• 한국전기전자재료학회논문지
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• 제16권8호
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• pp.744-751
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• 2003

Co-Pd alloy thin films prepared by a DC-sputter that have self-organized nano structure(SONS), are promising for high-density information storage media in information era. We prepared the samples by varying Pd contents of 0~8.1 wt% at the substrate temperatures of room temperature (RT) and 200 $^{\circ}C$, respectively Microstructure and Pd contents of the Co$_{1-x}$ Pd$_{x}$ films are probed by a scanning electron microscope (SEM), a transmission electron microscope (TEM) and an energy dispersive spectrometer (EDS). We also investigated the saturation magnetization (Ms), remanence and coercivity of the Co$_{1-x}$ Pd$_{x}$ films. Surface roughness are measured by an atomic force microscope (AFM). We revealed that self-organized nano size Co-enriched phase and Pd-enriched phase existed with Pd contents at the substrate temperatures of RT and 20$0^{\circ}C$ through microstructure characterization. SONS helped to keep the saturation magnetization and enhance the perpendicular anisotropy with Pd contents. Out result implies that we may tune the perpendicular magnetic properties with keeping the saturation magnetization by varying substrate temperatures and Pd contents for high density magnetic recording.rding.

• 한국전기전자재료학회논문지
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• 제15권9호
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• pp.812-817
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• 2002

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 제5회 학술대회 논문집 일렉트렛트 및 응용기술연구회
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• pp.90-95
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• 2003

The present paper is to investigate the phase stability and soft magnetic properties of amorphous CoNbZr films when Pd is added as a substitution for CoNbZr alloys. The films were prepared by a RF magnetron sputtering method. The CoNbZrPd films deposited on Si wafers exhibited amorphous structures being independent upon the amount of Pd added in the films. On the addition of 4.34% Pd, the excellent soft magnetic characteristics of the films were observed with a coercive force of 0.54 Oe and an anisotropy field of 11 Oe, whereas a coercive force of 1 Oe and an anisotropy field of 3.5 Oe were shown in the film without the addition of Pd. The increased anisotropy field and low coercive force of the films may be attributed to the occupancy of Pd in the preferred sites parallel to the external magnetic field applied on the deposition process. A permeability of about 1100 was kept constant in the operation frequency ranging up to 100 MHz, which can be explained by the Landau-Lifshitz formula.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.54-58
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• 2002

The present paper is to investigate the phase stability and soft magnetic properties of amorphous CoNbZr films when Pd is added as a substitution for CoNbZr alloys. The films were prepared by a RF magnetron sputtering method. The CoNbZrPd films deposited on Si wafers exhibited amorphous structures being independent upon the amount of Pd added in the films. On the addition of 4.34% Pd, the excellent soft magnetic characteristics of the films were observed with a coercive force of 0.54 Oe and an anisotropy field of 11 Oe, whereas a coercive force of 1 Oe and an anisotropy field of 3.5 Oe were shown in the film without the addition of Pd. The increased anisotropy field and low coercive force of the films may be attributed to the occupancy of Pd in the preferred sites parallel to the external magnetic field applied on the deposition process. A permeability of about 1100 was kept constant in the operation frequency ranging up to 100 MHz, which can be explained by the Landau-Lifshitz formula.

• 한국자기학회지
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• 제6권6호
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• pp.405-410
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• 1996

방사광 광전자분광법을 이용하여 $Co_{x}Pd_{100-x}$ 합금박막들(x = 0, 25, 40, 65)의 가전자띠 스펙트럼들을 측정하고, Co 3d 전자와 Pd 4d 전자들에 의한 각각의 부분스펙트럼 무게분포(partial spectral weight distribution : PSW)를 결정하였다. Co-Pd 합금박막에서의 Co 3d PSW는 수직자기이방성을 나타내는 영역에 해당하는 Co 함량 25% 이하에서 순수 Co 박막의 스펙트럼과 상당히 다른 구조를 보인 반면, Co 함량이 약 40% 이상이 되면 순수 Co 박막의 PES스펙트럼과 거의 일치하였다. Co 함량이 25% 이하의 Co 3d PSW에서 관찰된 페르미준위 근처의 봉우리 구조와 결합에너지 2 eV 근처의 어깨구조는 혼성에 의한 Co 3d 전자구조의 변화를 반영한다. 따라서 Co 3d 전자와 Pd 4d 전자 간의 혼성상호작용이 수직자기이방성의 결정에 중요한 역할을 하는 것으로 추측되었다. Co-Pd 합금박막에서의 Pd 4d PSW는 순수 Pd 스펙트럼에 비하여 그 폭이 넓고, 주 봉우리의 결합에너지가 크며, 페르미준위에서의 스펙트럼의 세기가 작게 관찰되었다. 그리고 Pd 함량이 감소함에 따라 Pd 4d PSW의 반치폭이 증가하였는데, 이러한 결과는 Co-Pd 합금이 형성될 때의 무질서 효과 또는 Co 3d 전자와 Pd 4d 전자간의 혼성상 호작용으로 인한 Pd 4d 전자구조의 변화를 반영하는 것으로 추측되었다.

