• Journal of the Semiconductor & Display Technology
• /
• v.23 no.2
• /
• pp.100-106
• /
• 2024

To generate the plasma required in dry cleaning processes, the plasma chamber must be supplied with a high-quality AC voltage with a voltage of more than 1 kV and a frequency of 400 kHz. In the existing research, many methods to supply high power have been studied, but how to improve the quality of the power for high-quality plasma has been relatively little studied. In this paper, we propose a study to improve the quality of RF power circuit for high-quality plasma generation in dry cleaning method. Existing methods in the environment of full-bridge-based RF power circuits must perform PWM duty control in the light load region. This causes distortions in the waveform, resulting in poor power quality, which directly leads to poor plasma quality. To solve these problems, a half-bridge switching method is proposed and the improvement in waveform quality is verified. To verify the feasibility of the design and control algorithm proposed in this paper, an RF power circuit prototype is fabricated and the proposed design and control method is verified through simulation and actual experiments under dummy load.

• The KSFM Journal of Fluid Machinery
• /
• v.17 no.2
• /
• pp.54-58
• /
• 2014

The method of residential waste and food waste collecting is changed into automatic waste collection(AWC) system from direct collection by human resource. To solve the problem caused by odour from AWC facilities, the structure of input facilities, conveying pipes and collecting facilities have been changed into closed and sealed construction to enclosed the facilities and collect odour efficiently. Based on cases and experiences, to treat variable odour matters which are caused by food waste, chemical cleaning method is preferable method to cope with odour caused by food waste.

• Journal of KIISE:Computer Systems and Theory
• /
• v.27 no.6
• /
• pp.567-582
• /
• 2000

We propose a new way of managing flash memory space for flash memory-specific file system based on log-structured file system. Flash memory has attractive features such as non-volatility, and fast I/O speed, but it also suffers from inability to update in place and limited usage cycles. These drawbacks require many changes to conventional storage (file) management techniques. Our focus is on lowering cleaning cost and evenly utilizing flash memory cells while maintaining a balance between the two often-conflicting goals. The proposed cleaning method performs well especially when storage utilization and the degree of locality are high. The cleaning efficiency is enhanced by dynamically separating cold data and non-cold data. The second goal, cycle-leveling is achieved to the degree where the maximum difference between erase cycles is below the error range of the hardware. Simulation results show that the proposed method has significant benefit over naxve methods: maximum of 35% reduction in cleaning cost with even spreading writes across segments.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.48 no.10
• /
• pp.710-715
• /
• 1999

The purpose of this work is to develop a high-efficiency air cleaning system for air pollutants such as particulate and gaseous state in indoor environments. In order to enhance a removal efficiency of gaseous state pollutants, we suggested that pulsed discharge plasma be combined with $TiO_2$ photocatalyst (photocatalytic plasma air cleaning unit). We investigated experimentally the basic characteristics of photocatalytic plasma air cleaning unit and measured air pollutants removal efficiency. The wavelength of light radiated from pulsed discharge plasma under the atmospheric condition was 310~380nm. Its energy is enough to excite the $TiO_2$ photocatalyst and it makes a photochemical reaction in the surface of $TiO_2$ photocatalyst. The removal quantity of trimethylamine$((CH_3)_3N)\; was\; 130mg/m^34 which is twice quantity of pulsed discharge plasma without $TiO_2$ phtocatalyst unit. From the result of gas analysis using FT-IR, nitric oxide was not detected and trimethylamine was decomposed to $H_2O\; and \;CO_2$. And trimethylamine removal efficiency was 95%. These experimental results indicate that photocatalytic plasma air cleaning unit is a potential method in removing the pollutants.

• Journal of the Semiconductor & Display Technology
• /
• v.9 no.1
• /
• pp.5-10
• /
• 2010

Among a variety of cleaning processes, the cryogenic carbon dioxide ($CO_2$) cleaning has merits because it is highly efficient in removing very fine particles, innoxious to humans and does not produce residuals after the cleaning, which enables us to extend its area of coverage in the semi-conductor fabrication society. However, the cryogenic carbon dioxide cleaning method has some technical research issues in aspect to particles' adhesion and removal. To resolve these issues, performing an analysis for the identification of particle adhesion mechanism is needed. In this study, a research was performed by a theoretical approach. To this end, we extended the G-T (Greenwood-Tripp) model by applying the JKR (Johnson-Kendall-Roberts) and Lennard-Jones potential theories and the statistical characteristics of rough surface to investigate and identify the contact, adhesion and deformation mechanisms of soft or hard particles on the rough substrate. The statistical characteristics of the rough surface were taken into account through the employment of the normal probability distribution function of the asperity peaks on the substrate surface. The effects of surface roughness on the pull-off force for these particles were examined and discussed.

