• 한국전기전자재료학회논문지
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• 제21권2호
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• pp.111-117
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• 2008

We have studied surface roughness, contamination of impurity, bonding with some gas element, reflectance and zeta potential on masks to be generated or changed during photolithography/dry or wet etching process. Mask surface roughness was not changed after photolithography/dry etching process. But surface roughness was changed on some area under MoSi film of Cr/MoSi/Qz. There was not detected any impurity on mask surface after plasma dry etching process. Reflectance of mask was increased after variable plasma etching treatment, especially when mask was treated with plasma including $O_2$ gas. Blank mask was positively charged when the mask was treated with Cr plasma etching gas($Cl_2:250$ sccm/He:20 $sccm/O_2:29$ seem, source power:100 W/bias power:20 W, 300 sec). But this positive charge was changed to negative charge when the mask was treated with $CF_4$ gas for MoSi plasma etching, resulting better wet cleaning. There was appeared with negative charge on MoSi/Qz mask treated with Cr plasma etching process condition, and this mask was measured with more negative after SC-1 wet cleaning process, resulting better wet cleaning. This mask was charged with positive after treatment with $O_2$ plasma again, resulting bad wet cleaning condition.

• 대한기계학회논문집B
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• 제20권5호
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• pp.1639-1648
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• 1996

Protection of gas turbine blade from its erosion and abrasion at high temperature and pressure is the first goal to cleanup the hot gas upstream for IGCC and PFBC. Ceramic filters represent an attractive technology for particle removal at high temperature and high pressure condition. They have demonstrated being a good system for improvement of thermal efficiency and reduction of effluent pollutants in advanced coal-based power systems such as IGCC and PFBC. Ceramic filter elements currently being developed were evaluated in the previous paper. In this paper, we measured the ash size and distribution on cleaning of ceramic candle filter. The results are as follows : in this experimental range, ceramic candle filter was shown to be fully adequate for the removal process of dust under high temperature and pressure. Also filtration efficiency of ceramic candle filter was higher than 98% compared with the regulation limit of particle size in gas turbine inlet.

• Nuclear Engineering and Technology
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• 제38권4호
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• pp.391-398
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• 2006

It is recommended to clean steam generators of nuclear power plants during plant outages. Under normal operations, sludge is created and constantly accumulates in the steam generators. The constituents of this sludge are different depending on each power plant characteristics. The sludge of the Kori Unit 1 steam generator, far example, was found to be composed of 93% ferrous oxide, 3% carbon and 1% of silica oxide and nickel oxide each. The research to develop a lancing system that would remove sludge deposits from the tubesheet of a steam generator was started in 1998 by the Korea Electric Power Research Institute (KEPRI) of the Korea Electric Power Corporation (KEPCO). The first commercial domestic lancing system in Korea, the $KALANS^(R)-I$ Lancing System, was completed in 2000 for Kori Unit 1 for cleaning the tubesheet of its Westinghouse Delta-60 steam generator. Thereafter, the success of the development and site implementation of the $KALANS^(R)-I$ lancing system for YGN Units 1&2 and Ulchin Units 3&4 was also realized in 2004 for sludge removal at those sites. The upper bundle cleaning system for Westinghouse model F steam generators is now under development.

• 조명전기설비학회논문지
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• 제20권8호
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• pp.6-14
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• 2006

본 논문은 TFT-LCD(Thin Film Transistor Liquid Crystal Display) PECVD(Plasma Enhanced Chemical Vapor Deposition) 장비 공정용 챔버(Chamber) 세정을 위한 새로운 플라즈마 세정방법에 적합한 플라즈마 발생방법과 플라즈마 발생을 위한 고주파 전원장치의 전력회로에 관한 연구이다. 세정에 요구되는 고밀도 플라즈마는 안테나 형태의 기존 ICP(Inductively Coupled Plasma) 방식에 강자성체인 페라이트 코어를 적용하므로 써 $1{\times}10^{11}[EA/cm^3]$이상의 고밀도 플라즈마 발생을 가능하게 하였다. 플라즈마 발생을 위한 400[kHz] 고주파 전력 변환장치의 경우 범용 HB(Half Bridge) 인버터 방식을 적용하여 플라즈마 부하에서도 안정적인 영전압 스위칭 동작을 확인 하였다. 변압기 직렬결합 방식을 사용한 10[kW] 고출력을 통해 $A_r$과 $NF_3$가스 분위기하에서 플라즈마의 밀도와 $NF_3$가스 분해율을 측정하므로서 고주파 전력 변환 장치의 성능을 입증하였다.

• 한국초전도ㆍ저온공학회논문지
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• 제21권2호
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• pp.22-25
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• 2019

The superconducting magnetic separation system has been developing to separate the iron oxide scale from the feed water of the thermal power plant. The accumulation in the boiler lowers the heat exchange rate or in the worst case damages it. For this reason, in order to prevent scale generation, controlling pH and redox potential is employed. However, these methods are not sufficient and then the chemical cleaning is performed regularly. A superconducting magnetic separation system is investigated for removing iron oxide scale in a feed water system. Water supply conditions of the thermal power plant are as follows, flow rate 400 t / h, flow speed 0.2 m / s, pressure 2 MPa, temperature $160-200^{\circ}C$, amount of scale generation 50 - 120 t / 2 years. The main iron oxide scale is magnetite (ferromagnetic substance) and its particle size is several tens ${\mu}m$. As the first step we are considering to introduce the system to the chemical cleaning process of the thermal power plant instead of the thermal power plant itself. The current status of development will be reported.

