• Tribology and Lubricants
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• v.31 no.6
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• pp.239-244
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• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.849-854
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• 2003

The Korea Atomic Energy Research Institute has developed a teleoperated cleaning robot for use in the radioactive zone of the isolation room of the Irradiated Material Examination Facility where direct human access to the interior is strictly limited. The teleoperated cleaning robot that was designed to completely eliminate human interaction with the hazardous radioactive contaminants has five remotely replaceable submodules - a mobile module for navigation, a cleaning module for dislodging and sucking contaminated waste, a sensing module for obstacle avoidance, a collection module for storing the acquired waste, and a cover module for protecting the collection module. This cleaning robot is capable of cleaning the contaminated floor surface of the isolation room and collecting loose dry spent nuclear fuel debris and other radioactive waste fixed or scattered on the floor surface. The developed cleaning robot is operated either by a manual control or by autonomous control in conjunction with a graphical simulator, by which the human operator can monitor and intervene the robot performing cleanup tasks in the isolation room. In this paper, we present the mechanical and environmental design considerations and development of the teleoperated cleaning robot for radioactive isolation room use. We also demonstrate its mock-up performance test results from the viewpoint of a remote cleanup operation and remote maintenance.

• Journal of Korean Society of Water and Wastewater
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• v.31 no.3
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• pp.229-236
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• 2017

In this study, a direct contact membrane module was manufactured to be used in a pilot scale membrane distillation process to treat $3m^3/day$ of the digestate produced from anaerobic digestion of livestock manure. In order to investigate the performance of the membrane module, permeate flux was measured with and without spacer inside the module under various condition of temperature difference and cross flow velocity (CFV) through the membrane surfaces. Flux recovery rate after chemical cleaning was also investigated by applying three different cleaning methods. Additionally, thermal energy consumption was theoretically simulated based on actual pilot plant operation conditions. As results, we observed flux of the module with spacer was almost similar to the theoretically predicted value because the installation of spacer reduced the channeling effect inside the module. Under the same operating condition, the permeate flux also increased with increasing temperature difference and CFV. As a result of chemical in-line cleaning using NaOCl and citric acid for the fouled membranes, the recovery rate was 83.7% compared to the initial flux when NaOCl was used alone, and 87% recovery rate was observed when only citric acid was used. However, in the case of using only citric acid, the permeate flux was decreased at a rapid rate. It seemed that a cleaning by NaOCl was more effective to recover the flux of membrane contaminated by the organic matter as compared to a cleaning by citric acid. The total heat energy consumption increased with increasing CFV and temperature difference across the membrane. Thus, further studies should be intensively conducted to obtain a high permeate flux while keeping the energy consumption to a minimum for a practical application of membrane distillation process to treat wastewater.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2014.11a
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• pp.115-116
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• 2014

This study investigated power generation of photovoltaic equipment at detached houses. The study estimated monthly mean generation according to maintenance conditions that included module cleaning, inspection into generation, cleaning of module and photovoltaic generation. At analysis upon generation, households with periodical module cleaning and inspection into generation, clean module and good generation conditions had high generation. 20-years of PV equipment life varied much depending upon maintenance conditions. Users should keep module clean and inspect generation regularly and put PV equipment at the place with good solar radiation.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.14 no.5
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• pp.1-7
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• 2015

Cleaning by injecting dry ice and water is a generally adopted trend these days to clean molds (injection, diecasting foundry, press, rubber mold, etc). This cleaning method is performed manually, or by installing multiple high pressure spray nozzles. We have manufactured a turbine cleaning module device that is able to clean diecasting modules at any position and angle in the space by mounting an articulated robot instead of the existing pipe type injection nozzle, to minimize lead time and enhance working yield of the cleaning process. In this paper, we analyzed process factors that are required to design the turbine module by reviewing number of revolution, and results according to different blade angles and thicknesses of the mold release injection turbine module, using computational fiuid dynamics (CFD).

