• Title/Summary/Keyword: Clean Process

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저온 Si계 에피 성장기술에서 실험계획법에 의한 in-situ H$_2$ bake 및 GeH$_4$ clean 공정 최적화 (The process optimization of in-situ H$_2$ bake and GeH$_4$ clean in low temperature Si epitaxy using design of experiment)

  • 이경수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1994년도 추계학술대회 논문집
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    • pp.54-58
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    • 1994
  • H$_2$ bake and GeH$_4$ clean are used as a in-situ pre-clean method in low temperature Si based epitaxial growth technology using rapid thermal processing chemical vapor deposition (RTPCVD). In this paper, the H$_2$ bake and GeH$_4$ clean processes are optimized for low surface defect density using Taguchi method. In H$_2$ bake process, the epitaxial growth temperature affects dominantly on the surface defect density, and the next affecting factors are H$_2$ bake temperature and rinse time in de-ionised water. In GeH$_4$ clean process, GeH$_4$ clean temperature affects most strongly on the surface defect density, and the minor factor is GeH$_4$flow rate. The optimum process conditions predicted fly Taguchi method agree well with tile experimental data in both in-situ clean processes.

Development of Treatment Process for Residual Coal from Biosolubilization

  • Rifella, Archi;Shaur, Ahmad;Chun, Dong Hyuk;Kim, Sangdo;Rhim, Young Joon;Yoo, Jiho;Choi, Hokyung;Lim, Jeonghwan;Lee, Sihyun;Rhee, Youngwoo
    • 청정기술
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    • 제24권2호
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    • pp.119-126
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    • 2018
  • This study introduced a treatment process that was developed to treat Indonesian low-rank coal with high-ash content, which has the same characteristics as residual coal from the biosolubilization process. The treatment process includes separation of ash, solid-liquid separation, pelletizing, and drying. To reduce the ash content, flotation was performed using 4-methyl-2-pentanol (MIBC) as frother, and kerosene, waste oil, and cashew nut shell liquid (CNSL) as collectors. The increasing amount of collector had an effect on combustible coal recovery and ash reduction. After flotation, a filter press, extruder, and an oven drier were used to make a dried coal pellet. Then another coal pellet was made using asphalt as a binder. The compressive strength and friability of the coal pellets were tested and compared.

씻지 않은 쌀의 가공 공정 개발 (I) - 질량수지 분석 - (Development of a Process for Clean-Washed Rice Processing (I) - Mass Balance Analysis -)

  • 장동일;한우석;김동철;이상효
    • Journal of Biosystems Engineering
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    • 제24권4호
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    • pp.317-324
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    • 1999
  • This study was conducted to decide several design criterion for clean-washed rice processing system development. A Computer simulation was used to predict and analyze the mass balances and moisture changes of the process of clean-washed rice processing system. The following results were obtained from this study. 1. In order to attain the processing capacity of 1,000kg/h of the clean-washed rice processing system, that of the system was designed as 1,400kg/h which was based on the safety factor of 40% and handling capability of mass variations occurred during processing. 2. It was analyzed that the proper time required for aqueous cleaning process should be within one minute. 2. It was analyzed that the proper time required for aqueous cleaning process should be within one minute. 3. The final moisture content of clean-washed rice was controlled being 15%(w.b.) for the sake of safe storage. 4. It was proven that the optimum drying time was three minutes for the clean-washed rice dried by a rotary dryer.

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질산 제거 및 재이용 기술 (Nitrate Removal and Recycling Technique)

  • 심상준;이경희;조영상
    • 청정기술
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    • 제3권2호
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    • pp.31-33
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    • 1997
  • Nitrate contamination in surface water and ground water have increased in Korea. This trend has raised concern because nitrates caused methemoglobinemia in infants. To remove nitrates from waters, various purification processes including ion-exchange, biological denitrification, and chemical denitrification are currently in use for the treatment of water. However, little economically advantageous process exists for the industrial scale treatment of effluents highly polluted with nitrates. A new process has been developed for nitrate and other salts removal from polluted waters. Alumina cement and lime served as precipitating agents to remove nitrate with stirring at basic pH. Decreasing alumina content in alumina cement result in a increasing in nitrate removal yield. Stable removal of nitrate(1000mg/L) was readily achieved by two-stage removal process.

