• Journal of the Semiconductor & Display Technology
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• v.7 no.2
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• pp.59-62
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• 2008

The Lifetime of OLEDs by ITO/glass substrates cleaning method and cathode deposition method were investigated in the fabrication of green light emitting OLEDs with $Alq_3$-C545T fluorescent system. In our experiments, the optimum cleaning method was obtained at last processing of boiling IPA(isopropyl alcohol). And the optimum deposition methode was obtained at 3 steps deposition rate of Al. The deposition rate of 3 steps progressed changing from $0.5\AA$/sec to $3\AA$/ sec. The green light emitting OLED with plasma treatment at 150W for 2 minutes showed the highest luminance and efficiency of 20000 cd/$m^2$ and 16 lm/W. On the contrary, the OLED device without plasma treatment showed much lower performance with the luminance and efficiency of 3500 cd/$m^2$ and 2 lm/W.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3279-3281
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• 1999

This paper describes a method of direct wafer bonding using surfaces activated by a radio-frequency hydrogen plasma. The hydrogen plasma cleaning of silicon in the RIE mode was investigated as a pretreatment for silicon direct bonding. The cleaned silicon surface was successfully terminated by hydrogen, The hydrogen-terminated surfaces were rendered hydrophilic, which could be wetted by Dl water rinse. Two wafers of silicon and silicon dioxide were contacted to each other at room temperature and postannealed at $300{\sim}1100^{\circ}C$ in an $N_2$ atmosphere for 2 h. From the AFM results, it was revealed that the surface became rougher with the increased plasma exposure time and power. The effect of the plasma treatment on the surface chemistry was investigated by the AES analysis. It was shown that the carbon contamination at the surface could be reduced below 5 at %. The interfacial energy measured by the crack propagation method was 122 $mJ/m^2$ and 384 $mJ/m^2$ for RCA cleaning and hydrogen plasm, respectively.

• Journal of the Korean Solar Energy Society
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• v.35 no.1
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• pp.21-28
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• 2015

A small washer powered directly and solely by thermal radiation was constructed and tested to explore the feasibility of using solar energy or other types of thermal radiation for washing and cleaning. In principle, TA (ThermoAcoustic) washers have the benefits of simpler design and operation and fewer energy conversion processes, thus should be more energy efficient and cost less than electric washing/cleaning systems. The prototype TA converter we constructed could sustain itself with consistent fluid oscillations for more than 20 minutes when powered by either concentrated solar radiation or an IR (infrared) heater. The frequencies of water oscillations in the wash chamber ranged from 2.6 to 3.6 Hz. The overall conversion efficiency was lower than the typical efficiencies of TA engines. Change in water temperature had little effect on the oscillatory flow in the TA washer due to its low efficiency. On the other hand higher water temperatures enhanced grease removal considerably in our tests. Methods for measuring the overall conversion efficiency, frictional loss, and grease removal of the TA washing system we designed were developed and discussed.

• Journal of the Korean Applied Science and Technology
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• v.34 no.1
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• pp.58-65
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• 2017

Fluidized bed gasification is technically and economically proven technology, which shows the high possibility of realization and commercialization. However, in Korea, development of FBG to the commercial scale for power generation and industry is mainly blocked by the fact that there is no experience of design, troubleshooting and operation of even pilot scale fluidized bed gasifier. In this study, a $3MW_{th}$ circulating fluidized bed(CFB) was newly developed for biomass gasification. The fluidized bed was mainly composed of circulating and bubbling fluidized reactors integrating in-situ tar removal step in the system. For cleaning of the tar and acid gas in the product gas, the sequential gas cleaning process comprised of a ceramic filter, rapid quencher and wet scrubber was adopted. Effect of equivalence ratio was investigated to find the optimal operating conditions for the $3MW_{th}$ integrated system of fluidized bed gasification.

• Applied Chemistry for Engineering
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• v.19 no.6
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• pp.640-644
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• 2008

Lubricating oil on aluminium surfaces was cleaned by a low temperature plasma process. Oxygen plasma mixed with argon was used, and process parameters were the mixing ratio of argon in oxygen, discharge power, and negative DC potential. The aluminium surfaces were analyzed with FTIR and EDX after the cleaning. It was found that almost all of the oil was eliminated in 20 min. if the oil was pure. Elimination efficiency was highly dependent on operational conditions of the process. The highest efficiency was obtained when treated at 300 W with oxygen plasma mixed with 30% argon applying negative potential more than -500 V on the aluminium surfaces. However, efficiency higher that 60% cannot be obtained at any condition if the oil contained inorganic materials.

