• 제목/요약/키워드: Clean Room

검색결과 289건 처리시간 0.022초

반도체 클린룸용 세라믹 Rotor 흡착제 개발 (The Development of Absorption Elements of Ceramic Rotors for the Semiconductor Clean Room System)

  • 서동남;하종필;정미정;문인호;조상준;김익진
    • 한국산학기술학회논문지
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    • 제1권2호
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    • pp.33-40
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    • 2000
  • 본 연구는 반도체 크린룸에서 VOC(volatile organic compound)과 수분을 제거하기 위한 흡착로타에 관한 것이다. 흡착로타는 세라믹 페이퍼 허니컴 기질에 NaX 제올라이트와 TS-1 제올라이트로 만들어졌다. NaX 제올라이트는 수열합성법으로 합성되어졌으며, NaX 제올라이트 결정(2∼3 ㎛)을 seed로 합성 조성에 3∼5 wt%까지 첨가하여 5 ㎛의 균일한 NaX 제올라이트를 성장시켰다. Seed의 첨가는 seed를 첨가하지 않은 합성용액과 비교하여 결정의 크기가 크며, 균일한 NaX 제올라이트 결정을 성공적으로 합성하였다. TS-1 제올라이트는 초기 반응액의 pH를 변화시켜 합성하였다. 반응물의 pH는 10.0에서 11.5 까지의 범위를 가지며, PH 10.4에서 큰 기공(8∼10 (equation omitted))을 가진 TS-1 제올라이트(ETS-10)가 합성되는 반면 pH가 11.5에서는 작은 기공 (3∼5 (equation omitted))을 갖는 TS-1 제올라이트(ETS-4)가 합성되었다.

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Fluorine-Free Imidazolium-Based Ionic Liquids with a Phosphorous-Containing Anion as Potential CO2 Absorbents

  • Palgunadi, Jelliarko;Kang, Je-Eun;Cheong, Min-Serk;Kim, Hong-Gon;Lee, Hyun-Joo;Kim, Hoon-Sik
    • Bulletin of the Korean Chemical Society
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    • 제30권8호
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    • pp.1749-1754
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    • 2009
  • Solubilities of carbon dioxide (C$O_2$) in a series of fluorine-free room temperature ionic liquids (RTILs), dialkylimidazolium dialkylphosphates and dialkylimidazolium alkylphosphites, were measured at 313∼333 K and pressures up to 5 MPa. Henry’s law coefficients as the solubility parameter of C$O_2$ in RTILs were derived from the isotherm of fugacity versus C$O_2$ mole fraction. The C$O_2$ solubility in a phosphorus-containing RTIL was found to increase with the increasing molar volume of the RTIL. In general, dialkylimidazolium dialkylphosphate exhibited higher absorption capacity than dialkylimidazolium alkylphosphite as long as the RTILs possess an identical cation. Among RTILs tested, 1-butyl-3-methylimidazolium dibutylphosphate [BMIM][B$u_2PO_4$] and 1-butyl-3-methylimidazolium butylphosphite [BMIM][BuHP$O_3$] exhibited similar Henry’s law coefficients to 1-butyl-3-methylimidazolium bis (trifluoromethylsulfonyl)imide ([BMIM][T$f_2$N]) and 1-butyl-3-methylimidazolium tetrafluoroborate ([BMIM][B$F_4$]), respectively. The Krichevsky-Kasarnovsky equation was employed to derive the C$O_2$ solubility parameter (Henry’s law coefficient) from the solubility data measured at elevated pressures.

