• Journal of the Korean Vacuum Society
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• v.10 no.2
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• pp.267-274
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• 2001

Removal of Cr, Ni and Cu impurities on Si surfaces using remote plasma-excited hydrogen was investigated. Si surfaces were contaminated intentionally by acetone with low purity. To determine the optimum process condition, remote plasma-excited hydrogen cleaning was conducted for various rf-powers and plasma exposure times. After remote plasma-excited hydrogen cleaning, Si surfaces were analyzed by Total X-ray Reflection Fluorescence(TXRF), Surface Photovoltage(SPV) and Atomic Forece Microscope(AFM). The concentrations of Cr, Ni and Cu impurities were reduced and the minority carrier lifetime increased after remote plasma-excited hydrogen. Also RMS roughness decreased by more than 30% after remote plasma-excited hydrogen cleaning. AFM analysis results also show that remote plasma-excited hydrogen cleaning causes no damage to the Si surface. TXRF analysis results show that remote plasma-excited hydrogen cleaning is effective in eliminating metallic impurities from Si surface only if it is performed under an optimum process conditions. The removal mechanism of the Cr, Ni and Cu impurities using remote plasma-excited hydrogen treatments is proposed to be the lift-off during removal of underlying chemical oxides.

• 한국태양에너지학회:학술대회논문집
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• 2009.11a
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• pp.279-284
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• 2009

Traditionally, so-called "industrial waste gases", such ad exhaust from boilers at industrial installations and a large quantity of soot discharged from power station, before their release into the atmosphere, have been on occasion subjected to an air cleaning process to remove fine particles that may pollute the atmosphere (such as mist and dust containing various powdery or oily substances and moisture from industrial waste gases). The release of industrial waste gases containing these particles directly into the atmosphere poses a serious threat to the earth environment; and recovery of these noxious substances is required by law in some countries and local governments. in urban areas, air pollution from automobile exhaust and others creates a serious condition. Some homes are equipped with and use indoor air purifiers. In many of the kitchens of restaurants, smoke generated during cooking and otherwise contaminated air are cleansed by air purifiers before being released outside or recycled inside. For the dust collecting devices to recover the fine particles contained in contaminated air, the cause for air pollution and how to purify air, many types based on various principles are known. Specifically, classified based on theories of particle collection, filtration, gravity, inertia, centrifugation, electricity, and cleaning types are cited as available processes. Among them, an appropriate type is selected according to the size or type of fine particles to be collected and conditions for installation. For the efficiency of dust collection, a filtration system (by using bag filters and others) and electric system are particularly outstanding and are therefore used widely in various areas of industry. In this research, rotary type high performance oil mist and smoke collecting system with self auto cleaning device equipped with the cleaning fluid spraying section is investigated.

• Membrane Journal
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• v.26 no.5
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• pp.401-406
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• 2016

In this study, we have investigated the removal of the low level radioactive ions of Cs and I in water by the reverse osmosis (RO) process. The two RO modules produced in domestic region and the waste RO module after the cleaning process were selected. Then we compared removal performance of both Cs and I. The experiments are conducted by varying the concentration of feed, the pressure. As a results, it was confirmed that all three modules are higher I decontamination factor than Cs. And particularly, for the cleaned RO module, its decontamination factor of I was 1140. Since the results at low pressure condition were better than that at high pressure conditions, the use of the direct installation of RO modules on the tap water might be possible. In addition, it was confirmed that the waste RO module after cleaning process using EDTA, SBS and NaOH, increased the decontamination performance better than before cleaning, in particular, the recovery ratio after cleaning was 6.3% higher.

