• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1306-1311
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• 2009

In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from the outdoor air introduced into clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is therefore useful for reducing the outdoor air conditioning load for a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. In the present study, numerical analysis and experiment was conducted to simulate the amount of energy reduction of exhaust air heat recovery type air washer system. The present numerical results showed good agreement with the results of the experimental data.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.22 no.10
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• pp.697-703
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• 2010

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants from the outdoor air introduced into a clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is useful for reducing the outdoor air conditioning load required to maintain a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to cool or heat the outdoor air. In the present study, numerical analysis was conducted to evaluate the recovered heat of an exhaust air heat recovery type air washer system, which is the key part of an energy saving outdoor air conditioning system for semiconductor clean rooms. The present numerical results showed relatively good agreement with the available experimental data.

• Proceedings of the SAREK Conference
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• 2008.06a
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• pp.844-849
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• 2008

In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. From the energy saving point of view, heat recovery is useful for the reduction of air conditioning energy consumption for clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. However, so far there have not been sufficient studies of analyzing the comparison of the amounts of energy consumption and saving. In the present study, an experiment was conducted to investigate the energy consumption and heat recovery of a fin-coil type air washer system for semiconductor manufacturing clean rooms.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.5
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• pp.921-925
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• 2007

Gas removal characteristics of an air clean system, consisted of a filter and a nonthermal discharge plasma reactor with a magnetic field, have been investigated with emphasis on the enhancing gas removal efficiency of the applied magnetic field. It is found that the magnetic field influenced significantly to the corona discharge characteristics, decreasing the corona onset voltage and increasing the corona current. As a result, the proposed air clean system with the magnetic field showed the higher removal efficiency of the gas (e.g., trimethlyamine) than that of without the magnetic field. This would be because the magnetic field applied to the discharge plasma reactor of the air clean system can elevate the corona characteristics, and activate the generation of ozone, thus the removal efficiency of the gas was concurrently enhanced. This reveals that the proposed air clean system with the magnetic field could be used as an effective means of removal an indoor pollutant gas.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.1 no.1
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• pp.32-45
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• 1989

The airflow characteristics of clean tunnel type clean room were experimentally investigated with the change of operating speed and exit type. Distributions of air velocity and pressure were measured in clean room which is located lower than HEPA filters, and the pressure distribution was also measured in upper plenum which is located above the HEPA filters, to identify the performance of clean room. Through the analysis it was turned out that air velocity characteristics in clean room were significantly affected by the upper plenum flow conditions such as pressure distribuion. This results will be useful in the actual clean room design to enhance the performance.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.1 no.4
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• pp.276-289
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• 1989

The airflow characteristics in both the upper plenum and the clean space of clean room are investigated by measuring the pressure distribution of the upper plenum and the velocity profile in the clean space, at the various conditions of the supplied airflow rate, the volume of upper plenum and the air supply type. The performance of vertical air supply type and horizontal air supply type is analyzed in terms of the airflow uniformity which is frequently used in indicating the clean room performance, and the relations among the volume of upper plenum, the supplied airflow rate and the airflow uniformity are confirmed. The results of this experimental study can be applied to the designing of the upper plenum of clean room.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.21 no.5
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• pp.273-281
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• 2009

In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of $1,000\;m^3/h$ that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.988-992
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• 2006

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3,\;SO_x$ and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate the heat recovery and gas removal efficiencies of a direct atomization type heat recovery air washer.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.24 no.4
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• pp.297-305
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• 2012

In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 $m^3/h$ that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditioning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.16 no.5
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• pp.475-481
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• 2004

This paper presents a force model of the clean tube system, which was developed as a means of transferring air-floated wafers inside a closed tube filled with super clean air. The recovering force from the holes for floating wafers is modeled as a linear spring and thus the wafers motion is modeled as a mass-spring-damper system. The propelling forces are modeled as linear along with the wafer location. The paper also proposes a control method to emit and stop a wafer at the center of a control unit. It reveals the minimum value of the propelling force to leave from the control unit. In order to stop the wafer, it utilizes the exact time when the wafer arrives at the position to activate the propelling force. Experiments with the clean tube system built for the 12 inch wafer shows the validity of the proposed model and the algorithm.