• 제목/요약/키워드: Co-based films

검색결과 245건 처리시간 0.027초

RF 마그네트론 스퍼터를 이용하여 제작한 MIZO 박막의 특성에 미치는 기판 온도의 영향 (Characteristics of the Mg and In co-doped ZnO Thin Films with Various Substrate Temperatures)

  • 전기석;지홍섭;임상우;정채환
    • Current Photovoltaic Research
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    • 제4권4호
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    • pp.150-154
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    • 2016
  • Mg and In co-doped ZnO (MIZO) thin films with transparent conducting characteristics were successfully prepared on glass substrates by RF magnetron sputtering technique. The Influence of different substrate temperature (from RT to $400^{\circ}C$) on the structural, morphological, electrical, and optical properties of MIZO thin films were investigated. The MIZO thin film prepared at the substrate temperature of $350^{\circ}C$ showed the best electrical characteristics in terms of the carrier concentration ($4.24{\times}10^{20}cm^{-3}$), charge carrier mobility ($5.01cm^2V^{-1}S^{-1}$), and a minimum resistivity ($1.24{\times}10^{-4}{\Omega}{\cdot}cm$). The average transmission of MIZO thin films in the visible range was over 80% and the absorption edges of MIZO thin films were very sharp. The bandgap energy of MIZO thin films becomes wider from 3.44 eV to 3.6 eV as the substrate temperature increased from RT to $350^{\circ}C$. However, Band gap energy of MIZO thin film was narrow at substrate temperature of $400^{\circ}C$.

Mechanical and Water Barrier Properties of Biopolyester Films Prepared by Thermo-Compression

  • Rhim, Jong-Whan
    • Food Science and Biotechnology
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    • 제16권1호
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    • pp.62-66
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    • 2007
  • Four different biopolyester films, two aliphatic polyesters including polylactides (PLA) and poly(3-hydroxy-butyrate-co-3-hydroxyvalerate (PHBV), and two aliphatic-aromatic copolyesters including Ecoplex and Biomax, were prepared using by thermo-compression, and their tensile and water barrier properties were determined. Among the films tested, PLA film was the most transparent (T: 95.8%), strongest, and stiffest (TS, 40.98 MPa; E, 1916 MPa), however it was rather brittle. In contrast, Ecoplex film was translucent while being the most flexible and resilient (EB, 766.8%). Biomax film was semitransparent and was the most brittle film tested (EB, 0.03%). All biopolyester films were water resistant exhibiting very low water solubility (WS) values ranging from 0.0.3 to 0.36%. PHBV film showed the lowest water vapor permeability (WVP) value ($1.26{\times}10^{-11}\;g{\cdot}m/m^2{\cdot}sec{\cdot}Pa$) followed by Biomax, PLA, and Ecoflex films, respectively. The water vapor barrier properties of each film were approximately 100 times higher than those of carbohydrate or protein-based films, but about 100 times lower than those of commodity polyolefin films such as low-density polyethylene (LDPE) or polypropylene (PP).

Effect of Interface Roughness on Magnetoresistance of[Ni/Mn] Superlattice-Based Spin Valves

  • J.R. Rhee;Kim, M.Y.;J.Y. Hwang;Lee, S.S.
    • Journal of Magnetics
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    • 제6권4호
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    • pp.145-147
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    • 2001
  • The effect of interface roughness between [Ni/Mn] superlattice and pinned NiFe layer on magnetoresistance (MR) of [Ni/Mn] superlattice-based spin valve films was investigated. Antiferromagnetic phase structure and interface roughness of [Ni/Mn] superlattice spin valve films were compared in the as-deposited and the annealed samples at 240$\^{C}$, respectively. Surface morphology of spin valves was substantially flattened due to the formation of the antiferromatic NiMn phase. In case of Co insertion between Cu and NiFe, the interlace roughness and MR ratio in the annealed [NiMn] superlattice and pinned NiFe/Co layer increased more than those in the annealed [Ni/Mn] superlattice and pinned NiFe layers respectively.