• 한국방사성폐기물학회:학술대회논문집
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• 한국방사성폐기물학회 2017년도 춘계학술논문요약집
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• pp.237-238
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• 2017

• 청정기술
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• 제16권3호
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• pp.162-171
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• 2010

본 연구에서는 유기산, 무기산, 여러 첨가제들을 이용하여 옥내급수관의 스케일 제거에 적합한 환경친화적인 세정제를 개발하고자 연구를 수행하였다. 여러 유기산 중에서 oxalic acid, citric acid, malic acid 등의 경우 산화철 제거에 비교적 좋은 효율을 보였다. 이들 유기산들을 주축으로 하여 보조제를 첨가하여 옥내급수관 스케일의 주성분인 산화철 제거 평가실험을 하였다. 여러 첨가제 중에 비이온 계면활성제가 산화철 제거력 향상에 매우 뛰어남을 확인할 수 있었다. 그리고 산화철에 대해 높은 용해력을 보인 두 종류의 배합세정제 $F_1$과 $F_2$를 제조하였는데 배합세정제 $F_1$의 경우 유기산과 첨가제로만 이루어져 있어 기존의 화학세척제에 비하여 안전하고 환경친화적이지만 비교적 산화철 용해력이 조금 떨어졌고, $F_2$의 경우는 $F_1$에 무기산을 소량 첨가함으로 산화철 용해력을 보완해 줌으로써 보다 높은 산화철 세정력을 필요로 할 때 사용하는 것이 좋을 것으로 판단된다. 따라서 옥내급수관 세정 시 스케일의 정도에 따라 배합후보 세정제를 선택하는 것이 바람직하다고 판단된다.

• 한국산학기술학회논문지
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• 제15권3호
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• pp.1229-1235
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• 2014

LPG차량의 공기 흡입 시스템에서 먼지 입자의 대부분은 공기 청정기를 통해 제거되지만, 아주 작은 입자는 제거되지 않고 흡기계통에 축적되게 된다. 이 축적된 카본은 공회전 속도 제어와 센서신호 그리고 배출가스에 영향을 주게 된다. 또한 엔진 채터링 현상이나 자동변속기의 변속시점 불량등을 야기시킨다. 이 연구는 세척액을 사용하여 흡기계통을 세척하는 것에 관한 것이다. 워밍업된 챠량에서 흡입호스를 제거하고 세척액을 사용하여 가속시에 세척액을 흡입장치에 분사시켜 흡기계통을 세척하는 것이다. 세척액을 사용하여 스로틀 바디, ISC, 서지탱크, 흡입매니폴드, 흡기밸브, 연소실까지 세척함으로서 다음과 같은 실험결과를 얻을 수 있다. 스로틀 밸브가 정확하게 작동되어 TPS의 센서 신호 전압이 개선되었으며, 차량이 정지하는 경우 ISC 시스템은 공회전 속도 제어를 원활하게 작동하였다. 또한 일산화탄소는 약 0.15 %, 탄화수소는 약 20~100PPM으로 각각 감소되어 배기가스가 현저하게 개선되었다.

• 대한기계학회논문집A
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• 제26권7호
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• pp.1376-1383
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• 2002

Seismic qualification of the Air Cleaning Units for nuclear power plant Ulchin 5&6 has been performed with the guideline of ASME Section III and IEEE 344 code. By using the structural and geometrical similarity analysis, the three models to be analyzed are condensed into a single model and, at the same time, the excitation forces and other operating loads for each model are encompassed with respect to different loading conditions. As the fundamental frequencies of the structure are found to be less than 33Hz, which is the upper frequency limit of the seismic load, response spectrum analysis using ANSYS is performed in order to combine the modal stresses within the frequency limit. In order to confirm the structural and electric stability of the major components, modal analysis theory is adopted to derive the required response spectrum at the component locations. As the all combined stresses obtained from the above procedures are less than allowable stresses and no mechanical or electrical failures are found from the seismic testing, the authors confirm the safety of the nuclear equipments Air Cleaning Units studied in this paper.

• 한국산학기술학회논문지
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• 제14권4호
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• pp.2043-2048
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• 2013

원자력발전소 OPR-1000 CE형 증기발생기는 전열관 재질이 Alloy-600 HTMA으로 되어 있고, 2차측은 퇴적된 슬러지로 인해 ODSCC가 발생한다. ODSCC는 관판 주변에 집중되고 있고, 슬러지 높이에 따라 영향을 받고 있다. 증기발생기 2차측 부식분위기 저감과 함께 전열관의 응력부식균열의 발생을 억제하기 위하여 부분화학세정을 실시하였다. 슬러지 제거량은 259.2kg이고, 퇴적 슬러지 높이는 0.71인치에서 0.34인치로 낮아졌으며, 부식율은 최대 2.34mils로서 EPRI 권고사항인 10mils 이내로 만족하였다.