• Title/Summary/Keyword: Co $\beta$-diketonates

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A Study on the Development of CVD Precursors VI-Thermal Properties of Co(III) β-Diketonates

  • Lee, Han-Bin;Lee, Choong-Hyuk;Oh, In-Sook;Lee, Ik-Mo
    • Bulletin of the Korean Chemical Society
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    • v.31 no.4
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    • pp.891-894
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    • 2010
  • Thermal properties of a series of Co $\beta$-diketonates have been systematically investigated and it is found that tris(3,5-heptanedionato) cobalt(III) ($Co(hd)_3$) with the lowest melting point among them can be a better precursor than tris(2,2,6,6-tetramethyl-3,5-heptanedionato cobalt(III) ($Co(tmhd)_3$), one of the most popular precursors to date, under suitable conditions. Isothermal TGA study shows that $Co(hd)_3$ would work better at higher temperature, while $Co(dmhd)_3$ would be a better precursor at lower temperature.