• Korean Journal of Materials Research
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• v.11 no.5
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• pp.361-366
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• 2001

It is difficult to obtain high Cu nucleation density and continuous Cu films in Cu-MOCVD without cleaning the TiN substrate prior to Cu deposition. In this study effects of plasma precleaning on the Cu nucleation density were investigated using SEM, XPS, AES, AFM analyses. Direct plasma pretreatment is much more effective than remote plasma pretreatment in enhancing Cu nucleation. Cleaning effects are enhanced with increasing the rf-power and the plasma exposure time in hydrogen plasma pretreatment. The mechanism through which Cu nucleation is enhanced by plasma pretreatment is as follows: Hydrogen ion\ulcorner in the hydrogen plasma react with TiN to form Ti and $NH_3$ Cu nucleation is easier on the Ti substrate than TiN substrate.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.4
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• pp.147-151
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• 2002

The resistances of metal2 contact to metall and poly Si are checked by various RF etch conditions in terms of pre-cleaning. The changes of resistance are evaluated by statistical analysis method(SAS) for the AC bias power, coil power and RF target. The contact area on poly Si is shown by TEM image and the distributions of contact resistance according to ar etch target and RTP are investigated. The RTP groups have larger variations than normal RF etch targets. When the RF etch target becomes lower and coil power becomes higher, the resistances of metal2 contact to metals and poly Si have lower contact resistance. But the condition of AC bias power did not satisfied low meta12 contacts resistance for metall and poly Si simultaneously. The R-square of ststistical analysis was 0.98 for resistances of meta12 contact to poly Si and 0.87 for resistances of meta12 contact to metall.

• Nuclear Engineering and Technology
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• v.54 no.9
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• pp.3293-3298
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• 2022

Removing radioactive contaminated metal materials is a vital task during the decommissioning of nuclear power plants to reduce the cost of the post-dismantling process. The laser decontamination technique has been recognized as a key tool for a successful dismantling process as it enables a remote operation in radioactive facilities. It also minimizes exposure of workers to hazardous materials and reduces secondary waste, increasing the environmental friendless of the post-dismantling processing. In this work, we present a thorough and efficient laser decontamination approach using a single-mode continuous-wave (CW) laser. We subjected stainless steels to a surface-removal process that repetitively exposes the laser to a confined region of ~75 ㎛ at a high scanning rate of 10 m/s. We evaluate the decontamination performance by measuring the removal depth with a 3D scanning microscope and further investigate optimal removal conditions given practical parameters such as the laser power and scan properties. We successfully removed the metal surface to a depth of more than 40 ㎛ with laser power of 300 W and ten scans, showing the potential to achieve an extremely high DF more than 1000 by simply increasing the number of scans and the laser power for the decontamination of primary circuits.

• Vacuum Magazine
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• v.4 no.1
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• pp.16-23
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• 2017

Recently, KSTAR, Korea's superconducting fusion energy research and development device, has succeeded in driving the high performance plasma for 70 seconds for the first time in the world. Continuous plasma operation technology is an essential factor for commercialization of fusion energy power generation. Therefore, this achievement is expected to play a major role in the research of fusion technology required for future fusion power plants. In order to operate the KSTAR, the discharge process in which the neutral gas is turned into the plasma should be preceded in the start-up (breakdown) phase of tokamak operation. This process essentially involves the vacuum environment in the tokamak device. KSTAR has successfully operated a vacuum pumping system to achieve the target level of the vacuum environment through a high temperature baking operation, a discharge cleaning process and boronization.

• 한국신재생에너지학회:학술대회논문집
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• 2011.05a
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• pp.205.2-205.2
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• 2011

Micro hydraulic turbines take a growing interest because of its small and simple structure as well as high possibility of applying to micro and small hydropower resources. The differential pressure exiting within the city water pipelines can be used efficiently to generate electricity like the energy generated through gravitational potential energy in dams. In order to reduce water pressure at the inlet of water cleaning centers, pressure reducing valves are used widely. Therefore, pressure energy is wasted. Instead of using the pressure reduction valve, a micro counter-rotating hydraulic turbine can be replaced to get energy caused by the large differential pressure found in the city water pipelines. In this study, in order to acquire design data of counter-rotating tubular type micro-turbine, output power, head, and efficiency characteristics due to the diffuser.