• Title/Summary/Keyword: Coating Inspection

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Humidity Induced Defect Generation and Its Control during Organic Bottom Anti-reflective Coating in the Photo Lithography Process of Semiconductors

  • Mun, Seong-Yeol;Kang, Seong-Jun;Joung, Yang-Hee
    • Journal of information and communication convergence engineering
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    • v.10 no.3
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    • pp.295-299
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    • 2012
  • Defect generation during organic bottom anti-reflective coating (BARC) in the photo lithography process is closely related to humidity control in the BARC coating unit. Defects are related to the water component due to the humidity and act as a blocking material for the etching process, resulting in an extreme pattern bridging in the subsequent BARC etching process of the poly etch step. In this paper, the lower limit for the humidity that should be stringently controlled for to prevent defect generation during BARC coating is proposed. Various images of defects are inspected using various inspection tools utilizing optical and electron beams. The mechanism for defect generation only in the specific BARC coating step is analyzed and explained. The BARC defect-induced gate pattern bridging mechanism in the lithography process is also well explained in this paper.

A Study on the Coating Thickness of Surface Modified Aggregate by Using the Excess Paste Theory and Rheology Value (잉여 페이스트 이론과 레올로지 정수를 이용한 표면 개질골재의 피막두께 평가에 관한 연구)

  • Choi, Hee-Sup;Choi, Hyeong-Gil
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.23 no.5
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    • pp.23-29
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    • 2019
  • This study applies to the surface modification technique by coating the surface of aggregates using the modified paste such as cementitious materials in order to develop completely recycling technology of coarse aggregate. In this case, coating thickness of modified aggregate can be considered that the decision is dependent on the viscosity and tenacity of modified paste. In this study identify the flow properties of the fresh modified paste, and examined for the coating thickness of modified aggregate. As a result, it was possible to design a quantitative coating thickness of modified paste assuming that a modified paste to a Bingham Fluid and consider by excess paste theory and rheology constant (yield value). Accordingly, it is considered that the quantitative mix design of concrete using by surface modified aggregates will be possible.

Development of Automatic Recognition and Spray Control System for Reducing the Amount of Marine Coating paint (선박용 피도물 도료 사용량 절감을 위한 인식 및 스프레이 자동제어시스템 개발)

  • Jung, Young-Deuk
    • Journal of the Korea Safety Management & Science
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    • v.21 no.3
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    • pp.23-27
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    • 2019
  • The first aim of the study is to improve the productivity by uniformizing the thickness of coating and reducing quality-inspection time. The second aim is to cut down on the raw materials for coating by prevent the waste of spraying in the air during a painting process through a real-time coating-size-recognition monitering to fit the target components. To achieve the two aims, a simplified version of automatic coating control system for recognition of coating for vessels and Spray. With the sytem, following effects are expected: First, quality improvement will be achieved by uniformizing the film-thickness. Second, it will reduce the waste of coating paint by constructing the speed of the coating, the spray gun robot transfer time, and the number of DBs according to the size of the vessel. Third, as a 3D industry, it will be able to solve the difficulty of supply of labors and save up the labor costs. Therefore, in the future, further research will be needed to be applied to various products with DB design that designates the variable value, which is added for each type of pieces by comparing the difference between various types of workpieces and linear ones.

Laboratory Evaluation of Select Methods of Corrosion Prevention in Reinforced Concrete Bridges

  • Pritzl, Matthew D.;Tabatabai, Habib;Ghorbanpoor, Al
    • International Journal of Concrete Structures and Materials
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    • v.8 no.3
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    • pp.201-212
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    • 2014
  • Sixteen reinforced concrete laboratory specimens were used to evaluate a number of corrosion prevention methods under an accelerated (6 months) testing program. The use of galvanic thermal sprayed zinc, galvanic embedded anodes, a tri-silane sealer, an acrylic coating, and an epoxy/polyurethane coating was evaluated. The specimens received various treatments prior to exposure to accelerated corrosion. The performance of the treatments was evaluated with respect to corrosion currents, chloride ingress, extent of cracking, severity of rust staining, and visual inspection of the reinforcing steel after the conclusion of testing and dissection. Results indicated that the tri-silane sealer, the conjoint use of galvanic thermal sprayed zinc and epoxy/polyurethane coating, the epoxy/polyurethane coating, and acrylic coating performed better than the other methods tested. Higher chloride concentrations were measured in the vicinity of embedded zinc anodes.

