• Title/Summary/Keyword: Cleaning Method

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Enhancement of Data Retention Time in DRAM through Optimization of Sidewall Oxidation Precleaning (측면산화 프리크리닝의 최소화를 통한 DRAM의 데이터 유지시간 개선)

  • Chai, Yong-Yoong;Yoon, Kwang-Yeol
    • The Journal of the Korea institute of electronic communication sciences
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    • v.7 no.4
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    • pp.833-837
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    • 2012
  • This paper proposes a DRAM data retention time enhancement method that minimizes silicon loss and undercut at STI sidewall by reducing the SC1 (Standard Cleaning) time. SC1 time optimization debilitates the parasitic electric field in STI's top corner, which reduces an inverse narrow width effect to result in reduction of channel doping density without increasing the subthreshold leakage of cell Tr. Moreover, it minimizes the electric field in depletion area from cell junction to P-well, increasing yield or data retention time.

Effect of O2 Plasma Treatment on the Surface Morphology and Characteristics of Poly (imide) to Develop Self-cleaning Industrial Materials (자기세정산업용 소재 개발을 위한 O2 플라즈마 처리가 Poly(imide) 필름의 표면 형태 및 특성에 미치는 영향)

  • Kang, In-Sook
    • Journal of the Korean Society of Clothing and Textiles
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    • v.36 no.10
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    • pp.1117-1124
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    • 2012
  • This study was a preliminary study to investigate the influence of surface morphology and characteristics on the self-cleaning of substrates. PI film was treated by $O_2$ plasma to modify the surface; in addition, AFM and Fe-SEM were employed to examine the morphological changes induced on a PI film treated by $O_2$ plasma and surface energies calculated from measured contact angles between several solutions and PI film based on the geometric mean and a Lewis acid base method. The surface roughness of PI film treated by $O_2$ plasma increased with the duration of the $O_2$ plasma on PI film due to the increased surface etching. The contact angle of film treated by $O_2$ plasma decreased with the increased treatment time in water and surfactant solution; in addition, the surface energy increased with the increased treatment times largely attributed to the increased portion on the polar surface energy of PI film. The coefficient of the correlation between surface roughness and surface polarity such as contact angle and surface energy was below 0.35; however, it was over 0.99 for the contact angle and surface energy.

Enhanced Hydrophilic Property of TiO2 Thin Film Deposited on Glass Etched with O2 Plasma

  • Kim, Hwa-Min;Seo, Sung Bo;Kim, Dong Young;Bae, Kang;Sohn, Sun Young
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.3
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    • pp.152-155
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    • 2013
  • $TiO_2$ films were deposited on glass substrates with and without $O_2$ plasma etching by using the RF-magnetron sputtering method. We focused on the effect of surface structure on the photoinduced hydrophilic properties of $TiO_2$ films, fabricated on different surface conditions according to the presence or absence of the $O_2$ plasma treatment on glass substrates. The wettability and photoinduced hydrophilic properties of the $TiO_2$ films were investigated according to the changes in water contact angles under UV light irradiations with a very low intensity of 0.1 $mW/cm^2$. The photoinduced hydrophilic properties on the $TiO_2$ formed above the plasma treated glass were also superior to those on the $TiO_2$ formed above the bare glass. This enhanced $TiO_2$ film has been used practically for self cleaning and anti-fogging glasses.

The Dyeability and Antimicrobial Activity of Artemisia princeps Extracts (쑥 추출물의 염색성 및 항균성)

