• 제목/요약/키워드: Cleaning condition

검색결과 298건 처리시간 0.03초

SC1 세척공정을 이용한 고품질 Poly(3,4-ethylenedioxythiophene) 전극 패턴 어레이의 개발 (Development of High-Quality Poly(3,4-ethylenedioxythiophene) Electrode Pattern Array Using SC1 Cleaning Process)

  • 최상일;김원대;김성수
    • 통합자연과학논문집
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    • 제4권4호
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    • pp.311-314
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    • 2011
  • Application of self-assembled monolayers (SAMs) to the fabrication of organic thin film transistor has been recently reported very often since it can help to provide ohmic contact between films as well as to form simple and effective electrode pattern. Accordingly, quality of these ultra-thin films is becoming more imperative. In this study, in order to manufacture a high quality SAM pattern, a hydrophobic alkylsilane monolayer and a hydrophilic aminosilane monolayer were selectively coated on $SiO_2$ surface through the consecutive procedures of a micro-contact printing (${\mu}CP$) and dip-coating methods under extremely dry condition. On a SAM pattern cleaned with SC1 solution immediately after ${\mu}CP$, poly(3,4-ethylenedioxythiophene) (PEDOT) source and drain electrode array were very selectively and nicely vapour phase polymerized. On the other side, on a SC1-untreated SAM pattern, PEDOT array was very poorly polymerized. It strongly suggests that the SC1 cleaning process effectively removes unwanted contaminants on SAM pattern, thereby resulting in very selective growth of PEDOT electrode pattern.

0.13μm Cu/Low-k 공정 Setup과 수율 향상에 관한 연구 (A Study on 0.13μm Cu/Low-k Process Setup and Yield Improvement)

  • 이현기;장의구
    • 한국전기전자재료학회논문지
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    • 제20권4호
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    • pp.325-331
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    • 2007
  • In this study, the inter-metal dielectric material of FSG was changed by low-k material in $0.13{\mu}m$ foundry-compatible technology (FCT) device process based on fluorinated silicate glass (FSG). Black diamond (BD) was used as a low-k material with a dielectric constant of 2.95 for optimization and yield-improvement of the low-k based device process. For yield-improvement in low-k based device process, some problems such as photoresist (PR) poisoning, damage of low-k in etch/ash/cleaning process, and chemical mechanical planarization (CMP) delamination must be solved. The PR poisoning was not observed in BD based device. The pressure in CMP process decreased to 2.8 psi to remove the CMP delamination for Cu-CMP and USG-CMP. $H_2O$ ashing process was selected instead of $O_2$ ashing process due to the lowest condition of low-k damage. NE14 cleaning after ashing process lot the removal of organic residues in vias and trenches was employed for wet process instead of dilute HF (DHF) process. The similar-state of SRAM yield was obtained in Cu/low-k process compared with the conventional $0.13{\mu}m$ FCT device by the optimization of these process conditions.

폐색 저감형 산기관의 개발 및 적용성 평가 (A study on the Development and Evaluation of Sludge Occlusion Reduced Diffuser)

  • 김영훈;김관엽;이의종;남종우;이창하;전민정;김형수
    • 상하수도학회지
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    • 제25권1호
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    • pp.41-49
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    • 2011
  • The diffuser which is conventionally adapted to MBR, has problem that decreasing the cleaning effect of membrane module by inflexible air supply due to the occlusion of sludge from diffuser hole. To solve this problem, diffuser structure of submerged module should be improved to discharge sludge which is flow into the diffuser for prevent occlusion in the diffuser. In this study, the structure of the diffuser was reformed to open lower part for preclusion the blocking. And the outlet diameter of the diffuser was drawn through the condition for the depth of water and air rate, to prevent air-leak condition of improved diffuser. Moreover, application is evaluated by comparing test with occlusion effect of the conventional and improved diffuser. From the results, air-water boundary changes are steady with changes of water depth and it shows linear relation about air rate. By using this linear numerical formula, the height of diffuser's outlet can be decided. Also, it displays that it can prevent the occlusion effect during the comparing test. Hereafter, if this diffuser is applied to practical MBR process, the occlusion problem of diffuser will be disappeared.

