• Title/Summary/Keyword: CoTi

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Effect of CH4 Concentration on the Dielectric Properties of SiOC(-H) Film Deposited by PECVD (CH4 농도 변화가 저유전 SiOC(-H) 박막의 유전특성에 미치는 효과)

  • Shin, Dong-Hee;Kim, Jong-Hoon;Lim, Dae-Soon;Kim, Chan-Bae
    • Korean Journal of Materials Research
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    • v.19 no.2
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    • pp.90-94
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    • 2009
  • The development of low-k materials is essential for modern semiconductor processes to reduce the cross-talk, signal delay and capacitance between multiple layers. The effect of the $CH_4$ concentration on the formation of SiOC(-H) films and their dielectric characteristics were investigated. SiOC(-H) thin films were deposited on Si(100)/$SiO_2$/Ti/Pt substrates by plasma-enhanced chemical vapor deposition (PECVD) with $SiH_4$, $CO_2$ and $CH_4$ gas mixtures. After the deposition, the SiOC(-H) thin films were annealed in an Ar atmosphere using rapid thermal annealing (RTA) for 30min. The electrical properties of the SiOC(-H) films were then measured using an impedance analyzer. The dielectric constant decreased as the $CH_4$ concentration of low-k SiOC(-H) thin film increased. The decrease in the dielectric constant was explained in terms of the decrease of the ionic polarization due to the increase of the relative carbon content. The spectrum via Fourier transform infrared (FT-IR) spectroscopy showed a variety of bonding configurations, including Si-O-Si, H-Si-O, Si-$(CH_3)_2$, Si-$CH_3$ and $CH_x$ in the absorbance mode over the range from 650 to $4000\;cm^{-1}$. The results showed that dielectric properties with different $CH_4$ concentrations are closely related to the (Si-$CH_3$)/[(Si-$CH_3$)+(Si-O)] ratio.

The Effect of Fuel Sulfer on Particulate Matter of Diesel Engine Equipped with Oxidation Catalyst (경유 중 황이 산화촉매 장착 디젤엔진의 입자상 물질에 미치는 영향)

  • 조강래;신영조;류정호;김희강
    • Journal of Korean Society for Atmospheric Environment
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    • v.13 no.6
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    • pp.487-495
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    • 1997
  • The most desirable diesel oxidation catalyst (DOC) should have the properties of oxidizing CO, HC and SOF effectively at low exhaust gas temperature while minimizing the formation of sulfate at high exhaust gas temperature. Precious metals such as platinum and palladium have been known to be sufficiently active for oxidizing SOF and also to have high activity for the oxidation of sulfur dioxide $(SO_2)$ to sulfur trioxide $(SO_3)$. There is a need to develop a highly selective catalyst which can promote the oxidation SOF efficiently, on the other hand, suppress the oxidation of $SO_2$. In this study, a Pt-V catalyst was prepared by impregnating platinum and vanadium onto a Ti-Si wash coated ceramic monolith substrate. A prepared Pt-V catalytic converter was installed on a heavy duty diesel engine and the effect of fuel sulfur on particulate matter (PM) of heavy duty diesel engine was measured. The effect of fuel sulfur on PM of Pt-V was also compared with that of a commercialized Pt catalyst currently being used in some of the heavy duty diesel engines in advanced countries. Only 1 $\sim$ 3% of sulfur in the diesel fuel was converted to sulfate in PM for the engine without catalyst, but almost 100% of sulfur conversion was achieved for the engine with Pt catalyst at maximum loading condition. In the case of Pt-V catalyst, there was no big difference in conversion with the base engine even at maximum loading condition. The reason of SOF increase according to the increase of suflate emission was identified as the washing off effect of bound water in sulfate.

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EVALUATION OF BONE RESPONSE BY RESONANCE FREQUENCY ANALYSIS OF ANODIZED IMPLANTS

