• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.11 no.6
• /
• pp.183-188
• /
• 2012

This study was carried out to design the spray nozzle tip for airless spray coating. Airless spray coating is the process of coating an object with a liquid spray of paint or other fluid. The nozzle tip controls the fluid flow rate and creates back pressure in the system. The nozzle tip also defines the spray pattern by the size and shape of the orifice. The spray pattern of nozzle tip was investigated numerically using ANSYS CFX ver. 14.0. It was observed that performance result of designed nozzle tip was correspond well, compared with that of GARCO nozzle tip.

• Journal of the Semiconductor & Display Technology
• /
• v.21 no.2
• /
• pp.38-44
• /
• 2022

Plasma density in semiconductor fabrication equipment becomes higher to achieve the improved the throughput of the process, but the increase of surface corrosion of the ceramic coated chamber wall has been observed by the increased plasma density. Plasma chamber wall coating with aerosol deposition prefer to be firm and uniform to prevent the potential creation of particle inside the chamber from the deformation of the coating materials, and the aerosol discharge nozzle is a good control factor for the deposited coating condition. In this paper, we investigated the design of the nozzle of the aerosol deposition to form a high-quality coating film. Computational fluid dynamics (CFD) study was employed to minimize boundary layer effect and shock wave. The degree of expansion, and design of simulation approach was applied to found out the relationship between the divergence angle and nozzle length as the key parameter for the nozzle design. We found that the trade-off tendency between divergence angle and nozzle length through simulation and quantitative analysis, and present the direction of nozzle design that can improve the uniformity of chamber wall coating.

• Korean Journal of Metals and Materials
• /
• v.49 no.3
• /
• pp.221-230
• /
• 2011

The cold spray process is an emerging technology that utilizes high velocity metallic particles for surface coating. Metallic powder particles are injected into a converging-diverging de Laval nozzle and accelerated to a high velocity by a supersonic gas flow. The cold spray process normally uses a circular nozzle that has a rather narrow spraying range. To overcome this fault, a slit nozzle was considered in this study. The slit nozzle is anticipated to reduce the coating process time because it has a wider coating width than the circular nozzle. However, the slit nozzle can reduce the coating efficiency because it does not allow as much gas and particle velocity as the circular nozzle. To improve the coating efficiency of a slit nozzle, the shape of the slit nozzle was modified. And the results of gas flow and particle behaviour according to the nozzlers shape were compared by the a numerical analysis. As a results, as Expansion Ratio(ER) of 7.5 was found to be the most optimal condition for enhancing the spraying efficiency when the ER was changed by the variation of nozzle neck and exit size.

• Proceedings of the KIEE Conference
• /
• 2003.10a
• /
• pp.42-44
• /
• 2003

The paper presents the method and apparatus for conformal photoresist spray coating on the 3D structured substrate. The system consists of a high-temperature-rotational chuck, ultrasonic spray nozzle module, angle control module and nozzle moving module. The coating uniformity is acquired by controlling the moving speed of the ultrasonic spray nozzle across the substrate which is rotated constantly. To coat the photoresist conformally the spray angle of the nozzle and the temperature of the substrate are controlled during spray coating. The rotational chuck can be heated up by hot air or $N_2$. The photoresist (AZ1512) has been coated on the 3D structured wafer by spray coating system and the characteristics have been evaluated.

• Journal of the Korean Society for Precision Engineering
• /
• v.10 no.3
• /
• pp.57-68
• /
• 1993

Air Wiping technique is widely used because of easy and efficient coating control in present CGL. Coaring weight is decided by nozzle header pressure, strip line speed and distance between strip and nozzle. Coating defects are results from unbalance of these factors and coating equipment calibration inaccuracy. Therefore, this study is mainly dealing with the cause of coating defects such as edge overcoating and coating deviation. The coptimum working condition is suggested by formulated coating model using collected working data. We developed two demension analysis program for air flow in nozzle and calculated dynamic pressure and air velocity with this program. The productivity and coating guality are improved by applying the result of this reserach.

