Ni_xCo_{1-2x}Mn_x]O_2$ materials for lithium secondary batteries prepared by mechanical alloying (기계적 합금법을 이용한 리튬 2차 전지용 층상 양극물질 $Li[Ni_xCo_{1-2x}Mn_x]O_2$ 의 합성 및 전기화학적 특성에 관한 연구)

  • 박상호;신선식;선양국
    • Proceedings of the Korea Crystallographic Association Conference
    • /
    • 2002.11a
    • /
    • pp.16-16
    • /
    • 2002
  • The presently commercialized lithium-ion batteries use layer structured LiCoO₂ cathodes. Because of the high cost and toxicity of cobalt, an intensive search for new cathode materials has been underway in recent years. Recently, a concept of a one-to-one solid state mixture of LiNO₂ and LiMnO₂, i.e., Li[Ni/sub 0.5/Mn/sub 0.5/]O₂, was adopted by Ohzuku and Makimura to overcome the disadvantage of LiNiO₂ and LiMnO₂. Li[Ni/sub 0.5/Mn/sub 0.5/]O₂ has the -NaFeO₂ structure, which is characteristic of the layered LiCoO₂ and LiNiO₂ structures and shows excellent cycleability with no indication of spinel formation during electrochemical cycling. Layered Li[Ni/sub x/Co/sub 1-2x/Mn/sub x/]O₂ (x = 0.5 and 0.475) materials with high homogeneity and crystallinity were synthesized using a mechanical alloying method. The Li[Ni/sub 0.475/Co/sub 0.05/Mn/sub 0.475/]O₂ electrode delivers a high discharge capacity of 187 mAh/g between 2.8 and 4.6 V at a high current density of 0.3 mA/㎠(30 mA/g) with excellent cycleability. The charge/discharge and differential capacity vs. voltage studies of the Li[Ni/sub x/Co/sub 1-2x/Mn/sub x/]O₂ (x = 0.5 and 0.475) materials showed only one redox peak up to 50 cycles, which indicates that structural phase transitions are not occurred during electrochemical cycling. The magnitude of the diffusion coefficients of lithium ions for Li[Ni/sub x/Co/sub 1-2x/Mn/sub x/]O₂(x = 0.5 and 0.475) are around 10/sup -9/ ㎠/s measured by the galvanostatic intermittent titration technique (GITT).

  • PDF

A brief review of the bilayer electrolyte strategy to achieve high performance solid oxide fuel cells (고성능 고체산화물 연료전지를 위한 이중층 전해질 전략)

  • Park, Jeong Hwa;Kim, Doyeub;Kim, Kyeong Joon;Bae, Kyung Taek;Lee, Kang Taek
    • Ceramist
    • /
    • v.23 no.2
    • /
    • pp.184-199
    • /
    • 2020
  • The solid oxide fuel cells (SOFCs) are the one of the most promising energy conversion devices which can directly convert chemical energy into electric power with high efficiency and low emission. The lowering operating temperature below 800 ℃ has been considered as the mostly considerable research and development for commercialization. The major issue is to maintain reasonably high performance of SOFCs at reduced temperatures due to increment of polarization resistance of electrodes and electrolyte. Thus, the alternative materials with high catalytic activities and fast oxygen ion conductivity are required. For recent advances in electrolyte materials and technology, newly designed, highly conductive electrolyte materials and structural engineering of them provide a new path for further reduction in ohmic polarization resistance from electrolytes. Here, a powerful strategy of the bilayer concept with various oxide electrolytes of SOFCs are briefly reviewed. These recent developments also highlight the need for electrolytes with greater conductivity to achieve a high performance, thus providing a useful guidance for the rational design of cell structures for SOFCs. Moreover, cell design, materials compatibility, processing methods, are discussed, along with their role in determining cell performance. Results from state-of-the-art SOFCs are presented, and future prospects are discussed.