• 한국자기학회지
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• 제6권4호
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• pp.235-241
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• 1996

수직자기 기록매체를 위해 스퍼터링법으로 Co/Pd 및 Co/Pt 다층막을 형성하였으며 Pd 및 Pt 바닥층의 증착 압력이 다층막의 자화거동 및 보자력에 미치는 영향에 대해 연구하였다. Co/Pd 다층막의 경우 보자력이 바닥층의 증착 압력에 매우 민감하여 바닥층 증착압력만을 조절함으로써 보자력을 크게 증가시킬 수 있었으나 Co/Pt 경우 바닥층의 증착압력 조절에 의한 보자력 증대효과는 미미하였다. 바닥층의 종류 및 증착압력에 따른 다층막의 보자력 변화를 바닥층의 표면 거칠기 및 다층막 증착착시의 계면상태 변화의 측면에서 설명할 수 있었으며 이는 바닥층의 증착압력의 증가에 따른 다층막의 수직이방성 에너지 감소 및 자화반전 기구의 변화와도 연관시킬 수 있었다. 다층막의 Kerr 회전각은 바닥층의 종류 및 증착압력에는 거의 의존하지 않는 것으로 나타났다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.169-169
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• 1999

We studied magnetic properties of co thin films deposited on Pd (111) surface, which attracted much attention recently due to the perpendicular magnetic anisotropy, using magnetic circular dichroism(MCD). Special attention was paid on the effect of Pd capping and interface roughness on the direction of magnetic easy axis, and for that purpose MCD signals for all Co thicknesses were measured with two different ways : in-plane and out-of-plane geometry. In case of bare Co films deposited on smooth Pd(111) surface, no MCD signal was observed under 4$\AA$ co thickness. At 4$\AA$ Co thickness, MCD signal at the out-of-plane geometry was observed, and for thicker Co films, only in-plane MCD signal was measured. This type of magnetic easy axis transition has been reported for other cases like Co/Pt system. The effect of 5$\AA$ Pd capping on these bare Co films made an remarkable change on the transition of magnetic easy axis. Out-of-plane MCD signals exists up to 20$\AA$ Co thickness, and disappears at 24$\AA$ Co thickness. In-plane MCD signals first appears at 10$\AA$ Co thickness and gradually increases up to 24$\AA$ Co thickness. Between 10$\AA$ and 20$\AA$ Co thickness, in-plane and out-of-plane MCD signal coexist. The formation of multi-domain structure or the existence of tilted magnetic easy axis is an possible scenario for such an interesting coexistence. The effect of interface roughness was also tested by measuring MCD signal on Co films deposited on un-annealed Pd(111) surface. Out-of-plane MCD signal was observed up to 8$\AA$ Co thickness and the anisotropy of MCD signal at 4$\AA$ Co thickness was very large with respect to that of Co film deposited on the smooth substrate. Above 8$\AA$ thickness, there exists only in-plane MCD signal. From above results, it was concluded that both Pd capping and interface roughness induce and reenforce the perpendicular magnetic anisotropy. The large perpendicular magnetic anisotropy of Co/Pd multilayer system made by sputtering method can be well understood from our results.

• 한국자기학회지
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• 제3권4호
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• pp.269-276
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• 1993

Co/Pd 다층박막에서 두 sublayer의 층수비($n_{Co}/n_{Pd}$ = 1/4, 2/4, 3/4, 5/4), 기판온도 ($실온,\;100,\;150,\;200\;^{\circ}C$)를 달리하는 시료를 열진공 증착방법으로 제작하고 이에 대한 Hall 이력곡선을 측정하였다. 이때 나타나는 다야한 형태의 이력곡선을 Co와 Pd sublayer의 자화에 의한 transverse Hall effect 항과 magnetoresistivity 항이 중첩된 것으로 보고 이를 최적 fiting 방법으로 분해하였다. 이 결과 시료 전체의 계면 영역에 걸쳐 강자성과 반강자성인 두 자화상태가 공존하며 이들의 exchange anisotropy의 크기와 반강자성 물질에 의한 강자성 물질의 자벽 고착 효과에 따라 uniaxal 또는 unidirectional easy axis 형의 Hall 이력곡선을 형성하는 것으로 나타났다.

• Journal of Magnetics
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• 제8권4호
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• pp.146-148
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• 2003

Multilayered films of Co/Pd have been studied as a candidate material for a high density perpendicular recording medium due to higher anisotropy energy. However, high exchange coupling among grains results in large transition noise. To reduce the exchange coupling and grain size, addition of 3rd elements and physical separation of grains have been attempted. In the present paper, effects of sputtering pressure, Co sublayer thickness and Pd underlayer thickness on magnetic properties and microstructures were studied. It was found that by increasing sputtering pressure from 5 mTorr to 25 mTorr, Ms decreased to one half and coercivity increased more than 5000 Oe. The increase of the coercivity is associated with physical separation of grains by high pressure sputtering. Ms per volume of Co for Co/Pd multilayered film deposited at 25 mTorr shows continuous decrease with increasing Co sublayer thickness. This was related to void formation and intermixing of Co/Pd interface. Also, effect of Pd underlayer thickness on magnetic properties will be discussed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.27-28
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• 2009

In this study, we have fabricated the 3 wt% $Li_2CO3$ doped $(Ba,Sr)TiO_3$ thick films on the Ag/Pd printed $Al_2O_3$ substrates for the LTCCs (Low Temperature Co-fired Ceramics) applications. From the X-ray diffraion analysis, 3 wt% $Li_2CO3$ doped BST thick films on the Ag/Pd printed $Al_2O_3$ substrates, which sintered at 900 $^{\circ}C$ have perovskite structure without any pyro phase. The dielectric properties of 3 wt% $Li_2CO3$ doped BST thick films were measured from 1 kHz to 1 MHz. To investigate the electrical properties of 3 wt% $Li_2CO3$ doped BST thick films, we employed the impedance spectroscopy. The complex impedance of 3 wt% $Li_2CO3$ doped BST thick films were measured from 20 Hz to 1 MHz at the various temperatures.