A Study on Detecting Dross in Coating Layer on Hot-dip Galvanizing Steels (용융아연 도금강판의 도금층에 잔류한 드로스 검출에 관한 연구)

  • 김유철;이호종
    • Journal of the Korean institute of surface engineering
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    • v.36 no.6
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    • pp.466-474
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    • 2003
  • To develop a method of detecting dross in coating layer on hot-dip galvanizing steel, chemical etching behavior of the artificial coating layers with top and bottom dross were investigated. After chemical etching with the mixture of picric acid and sodium thiosulfate, each of the top and bottom dross take its distinct color, and alloy layer in coating is also observed. Defects in the coating layers of HGI(hot rolled galvanized iron), CGI(continuous galvanized steel sheet) and GA(galvannealed steel) were analysed, and methods of dross detection which can be applied to inspection process in manufacture were suggested.

- Analysis of Likelihood of Failure for the External Corrosion of Carbon and Low Alloy Steels through the Quantitative Risk Based Inspection using API-581 - (API-581에 의한 정량적 위험기반검사에서 탄소강 및 저합금강의 외부부식에 치한 사고발생 가능성 해석)

  • Lee Hern Chang;Kim Hwan Joo;Jang Seo Il;Kim Tae Ok
    • Journal of the Korea Safety Management & Science
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    • v.6 no.4
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    • pp.239-248
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    • 2004
  • Likelihood of failure for the external corrosion of carbon and low alloy steels, which affect to a risk of facilities, was analyzed quantitatively through the risk based inspection using API-581 BRD. We found that the technical module subfactor (TMSF) decreased as the inspection number increased and it increased as the Inspection effectiveness and the used year increased. In this condition, the TMSF showed high value for the case of the marine/cooling tower drift area as a corrosion driver, poor quality of coating, no insulation, and low insulation condition.

Inspection of Ceramic Coatings Using Nanoindentation and Frequency Domain Photoacoustic Microscopy

  • Steen, T.L.;Basu, S.N.;Sarin, V.K.;Murray, T.W.
    • Journal of the Korean Society for Nondestructive Testing
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    • v.26 no.6
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    • pp.390-402
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    • 2006
  • The elastic properties and thickness of mullite environmental barrier coatings grown through chemical vapor deposition (CVD) on silicon carbide substrates were measured using frequency domain photoacoustic microscopy. In this technique, extremely narrow bandwidth surface acoustic waves are generated with an amplitude modulated laser source. A photorefractive crystal based interferometer is used to detect the resulting surface displacement. The complex displacement field is mapped as a function of source-to-receiver distance in order to extract the wavelength of the surface acoustic wave at a given excitation frequency, and the phase velocity is determined. The coatings tested exhibited spatial variations in thickness and mechanical properties. The measured surface wave dispersion curves were used to extract an effective value for the elastic modulus and the coating thickness. Nanoindentation was used to validate the measurements of the effective elastic modulus. The average elastic modulus measured through the coating thickness using nanoindentation is compared to the effective modulus found using the photoacoustic system. Optical microscopy is used to validate the thickness measurements. The results indicate that the photoacoustic microscopy technique can be used to estimate the effective elastic properties in coatings exhibiting spatial inhomogeneities, potentially providing valuable feedback for the optimization of the CVD growth process.