Electrochemical Properties of Cathode according to the Type of Sulfide Electrolyte and the Application of Surface Coating

  • Yoon, Da Hye;Park, Yong Joon
    • Journal of Electrochemical Science and Technology
    • /
    • v.12 no.1
    • /
    • pp.126-136
    • /
    • 2021
  • The electrochemical performance of all-solid-state cells (ASSCs) based on sulfide electrolytes is critically affected by the undesirable interfacial reactions between oxide cathodes and sulfide electrolytes because of the high reactivity of sulfide electrolytes. Based on the concept that the interfacial reactions are highly dependent on the type of sulfide electrolyte, the electrochemical properties of the ASSCs prepared using three types of sulfide electrolytes were observed and compared. The Li2MoO4-LiI coating layer was also introduced to suppress the interfacial reactions. The cells using argyrodite electrolyte exhibited a higher capacity and Coulombic efficiency than the cells using 75Li2S-22P2S5-3Li2SO4 and Li7P3S11 electrolytes, indicating that the argyrodite electrolyte is less reactive with cathodes than other electrolytes. Moreover, the introduction of Li2MoO4-LiI coating on the cathode surface significantly enhanced the electrochemical performance of ASSCs because of the protection of coating layer. Pulverization of argyrodite electrolyte is also effective in increasing the capacity of cells because the smaller size of electrolyte particles improved the contact stability between the cathode and the sulfide electrolyte. The cyclic performance of cells was also enhanced by pulverized electrolyte, which is also associated with improved contact stability at the cathode/electrolyte. These results show that the introduction of Li2MoO4-LiI coating and the use of pulverized sulfide electrolyte can exhibit a synergic effect of suppressed interfacial reaction by the coating layer and improved contact stability owing to the small particle size of electrolyte.

Development and validation of Everyday Gender Microaggression Scale (일상 속 성차별 경험 척도 개발 및 타당화)

  • Eunha Kim
    • Korean Journal of Culture and Social Issue
    • /
    • v.24 no.4
    • /
    • pp.593-614
    • /
    • 2018
  • By applying the concept of microaggression (subtle and indirect form of discrimination), the aim of this study was to develop and validate the Everyday Gender Microaggression Scale (EGM). For this purpose, based on the results of literature review, surveys, and individual interviews, we developed 17 pilot items. Next, after expert content validation, we administered online survey to 180 adult women and conducted exploratory factor analysis. The result revealed 2 factors, 14 items, and this structure was reconfirmed through confirmatory factor analysis in another sample of 219 adult women. Convergent and concurrent validities were also examined via correlations with measures of sexism, depression, and life satisfaction. We discussed implications, ways to use the EGM, and suggestions for future research.

The research and Development trends of Telecommunications of the End of the 20th Century(Present) and the Beginning of the 21st Century(Future) (20세기 말과 21세기 초의 전기통신의 연구개발동향)

  • 조규심
    • Journal of the Korean Professional Engineers Association
    • /
    • v.29 no.2
    • /
    • pp.15-23
    • /
    • 1996
  • With the ever-increasing importance of high-speed information in society as we move towards the 21 st century, telecommunication laboratories of advanced nations are pressing forward with research and development aimed at implementing its W & P(Visual Intelligent and Personal) services and construction of a new network to support them. In legals to the former, based on a long-term view of technological and market trends, those laboratories are researching and developing services that will make possible an effective progression from the development of services that answer to potential needs towards the full-scale implementation of VI & P services. In regards to the latter, these laboratories are responding in a flexible manner to the increasing diversity and disposal of the communications environment by separating the network into a transmission system and a versatile information control/conversion -ion system and laboratories are working at enhancing the performance of both. Within these board aims, the laboratories are currently focusing our attention in three areas : the technology for a high-speed broadband transmission system featuring optical frequency multiplexing and ATM techniques, network and software technologies for advanced information control and conversion, and technology for constructing a new access network that can provide a comprehensive range of multimedia services. This article describes the laboratories' concept of how VI & P services will develop in the future, and the latest trends in the field of communications. It also describes the ideal configuration of the new network and discusses the important technological aspects of how it is to be constructed. Finally, it presents the results of the laboratories'recent research which include some innovative work, point out the areas requiring future investigation.

  • PDF