  • Roh Hyun-Ki;Heo Seong-Joo;Rhyu In-Chul
    • The Journal of Korean Academy of Prosthodontics
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    • v.43 no.6
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    • pp.745-750
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    • 2005
  • Statement of problem. Resonance frequency analysis has been increasingly served as a non-invasive and objective method for clinical monitoring of implant stability. Many clinical studies must be required for standardized data using RFA. Purpose. This study was performed to evaluate RFA value changes in two anodized implant groups. Material and method. Among a total of 24 implants, twelve screw shaped implants as a test group (H2-R8.5) were manufactured, which had a pitch-height of 0.4 mm, an outer diameter of 4.3 mm, a length of 8.5 mm, and external hexa-headed, were turned from 5 mm rods of commercially pure titanium (ASTM Grade IV, Warantec Co., Seoul, Korea), and another twelve implants as a control group were $Br{\aa}nemark$ Ti-Unite MK4 (diameter 4.0 mm, length 8.5 mm). Each group was installed in tibia of rabbit. Two implants were placed in each tibia (four implants per rabbit). Test two implants were inserted in right side and control two in left side. ISQ values were measured using $Osstell^{TM}$ (Integration Diagnostics Ltd. Sweden) during fixture installation, and 12 weeks later and evaluated the RFA changes. Results. Mean and SD of baseline ISQ values of test group were $75.0{\pm}3.4$ and $68.7{\pm}8.1$ for control group. Mean and SO of ISQ values 12 weeks after implant insertion were $73.2{\pm}4.7$ for test group and $72.6{\pm}3.9$ for control group. There were no statistically significant differences between groups in ISQ values after 3 months (P>0.05). From the data, RFA gains after 3 months were calculated, and there was statistically significant difference between groups (P<0.05). Conclusion. Although there were RFA changes between groups, implant stability after experimental period shows alike tendency and good bone responses.

Determination of Hg22+ Ions Using a Modified Glassy Carbon Electrode with 2,2':6':2''-Terpyridine

  • Kong, Young-Tae;Bae, Yun-Jung;Shim, Yoon-Bo
    • Bulletin of the Korean Chemical Society
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    • v.23 no.2
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    • pp.346-350
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    • 2002
  • A glassy carbon electrode (GCE) modified with 2,2':6':2”-terpyridine (2,2':6':2”-TPR) using a spin coating method was applied for the highly selective and sensitive analysis of a trace amount of $Hg_2^{2+}$ ions. Various experimental parameters, which influenced the response of the 2,2':6':2”-TPR modified electrode to $Hg_2^{2+}$ ions, were optimized. The linear sweep and differential pulse voltammograms for the 2,2':6':2”-TPR modified electrode deposited with Hg show a well-defined anodic peak at +0.65 V (vs. Ag|AgCl). After a 25 min preconcentration time in an $Hg_2^{2+}$ ion solution (0.1 M acetate buffer, pH 5.0), differential pulse voltammetry(DPV) with 2,2':6':2”-TPR modified electrode shows a linear response between $1.0\;{\times}\;10^{-6}M\;and\;2.0\;{\times}\;10^{-7}M$. The least-square treatment of these data produce an equation of I[${\mu}A$] = 0.031 + 0.005C with r = 0.980(n = 5). The detection limit of this electrode with linear sweep voltammetry and differential pulse anodic voltammetry were $2.0\;{\times}\;10^{-6}M\;and\;8.0\;{\times}\;10^{-8}M$, respectively. The presence of Pb, Fe, Cd, Ti, Ni, Co, Mg, Al, Mn, and Zn did not interfere in the analysis of the $Hg_2^{2+}$ ion. The 2,2':6':2”-TPR modified GCE has been successfully applied in determination trace amounts of Hg in a human urine sample.

A scientific analysis of pigments for the Ilweoloakdo (일원오악도 안료에 대한 과학적 분석)

  • Han, Min-Su;Hong, Jong-Ouk
    • 보존과학연구
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    • s.26
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    • pp.165-188
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    • 2005
  • From the ancient to these days, there have been used many kinds of pigment which have two types that are inorganic pigment and organic pigment. At the ancient times, natural pigment had been used but the artificially mixed pigment has been used in modern times. By the way, searching for studies has been studied recently, it would be said the ancient pigments such as Danchung, Wall painting and Mural painting are the mainthema. However, studies about the pigments used in modern pictured relics have rarely can be found. Therefore, this analysis of Ilweolokdo would be important at the point of the pigments used in pictures of royal family in modern times and the results can be briefly summarized as below; Firstly, the results of qualitative analysis of the pigments that base or all pigments of picture was detected components of Ca, Fe and As, this results meaning that picture was used filler and basic paint. Secondly, a result of the analysis on the composition elements of the pigments shows that the main components in their composition are ;White - Lead Cyanamide($2PbCO_3$.$Pb(OH)_2$) or Titanium Oxide($TiO_2$)Blue - Ultramarine($2(Na_2O$.$Al_2O_3$ .$2Si_O2$).$Na_2S_2$)Green - Emerald green($C_2H_3A_s3Cu_2O_8$)Gold - Gold(Au), Red-Red Lead($Pb_3O_4$) or Cinnabar(HgS)Black - Carbon(C)Thirdly, X-ray diffraction analysis of crystalline structure for the blue and green pigment peeling off in picture shows that the components of blue pigment is Ultramarine($2(Na_2O$.$Al_2O_3$ .$2Si_O2$).$Na_2S_2$) and green pigment is Emerald green($C_2H_3A_s3Cu_2O_8$). Especially, microcrystalline structure of the green pigment was the shape like a cross section of wood. Consequently, we knew through the analysis of qualitative and microcrystallinestructures seen on the cross section of analyzed pigments layer that the all pigments used in the Ilweoloakdo is possible to use synthetic pigments in modern.