발전소용 CTCS 내 Vortex Promoter 설계 변수에 따른 세척용 스폰지 볼 회수성능 분석 (Analysis of Cleaning Sponge Ball Recovery Performance According to Vortex Promoter Design Parameters in CTCS for Power Plant)

  • 정다운;이승율;김동선;서현규
    • 한국분무공학회지
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    • 제28권3호
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    • pp.126-133
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    • 2023
  • This study analyzes the flow characteristics and sponge ball recovery performance in a ball strainer according to vortex promoter design variables through flow-particle analysis based on actual experiments to derive a method for improving the recovery rate of cleaning sponge balls of CTCS applied to existing power plants. Based on the ball strainer in CTCS used in the power plant, the experiment was conducted by changing the design factor of the improved shape. In addition, flow and particle analysis were performed under the same conditions as the experiment to numerically the flow characteristics and recovery rate in the ball strainer according to the design factor of the vortex promoter. As a result of the study, it was confirmed that the recovery performance was improved by about 3% by changing the design height of the Vortex promoter. And when comparing the difference between maximum and minimum recovery rate, it was found that the effect on the recovery performance increased slightly according to the distance condition compared to the vortex promoter design height condition.

타이타늄 터닝 스크랩 내 절삭유 제거를 위한 초음파 침지-스팀 및 고온 건조 공정 (Ultrasonic Immersion-steam Cleaning and High Temperature Drying Process for Removing Cutting Oil on Titanium Turning Scraps)

  • 채지광;유수환;오정민;임재원
    • 자원리싸이클링
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    • 제30권1호
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    • pp.60-65
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    • 2021
  • 타이타늄 터닝 스크랩을 재활용하기 위해서는 표면에 남아있는 절삭유나 기타 오염물을 제거해야할 필요가 있다. 본 연구에서는 초음파 침지-스팀의 복합 세척 공정을 활용하여 타이타늄 스크랩을 세척하고, 건조 조건을 달리하여 절삭유를 제거하는 실험을 진행하였다. 또한 절삭유 제거 메커니즘 확인을 위한 접촉각 측정을 통해 타이타늄 터닝 스크랩의 침지 용액 최적 농도를 확인하였다. 피로인산나트륨 용액에 침지 세척 시 50℃에서 절삭유 내 탄소 제거율이 가장 높았으며, 스팀 세척-초음파 침지-스팀 세척 순으로 진행하는 것이 초음파 침지 후 스팀 세척을 실시하는 것보다 탄소 함량이 낮은 것을 확인했다. 타이타늄 스크랩의 TGA 분석을 통해 산화 및 절삭유의 분해 거동을 조사하고 고온 건조에 적용하였다. 건조 후 탄소와 산소 함량을 고려 시 200℃에서 2시간 건조를 하는 것이 최적의 조건임을 확인하였다.

공기정화용 소형 전기집진장치의 집진효율에 관한 연구 (A Study on Collection Efficiency of Compact and Small Size Air-Cleaning Electrostatic Precipitator)

  • Lee, S.H.;Yum, M.O.;Kang, K.O.
    • 한국정밀공학회지
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    • 제14권1호
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    • pp.84-89
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    • 1997
  • Recentely, a compact and small size air-cleaning Electrostatic Precipitator(ESP) is needed to develop for air conditioning devices. From Deutsch formula for ESP efficiency, collection efficiency is affected not only the structure of collection section but also the charge rate of dust. In terms of collection area, the most useful type is a scroll type ESP. In this work, we investigated experimentally aptimum design factor of scroll type ESP by application of Taguchi method. And we developed the scroll type ESP by using optimal condition of control factor.

