• Korean Journal of Materials Research
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• v.24 no.8
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• pp.429-433
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• 2014

As the fabrication technology used in FPDs(flat-panel displays) advances, the size of these panels is increasing and the pattern size is decreasing to the um range. Accordingly, a cleaning process during the FPD fabrication process is becoming more important to prevent yield reductions. The purpose of this study is to develop a FPD cleaning system and a cleaning process using a two-phase flow. The FPD cleaning system consists of two parts, one being a cleaning part which includes a two-phase flow nozzle, and the other being a drying part which includes an air-knife and a halogen lamp. To evaluate the particle removal efficiency by means of two-phase flow cleaning, silica particles $1.5{\mu}m$ in size were contaminated onto a six-inch silicon wafer and a four-inch glass wafer. We conducted cleaning processes under various conditions, i.e., DI water and nitrogen gas at different pressures, using a two-phase-flow nozzle with a gap distance between the nozzle and the substrate. The drying efficiency was also tested using the air-knife with a change in the gap distance between the air-knife and the substrate to remove the DI water which remained on the substrate after the two-phase-flow cleaning process. We obtained high efficiency in terms of particle removal as well as good drying efficiency through the optimized conditions of the two-phase-flow cleaning and air-knife processes.

• Textile Coloration and Finishing
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• v.30 no.4
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• pp.288-293
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• 2018

This study reported the dual functional self-cleaning PET fabrics prepared from $TiO_2$ and hexadecyltrimethoxysilane treatment, which have photodegradation and superhydrophobicity on the fabric surface. Phodegradation and superhydrophobicity of the resulting fabric were compared with $TiO_2$ or silane treated fabrics. The dual functional self-cleaning PET fabric showed less photodegradation than the $TiO_2$ treated fabric. However, the dual functional self-cleaning fabrics showed superior superhydrophobicity to silane treated fabric with increased water contact angle and significantly decreased roll-off angle. This suggested that the dual functional PET fabric has a great potential to be the commercialized self-cleaning fabric because it is repellent to soil or dust and even if soil or dust is adsorbed on the fabric surface, it can be removed by water rolling off on the surface or photodegradation by the photocatalyst.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.415-419
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• 2002

In this study, we suggest a environmentally-conscious and dry cleaning process mechanism for the recycling of end-of-life CRT, and also develope a protype cleaning system to verify the faulty of the designed mechanism. This system accommodates the specifications of 14 ~ 32" end-of-life CRT. In experimental result, it is expected that the developed system improve the productivity up to 10% and decrease the loss rate of cleaning glass 3~4 times rather than the existing methods.hods.

• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.282-284
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• 2006

UV lamp systems have been used for cleaning of display pannels of TFT LCD or Plasma Display Pannel (PDP). However, the needs for high efficient cleaning and low cost made high voltage plasma cleaning techniques be developed and improved. In this paper, 3kW high voltage plasma power supply system was developed for LCD cleaning. The 3-phase input voltage is rectified and then inverter system is used to make a high frequency pulse train, which is rectified after passing through a high-power transformer. Finally, bi-directional high voltage pulse switching circuits are used to generate the high voltage plasma.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.8
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• pp.715-718
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• 2008

An in-line wet etch/cleaning system was established for the research and development in wet etch process. The system was equipped with a reverse moving system for the reduction in the size of the in-line wet etch/cleaning system and it was possible for the glass substrate to be moved back and forth and alternated in a wet etch bath. For the comparison of the effect of the normal motion and that of the alternating motion on the in-line wet etch process, indium tin oxide(ITO) pattern was obtained through both wet etch process conditions. The results showed that the alternating motion is not inferior to the normal motion in etch rate and in etch uniformity. It is concluded that the alternating motion is possible to be applied to the in-line etch process.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.3
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• pp.1229-1235
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• 2014

At the LPG vehicle air intake system, most of dust particles in the air cleaner are removed. However very small particles are not removed and accumulated. The accumulation of carbon in air intake system is going to affect the idle speed control and sensor signal. It also causes engine chattering and transmission troubles of automatic transmission. This is study about cleaning up intake system using cleaning chemical. We can clean up the intake system by spraying cleaning liquid onto intake device when the engine is idling after intake hose is removed from warmed up vehicle. We can obtain the following experimental results by cleaning up ISC, surge tank, intake manifold, intake valves and combustion chamber. According to this results, the stroll valve works correctly and power rate of engine is up to the standard, it is smoothy to control the idling speed when a vehicle pulls up. After cleaning up CO grow down about 0.15%, HC does about 20~100 ppm.

• Journal of Power System Engineering
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• v.21 no.3
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• pp.74-84
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• 2017

This paper presents the development of the underwater cleaning robot platform for a higher efficiency in manufacturing industry. Human operators directly go into the cistern and clean sludge after drainage of the water so far. It is sometimes dangerous because of the harmful chemical materials from the product making process. In addition, it takes long time for water drainage and supplying it back. However, the robot cleaning operation does not need to drain water so that it could be applied to the sludge cleaning work at any time without the plant pause. Moreover, it can prevent the safety accidents because human operators are not necessary to enter directly the sludge cisterns. This paper shows the performance of cleaning work that can be applied in the industrial field through the design and development of underwater cleaning robot platform. And these results demonstrate that the developed underwater cleaning robot has great possibilities to clean other industrial water cisterns.

• Air Cleaning Technology
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• v.9 no.4 s.35
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• pp.41-52
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• 1996

• Air Cleaning Technology
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• v.6 no.2 s.21
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• pp.51-66
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• 1993

• Air Cleaning Technology
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• v.12 no.1 s.44
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• pp.81-86
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• 1999