Evaluation on the Performance of Coating Materials for Improving the Durability of Concretes (콘크리트의 내구성 증진을 위한 코팅재의 성능 평가)

  • Kim, Sung-Soo;Choi, Choon-Sik;Nam, Yong-Hyuk
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.7 no.4
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    • pp.99-107
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    • 2003
  • Normally coating is used a method for protecting reinforced concrete. For this purpose, organic as well as inorganic coatings are used. The advantages of inorganic coatings are lower absorption of UV, non-burning etc. On the other hand, organic coatings have the advantage of low permeability of $CO_2$, $SO_2$ and water. Organic coatings provide better protection for reinforced concrete. However, in organic coatings such as epoxy, urethane and acryl, long-term adhesive strength is reduced and the formed membrane of those is blistered by various causes. Also when organic coatings are applied to the wet surface of concrete, they have a problem with adhesion. So, we developed coating material, WGS-Eco which was hybridized with polymer and cement based material to protect concrete structures and solve problems of organic coatings. This study was conducted an comparative evaluation on physical and durable performance of developed coating material and previously used coating materials. As a result, the performance of developed coating material was not inferior to organic coating materials. So, the developed coating material was considered as a suitable coating material which had advantages of inorganic and organic coatings for protecting concrete.

A Study on the Emission of VOCs in Parking Lot Floor Coating (주차장 바닥 코팅제의 휘발성유기화합물 배출에 관한 연구)

  • Lee, Seung-Chan;Yoon, Gil-Ho;Park, Yong-Soon;Kil, Bae-Su;Yoon, Hyun-Do
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.23 no.4
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    • pp.152-158
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    • 2019
  • Measure the type and content of VOCs for A-company epoxy coating and B-company floor coating(Type A, B), which are used as flooring materials for parking lots. Than the VOCs used gas detectors to measure gas emissions, assuming the worst environment to reduce errors in external environments in the formaldehyde, toluene and xylene harmful to workers and tenants. As a result, A-company epoxy coating has the largest amount of VOCs, and compared to A-company epoxy coating, B-company floor coating of A type represented about 79% less and B type about 96% less. In addition, A-company epoxy coating was also the highest in gas emission measurement for formaldehyde, toluene and xylene using gas detector after 1 hour and 8 hours in closed environment conditions. B-company floor coating A type was less than A-company epoxy coating, which was about 42.3% less measured. And type B satisfied all TWA even in closed environment conditions.

Development of an FPGA-based Sealer Coating Inspection Vision System for Automotive Glass Assembly Automation Equipment (자동차 글라스 조립 자동화설비를 위한 FPGA기반 실러 도포검사 비전시스템 개발)

  • Ju-Young Kim;Jae-Ryul Park
    • Journal of Sensor Science and Technology
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    • v.32 no.5
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    • pp.320-327
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    • 2023
  • In this study, an FPGA-based sealer inspection system was developed to inspect the sealer applied to install vehicle glass on a car body. The sealer is a liquid or paste-like material that promotes adhesion such as sealing and waterproofing for mounting and assembling vehicle parts to a car body. The system installed in the existing vehicle design parts line does not detect the sealer in the glass rotation section and takes a long time to process. This study developed a line laser camera sensor and an FPGA vision signal processing module to solve this problem. The line laser camera sensor was developed such that the resolution and speed of the camera for data acquisition could be modified according to the irradiation angle of the laser. Furthermore, it was developed considering the mountability of the entire system to prevent interference with the sealer ejection machine. In addition, a vision signal processing module was developed using the Zynq-7020 FPGA chip to improve the processing speed of the algorithm that converted the profile to the sealer shape image acquired from a 2D camera and calculated the width and height of the sealer using the converted profile. The performance of the developed sealer application inspection system was verified by establishing an experimental environment identical to that of an actual automobile production line. The experimental results confirmed the performance of the sealer application inspection at a level that satisfied the requirements of automotive field standards.