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Geochemical Dispersion and Enrichment of Fluvial Sediments Depending on the Particla Size Distribution (입도분포에 따른 하상퇴적물의 지구화학적 분산 및 부화)

  • 이현구
    • Economic and Environmental Geology
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    • v.32 no.3
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    • pp.247-260
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    • 1999
  • Geochermical characteristics of the fluvial sediments deprnding on particle size distribution size were investigated in the respect of majir, minor and rare eath element chemisitry. Ratios of $Al_{2}O_{3}/Na_{2}O$ and $K_{2}O/Na_{2}O$ of the sediments show the homogeneous valus, and partly positive correlation with $SiO_{2}/Al_{2}O_{3}$, respecively. Characteristics of minor element ratios (V/Ni, Cr/V, Ni/Co and Zr/Hf)are within the lower and narrow range. Thesesuggested that sediment sources may be acidic to intermediate granitic rock, and may be explained by simple weathering and sedimentation. With increasing SiO2 contents, concentrations of $Al_{2}O_{3}$, $Fe_{2}O_{3}$, CaO and MgO decreased, but those of $K_{2}O$ and $Na_{2}O$ increased, Concentrations of Ba, Be, Cs, Cu, Li, Ni, Sr, V and Zr show comparatively normal negative and some positive trends. Compared with the mean composition of granite, concentrations of $Al_{2}O_{3}$, $Fe_{2}O_{3}$, MnO, CaO and MgO in the sediments of the study area were highly enriced. Among some minor and rare earth elements, concentrations of As, Cd, Cu, and V were enriched, but those of Be, Ce, Rb, Sc, Sr and Zn were depleted when compared with average composition of granite. By decreasing of particle size fractions, SiO2, Rb and Sr conterts decreased, but concentrations of $Al_{2}O_{3}$, $Fe_{2}O_{3}$, CaO, MgO, $TiO_{2}$, MgO, $P_{2}O_{5}$, Be, Cu, Hf, Pb, V and Zr increased. From the correlations between particle size fractions and element concenreations, some elements of $Fe_{2}O_{3}$, CaO, MgO, $P_{2}O_{5}$, Cu, Ni, Zn and Zr showed typical trends in the secondary contramination sediments. These trends are typically shown under 100 mesh fractions. It indicates that the fraction of minus 100 mesh is the optimum size fraction for geochemical and environmental survey.

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Growth and Characteristics of SrBi2Nb2O9 Thin Films for Memory Devices (메모리 소자에의 응용을 위한 SrBi2Nb2O9 박막의 성장 및 전기적 특성)

  • Gang, Dong-Hun;Choe, Hun-Sang;Lee, Jong-Han;Im, Geun-Sik;Jang, Yu-Min;Choe, In-Hun
    • Korean Journal of Materials Research
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    • v.12 no.6
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    • pp.464-469
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    • 2002
  • $SrBi_2Nb_2O_9(SBN)$ thin films were grown on Pt/Ti/Si and p-type Si(100) substrates by rf-magnetron co-sputtering method using two ceramic targets, $SrNb_2O_6\; and \;Bi_2O_3$. The structural and electrical characteristics have been investigated to confirm the possibility of the SBN thin films for the applications to destructive and nondestructive read out ferroelectric random access memory(FRAM). For the optimum growth condition X-ray diffraction patterns showed that SBN films had well crystallized Bi-layered perovskite structure after $700^{\circ}C$ heat-treatment in furnace. From this specimen we got remnant polarization $(2P_r)$ of about 6 uC/$\textrm{cm}^2$ and coercive voltage $(V_c)$ of about 1.5 V at an applied voltage of 5 V. The leakage current density was $7.6{\times}10^{-7}$/A/$\textrm{cm}^2$ at an applied voltage of 5V. And for the NDRO-FRAM application, properties of SBN films on Si substrate has been investigated. From transmission electron microscopy (TEM) analysis, we found the furnace treated sample had a native oxide about 2 times thicker than the RTA treated sample and this thick native oxide layer had a bad effect on C-V characteristics of SBN/Si thin film. After $650^{\circ}C$ RTA process, we got the improved memory window of 1.3 V at an applied voltage of 5 V.

