• Korean Journal of Optics and Photonics
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• v.33 no.6
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• pp.317-323
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• 2022

In this investigation, we describe a chromatic confocal sensor based on a geometric phase lens for measuring the thicknesses of transparent plates. In order to design a compact sensor, a geometric phase lens, which has diffractive and polarizing characteristics, is used as a device to generate chromatic aberration, and a fiber optic module is adopted. The systematic error of the sensor is reduced with wavelength peak detection by Gaussian curve fitting and the common error compensation obtained by the repeatedly consecutive experimental results. An approach to calculate the plate thickness is derived and verified with sapphire and BK7 plates. Because of the simple and compact design of the proposed sensor with rapid measurement capability, it is expected to be widely used in thickness measurements of transparent plates as an alternative to traditional approaches.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.2
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• pp.69-74
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• 2020

In this study, we proposed a method for surface profiling aspheric lens molds using a precision displacement sensor with a spatial scanning mechanism. The precision displacement sensor is based on the confocal principle using a broadband light source, providing a 10 nm resolution over a 0.3 mm measurable range. The precision of the sensor, depending on surface slope, was evaluated via Allan deviation analysis. We then developed an automatic surface profiling system by measuring the cross-sectional profile of a lens mold. The precision of the sensor at the flat surface was 10 nm at 10 ms averaging time, while 200 ms averaging time was needed for identical precision at the steepest slope at 25 deg. When we compared the measurement result of the lens mold to a commercial surface profiler, we found that the accuracy of the developed system was less than 90 nm (in terms of 3 sigmas of error) between the two results.