• Bulletin of the Korean Chemical Society
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• v.30 no.10
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• pp.2309-2317
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• 2009

Depurination, the release of purine bases from nucleic acids by hydrolysis of the N-glycosidic bond, gives rise to alterations of the cell genome. Though cells have evolved mechanisms to repair these lesions, unrepaired apurinic sites have been shown to have two biological consequences: lethality and base substitution errors. 2-Bromopropane (2-BP) is used as an intermediate in the synthesis of pharmaceuticals, dyes, and other organics. In addition, 2-BP has been used as a replacement for chloroflurocarbons and 1,1,1-trichloroethane as a cleaning solvent in electronics industry. However, 2-BP was found to cause reproductive and hematopoietic disorders in local workers exposed to it. Owing to the toxicity of 2-BP, there has been a tendency to use 1-BP as an alternative cleaning solvent to 2-BP. However, 1-BP has also been reported to be neurotoxic in rats. Though $N^7$-guanine adduct of 2-BP has been reported previously, massive depurination of the nucleosides and calf thymus DNA was observed in this study. We incubated the nucleosides (ddG, dG, guanosine, ddA, dA and adenosine) with excess amount 2-BP at the physiological condition (pH 7.4, $37\;{^{\circ}C}$), which were analyzed by HPLC and LC-MS/MS. In addition, the time and dose response relationship of depurination in nucleosides induced by 2-bromopropane at the physiological condition was investigated. Similarly, incubation of calf-thymus DNA with the excess amount 2-BP at the physiological condition was also performed. In addition, the time and dose response relationship of depurination in calf-thymus DNA induced by 2-BP at the physiological condition was investigated. Those results suggest that the toxic effect of 2-BP could be both from the depurination of nucleosides and DNA adduct formation.

• Korean Chemical Engineering Research
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• v.40 no.6
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• pp.769-777
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• 2002

Using four components - nonionic surfactants, water, hydrocarbon oil and an alcohol as cosurfactant, 12 types of cleaning agents were prepared, and their physical properties such as surface tension, viscosity, electroconductivity and phase stability were measured. As the formulated cleaning agents have low surface tensions(30.5-31.1 dyne/cm) and low viscosities (1.6-7.2 c.p.), they are satisfied with the general physical properties of water-in-oil(W/O) microemulsions for their industrial use. They showed a tendency that their temperature range for stable one-phase microemulsion decreased in accordance with the increase of alcohol/surfactant(A/S) ratio in the formulations. However, the temperature range of one-phase microemulsion was much more affected by hydrophilic lipophillic balance(HLB) value of the nonionic surfactant which increased its temperature range and it increased in accordance with the higher HLB value in the formulations. And the maximum content of water which can keep stable one-phase W/O microemulsion was measured at each sample. In addition, their temperature range for stable one-phase microemulsion was also measured. It was confirmed that the selection of surfactant type was very important for formulating a cleaning agent, since the W/O microemulsion system with the nonionic surfactant of the lower HLB value showed better cleaning efficacy that of the higher HLB value for abietic acid as a soil, which was used for preparing a rosin-type flux. In the formulated cleaning agents with the increase of A/S ratio in the formulations, however, there was no significant difference in cleaning efficacy. It was investigated that the differences of their cleaning efficacy was affected by the change of the condition of temperature and sonicating frequency as important factors in the industrial cleaning. That is, the higher, their cleaning temperature and the lower, their sonicating frequency, the more increased, their cleaning efficacy. Furthermore, using optical instruments like UV/Visable Spectrophotometer and FT-IR Spectrometer, their cleaning efficacy for abietic acid was measured. The removal of soil from the contaminated rinse water was measured by gravity separation method in the rinse bath. As a result, the cleaning agent system having the nonionic surfactant of HLB value 6.4 showed over 85% water-oil separation efficacy at over $25^{\circ}C$. Therefore, it was demonstrated in this work that the formulating cleaning agents were very effective for cleaning and economical in the possible introduction of water recycling system.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.20 no.8
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• pp.6-14
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• 2006