DEVS 다이어그램 기반 이산사건 시뮬레이션 소프트웨어 구현 및 정적 검증기법: 실용적 접근방법 (Implementation and Static Verification Methodology of Discrete Event Simulation Software based on the DEVS Diagram: A Practical Approach)

  • 송해상
    • 한국시뮬레이션학회논문지
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    • 제27권3호
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    • pp.23-36
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    • 2018
  • 이산사건시스템명세(DEVS) 형식론은 이산사건시스템을 모듈러하고 계층적으로 모델링할 수 있는 잘 정의된 의미론을 제공하고 있어 이산사건시스템 모델링 시뮬레이션 (M&S)에 많이 사용되어 왔다. 이러한 수학적 표현 대신에 DEVS 다이어그램은 복잡한 시스템을 보다 직관적이며 편리한 표현력을 제공한다. 본 논문은 DEVS 다이어그램을 이용하여 표현된 모델을 시뮬레이션 코드로 체계적으로 구현하며 검증하는 DEVS 클린룸 프로세스를 제안하였다. 구체적으로, 주어진 다이어그램 모델의 적합성 검사, 테이블 DEVS 모델로의 변환, 마지막으로 시뮬레이션 소스코드로 변환하는 방법과 역으로 추적성을 기반으로 한 검사기법을 통해 정적 검증하는 구체적인 방법을 제시하였다. 간단한 예제를 통해 제안된 프로세스를 적용하는 구체적인 방법을 설명하였으며, 적용사례 통해 제안된 기법이 실용적으로 적용 가능한 효과적인 프로세스임을 확인하였다.

우수방사성의약품 생산시설 개발 (Development of Good Manufacturing facility for Radiopharmaceuticals)

  • 신병철;정원명;박상현;이규일;박경배;박진호
    • Journal of Pharmaceutical Investigation
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    • 제33권2호
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    • pp.145-149
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    • 2003
  • Manufacturing facilities of the pharmaceuticals must meet certain level of the cleanness required so that foreign substances such as dust, moisture, heat, microorganism, or virus do not contaminate the product. In case of radiopharmaceuticals for medical treatment and diagnosis, not only should the operators and environment be protected from radiation but also need to be isolated from the foreign contaminant. Therefore, manufacturing facilities for radiopharmaceuticals must satisfy the design standards of both hot cell and clean room which are specified by GMP. However, standards of maintaining negative pressure for preventing spread of radioactive contaminant in isolated facilities conflict with the standards of maintaining positive pressure for keeping cleanness. To solve this problem, air pressure of hot cell was designed lower than in the adjacent area to meet standards of the radiation safety. To keep higher cleanness in certain part of the hot cell for filling, minimal relative positive pressure allows. In order to effectively maintain the cleanness that is required for production of Tc-99m generator, which takes 70% of whole demand of radiopharmaceuticals, the rooms placed in each side of production room are used as a buffer area and three lead hot cells are installed in production room. In this research, we established the appropriate engineered design concept for Tc-99m generator manufacturing facility, which satisfies both GMP cleanness standard for preventing particles, bacteria, other contaminants and the regulations of radiation safety for supervising and controlling the amount of radiation exposure and exhausted radioactivity. And the concept of multi-barrier buffer zones is introduced to apply negative air pressure for hot cell with first priority and to continue relative positive air pressure for clean room.

Ultra-Clean Patterned Transfer of Single-Layer Graphene by Recyclable Pressure Sensitive Adhesive Films

  • Kim, Sang Jin;Lee, Bora;Choi, Yong Seok;Kim, Philip;Hone, James;Hong, Byung Hee;Bae, Sukang
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.301.1-301.1
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    • 2016
  • We report an ultraclean, cost-effective, and easily scalable method of transferring and patterning large-area graphene using pressure sensitive adhesive films (PSAFs) at room temperature. This simple transfer is enabled by the difference in wettability and adhesion energy of graphene with respect to PSAF and a target substrate. The PSAF transferred graphene is found to be free from residues, and shows excellent charge carrier mobility as high as ${\sim}17,700cm^2/V{\cdot}s$ with less doping compared to the graphene transferred by thermal release tape (TRT) or poly(methyl methacrylate) (PMMA) as well as good uniformity over large areas. In addition, the sheet resistance of graphene transferred by recycled PSAF does not change considerably up to 4 times, which would be advantageous for more cost-effective and environmentally friendly production of large-area graphene films for practical applications.