The Electrode Characteristics of the Sintered AB5-type Metal Hydrogen Storage Alloy for Ni-MH Secondary Battery (Ni-MH 2차전지용 AB5계 수소저장합금의 소결에 따른 전극 특성)

  • Chang, Sang-Min;Park, Won;Choi, Seung-Jun;Noh, Hak;Choi, Jeon;Park, Choong-Nyeon
    • Transactions of the Korean hydrogen and new energy society
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    • v.7 no.2
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    • pp.157-164
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    • 1996
  • The AB5-type metal hydride electrodes using $(LM)Ni_{4.49}Co_{0.1}Mn_{0.205}Al_{0.205}$(LM : Lanthaniumrich Mischmetal) alloy powders(${\leq}200$mesh) which were coated with 25wt% copper in an acidic bath were prepared with or without addition of 10wt% PTFE as a binder. Prior to electrochemical measurements, the electrodes were sintered at $40^{\circ}C$ for 1 and 2hrs in vacuum with Mm(mischmetal) and sponge type Ti getters. The properties such as maximum capacity, cycle life and mechanical strength of the negative electrode have been investigated. The surface analysis of the electrode was also obtained before and after charge-discharge cycling using scanning electron microscope(SEM). From the observations of electrochemical behavior, it was found that the sintered electrode shows a lower maximum discharge capacity compared with non-sintered electrode but it shows a better cycle life. For the both electrodes with or without addition of PTFE binder, the values of mechanical strength were obtained, and their values increased with increasing sintering time. However, there is little difference of discharge capacity for both electrodes.

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Dielectric and Piezoelectric Properties in Multilayer Ceramic Actuator (적층형 세라믹 액츄에이터의 유전 및 압전특성)

  • Choi, Hyeong-Bong;Jeong, Soon-Jong;Ha, Mun-Su;Koh, Jung-Hyuk;Lee, Dae-Su;Song, Jae-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.615-618
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    • 2004
  • The piezoelectricity and polarization of multilayer ceramic actuators, being designed to stack ceramic layer and electrode layer alternately, were investigated under a consideration of geometry, the thickness ratio of the ceramic layer to electrode layer The actuators were fabricated by tape-casting of $0.42PbTiO_3-0.38PbZrO_3-0.2Pb(Mn_{1/3}Nb_{2/3})O_3$ followed by laminating, burn-out and co-firing process. The actuators of $5\times5mm^2$ in area were formed in a way that $60{\sim}200{\mu}m$ thick ceramics were stacked 10 times alternately with $5{\mu}m$ thick electrode. Increase in polarization and electric field-displacement with increasing thickness ratio of the ceramic/electrode layer and thickness/cross section ratio were attributed to the change of $non-180^{\circ}/180^{\circ}$ domain ratio which was affected by the interlayer internal stress and Poisson ratio of ceramic layer. The piezoelectricity and actuation behaviors were found to be dependent upon the volume ratio (or thickness ratio) of ceramic layer relative to ceramic layer. Concerning with the existence of internal stress, the field-induced polarization and deformation were described in the multilayer actuator.

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Optimization of Growth Gases for the Low-temperature Synthesis of Carbon Nanotubes (탄소나노튜브의 저온성장을 위한 합성가스의 최적화 연구)

  • Kim, Young-Rae;Jeon, Hong-Jun;Lee, Han-Sung;Goak, Jeung-Choon;Hwang, Ho-Soo;Kong, Byung-Yun;Lee, Nae-Sung
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.4
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    • pp.342-349
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    • 2009
  • This study investigated the growth characteristics of carbon nanotubes (CNTs) by changing a period of annealing time and a $C_{2}H_{2}/H_2$ flow ratio at temperature as low as $450^{\circ}C$ with inductively coupled plasma chemical vapor deposition. The 1-nm-thick Fe-Ni-Co alloy thin film served as a catalyst layer for the growth of CNTs, which was thermally evaporated on the 15-nm-thick Al underlayer deposited on the 50-nm-thick Ti diffusion barrier. The annealing at low temperature of $450^{\circ}C$ brought about almost no granulation of the catalyst layer, and the CNT growth was not affected by a period of annealing time. A study of changing the flow rate of $C_{2}H_{2}$ and $H_2$ showed that as the ratio of the $C_{2}H_{2}$ flow rate to the $H_2$ flow rate was lowered, the CNTs were grown to be longer With further decreasing the flow ratio, the length of CNTs reached the maximum and then became shorter. Under the optimized gas flow rates, we successfully synthesized CNTs with a uniform length over a 4-inch Si wafer at $450^{\circ}C$.