• Membrane and Water Treatment
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• v.12 no.2
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• pp.65-73
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• 2021

Sponge ball cleaning can generate an abrasion effect, which leads to an attractive increasing in both permeate flux and membrane rejection. The aim of this study was to investigate the influence of the daily sponge ball cleaning (SBC) on the performance of different UF cross-flow membrane modules integrated with a bioreactor. Two 1"-membrane modules and one 1/2"-membrane module were tested. The parameters measured and controlled are temperature, pH, viscosity, particle size, dissolved organic carbon (DOC), total suspended solids (TSS), and permeate flux. The permeate flux could be improved by 60%, for some modules, after 11 days of daily sponge ball cleaning at a transmembrane pressure of 350 kPa and a flow velocity of 4 m/s. Rejection values of all tested modules were improved by 10%. The highest permeate flux of 195 L/㎡.h was achieved using a 1"-membrane module with the aid of its negatively charged membrane material and the daily sponge ball cleaning. In addition, the enhancement in the permeate flux caused by daily sponge ball cleaning improved the energy specific demand for all tested modules. The negatively charged membrane showed the lowest energy specific demand of 1.31 kWh/㎥ in combination with the highest flux, which is a very competitive result.

• Journal of the Korea Safety Management & Science
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• v.25 no.2
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• pp.153-158
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• 2023

This research was conducted to reduce the defect rate caused by nozzle clogging of printing heads used in binder jet 3D printers. The binder jet 3D printing technology may adhere to the printing head nozzle by dispersing powder due to mechanical operation such as transferring the printing head and supplying powder, and may cause nozzle clogging by natural curing at the nozzle end depending on the type of binder used. To solve this problem, this study created a cleaning module exclusively for printing heads to check whether the durability of printing heads is improved through analysis of printing results before and after using the cleaning module. To this end, this research used a thermal bubble jet printing head, and the used powder was studied using gypsum powder.

• Proceedings of the KIEE Conference
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• 2015.07a
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• pp.1090-1091
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• 2015

사막은 일조량이 많고, 세계적으로 넓은 규모를 가지고 있어 대규모 태양광 발전소 건설에 주목받고 있지만, 태양광 모듈 표면에 쌓이는 모래먼지로 인하여 발전효율 저하가 발생되고 있는 실정이다. 이에 태양광 모듈 표면의 모래먼지를 제거할 수 있는 태양광 모듈 크리닝 시스템을 개발 하였다. 본 논문에서는 사막 환경을 고려하여 물을 필요로 하지 않는 압축공기 및 회전하는 브러쉬로 모듈 표면을 세척하는 Solar Module Cleaning System을 제안한다.

• Journal of Advanced Marine Engineering and Technology
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• v.33 no.4
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• pp.553-561
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• 2009

This paper presents development of ROV-type underwater robot capable of cleaning ship hull in automatic mode. The purpose of developing this robot is for underwater cleaning to secure the safety of divers who inspect and clean the ship hull. The robot consists of the cleaning system with rotating brush mechanism, a car-like driving mechanism, inspection system using video, and overall control system for underwater communication and operation. In this paper, we present overall design process of the cleaning system and operating system and technical contents of the overall control system for the underwater cleaning robot.

• Journal of Korean Society on Water Environment
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• v.21 no.1
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• pp.29-33
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• 2005

In order to recycle the waste material and to develop the thickening unit of waste activated sludge from wastewater treatment facilities, the filtration bio-reactor equipped with a shadow mask filter module was employed for this work from which the operating properties and parameters were drawn. The sludge thickening and filtration unit is made of cylindrical acryl tank(12cm i.d. ${\times}$ 58cm height: working volume of 6L), where the flat-sheet type of shadow mask filter module(pore size: 220~250um, opening area: 34.8~39.6%) was installed and the effluent was withdrawn from the effluent port at the lowest point of the reactor, and the filtration was performed only by the hydraulic pressure. For evaluating the operating performance of this reactor, some parameters such as the solid-liquid separation of different biomass concentrations, the water quality of filtrate, the aeration cleaning time and the cleaning effect were investigated. Depending on the MLSS concentrations, the different time to withdraw 3L of filtrate was required in which the longer filtration time was necessary for the higher MLSS concentrations caused by the thicker formation of cake layer: 40 minutes for 5,000 mg/L, 70 minutes for 10,000 mg/L and 100 minutes for 15,000 mg/L, where the concentrations of SS were 8.9, 6.7 and 6.5 mg/L, respectively. Under the same operating conditions (the intensity of aeration cleaning: 80 L/min, MLSS: 10,000 mg/L), the proper aeration cleaning time was revealed 30 seconds, and the stable formation of cake layer was in the range of 10 to 15 minutes. Therefore, the shadow mask considered as a waste material can be of use as a filter material for the sludge thickening system.