• The Journal of Advanced Prosthodontics
• /
• v.7 no.2
• /
• pp.85-92
• /
• 2015

PURPOSE. This study aimed to investigate the efficacy of cleaning solutions on saliva-contaminated zirconia in comparison to air-abrasion in terms of resin bonding. MATERIALS AND METHODS. For saliva-contaminated air-abraded zirconia, seven cleaning methods)-no contamination (NC), water-spray rinsing (WS), additional air-abrasion (AA), and cleaning with four solutions (Ivoclean [IC]; 1.0 wt% sodium dodecyl sulfate [SDS], 1.0 wt% hydrogen peroxide [HP], and 1.0 wt% sodium hypochlorite [SHC])-were tested. The zirconia surfaces for each group were characterized using various analytical techniques. Three bonded resin (Panavia F 2.0) cylinders (bonding area: $4.5mm^2$) were made on one zirconia disk specimen using the Ultradent jig method [four disks (12 cylinders)/group; a total of 28 disks]. After 5,000 thermocycling, all specimens were subjected to a shear bond strength test with a crosshead speed of 1.0 mm/minute. The fractured surfaces were observed using an optical and scanning electron microscope (SEM). RESULTS. Contact angle measurements showed that groups NC, AA, IC, and SHC had hydrophilic surfaces. The X-ray photoelectron spectroscopy (XPS) analysis showed similar elemental distributions between group AA and groups IC and SHC. Groups IC and SHC showed statistically similar bond strengths to groups NC and AA (P>.05), but not groups SDS and HP (P<.05). For groups WS, SDS, and HP, blister-like bubble formations were observed on the surfaces under SEM. CONCLUSION. Within the limitations of this in vitro study, some of the cleaning solutions (IC or SHC) were effective in removing saliva contamination and enhancing the resin bond strength.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.11 no.1
• /
• pp.33-40
• /
• 1998

The composite SiO$_2$/Si$_3$N$_4$/SiO$_2$(ONO) film formed by oxidation on nitride film has been widely studied as DRAM stacked capacitor multi-dielectric films. Load lock(L/L) LPCVD system by HF cleaning is used to improve electrical capacitance and to scale down of effective thickness for memory device, but is brings a new problem. Nitride film deposited using HF cleaning shows selective deposition on poly silicon and oxide regions of capacitor. This problem is avoidable by carpeting chemical oxide using $H_2O$$_2$cleaning before nitride deposition. In this paper, we study the limit of nitride thickness for abnormal oxidation and the initial deposition time for nitride deposition dependent on underlayer materials. We proposed an advanced fabrication process for stacked capacitor in order to avoid selective deposition problem and show the usefulness of nitride deposition using L/L LPCVD system by $H_2O$$_2$cleaning. The natural oxide thickness on polysilicon monitor after HF and $H_2O$$_2$cleaning are measured 3~4$\AA$, respectively. Two substrate materials have the different initial nitride deposition times. The initial deposition time for polysilicon is nearly zero, but initial deposition time for oxide is about 60seconds. However the deposition rate is constant after initial deposition time. The limit of nitride thickness for abnormal oxidation under the HF and $H_2O$$_2$cleaning method are 60$\AA$, 48$\AA$, respectively. The results obtained in this study are useful for developing ultra thin nitride fabrication of ONO scaling and for avoiding abnormal oxidation in stacked capacitor application.

• The Journal of the Institute of Internet, Broadcasting and Communication
• /
• v.9 no.6
• /
• pp.163-168
• /
• 2009

In this paper, We proposed the efficient method of cleaning impulse noise using mean shift segmentation. This method do its job for the pixel which is identified as impulse noise using mean shift segmentation instead of all pixel of image by the existing method. we found that the quality of image is improved by measuring the sum of square error in result image and impulse noise is cleaned efficiently by doing experiment.

• Applied Chemistry for Engineering
• /
• v.18 no.2
• /
• pp.188-193
• /
• 2007

Semi-solvent type cleaning agents were prepared by mixing naphthenes, natural terpene oil, surfactant and water, and measured their physical properties. And also, cleaning efficiency for flux and grease was measured by gravimetric method. By measuring the physical properties, pH for cleaning agents were 6.0~6.7, surface tension, 27.4~28.4 dyne/cm, and wetting index, 8.65~12.46 (with water), 11.99~17.43 (without water). The cleaning agent composed of naphthene, 30 wt%, natural terpene oil, 45 wt%, surfactant, 13 wt%, co-surfactant, 12 wt%, and water, 0 wt% had the largest wetting index, and shown the most effective cleaning properties for flux (98.66%) and grease (93.44%). The conductivity with $0.5{\sim}0.9{\mu}s/cm$ to the cleaning agent containing small amount of water was found to form W/O type microemulsion.

• Journal of Korean society of Dental Hygiene
• /
• v.14 no.6
• /
• pp.903-913
• /
• 2014

Objectives: The purpose of the study was to investigate the content analysis of daily tooth cleaning service records by caregivers in a long-term care facility. Methods: The data were analyzed by qualitative research based on content analysis of the daily records of the processes and results of daily tooth cleaning service. Twenty caregivers provided tooth, gum and denture cleaning service after breakfast, lunch, and dinner to 48 elderly residents. The study lasted about two weeks(from August 4 to August 20, 2014). The researcher reconstructed the language by repeatedly reviewing the caregivers statements in the records. The content categories were derived from the records through a reiterative manual comparative analysis. Using constant comparison method, reconstructed meanings were incorporated into various meanings and reanalyzed by final categories called as analytic coding. In order to validate the reliability, 6 times of discussion made the common meanings through a master's degree student and a dental hygiene professor. Results: The caregivers identified lack of understanding and ability to recognize the functional physical and mental changes in the elderly. The elderly had difficulty in recognizing silent communication and daily tooth cleaning. The caregivers were so strenuous in taking care of the daily tooth cleaning service for the elderly. At last, they gave up the daily tooth cleaning service and took on it to the guardians. They found that there was no social supporting network for oral health of the elderly residents. Conclusions: Caregivers had insufficient understanding of the functional physical and mental changes in the elderly residents, and they had difficulty providing daily tooth cleaning service to the elderly due to poor skill and abilities.