  • 김병희;송화순
    • Textile Coloration and Finishing
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    • v.11 no.5
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    • pp.30-37
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    • 1999
  • The extracts drawn out from Artemisia princeps by water was concentrated. Using this concentrate the silk and the cotton fabrics were dyed, and they were measured with the K/S value, surface color and mordant quantity in order to evaluate the dyeability and the antimicrobial activity. The results are as follows; 1. The K/S value of the silk fabric was much higher than that of the cotton fabric. And the color yield of the dyed silk fabric was most efficient for the premordanting method. 2. The surface colors on the dyed fabric depended heavily upon mordants used or mordanting methods. For all cases, the value of the dyed fabric was generally dark. For the Cr-mordant among various mordants, the chroma produced clear and the color difference was distinct when using the Fe-mordant. 3. On the other hand the amount of absorbed mordant in the silk fabric was larger than that of the cotton fabric. And the Cu-mordant was most efficient. 4. The color fastness was significantly improved when mordants were added. Cr-mordant improved best in all of the dry cleaning, wet cleaning and perspiration fastness. Iron and abrasion fastness showed over 4-5 grade regardless of any mordant. And light fastness was best in Cu-mordant. 5. The Cu-mordant showed the greatest antimicrobial activity in both of mordant treat silk and cotton fabrics.

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File System for Performance Improvement in Multiple Flash Memory Chips (다중 플래시 메모리 기반 파일시스템의 성능개선을 위한 파일시스템)

  • Park, Je-Ho
    • Journal of the Semiconductor & Display Technology
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    • v.7 no.3
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    • pp.17-21
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    • 2008
  • Application of flash memory in mobile and ubiquitous related devices is rapidly being increased due to its low price and high performance. In addition, some notebook computers currently come out into market with a SSD(Solid State Disk) instead of hard-drive based storage system. Regarding this trend, applications need to increase the storage capacity using multiple flash memory chips for larger capacity sooner or later. Flash memory based storage subsystem should resolve the performance bottleneck for writing in perspective of speed and lifetime according to its physical property. In order to make flash memory storage work with tangible performance, reclaiming of invalid regions needs to be controlled in a particular manner to decrease the number of erasures and to distribute the erasures uniformly over the whole memory space as much as possible. In this paper, we study the performance of flash memory recycling algorithms and demonstrate that the proposed algorithm shows acceptable performance for flash memory storage with multiple chips. The proposed cleaning method partitions the memory space into candidate memory regions, to be reclaimed as free, by utilizing threshold values. The proposed algorithm handles the storage system in multi-layered style. The impact of the proposed policies is evaluated through a number of experiments.

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Development of the DIW-$O_3$ Cleaning Technology Substituted for the Semiconductor Photoresist Strip Process using the SPM (SPM을 이용한 반도체 포토레지스트 제거 공정 대체를 위한 DIW-$O_3$ 방식 세정기술 개발)

  • Son, Yeong-Su;Ham, Sang-Yong
    • 연구논문집
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    • s.33
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    • pp.99-109
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    • 2003
  • Recently the utilization of the ozone dissolved de-ionized water(DIW-$O_3$) in semiconductor wet cleaning process and photoresist stripping process to replace the conventional sulfuric acid and hydro peroxide mixture(SPM) method has been studied. In this paper, we propose the water-electrode type ozone generator which has the characteristics of the high concentration and purity to produce the high concentration DIW-$O_3$ for the photoresist strip process in the semiconductor fabrication. The proposed ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. Through this study, we obtained the results of the 10.3 wt% of ozone gas concentration at the oxygen gas of 0.5 [liter/min.] and the DIW-$O_3$ concentration of 79.5 ppm.. Through the photoresist stripping test using the produced DIW-$O_3$, we confirmed that the photoresist coated on the silicon wafer was removed effectively in the 12 minutes.

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A Study on the Effect of Dust Precharging on Filtration Performance

  • Park, Y.O;Park, S.J.;Lee, J.H.;Kim, S.D.;Park, H.S.;Park, H.K.
    • Journal of Korean Society for Atmospheric Environment
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    • v.17 no.E2
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    • pp.53-59
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    • 2001
  • A hybrid dust-collector combining electrostatic charging with fabric filtration method was developed, and its performance characteristics were evaluated in this study. Charged particles build porous dendritic structure on the surfaces of filter by electrostatic attraction, increasing the collection efficiency of dust particles and reducing the pressure drop through the deposited dust layer and filter media. The cleaning performance of the dust layer is improved because the dendritic structured dust layer can be removed more easily by pulse jet cleaning flow. The results of the experiment showed a reduction of fine particle emission of 37% and the energy saving of 13% by precharging dust particles before filtration.