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The Dispersion Stability of Multi-Walled Carbon Nanotubes in the Presence of Poly(styrene/$\alpha-methyl$ styrene/acrylic acid) Random Terpolymer

  • Chang, Woo-Hyuck;Cheong, In-Woo;Shim, Sang-Eun;Choe, Soon-Ja
    • Macromolecular Research
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    • 제14권5호
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    • pp.545-551
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    • 2006
  • Aqueous dispersions of pristine and functionalized (COOH- and $NH_2$-) multi-walled, carbon nanotubes (MWNTs) were prepared by using three types of surf act ants: sodium dodecyl sulfate (SDS, anionic), PEO-PPO-PEO (Pluronic P84, non-ionic), and poly(styrene/$\alpha-methyl$ styrene/acrylic acid) random terpolymer, i.e., alkali-soluble resin (ASR). The aggregate size, $\zeta-potential$, and storage stability of the MWNT aqueous dispersions were investigated by using dynamic light scattering and the turbidity method at room temperature. The exfoliation of the MWNT aggregates was determined by a UV-visible spectrophotometer and the morphology of the surfactant-coated MWNTs was observed by transmission electron microscopy (TEM). In all cases, ASR showed better dispersion stability with the smallest aggregate size, compared with the other surfactants, because of its unique molecular structure, i.e., randomly incorporated carboxylic acid groups and planar phenyl groups that can be irreversibly and effectively adsorbed on the MWNT surface. A predominantly-exfoliated morphology of MWNTs was observed in the presence of ASR from the strong intensity of the UV-vis spectrum at 263 nm.

피에조를 이용한 코로나 방전과 펄스교류 코로나 방전을 이용한 정전기 제거장치의 비교 연구 (A Comparative Study on the Electrostatic Eliminator of Piezo Type Ionizer and Pulse AC Corona Type Ionizer)

  • 권승열;이동훈;최재욱
    • 한국안전학회지
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    • 제24권6호
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    • pp.50-54
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    • 2009
  • Ionizer is used for improving manufacturing process and reducing inferior goods in the clean room. As a general rule, neutralization of the electrostatic charge is most important to make TFT-LCD, PDP and OLED. Pulse AC-static eliminator with output voltage of about 10.5kV has been used these days as neutralization device. But this device has a problem with lower performance which was caused by particles-adhesion on the electrode when it has been used for a long time. So we studied to solve the problem with lower performance using high Frequency(72kHz) static eliminator which was produced by Piezo transformer device, and compared Pulse-AC type with Piezo-electronic device such as decay time and ion balance for 10 weeks periods. As a result of this study, we found that Piezo transformer device has been maintained normal condition for 10 weeks. Also, we made the rule by this study, normally Piezo transformer device has to clean the electrode during every 11th weeks.

개별공간의 자외선 살균 시스템 (UV Immune System of Personalized Space)

  • 정기범;최상곤
    • 설비공학논문집
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    • 제21권1호
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    • pp.63-70
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    • 2009
  • The air sterilization systems are investigated experimentally in this paper. The goal is to reduce bacteria, mold and viruses in office air by using a UV sterilizer installed inside a partition panel and wall-mounted unit. These systems allow occupants to turn the system on/off and to control the incoming air speed and direction. The partition air sterilization system conditions and sterilizes the air, and then delivers the clean air into the personal task area through the partition panels, which are connected to the pressurized under-floor plenum. Room air exits through the return grills mounted on the ceiling. The wall-mounted air sterilization system sterilizes the air, and then delivers the clean air to the personal task area from the wall. In this study a full-size experimental environment is established to investigate the immunization performance of these air sterilization systems. A typical office space scale is used in this study in order to find an optimal system to achieve a sterilized healthy micro-environment. Multiple system parameters, including volume flow rate and velocity of supplied air, were regulated during the experiments. The more air contact these air sterilization systems had, the better disinfection performance. Over 90% of eradication ratios were obtained by these two air sterilization systems. The results indicate that these systems can efficiently disinfect office air contamination.