• The KSFM Journal of Fluid Machinery
• /
• v.18 no.6
• /
• pp.37-44
• /
• 2015

Conjugate heat analysis on a high pressure turbine stage including secondary flow paths has been carried out. The secondary flow paths were designed to be located in front of the nozzle and between the nozzle and rotor domains. Thermal boundary conditions such as empirical based temperature or heat transfer coefficient were specified at nozzle and rotor solid domains. To create heat transfer interface between the nozzle solid domain and the rotor fluid domain, frozen rotor with automatic pitch control was used assuming that there is little temperature variation along the circumferential direction at the nozzle solid and rotor fluid domain interface. The simulation results showed that secondary flow injected from the secondary flow path not only prevents main flow from penetrating into the secondary flow path, but also effectively cools down the nozzle and rotor surfaces. Also thermal barrier coating with different thickness was numerically implemented on the nozzle surface. The thermal barrier coating further reduces temperature gradient over the entire nozzle surface as well as the overall temperature level.

• Journal of Advanced Marine Engineering and Technology
• /
• v.24 no.3
• /
• pp.20-28
• /
• 2000

Air wiping technique is widely used because of easy and efficient coating control in present CGL The coating weight is controlled by nozzle header pressure. strip line speed, and the distance between strip and nozzle. Coating defects are resulted from the unbalance of these control factors and the inaccuracy of coating equipments. We investigates the main cause of coating defects, such as edge overcoating and coating deviation through various experiments. It is found that the edge overcoating is mainly come from nozzle lip type, and the coating deviation is caused by the unbalance of dynamic pressure.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2007.06a
• /
• pp.169-173
• /
• 2007

Slit-coater nozzle is one of core equipments of coating process in LCD panel manufactory. As a glass substrate size become bigger, a nozzle performance and a high-speed coating process are considered important issues. To design the optimal nozzle, the characteristics of fluid inside nozzle are studied using CFD (Computational Fluid Dynamics) method. Through research on design factors, we can know the coating uniformity influenced by lip length, cavity angle and gap size. The future work for this study is to find the factors in high-speed coating process and function between factors of design.

• Transactions of Materials Processing
• /
• v.18 no.2
• /
• pp.156-159
• /
• 2009

Slot coating has been wide spread in photo-resist coating on the glass for liquid crystal display. Die in slot coater consists of manifold and land. Material comes in inlet of the die and flow into the manifold and then flow out through the land. The coating thickness variations along the die length depend upon inside of die design such as manifold and die land. However the coating thickness variations along the moving direction(coating direction) of the coater depend upon the operational conditions of coater as well as die lip design. The coating behaviors including atmospheric air have been investigated in this study. Die geometries considered in this study were nozzle gap and length of the die lip. Coating gap and coating speed were the variables fur coating operational conditions. When the nozzle gap and length of die lip increased climbing effect of PR on the downstream die lip was reduced. Subsequently uniformity of coating thickness improved. Uniformity of coating thickness also enhanced as coating gap and coater speed increased. The uniformity of coating gap was related to the velocity vector distributions on the coating surface.

• Journal of computational fluids engineering
• /
• v.21 no.4
• /
• pp.11-18
• /
• 2016

A numerical study is conducted on the optical fiber coating flow in a primary coating nozzle consisting of three major parts: a resin chamber, a contraction and a coating die of small diameter. The flow is driven by the optical fiber penetrating the center of the nozzle at a high speed. The axisymmetric two-dimensional flow and heat transfer induced by viscous heating are examined based on the laminar flow assumption. Numerical experiments are performed with varying the convergent angle of nozzle contraction and the optical fiber drawing speed. The numerical results show that for high drawing speed greater than 30 m/s, there is a transition in the essential flow features depending on the convergent angle. For a large convergent angle greater than $30^{\circ}$, unfavorable multicellular flow structures are monitored, which could be associated with wall boundary-layer separation. In the regime of small convergent angle, as the angle increases, the highest resin temperature at the exit of die and the coating thickness decrease but the sensitivity of coating thickness on drawing speed and the maximum shear strain of resin on the optical fiber increase. The effects of the convergent angle are discussed in view of compromise searching for an appropriate angle for high-speed optical fiber coating.