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Corrosion Protection of STS304 Steel with Photo-Functional Material $TiO_2$ Coating (광기능성 재료 $TiO_2$ 피막에 의한 STS304강의 방식)

  • NAM KI-WOO;LEE SUNG-YEON;AHN SEOK-HWAN;KIM JONG-SOON
    • Journal of Ocean Engineering and Technology
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    • v.17 no.3 s.52
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    • pp.52-56
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    • 2003
  • This study investigates the photoelectrochemical behavior of STS304 steel with TiO2 thin films coating, applied by sol-gel mehod, for the purpose of cathodic photoprotection of the steel corrosion. One time TiO2-coated STS304 steel, adapted with two kinds of TiO2 sol solution, has the most dominant photopotential abilities, which was -200mV vs. SCE and -500mV vs. SCE under illumination with 40 W fluorescent lamp, respectively. That had yielded more negative values than the corrosion potential of the bare metal(-130mv vs.SCE). The bleaching of TCE was confirmed on TiO2-coated STS304 steel under UV-illumination with 20W Black-light. This Study concluded that Ti02-coated STS304 exhibited both a cathodic photoprotection effect against corrosion and a photocatalytic self-cleaning effect.

Super Hydrophilic Properties of ZrO2 Thin Film Containing TiO2 Photo-Catalysis (광촉매 TiO2 함유 ZrO2 박막의 초친수성)

  • Jung, Ki-Uk;Lee, Tea-Gu;Mun, Chong-Soo
    • Korean Journal of Materials Research
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    • v.18 no.4
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    • pp.211-217
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    • 2008
  • A $ZrO_2$ coating solution containing $ZrO_2$ photo-catalysis, which is transparent in visible light, was prepared by the hydrolysis of alkoxide, and thin films on the $SiO_2$ glass substrate were formed in a dipcoating method. These thin films were heat-treated at temperatures ranging from $250^{\circ}C-800^{\circ}C$ and their characteristics were subjected to thermal analysis, XRD, spectrometry, SEM, EDS, contact angle measurement, and AFM. Tetragonal $ZrO_2$ phase was found in the thin film heat treated at $450^{\circ}C$, and anatase $TiO_2$ phase was detected in the thin film heat-treated at $600^{\circ}C$ and above. The thickness of the films was approximately 300 nm, and the roughness was 0.66 nm. Thus, the film properties are excellent. The films are super hydrophilic with a contact angle of $4.0^{\circ}$; moreover, they have self-cleaning effect due to the photo catalytic property of anatase $TiO_2$.

A Study on the Combustion Optimization of a Common Rail Direct Injection Diesel Engine for Regeneration of the Diesel Particulate Filter (매연여과장치 재생을 위한 커먼레일 디젤엔진의 연소 최적화에 관한 연구)

  • Kang Jung Whun;Kim Man Young;Youn Gum Joong
    • Transactions of the Korean Society of Automotive Engineers
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    • v.13 no.4
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    • pp.167-173
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    • 2005
  • Thermal regeneration means burning-off and cleaning-up the particulate matters piled up in DPF(diesel particulate filter), and it requires both high temperature $(550\~600^{\circ}C)$ and appropriate concentration of oxygen at DPF entrance. However, it is not easy to satisfy such conditions because of the low temperature window of the HSDI(high speed direct injection) diesel engine(approximately $200\~350^{\circ}C$ at cycle). Therefore, this study is focused on the method to raise temperature using the trade-off relation between temperature, oxygen concentration, and the influence of many parameters of common rail injection system including post injection. After performing an optimal mapping of the common rail parameters for regeneration mode, the actual cleaning process during regeneration mode is investigated and evaluated the availability of the regeneration mode mapping through regenerating soot trapped in the DPF.