어린이도서관 좌식 열람실의 공간 구성 특성 (A Study on the Characteristics of Floor-sitting Reading Room in Children's Libraries)

  • 문은미
    • 한국실내디자인학회논문집
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    • 제24권1호
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    • pp.189-196
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    • 2015
  • As the number of children's libraries has increased in Korea, it has been discussed to improve the quality of design in the libraries. In a reading room of children's library, spatial consideration should be focused on the children under 10 years old since they are in important points to learn Hangul and to develop reading habits. This study is aimed to examine the characteristics of a floor-sitting reading room, where children can feel like a home, stay in clean and safe and play while reading. The seven case studies of floor-sitting reading rooms are analyzed from the viewpoint of each factor of physical environment, including structure, furniture, and decoration. The following is the summary of findings of this study. First, floor-sitting reading rooms tend to compose main reading areas around bookshelves. Reading areas create the characters by changing floor levels and arranging furniture associated with windows, columns, and wall-type bookshelves. In the reading areas, movable low-level tables are frequently placed for flexible space uses, and seats for reading tend to put together with fixed bookshelves. Second, the central areas of the reading rooms are often shaped in the forms of pods, storytelling areas, sculptures, and unique furniture. Especially storytelling areas and pods play the cores of the reading rooms with the varying steps of floors and pictorial graphics on walls. Third, decoration elements in the reading rooms are designed with graphics, visual displays, and sculptural decorations. In my case studies, spatial elements such as reading nooks, attics, tunnels, and shelters are not often found in the floor-sitting reading rooms even though children like to have them. Since it is the advantage of floor-sitting reading rooms where children can take off shoes and act freely, we should look for the design of such spatial elements in the floor-sitting reading rooms.

지역거점 공공병원의 인공신장부 공간구성에 관한 연구(1) (A Study on the Space Composition for Department of Kidney Dialysis in Regional Public Hospital(1))

  • 채철균;박경현
    • 의료ㆍ복지 건축 : 한국의료복지건축학회 논문집
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    • 제28권2호
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    • pp.31-38
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    • 2022
  • Purpose: This study presents the results of the analysis on space utilization of kidney dialysis units in regional public hospitals, which plays a key role in local public medical services. The result aims to achieve safety from infection, allow comfort for the dialysis environment, and stability for medical support. The purpose of this study is to present fundamental data for architectural plans for the kidney dialysis unit, as well as to alleviate potential infectious diseases such as COVID-19. Methods: For research purposes, the investigation and analysis of space utilization were based on architectural floor plans, research papers and literature, related legal systems, and public statistics. Of the main 35 regional public hospitals, in regards to data accessibility, 15 facilities were selected to conduct the survey and analysis for the objective. Results: The space composition by area research results of kidney dialysis units in public hospitals are as follows: Firstly, most targets do not have required rooms in the access and support area, except for the hemodialysis beds in the treatment section. Secondly, the access area requires necessary room and space design that took into consideration of convenience and accessibility for patients. Thirdly, in regards to infection prevention and control, proper circulation and room plan is essential for storage and disposal of contaminated products and linen after use. For the treatment area, the arrangement plan needs to establish a visual connection between the isolation room, the nursing station, and the bed area. Additionally, consideration of circulation in the preparation, treatment, observation, examination, and all other rooms in the facility is required. Lastly, for the support area, the room is designed to consider adequate working and meeting spaces for the medical staff, consultation space for patients or guardians, separate storage and disposal of clean and contaminated items, and the storage of various equipment for dialysis. Implications: In preparation for the increase in chronic kidney failure patients and the spread of infectious diseases, such as COVID-19, the researched data demonstrates the basic guidelines for space composition of kidney dialysis units and the significant role of regional public hospitals.