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연도가스 열회수용 순환유동층 열교환기의 오염저감특성 (Fouling Reduction Characteristics of a Fluidized Bed Heat Exchanger for Flue Gas Heat Recovery)

  • 이금배;전용두
    • 설비공학논문집
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    • 제16권8호
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    • pp.770-777
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    • 2004
  • Fouling and cleaning tests are performed for a uniquely designed 7,000 ㎉/hr fluidized bed heat exchanger for exhaust gas heat recovery. Fuel rich condition is maintained in the combustor for a limited time period to generate soot that is to be deposited on the heat transfer surfaces (fouling) and 600 Um glass beads are circulated inside the heat exchanger system for cleaning and enhancing the heat transfer performance. According to the present experimental study, performance degradation mode could be monitored and the effect of particle circulation on the heat transfer improvement could be identified. Through the present study, it is demonstrated that circulating particles contribute not only to the fouling reduction in gas side, but also to the heat transfer enhancement of the unit, while other possible aging factors including water side corrosion seemed to contribute to the accumulated performance deterioration.

Surface Cleaning of Polyethylene Terephthalate Film with Non-equilibrium Atmospheric Discharge Plasma

  • Sung, Youl-Moon
    • Transactions on Electrical and Electronic Materials
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    • 제9권2호
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    • pp.79-83
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    • 2008
  • The dampness by treating the surface with polyethylene terephthalate (PET) film was measured to grasp the plasma parameters and was observed the surface condition with an atomic force microscope (AFM) to find the causes of the dampness. Also, the vibrational and rotational temperatures in the plasma were calculated after identifying the radicals within the plasma by analyzing the emission spectral with an emission spectrum. The hydrophilic properties were enhanced, by treating the surface of the PET film with non-equilibrium atmospheric discharge plasma. When the rotational temperature was 0.22 to 0.31 eV within the plasma, surface modification control could be easily carried out to surface treatment of PET film on non-equilibrium atmospheric pressure plasma.

세척용 구형입자 순환에 따른 활성슬러지내 침지식 평막의 막간차압 (Transmembrane Pressures for the Submerged Flat Membrane in the Activated Sludge Solution by Circulation of the Cleaning Spherical Beads)

  • 정도인;민지수;이수민;정건용
    • 멤브레인
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    • 제28권1호
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    • pp.62-66
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    • 2018
  • 본 연구에서는 순수와 유사한 밀도의 세척형 구형 입자를 제작하고 순수 수조 내에서 산기량 및 입자 농도에 따른 입자의 유동 속도를 측정하였다. 세척형 구형 입자 1~3%를 MLSS 8,000 mg/L인 활성슬러지 용액에 주입하고 20 LMH 및 산기량 500 mL/min 조건에서 FR 및 SFCO 모드로 동시에 투과 실험하였다. 사용한 분리막은 유효 막면적이 $90cm^2$, 공칭 세공크기가 $0.4{\mu}m$인 평막이다. 입자 농도가 증가할수록 TMP가 감소하였으며 FR 모드, 입자 농도 2%일 때 가장 효과적인 것으로 확인되었다.

에너지소비를 고려한 실내공기청정기의 풍량별 입자 청정화능력 분석 (Analysis on Particle Cleaning Capacity of Indoor Air Cleaners for Different Flow Rates Considering Energy Consumption)

  • 한방우;강지수;김학준;김용진;원효식
    • 한국입자에어로졸학회지
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    • 제9권3호
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    • pp.139-147
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    • 2013
  • The performances of indoor air cleaners including particle cleaning capacity and collection efficiency are usually tested at the condition of the maximum air flow rate of the air cleaners. However, the power consumption of the air cleaners is highly dependent on the air flow rate of the individual air cleaners. Therefore, there seems to be an optimized air flow rate for the air cleaning capacity considering power consumption. In this study, clean air delivery rate(or standard useful area as suggested room size) and power consumption have been investigated for different maximum air flow rates of 15 air cleaners and then compared those for different air flow rate modes of the individual 5 air cleaners selected from the 15 cleaners. For the maximum air flow rate conditions of 15 air cleansers, the power consumption per unit area was less related to the maximum air flow rate. However, for the different air flow rate modes of the selected 5 air cleaners, the lower power consumption per unit area was corresponding to the lower air flow rate mode of the individual air cleaners. When considering the operation time to the desired particle concentrations, there was an optimized one in the medium air flow rate modes for the individual air cleaners. Therefore, not only the maximum air flow rate but also lower air flow rates of individual air cleaners should be considered for estimating air cleaning capacity based on energy consumption per unit area.