This paper is a study about a proper method of plasma generation to cleaning method and a high frequency power equipment circuit to generation of plasma that used cleaning of chamber for TFT-LCD PECVD. The high density plasma required for cleaning causes a possibility of high density plasma more than $1{\times}10^{11}[EA/cm^3]$. It apply a ferrite core of ferromagnetic body to a existing ICP form. In case of power transfer equipment on 400[kHz] high frequency to generation of plasma it makes certain a stable switching operation in condition of plasma through using a inverter form for general purpose HB. And it demonstrates the performance of power transfer equipment using methods of measurement which use a transformer of series combination the density of plasma and the rate of dissolution of $NF_3$ in condition of $A_r\;and\;NF_3$.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.10
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• pp.5980-5987
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• 2014

As a response to exhaust gas regulations, the electronic control system was applied to the diesel engine. The injected fuel mass and injection timing are accurately controlled using it, and the fuel efficiency and the engine output are significantly increased. In addition, the noise and the vibration of vehicles are decreased. To maintain the optimal performance of an electronic control diesel engine, it is important to control the fuel injection pressure accurately using the fuel pressure regulator. When the fuel pressure regulator is not worked normally, the failure phenomena (starting failure, staring delay, accelerated failure, engine mismatch et al.) occurred because the fuel pressure is not stabilized and controlled accurately. In this study, the effects on a fuel pressure, return fuel mass flow, and engine rotating speed according to the control rate of fuel pressure regulator were investigated to analyze the performance variation under the failure conditions of a fuel pressure regulator. As a result, when the control rate of a fuel pressure regulator decreased by 4%~6% compared to that of the standard condition, the variation of engine rotating speed and return fuel flow were increased greatly, and the abnormal condition occurred. In addition, it is possible to diagnose the failure of a fuel pressure regulator by monitoring these conditions.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.17 no.7
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• pp.688-693
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• 2005

Nowaday the natural ventilation rate decreases because the apartment housing is being air-tight. Therefore, Indoor Air Quality (IAQ) and indoor environment grow worse. Especially, Formaldehyde (HCHO), Volatile Organic Compounds (VOCs) which is emitted from the building materials and coating material etc. occur Sick House Syndrome that cause negative impact on resident's respiratory system and body. Therefore in construction field, it will be a important issues that development of a ventilation system with high effectiveness which can exhaust the contaminant out of the building quickly. In this research we evaluated 'wall attachable duct-less Heat Recovery Ventilation (HRV) system with air cleaning function'. We executed a synthetic evaluation about indoor air environment under various operating condition installing the system in real scale apartment house that is built in Anyang city. HRV system with air cleaning function showed good performance by removing HCHO, VOCs with less ventilation energy.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.5
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• pp.353-357
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• 2010

Recently, silicon etching have received much attention for display industry, nano imprint technology, silicon photonics, and MEMS application. After the etching process, removing of etch mask and residue of sidewall is very important. The investigation of the etched mask removing was carried out by using the ashing, HF dipping and acid cleaning process. Experiment shows that oxygen component of reactive gas and photoresist react with silicon and converting them into the mask fence. It is very difficult to remove by using ashing or acid cleaning process because mask fence consisted of Si and O compounds. However, dilute HF dipping is very effective process for SiOx layer removing. Finally, we found optimized condition for etched mask removing.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.4
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• pp.2043-2048
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• 2013

OPR-1000 CE Steam Generator, of which tube material is composed of Alloy-600 HTMA in nuclear power plant, secondary side is generated ODSCC(Outside Diameter Stress Corrosion Cracking) due to the accumulated sludge. ODSCC is centered around the tube sheet and is being affected depending on the height of the sludge. Chemical cleaning was carried out for a top-of-the-tube sheet(TTS) of Steam Generator in order to decrease corrosive condition of the secondary side of Steam Generator tubes and suppress the occurrence of stress corrosion cracking. The amount of sludge removal was 259.2kg. The height of the accumulated sludge was reduced from 0.71 to 0.34 inches. Corrosion rate as the maximum 2.34 mils was satisfied to within EPRI (Electric Power Research Institute) recommendation(10 mils).