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Low Temperature Plasma-Enhanced Atomic Layer Deposition Cobalt

  • 김재민;김형준
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 추계학술발표대회
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    • pp.28.2-28.2
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    • 2009
  • Cobalt thin film was fabricated by a novel NH3-based plasma-enhanced atomic layer deposition(PE-ALD) using Co(CpAMD) precursor and $NH_3$ plasma. The PE-ALD Co thin films were produced well on both thermally grown oxide (100 nm) $SiO_2$ and Si(001) substrates. Chemical bonding states and compositions of PE-ALD Co films were analyzed by XPS and discussed in terms of resistivity and impurity level. Especially, we successfully developed PE-ALD Code position at very low growth temperature condition as low as $T_s=100^{\circ}C$, which enabled the fabrication of Co patterns through lift-off method after the deposition on PR patterned substrate without any thermal degradation.

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이산화탄소 포집용 폴리비닐아세테이트-이온성액체 막 (Poly (vinyl acetate)-Ionic Liquids Membranes for $CO_2$ Capture)

  • 이상진;최수현;백일현
    • 한국에너지공학회:학술대회논문집
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    • 한국에너지공학회 2010년도 춘계학술 발표회
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    • pp.199-199
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    • 2010
  • Polymeric membranes have been widely used to separate gas mixtures, such as $O_2/N_2,\;CO_2/CH_4,\;CO_2/N_2$, and olefin/paraffin. The permeation selectivity is the ratio between composition ratio at the permeate side and composition ratio at the feed side. In addition, the permeation selectivity is a product of solubility selectivity and diffusivity selectivity. We present a novel idea and describe its experimental result, which was achieved by preparing polymer gel films that included a room temperature ionic liquid (RTIL) in a polymer matrix. It is known that $CO_2$ can dissolve easily in imidazolium-based RTILs. We prepared polymer-ionic liquid gel films using an ionic liquid, 1-ethyl-3-methylimidazolium acetate ([emim] acetate, C-tri) and a host polymer, poly (vinyl acetate) (PVAc, Aldrich).

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캐패시터용 강유전체 박막의 제조 및 특성 (Fabrication and Properties of Ferroelectric Thin Film for Capacitor)

  • 소병문;박춘배
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 추계학술대회 논문집 전문대학교육위원 P
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    • pp.31-34
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    • 1999
  • In the present study, we fabricated stoichiometric $(Ba_{1-x}Sr_x)TiO_3$ thin films at various substrate temperature and contents using of magnetron sputtering method on optimized Pt-based electrodes (Pt/TiN/$SiO_2$/Si). The substate temperature deposited at 200[ $^{\circ}C$], 400[$^{\circ}C$] and 600[$^{\circ}C$] and crystalline BST thin films show above 400[$^{\circ}C$]. Also, the composition of $(Ba_{1-x}Sr_x)TiO_3$ thin films deposited on Si wafer substrate at 400[$^{\circ}C$] were closed to stoichiometry($1.015{\sim}1.093$ in A/B ratio), but compositional deviation from a stoichiometry is larger as $SrCO_3$ is added. The drastic decrease of dielectric constant and increase of dielectric loss in $(Ba_{1-x}Sr_x)TiO_3$thin films is observed above 100[kHz]. V-I characteristics of $(Ba_{1-x}Sr_x)TiO_3$ thin films show the decrease of leakage current with the increase of $SrCO_3$ contents.

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Effect of Non-lattice Oxygen Concentration and Micro-structure on Resistance Switching Characteristics in Nb-doped HfO2 by DC Magnetron Co-Sputtering

  • 이규민;김종기;김영재;김종일;손현철
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.378.1-378.1
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    • 2014
  • In this study, we investigated that the resistance switching characteristics of Nb-doped HfO2 films with increasing Nb doping concentration. The Nb-doped HfO2 based ReRAM devices with a TiN/Nb-doped HfO2/Pt/Ti/SiO2 were fabricated on Si substrates. The Nb-doped HfO2 films were deposited by reactive dc magnetron co-sputtering at $300^{\circ}C$ and oxygen partial ratio of 60% (Ar: 16sccm, O2: 24sccm). Microstructure of Nb-doped HfO2 films and atomic concentration were investigated by XRD, TEM, and XPS, respectively. The Nb-doped HfO2 films showed set/reset resistance switching behavior at various Nb doping concentrations. The process voltage of forming/set is decreased and whereas the initial current level is increased in doped HfO2 films. However, the switching properties of Nb-doped HfO2 were changed above the specific doping concentration of Nb. The change of resistance switching behavior depending on doping concentration was discussed in terms of concentration of non-lattice oxygen and micro-structure of Nb-doped HfO2.

