• 반도체디스플레이기술학회지
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• 제23권2호
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• pp.100-106
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• 2024

To generate the plasma required in dry cleaning processes, the plasma chamber must be supplied with a high-quality AC voltage with a voltage of more than 1 kV and a frequency of 400 kHz. In the existing research, many methods to supply high power have been studied, but how to improve the quality of the power for high-quality plasma has been relatively little studied. In this paper, we propose a study to improve the quality of RF power circuit for high-quality plasma generation in dry cleaning method. Existing methods in the environment of full-bridge-based RF power circuits must perform PWM duty control in the light load region. This causes distortions in the waveform, resulting in poor power quality, which directly leads to poor plasma quality. To solve these problems, a half-bridge switching method is proposed and the improvement in waveform quality is verified. To verify the feasibility of the design and control algorithm proposed in this paper, an RF power circuit prototype is fabricated and the proposed design and control method is verified through simulation and actual experiments under dummy load.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2009년도 정보 및 제어 심포지움 논문집
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• pp.153-155
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• 2009

Cleaning robot system consists of four parts; navigation system for moving of robot, cleaning system, power system, and main system with cleaning algorithm. Navigation system is the most expensive part because it has motors and sensors which is high price. Navigation system is also essential to service robot system, but user should buy two systems which are service robot system and cleaning robot system. If it is possible to share navigation system, user can save money. In this paper, we design the cleaning robot system based on modular architecture.

• 한국레이저가공학회지
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• 제12권4호
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• pp.17-25
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• 2009

The surface cleaning method based on the laser-induced breakdown (LIB) of gas and subsequent plasma and shock wave generation can remove small particles from solid surfaces. In the laser shock cleaning (LSC) process, a high-power laser pulse induces optical breakdown of the ambient gas above the solid surface covered with contaminant particles. The subsequently created shock wave followed by a high-speed flow stream detaches the particles. In this work, a novel surface cleaning process using laser-induced breakdown of liquid is introduced and demonstrated. LIB of a micro liquid jet increases the shock wave intensity and thus removes smaller particle than the conventional LSC method. Experiments demonstrate that the cleaning force and cleaning efficiency are also increased significantly by this method.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.691-692
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• 2009

• 로봇학회논문지
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• 제12권1호
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• pp.65-77
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• 2017

In this paper, we introduce the pipe cleaning robot developed to clean the gas impurities of the iron manufacturing equipments. The pipe cleaning robot is composed of two driving modules and one cleaning module. 2-DOF joint units were developed for connections among the modules. To maximize the traction power of the driving parts, it became caterpillar type. The extension links have been developed to maintain the traction force in case the pipe inner diameters change. Three cleaning modules were developed for the effective cleaning in the pipe. The driving and cleaning performance tests of the pipe cleaning robot were proceeded in the field of the iron manufacturing equipments.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 학술대회 논문집 정보 및 제어부문
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• pp.421-423
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• 2005

Power transmission lines have been playing a key role as the mainstay of national industry. When a power failure occurs, it can have severe effects on national security as well as national industry and economy. In this paper, we consider an insulator failure, which is one of the main causes of such a power failure. In spite of its importance, however, a shortage of manpower in the insulator maintenance field is getting more serious due to working environments with a high voltage and a high place. For this reason, a new active maintenance technique using a robot system is required to prevent such an insulator failure. In this paper, a new robot mechanism for insulator cleaning and inspection was developed. We confirmed its effectiveness through experiments.

• Journal of Power Electronics
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• 제17권5호
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• pp.1150-1159
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• 2017

Flexibility in the power control of ultrasonic transducers has remained a challenge for cleaning applications. This paper introduces a modification of the existing piezoelectric ceramic transducer (PCT) circuit to increase the range of operation through its impedance characteristics. The output power is controlled using the asymmetrical voltage-cancellation (AVC) method. Together with a phase-locked loop control, the switching frequency of the inverter is automatically adjusted to maintain a lagging phase angle under load-parameter variations during the cleaning process. With the proposed modification, the region of the zero-voltage switching (ZVS) operation is extended, which results in a wider range of output power control. A hardware prototype is constructed and the control algorithm is implemented using an STM32F4 microcontroller. Simulation and experimental results are provided to verify the proposed method for a 50-W PCT. The operating frequency and output power ranges under study are 37 - 41 kHz and 15.8 - 50 W, respectively.

• 동력기계공학회지
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• 제18권1호
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• pp.38-44
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• 2014

The objectives of this study are to measure the ball recovery rate of cleaning apparatus for plate heat exchanger. Ceramic ball is used for plate heat exchanger cleaning. The main components of cleaning apparatus are comprised of ball collector, ball trap, ejector, pump and plate heat exchanger. The ball recovery rate are obtained with change in recovery time and velocity of water. The results show that the ball recovery rate is slightly increased with increase in the recovery time and the velocity of water over 0.4 m/s in the straight flow. In the case of reverse flow, the ball recovery rate more increased than straight flow. The maximum ball recovery rate of the straight flow and reverse flow reach 83.97% and 86.61%, respectively, when the velocity and cleaning time are 0.5 m/s and 15min.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.2005-2010
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• 2004

Ultrasonic cleaning is performed by cavitation which is caused by the change of the sound pressure due to the vibration in a cleaning tank. In this study, experiments on electric power and sound pressure with various temperatures, dissolved oxygen and the level of the fluid was done in order to find out how the changes in a cleaning tank affect cavitation. As a result of a series of experiments, we found that transducer impedance changes periodically in response to the variances of fluid and have a direct influence on cleaning efficiency.

• 한국입자에어로졸학회지
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• 제9권3호
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• pp.139-147
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• 2013

The performances of indoor air cleaners including particle cleaning capacity and collection efficiency are usually tested at the condition of the maximum air flow rate of the air cleaners. However, the power consumption of the air cleaners is highly dependent on the air flow rate of the individual air cleaners. Therefore, there seems to be an optimized air flow rate for the air cleaning capacity considering power consumption. In this study, clean air delivery rate(or standard useful area as suggested room size) and power consumption have been investigated for different maximum air flow rates of 15 air cleaners and then compared those for different air flow rate modes of the individual 5 air cleaners selected from the 15 cleaners. For the maximum air flow rate conditions of 15 air cleansers, the power consumption per unit area was less related to the maximum air flow rate. However, for the different air flow rate modes of the selected 5 air cleaners, the lower power consumption per unit area was corresponding to the lower air flow rate mode of the individual air cleaners. When considering the operation time to the desired particle concentrations, there was an optimized one in the medium air flow rate modes for the individual air cleaners. Therefore, not only the maximum air flow rate but also lower air flow rates of individual air cleaners should be considered for estimating air cleaning capacity based on energy consumption per unit area.