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청정에너지농업시스템 개발에 따른 실증단지의 온실가스배출량 분석 (Analysis of Greenhouse Gas Emission associated with Clean Energy Agriculture System Development)

  • 김태훈;윤성이
    • 한국유기농업학회지
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    • 제23권4호
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    • pp.643-658
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    • 2015
  • This study presents detailed emission of greenhouse gases of using Clean Energy Agriculture System according to a cradle-to-gate life-cycle assessment, including emission from energy use and leak of Biogas. Calculations were done with the PASS software and the covered gases are $CH_4$, $N_2O$ and $CO_2$, Total GHG fluxes of amount to $1719.03kgCO_2/day$, $39.63kgCO_2/day$ (2.31%) are from facility house process, $0.19kgCO_2/day$ (0.01%) are from transport process, $696.72kgCO_2/day$ (40.53%) are from Anaerobic digestion process, $846.61kgCO_2/day$ (49.25%) are from Heating and cooling system, $135.88kgCO_2/day$ (7.90%) are from Fertigation production process. The results suggest that for effective reduction of GHG emissions from Facility house using clean energy. Reduction targets should address both the production process as defined by IPCC sectors and the consumption process. An LCA assessment as presented here could be a basis for such efforts.

Reduce on the Cost of Photovoltaic Power Generation for Polycrystalline Silicon Solar Cells by Double Printing of Ag/Cu Front Contact Layer

  • Peng, Zhuoyin;Liu, Zhou;Chen, Jianlin;Liao, Lida;Chen, Jian;Li, Cong;Li, Wei
    • Electronic Materials Letters
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    • 제14권6호
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    • pp.718-724
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    • 2018
  • With the development of photovoltaic industry, the cost of photovoltaic power generation has become the significant issue. And the metallization process has decided the cost of original materials and photovoltaic efficiency of the solar cells. Nowadays, double printing process has been introduced instead of one-step printing process for front contact of polycrystalline silicon solar cells, which can effectively improve the photovoltaic conversion efficiency of silicon solar cells. Here, the relative cheap Cu paste has replaced the expensive Ag paste to form Ag/Cu composite front contact of silicon solar cells. The photovoltaic performance and the cost of photovoltaic power generation have been investigated. With the optimization on structure and height of Cu finger layer for Ag/Cu composite double-printed front contact, the silicon solar cells have exhibited a photovoltaic conversion efficiency of 18.41%, which has reduced 3.42 cent per Watt for the cost of photovoltaic power generation.

청정 절삭 가공을 위한 절삭유제의 선택 (Selection of Cutting Fluids for Environmentally Clean Machining)

  • 장윤상
    • 청정기술
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    • 제2권2호
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    • pp.165-175
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    • 1996
  • 절삭가공 공정에 있어서 절삭유제는 환경영향이 가장 큰 요인들 중의 하나이다. 현재의 기술수준에서 환경영향을 줄이기 위한 공정개선의 방법으로 유제의 환경부하에 대한 평가 및 저부하 유제로의 사용대체가 있다. 본 논문에서는 기존의 절삭성을 바탕으로한 절삭유제의 선택방법과 환경영향을 고려한 선택방법을 비교하여 절삭유제의 선택기준을 제시하고 환경부하의 평가방법으로 AMP 방법을 소개한다. 중절삭이며 저속가공인 드릴링가공을 통하여 절삭성과 환경영향을 함께 고려한 절삭유제의 선택과정을 예시한다. 절삭가공의 물질수지를 고려하여 다섯가지의 환경영향의 평가요소를 선정하고 한국공업규격의 다섯가지의 절삭유제를 비교한다. 비수용성 절삭유제가 성능 뿐만 아니라 환경적인 면에서도 수용성 유제에 비하여 우수한 결과를 보여주었다.

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