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PLD법으로 제조된 $CuSb_2O_6-SnO_2$ 박막의 전기.광학적 특성 (Preparation and Properties of $CuSb_2O_6$-doped $SnO_2$ Thin Films by Pulsed Laser Deposition)

  • 이채종;변승현;이희영;허영우;이준형;김정주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.262-263
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    • 2007
  • Effect of co-doping on optical and electrical properties of $SnO_2$ based thin films were studied. $SnO_2$ ceramic targets with up to 50mol% $CuSb_2O_6$ were prepared by sintering mixed-oxide compact in the temperature range of $1100^{\circ}C{\sim}1300^{\circ}C$ in air. Thin films were then deposited onto glass substrates by pulsed laser deposition where substrate temperature was maintained in the range of $500{\sim}650^{\circ}C$ with oxygen pressure of 3m~7.5mTorr and energy density of $1Jcm^{-2}$. It was found that with the increase amount of dopant, the electrical properties of thin films tended to improve with the smallest resistivity value obtained at about 8mol% doping, further increase, however, usually impaired the optical transmission in the visible range.

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바이오 플라스틱을 적용한 종이 합지 커피 포장재의 제품 특성에 관한 연구 (A Study on the Characteristics of Paper-based Packaging Materials with Bioplastics for Roasted Coffee Beans)

  • 유하경;주민정;우정희;오재영;임효승
    • 한국포장학회지
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    • 제27권1호
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    • pp.17-23
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    • 2021
  • Recent studies on recyclable materials in the packaging have an increased attention due to the eco-friendly policies of reducing carbon dioxide emissions in worldwide. Roasted coffee beans mostly packed in multi-layered films and papers according to their expiration date. To satisfy both recyclability and barrier properties, researches have been continued on paper-based packaging materials to enhance their properties. In this study, packaging materials for coffee beans are developed by laminating bioplastic films on papers. The tests of packaging materials were performed with mechanical properties, gas and water vaper permeability, recyclability and storage quality for coffee beans. Compared to other samples, the paper/bioplastics-based coffee package composed of starch coated papers and two bioplastics showed the lowest barrier properties, comparable mechanical strength and ability to maintain the quality of roasted coffee beans. Thus, it could be a good alternative for multi-layered packages for roasted coffee beans.

Study on Co- and Ni-base $Si_2$ for SiC ohmic contact

  • 김창교;양성준;노일호;장석원;조남인;정경화
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.167-171
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    • 2003
  • We report the material and electrical properties of $CoSi_2$ and $NiSi_2$contacts to n-type 4H-SiC depending on the post-annealing and the metal covering conditions. The Ni and Co silicides are deposited by RF sputtering with Ni/Si/Ni and Co/Si/Co films separately deposited on 4H-SiC substrates. The deposited films are annealed at $800\;^{\circ}C$ in $Ar:H_2$ (9:1) gas ambient. Results of the specific surface resistivity measurements show that the resistivity of the Co-based metal contact was the one order lower than that of the Ni-based contact. The specific contact resistance was measured by a transmission line technique, and the specific contact resistivity of $1.5{\times}10^{-6}\;{\Omega}\;cm^2$ is obtained for Co/Si/Co metal structures after a two-step annealing; at $550\;^{\circ}C$ for 10 min and $800\;^{\circ}C$ for 3min. The physical properties of the contacts were examined by using XRD and AES, and the results indicate that the Co-based metal contacts have better structural stability of silicide phases formed after the high temperature annealing.

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